Newport XPS Operating and maintenance manual

XPS Unified
Universal High-Performance
Motion Controller/Driver
V1.0
.x
Programmer’s
Manual

XPS Unified Programmer’s Manual
©2018by Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document may be reproduced or copied without the prior written
approval of Newport Corporation. This document is provided for information only, and
product specifications are subject to change without notice. Any change will be
reflected in future publishings.
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Table of Contents
1.0 Note ........................................................................................................... 1
2.0 TCP/IP Communication ......................................................................... 2
3.0 XPS .NET Software Drivers ................................................................... 3
3.1 How to Install .NET Drivers for XPS Controller .............................................................3
3.1.1 Requirements.........................................................................................................3
3.1.1 Installing the 32 bit (x86) Windows Platform .......................................................4
3.1.2 Installing the 64 bit (x64) Windows Platform.......................................................4
3.2 Variables Equivalent for Programming Langages............................................................5
3.3 How to Use XPS .NET Assembly from Visual Studio C#? .............................................6
3.3.1 Add Reference to Newport XPS .NET Assembly.................................................6
3.3.2 C# Code Sources ...................................................................................................6
3.4 How to Use XPS .NET Assembly from LabVIEW? ........................................................7
3.4.1 Add Reference to .NET Assembly ........................................................................7
3.4.2 LabVIEW Code Sources .......................................................................................7
3.5 How to Use XPS .NET Assembly from IronPython?.......................................................8
3.5.1 Add Reference to .NET Assembly ........................................................................8
3.5.2 IronPython Code Source .......................................................................................8
3.6 How to Use XPS .NET Assembly from Matlab? ...........................................................10
3.6.1 Add Reference to .NET Assembly ......................................................................10
3.6.2 Matlab Code Source ............................................................................................10
4.0 TCP/IP Support Functions................................................................... 11
4.1 OpenInstrument ..............................................................................................................11
4.2 CloseInstrument..............................................................................................................12
4.3 SetTimeout .....................................................................................................................12
5.0 XPS Standard Firmware Architecture (Base Version)...................... 13
5.1 Group Definition.............................................................................................................13
5.1.1 Object Structure...................................................................................................13
5.2 Positioner Definition.......................................................................................................14
5.2.1 Object Structure...................................................................................................14
5.2.2 Definition of the Positions Available for Each Positioner...................................15
5.3 SingleAxis Group ...........................................................................................................16
5.3.1 State Diagram......................................................................................................17
5.4 Spindle Group.................................................................................................................18
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5.4.1 State Diagram......................................................................................................19
5.5 XY Group .......................................................................................................................20
5.5.1 State Diagram......................................................................................................21
5.6 XYZ Group.....................................................................................................................22
5.6.1 State Diagram......................................................................................................23
5.7 MultipleAxes Group .......................................................................................................24
5.7.1 State Diagram......................................................................................................25
5.8 Analog and Digital I/O ...................................................................................................26
5.8.1 GPIO Name List..................................................................................................26
5.8.1.1 XPS-Q Hardware .....................................................................................26
5.8.1.2 XPS-RL or XPS-D Hardware ..................................................................27
6.0 XPS Extended Firmware Architecture (Contact Newport) .............. 28
6.1 SingleAxisWithClamping Group....................................................................................28
6.1.1 State Diagram......................................................................................................29
6.1.2 Group Clamping Sequence..................................................................................30
6.1.2.1 Clamping State Diagram..........................................................................30
