Newport Spectra-Physics ST-200 User manual

Smart Table ST-200
User’s Manual

Preface iii
Warranty
Newport Corporation warrants that this product will be free from defects in
material and workmanship and will comply with Newport’s published
specifications at the time of sale for a period of one year from date of
shipment. If found to be defective during the warranty period, the product
will either be repaired or replaced at Newport's option.
To exercise this warranty, write or call your local Newport office or
representative, or contact Newport headquarters in Irvine, California. You
will be given prompt assistance and return instructions. Send the product,
freight prepaid, to the indicated service facility. Repairs will be made and the
instrument returned freight prepaid. Repaired products are warranted for the
remainder of the original warranty period or 90 days, whichever first occurs.
Limitation of Warranty
The above warranties do not apply to products which have been repaired or
modified without Newport’s written approval, or products subjected to
unusual physical, thermal or electrical stress, improper installation, misuse,
abuse, accident or negligence in use, storage, transportation or handling. This
warranty also does not apply to fuses, batteries, or damage from battery
leakage.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED WARRANTY
OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE.
NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY
INDIRECT, SPECIAL, OR CONSEQUENTIAL DAMAGES RESULTING
FROM THE PURCHASE OR USE OF ITS PRODUCTS.
First printing 2004
© 2004 by Newport Corporation, Irvine, CA. All rights reserved. No part of
this manual may be reproduced or copied without the prior written approval
of Newport Corporation.
This manual has been provided for information only and product
specifications are subject to change without notice. Any change will be
reflected in future printings.
Newport Corporation
1791 Deere Avenue
Irvine, CA, 92606
USA
Part No. 41399-01, Rev. B

iv Preface
Confidentiality & Proprietary Rights
Reservation of Title:
The Newport programs and all materials furnished or produced in connection
with them ("Related Materials") contain trade secrets of Newport and are for
use only in the manner expressly permitted. Newport claims and reserves all
rights and benefits afforded under law in the Programs provided by Newport
Corporation.
Newport shall retain full ownership of Intellectual Property Rights in and to
all development, process, align or assembly technologies developed and other
derivative work that may be developed by Newport. Customer shall not
challenge, or cause any third party to challenge the rights of Newport.
Preservation of Secrecy and Confidentiality and Restrictions to Access:
Customer shall protect the Newport Programs and Related Materials as trade
secrets of Newport, and shall devote its best efforts to ensure that all its
personnel protect the Newport Programs as trade secrets of Newport
Corporation. Customer shall not at any time disclose Newport's trade secrets
to any other person, firm, organization, or employee that does not need
(consistent with Customer's right of use hereunder) to obtain access to the
Newport Programs and Related Materials. These restrictions shall not apply
to information (1) generally known to the public or obtainable from public
sources; (2) readily apparent from the keyboard operations, visual display, or
output reports of the Programs; 3) previously in the possession of Customer
or subsequently developed or acquired without reliance on the Newport
Programs; or (4) approved by Newport for release without restriction.
Service Information
This section contains information regarding factory service for the source.
The user should not attempt any maintenance or service of the system or
optional equipment beyond the procedures outlined in this manual. Any
problem that cannot be resolved should be referred to Newport Corporation.

Preface v
Technical Support Contacts
North America & Asia Europe
Newport Corporation Service Dept.
1791 Deere Ave. Irvine, CA 92606
Telephone: [phone]
Telephone: [phone] x31694
Newport/MICRO-CONTROLE S.A.
Zone Industrielle
45340 Beaune la Rolande, FRANCE
Telephone: [phone]
Newport Corporation Calling Procedure
If there are any defects in material or workmanship or a failure to meet
specifications, promptly notify Newport's Returns Department by calling 1-800-222-
6440 or by visiting our website at www.newport.com/returns within the warranty
period to obtain a Return Material Authorization Number (RMA#). Return the
product to Newport Corporation, freight prepaid, clearly marked with the RMA# and
we will either repair or replace it at our discretion. Newport is not responsible for
damage occurring in transit and is not obligated to accept products returned without
an RMA#.
E-mail: [email protected]
When calling Newport Corporation, please provide the customer care representative
with the following information:
• Your Contact Information
• Serial number or original order number
• Description of problem (i.e., hardware or software)
To help our Technical Support Representatives diagnose your problem, please note the
following conditions:
• Is the system used for manufacturing or research and development?
• What was the state of the system right before the problem?
• Have you seen this problem before? If so, how often?
• Can the system continue to operate with this problem? Or is the system non-
operational?
• Can you identify anything that was different before this problem occurred?