6.2 SingleAxisTheta Group ..................................................................................................31
6.2.1 State Diagram......................................................................................................32
6.2.2 Group Clamping Sequence..................................................................................33
6.2.2.1 Clamping State Diagram..........................................................................33
6.3 TZ Group........................................................................................................................34
6.3.1 State Diagram......................................................................................................35
6.4 User External Module Programming..............................................................................36
6.5 ZYGO Interferometer.....................................................................................................37
6.5.1 ZMI Measurement System ..................................................................................37
6.5.2 ZYGO P2 Interface Registers..............................................................................37
6.5.3 Status, Error, and High Nibble P2 Interface Register..........................................38
6.5.4 ZYGO Error Code Table.....................................................................................39
6.5.5 PEG Control Register..........................................................................................40
6.5.6 ZYGO Axis Error Status List..............................................................................40
6.5.7 ZYGO Axis Status List .......................................................................................41
7.0 XPS Functions Description................................................................... 42
7.1 Input Tests Common to all XPS Functions ....................................................................42
7.2 XPS Functions Lists .......................................................................................................43
7.2.1 Standard Functions..............................................................................................43
7.2.1.1 CleanCoreDumpFolder ............................................................................43
7.2.1.2 CleanTmpFolder ......................................................................................44
7.2.1.3 CloseAllOtherSockets ..............................................................................45
7.2.1.4 ControllerMotionKernelTimeLoadGet ....................................................46
7.2.1.5 ControllerRTTimeGet..............................................................................47
7.2.1.6 ControllerSlaveStatusGet.........................................................................48
7.2.1.7 ControllerSlaveStatusStringGet ...............................................................49
7.2.1.8 ControllerStatusGet..................................................................................50
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7.2.1.9 ControllerStatusRead ...............................................................................51
7.2.1.10 ControllerStatusStringGet ........................................................................52
7.2.1.11 ControllerSynchronizeCorrectorISR........................................................53
7.2.1.12 DataCollectionBufferReset ......................................................................54
7.2.1.13 DataCollectionBufferAndTimeReset .......................................................55
7.2.1.14 DataCollectionRequest.............................................................................56
7.2.1.15 DataCollectionTimeStampGet .................................................................57
7.2.1.16 DataCollectionTimeStampReset ..............................................................58
7.2.1.17 DoubleGlobalArrayGet............................................................................59
7.2.1.18 DoubleGlobalArraySet.............................................................................60
7.2.1.19 ElapsedTimeGet.......................................................................................61
7.2.1.20 ErrorStringGet..........................................................................................62
7.2.1.21 EventExtendedAllGet ..............................................................................63
7.2.1.22 EventExtendedConfigurationActionGet ..................................................64
7.2.1.23 EventExtendedConfigurationActionSet ...................................................65
7.2.1.24 EventExtendedConfigurationTriggerGet .................................................67
7.2.1.25 EventExtendedConfigurationTriggerSet ..................................................68
7.2.1.26 EventExtendedGet....................................................................................70
7.2.1.27 EventExtendedRemove ............................................................................71
7.2.1.28 EventExtendedStart..................................................................................72
7.2.1.29 EventExtendedWait..................................................................................74
7.2.1.30 ExternalModuleFirmwareVersionGet......................................................76
7.2.1.31 ExternalModuleScanFuncTimeDurationsGet ..........................................77
7.2.1.32 ExternalModuleSocketFree......................................................................78
7.2.1.33 ExternalModuleSocketReserve ................................................................79
7.2.1.34 FileGatheringRename ..............................................................................80
7.2.1.35 FileScriptHistoryRename.........................................................................81
7.2.1.36 FirmwareBuildVersionNumberGet..........................................................82
7.2.1.37 FirmwareVersionGet................................................................................83