vi Preface
Table of Contents
EU Declaration of Conformity............................................................... ii
Warranty................................................................................................ iii
Technical Support Contacts ................................................................... v
Table of Contents .................................................................................. vi
List of Figures ...................................................................................... vii
List of Tables ...................................................................................... viii
1Safety Precautions 9
1.1 Definitions and Symbols .............................................................. 9
1.1.1 General Warning or Caution .............................................9
1.1.2 Electric Shock....................................................................9
1.1.3 CSA Mark with “C” and “US” Indicators.........................9
1.1.4 European Union CE Mark ...............................................10
1.1.5 Fuses ................................................................................10
1.1.6 Frame or Chassis .............................................................10
1.1.7 On ....................................................................................10
1.1.8 Off....................................................................................11
1.1.9 Protective Conductor Terminal .......................................11
1.1.10 USB Connector Symbol ..................................................11
1.1.11 Mounting precaution .......................................................11
1.2 Warnings and Cautions............................................................... 12
1.2.1 General Warnings............................................................12
1.2.2 General Cautions .............................................................13
1.3 Location of Warnings ................................................................. 13
1.3.1 Rear Panel........................................................................13
2General Information 15
2.1 Introduction ................................................................................ 15
2.2 Specifications ............................................................................. 16
3Getting Started 19
3.1 Unpacking and Handling............................................................ 19
3.2 Inspection for Damage ............................................................... 19
3.3 Parts List..................................................................................... 19
3.4 Choosing and Preparing a Suitable Work Surface ..................... 20
3.5 Electrical Requirements.............................................................. 20
3.6 Power Supplies ........................................................................... 20
3.7 Operating Temperature............................................................... 20

Preface vii
4System Operation 21
4.1 Front Panel.................................................................................. 21
4.1.1 AC Power Switch ............................................................21
4.1.2 Status ...............................................................................22
4.1.3 I/O....................................................................................22
4.1.4 Auto- Tune.......................................................................23
4.1.5 USB Interface ..................................................................23
4.2 Rear Panel................................................................................... 24
4.2.1 Damper Output connectors..............................................24
4.2.2 Frame or Chassis Terminal..............................................24
4.2.3 AC Power Inlet Socket ....................................................24
5Software Application 25
5.1 Overview .................................................................................... 25
5.1.1 About Tab........................................................................26
5.1.2 Status Tab ........................................................................27
5.1.3 Auto -Tune Tab ...............................................................28
5.1.4 Manual Tune Tab ............................................................30
5.1.5 Options Tab .....................................................................31
6Maintenance and Service 33
6.1 Enclosure Cleaning..................................................................... 33
6.2 Fuse Replacement....................................................................... 33
6.3 Obtaining Service ....................................................................... 34
6.4 Service Form .............................................................................. 35
List of Figures
Figure 1 General Warning or Caution Symbol............................................... 9
Figure 2 Electrical Shock Symbol.................................................................. 9
Figure 3 CSA mark with “C” and “US” Indicators........................................ 9
Figure 4 CE Mark......................................................................................... 10
Figure 5 Fuse Symbol................................................................................... 10
Figure 6 Frame or Chassis Terminal Symbol............................................... 10
Figure 7 On Symbol ..................................................................................... 10
Figure 8 Off Symbol..................................................................................... 11
Figure 9 Protective Conductor Terminal Symbol ........................................ 11
Figure 10 USB connector Symbol.................................................................. 11
Figure 11 Locations of warnings on the rear panel ........................................ 13
Figure 12 Typical Compliance Curve. ........................................................... 16

viii Preface
Figure 13 Effect of damping on table vibration levels ................................... 17
Figure 14 Front Panel Layout......................................................................... 21
Figure 15 BNC output sensitivity................................................................... 23
Figure 16 Rear Panel ...................................................................................... 24
Figure 17 Smart Table-Util Software Icon..................................................... 25
Figure 18 About Tab Screen........................................................................... 26
Figure 19 Status Tab Screen........................................................................... 27
Figure 20 Auto Tune Tab Screen showing dual-channel display................... 29
Figure 21 Auto Tune Tab Screen showing single-channel display................ 29
Figure 22 Manual Tune Tab Screen ............................................................... 30
Figure 23 Options Tab Screen........................................................................ 32
Figure 24 Fuse Replacement .......................................................................... 34
List of Tables
Table 1 Specifications ................................................................................. 16
Table 2 Smart Table Controller Specifications........................................... 18
Table 3 Envoronmental Specifications ....................................................... 18
Table 4 Definition of SYSTEM, CH1 and CH2 status LED’s. .................. 22
Table 5 Measurment Parameters................................................................. 22

1 Safety Precautions
1.1 Definitions and Symbols
The following terms and symbols are used in this documentation and also
appear on the Smart Table Controller where safety-related issues occur.
1.1.1 General Warning or Caution
Figure 1 General Warning or Caution Symbol
The Exclamation Symbol in the figure above appears in Warning and Caution
tables throughout this document. This symbol designates an area where
personal injury or damage to the equipment is possible.
1.1.2 Electric Shock
Figure 2 Electrical Shock Symbol
The Electrical Shock Symbol in the figure above appears throughout this
manual. This symbol indicates a hazard arising from dangerous voltage.
Any mishandling could result in irreparable damage to the equipment, and
personal injury or death.
1.1.3 CSA Mark with “C” and “US” Indicators
Figure 3 CSA mark with “C” and “US” Indicators
The presence of the CSA mark with “C” and “US” indicates that it has been
designed, tested and certified as complying with all applicable U.S. and
Canadian safety standards.
9

10 Safety Precautions
1.1.4 European Union CE Mark
Figure 4 CE Mark
The presence of the CE Mark on Newport Corporation equipment means that
it has been designed, tested and certified as complying with all applicable
European Union (CE) regulations and recommendations.
1.1.5 Fuses
Figure 5 Fuse Symbol
The fuse symbol in the figure above identifies the fuse location on the Smart
Table Controller.
1.1.6 Frame or Chassis
Figure 6 Frame or Chassis Terminal Symbol
The symbol in the figure above appears on the Smart Table Controller. This
symbol identifies the frame or chassis terminal.
1.1.7 On
Figure 7 On Symbol
The On Symbol in the figure above represents a power switch position on on
the Model ST-200 Smart Table controller. This symbol represents a Power
On condition.

Safety Precautions 11
1.1.8 Off
Figure 8 Off Symbol
The Off Symbol in the figure above represents a power switch position on the
Model ST-200 Smart Table controller. This symbol represents a Power Off
condition.
1.1.9 Protective Conductor Terminal
Figure 9 Protective Conductor Terminal Symbol
The protective conductor terminal symbol in the above figure identifies the
location of the bonding terminal, which is bonded to conductive accessible
parts of the enclosure for safety purposes. The intent is to connect it to an
external protective earthing system through the power cord.
1.1.10 USB Connector Symbol
Figure 10 USB connector Symbol
The USB connector symbol in the above figure identifies the location of the
USB communications connector.
1.1.11 Mounting precaution
The dampers are installed at two corners of the table adjacent to a long side.
The exact position of each damper is indicated by three flat-head screws
visible flash with the table top. Please have in mind that four sealed holes in
each damper area are only 0.457 in (11.6 mm) deep. If you need to use some
of these holes, choose the length of the screws accordingly. An attempt to use
too long screws may cause damage to the dampers and de-lamination of the
table face sheet.

12 Safety Precautions
1.2 Warnings and Cautions
The following are definitions of the Warnings, Cautions and Notes that are
used throughout this manual to call your attention to important information
regarding your safety, the safety and preservation of your equipment or an
important tip.
WARNING
Situation has the potential to cause bodily harm or death.
CAUTION
Situation has the potential to cause damage to property or
equipment.
NOTE
Additional information the user or operator should consider.
1.2.1 General Warnings
Observe these general warnings when operating or servicing this equipment:
• Heed all warnings on the unit and in the operating instructions.
• Do not use this equipment in or near water.
• This equipment is grounded through the grounding conductor of the power
cord.
• Route power cords and other cables so they are not likely to be damaged.
• Disconnect power before cleaning the equipment. Do not use liquid or
aerosol cleaners; use only a damp lint-free cloth.
• To avoid fire hazard, use only the specified fuse(s) with the correct type
number, voltage and current ratings as referenced in the appropriate
locations in the service instructions or on the equipment. Only qualified
service personnel should replace fuses.
• To avoid explosion, do not operate this equipment in an explosive
atmosphere.
• Qualified service personnel should perform safety checks after any
service.