7.2.1.38 GatheringConfigurationGet......................................................................84
7.2.1.39 GatheringConfigurationSet ......................................................................85
7.2.1.40 GatheringCurrentNumberGet...................................................................86
7.2.1.41 GatheringDataAcquire .............................................................................87
7.2.1.42 GatheringDataGet ....................................................................................88
7.2.1.43 GatheringDataMultipleLinesGet..............................................................89
7.2.1.44 GatheringExternalConfigurationGet ........................................................91
7.2.1.45 GatheringExternalConfigurationSet.........................................................92
7.2.1.46 GatheringExternalCurrentNumberGet .....................................................93
7.2.1.47 GatheringExternalDataGet.......................................................................94
7.2.1.48 GatheringExternalStopAndSave ..............................................................95
7.2.1.49 GatheringReset.........................................................................................96
7.2.1.50 GatheringRun...........................................................................................97
7.2.1.51 GatheringRunAppend ..............................................................................98
7.2.1.52 GatheringStop ..........................................................................................99
7.2.1.53 GatheringStopAndSave..........................................................................100
7.2.1.54 GetLibraryVersion .................................................................................101
7.2.1.55 GlobalArrayGet......................................................................................102
7.2.1.56 GlobalArraySet ......................................................................................103
7.2.1.57 GPIOAnalogGainGet .............................................................................104
7.2.1.58 GPIOAnalogGainSet..............................................................................105
7.2.1.59 GPIOAnalogGet.....................................................................................106
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7.2.1.60 GPIOAnalogRangeConfigurationGet ....................................................107
7.2.1.61 GPIOAnalogRangeConfigurationSet .....................................................108
7.2.1.62 GPIOAnalogSet .....................................................................................109
7.2.1.63 GPIODigitalGet .....................................................................................110
7.2.1.64 GPIODigitalSet ......................................................................................111
7.2.1.65 GPIODigitalPulseWidthGet...................................................................112
7.2.1.66 GPIODigitalPulseWidthSet....................................................................113
7.2.1.67 GroupAccelerationCurrentGet ...............................................................114
7.2.1.68 GroupAccelerationSetpointGet ..............................................................115
7.2.1.69 GroupAnalogTrackingModeDisable......................................................116
7.2.1.70 GroupAnalogTrackingModeEnable .......................................................117
7.2.1.71 GroupBrakeStateGet ..............................................................................119
7.2.1.72 GroupBrakeSet.......................................................................................120
7.2.1.73 GroupCorrectorOutputGet .....................................................................121
7.2.1.74 GroupCurrentFollowingErrorGet...........................................................122
7.2.1.75 GroupGantryModeGet ...........................................................................123
7.2.1.76 GroupGantryModeSet............................................................................124
7.2.1.77 GroupHomeSearch.................................................................................125
7.2.1.78 GroupHomeSearchAndRelativeMove....................................................127
7.2.1.79 GroupInitialize .......................................................................................129
7.2.1.80 GroupInitializeNoEncoderReset ............................................................131
7.2.1.81 GroupInitializeWithEncoderCalibration ................................................133
7.2.1.82 GroupInterlockDisable...........................................................................135
7.2.1.83 GroupInterlockEnable ............................................................................136
7.2.1.84 GroupJogCurrentGet..............................................................................137
7.2.1.85 GroupJogModeDisable ..........................................................................139
7.2.1.86 GroupJogModeEnable............................................................................140
7.2.1.87 GroupJogParametersGet ........................................................................142
7.2.1.88 GroupJogParametersSet .........................................................................144
7.2.1.89 GroupKill ...............................................................................................146
7.2.1.90 GroupMotionDisable..............................................................................147
7.2.1.91 GroupMotionEnable...............................................................................148
7.2.1.92 GroupMotionStatusGet ..........................................................................149
7.2.1.93 GroupMoveAbort...................................................................................150
7.2.1.94 GroupMoveAbortFast ............................................................................152
7.2.1.95 GroupMoveAbsolute..............................................................................154