Safety Precautions 13
1.2.2 General Cautions
Observe these cautions when operating or servicing this equipment:
• If this equipment is used in a manner not specified in this manual, the
protection provided by this equipment may be impaired.
• To prevent damage to equipment when replacing fuses, locate and correct
the problem that caused the fuse to blow before re-applying power.
• Do not block ventilation openings.
• Use only the specified replacement parts.
• Follow precautions for static sensitive devices when handling this
equipment.
• This product should only be powered as described in the manual.
• There are no user-serviceable parts inside the ST-200 Smart Table
Controller.
• To prevent damage to the equipment, read the instructions in the
equipment manual for proper input voltage.
1.3 Location of Warnings
1.3.1 Rear Panel
Frame or Chassis
Terminal
Fuse info
MAX Powe
r
Electrical Hazard
Figure 11 Locations of warnings on the rear panel

14 Safety Precautions
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2 General Information
2.1 Introduction
The Smart Table is a combination of the structurally damped vibration
isolation table with electronics that can monitor vibration in real time and
active elements that use the vibration data to suppress the vibration.
Vibration state of the optical table is an important characteristic, in many
cases defining its suitability for a task at hand. Reducing vibration, especially
the dynamic deviation of the table from a rigid-body type behavior, is one of
the most important criterions of the table design. It is achieved mainly by the
vibration isolation. Vibration isolation by passive isolating legs, such as
Newport I-2000, reduces the vibration transmitted to the table from the floor.
Although excellent isolation from floor vibration can be achieved in these
systems, the table will deviate from the ideal rigid-body behavior at natural
frequencies of its flexural vibrations. External sources acting on the tabletop
(air turbulence or acoustical waves) or the dynamic events generated in the
payload excite resonance vibration in the table’s own free-state modes such
as bending and torsion. This can lead to deterioration of the payload
performance, in particular, misalignment of the optical equipment.
The Smart Table includes two active vibration dampers that add dissipation
to all natural vibration modes of the table in a wide frequency range without
creating any additional resonances at lower frequencies. If the load on the
table changes, the dampers maintain their efficiency and stability after simple
auto-tuning of control gains.
15

16 General Information
2.2 Specifications
Working Surface 400 Series ferromagnetic stainless steel
3/16 in. (4.8 mm) thick with integrated damping layer
Surface Flatness
[in. (mm)] ±0.004 (±0.1), over 2 ft. (600 mm) square
Core Design
Trussed honeycomb, vertically bonded closed cell construction,
0.010 in. (0.25 mm)
Steel sheet materials, 0.030 in. (0.76 mm) Triple core interface
Active Damping Adjustable electronic dampers
Structural Damping Constrained layer core, damped working surface and
composite edge finish
Mounting Holes 1/4-20 holes on 1 in. grid (M6-1.0 holes on 25 mm grid), 0.5 in.
borders (12.5 mm borders)
Hole/Core Sealing Easy clean conical cup 0.75 in. (19 mm) deep,
Non-corrosive high impact polymer material
Typical Table Performance Values ST Series
Maximum Dynamic Deflection Coefficient 0.4 x 10-3
Maximum Relative Motion Value [in. (mm)]* <3.0 x 10-9 (<7.6 x 10-8)
Deflection Under Load [in. (mm)]† <5.0 x 10-5 (<1.3 x 10-3)
Table 1 Specifications
Compliance, in/lb, damped corner
10 100 1 .103
1.10 7
1.10 6
1.10 5
1.10 4
1.10 3
ON
OFF
Hz
Figure 12 Typical Compliance Curve.
(This data was taken on a ST-48-8 table supported by I-2000 isolators.)

General Information 17
Vibration linear spectrum 25 cm from edges near an instrumented corner
50 100 150 200 250 300 350 400 450
0
0.5
1
1.5
2
Damping ON
Damping OFF
Frequency, Hz
Displacement, nm
Figure 13 Effect of damping on table vibration levels
The Smart Table uses the same materials and has the same main mechanical
characeristics as passively damped Newport RS series table. The dampers are
installed at two corners of the table adjacent to a long side. The exact position
of each damper is indicated by three flat-head screws that are flash with the
table top at the corners.
CAUTION
Please keep in mind that four sealed threaded holes in each
damper area are only 0.457 in (11.6 mm) deep. If you need to use
some of these holes, choose the length of the screws
accordingly. An attempt to use too long screws may cause
damage to the dampers and de-lamination of the table face sheet.

18 General Information
Smart Table Controller Specifications
Output Power
Continuous current 0.4A @ 12VDC
Output Voltage
Maximum effective output voltage at continuous power @ 12V @ 0.4A
Input Power
Voltage
Average Current @ continuous output rating
Peak Current @ continuous output rating
12V ±5%
0.6A
0.7A
Table 2 Smart Table Controller Specifications
System Environmental Specifications
AC Input
100-240VAC ±10%
47-63Hz,
1.25A, 80W
Operating Temperature 5°C to 40°C
Operating Humidity <85% relative humidity non-condensing
Storage Temperature 0-60°C
RH - <85% non-condensing
Altitude <3000
Electrical Class 1
Installation Category 2
Pollution Degree 2
Use Location Indoor use only
Table 3 Envoronmental Specifications

3 Getting Started
3.1 Unpacking and Handling
It is recommended that the Smart Table Controller is unpacked in a lab
environment or work site. Unpack the system carefully; small parts and
cables are included with the instrument. Inspect the box carefully for loose
parts before disposing of the packaging. You are urged to save the packaging
material in case you need to ship your equipment in the future.
3.2 Inspection for Damage
The Smart Table Controller is carefully packaged at the factory to minimize
the possibility of damage during shipping. Inspect the box for external signs
of damage or mishandling. Inspect the contents for damage. If there is
visible damage to the instrument upon receipt, inform the shipping company
and Newport Corporation immediately.
WARNING
Do not attempt to operate this equipment if there is evidence of
shipping damage or you suspect the unit is damaged. Damaged
equipment may present additional hazards to you. Contact
Newport technical support for advice before attempting to plug
in and operate damaged equipment.
3.3 Parts List
The following is a list of parts included with the Smart Table System.
1. ST Series table with dampers already installed inside table
2. ST-200 Controller
3. Two 15 pin damper cables
4. Power cord
5. User’s Manual
If you are missing any hardware or have questions about the hardware you
have received, please contact Newport.
19

20 Getting Started
3.4 Choosing and Preparing a Suitable Work Surface
Smart Table Controller may be placed on any reasonably firm table or bench
during operation. Position the controller so that there is easy access to the
power cord. The front legs of the unit can be pulled out to tilt the unit at an
angle, if desired. Do not put the Controller on or attach to the isolated table.
Manual operation of front panel controls will disturb mechanically the
normal operation of the system.
3.5 Electrical Requirements
Before attempting to power up the unit for the first time, the following
precautions must be followed:
WARNING
To avoid electric shock, connect the instrument to properly
earth-grounded, 3-prong receptacles only. Failure to observe
this precaution can result in severe injury.
• Have a qualified electrician verify the wall socket that will be used is
properly polarized and properly grounded.
• Provide adequate distance between the Smart Table Controller and
adjacent walls for ventilation purposes. Approximately 2-inch spacing for
all surfaces is adequate.
• Set the mains selector tumbler to the voltage that matches the power outlet
AC voltage.
3.6 Power Supplies
AC power is supplied through the rear panel input power connector that
provides in-line transient protection and RF filtering. The input power
connector contains the fuses and the switch to select series or parallel
connection of the transformer primaries for operation at 100VAC, 120VAC,
220VAC or 240VAC.
3.7 Operating Temperature
Smart Table Controller is designed for operation in a laboratory environment.
Recommended ambient operating temperatures are between 20 - 25°C.
Operation at higher or lower ambient temperatures for limited periods (e.g.
several hours) will not cause any harm but may slightly reduce the
performance.