7.2.1.96 GroupMoveEndWait..............................................................................156
7.2.1.97 GroupMoveRelative...............................................................................157
7.2.1.98 GroupPositionCurrentGet ......................................................................159
7.2.1.99 GroupPositionSetpointGet .....................................................................160
7.2.1.100 GroupPositionTargetGet ........................................................................161
7.2.1.101 GroupReferencingActionExecute ..........................................................162
7.2.1.102 GroupReferencingStart ..........................................................................164
7.2.1.103 GroupReferencingStop...........................................................................165
7.2.1.104 GroupSpinCurrentGet ............................................................................166
7.2.1.105 GroupSpinModeStop..............................................................................167
7.2.1.106 GroupSpinParametersGet.......................................................................168
7.2.1.107 GroupSpinParametersSet .......................................................................169
7.2.1.108 GroupStatusGet......................................................................................171
7.2.1.109 GroupStatusStringGet ............................................................................172
7.2.1.110 GroupVelocityCurrentGet......................................................................173
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7.2.1.111 GroupVelocitySetpointGet.....................................................................174
7.2.1.112 HardwareDateAndTimeGet ...................................................................175
7.2.1.113 HardwareDateAndTimeSet ....................................................................176
7.2.1.114 HardwareDriverAndStageGet ................................................................177
7.2.1.115 InstallerVersionGet ................................................................................178
7.2.1.116 INTServitudesCommandGet..................................................................179
7.2.1.117 INTServitudesStatusGet.........................................................................180
7.2.1.118 KillAll ....................................................................................................181
7.2.1.119 Login ......................................................................................................182
7.2.1.120 LoginS....................................................................................................183
7.2.1.121 MultipleAxesPTExecution.....................................................................184
7.2.1.122 MultipleAxesPTLoadToMemory...........................................................186
7.2.1.123 MultipleAxesPTParametersGet..............................................................188
7.2.1.124 MultipleAxesPTPulseOutputGet............................................................189
7.2.1.125 MultipleAxesPTPulseOutputSet ............................................................191
7.2.1.126 MultipleAxesPTResetInMemory ...........................................................193
7.2.1.127 MultipleAxesPTVerification..................................................................194
7.2.1.128 MultipleAxesPTVerificationResultGet..................................................196
7.2.1.129 MultipleAxesPVTExecution ..................................................................197
7.2.1.130 MultipleAxesPVTLoadToMemory........................................................199
7.2.1.131 MultipleAxesPVTParametersGet...........................................................201
7.2.1.132 MultipleAxesPVTPulseOutputGet.........................................................202
7.2.1.133 MultipleAxesPVTPulseOutputSet .........................................................204
7.2.1.134 MultipleAxesPVTResetInMemory ........................................................206
7.2.1.135 MultipleAxesPVTVerification ...............................................................207
7.2.1.136 MultipleAxesPVTVerificationResultGet ...............................................209
7.2.1.137 OpenConnection.....................................................................................210
7.2.1.138 PositionerAccelerationAutoScaling .......................................................211
7.2.1.139 PositionerAnalogTrackingPositionParametersGet.................................213
7.2.1.140 PositionerAnalogTrackingPositionParametersSet..................................214
7.2.1.141 PositionerAnalogTrackingVelocityParametersGet ................................216
7.2.1.142 PositionerAnalogTrackingVelocityParametersSet .................................218
7.2.1.143 PositionerBacklashDisable.....................................................................220
7.2.1.144 PositionerBacklashEnable......................................................................221
7.2.1.145 PositionerBacklashGet ...........................................................................223
7.2.1.146 PositionerBacklashSet............................................................................224
7.2.1.147 PositionerCompensatedFastPCOAbort ..................................................225
7.2.1.148 PositionerCompensatedFastPCOCurrentStatusGet................................226
7.2.1.149 PositionerCompensatedFastPCOEnable ................................................227
7.2.1.150 PositionerCompensatedFastPCOFromFile.............................................228
7.2.1.151 PositionerCompensatedFastPCOLoadToMemory .................................230
7.2.1.152 PositionerCompensatedFastPCOMemoryReset.....................................231
7.2.1.153 PositionerCompensatedFastPCOPrepare ...............................................232
7.2.1.154 PositionerCompensatedFastPCOPulseParametersGet ...........................234
7.2.1.155 PositionerCompensatedFastPCOPulseParametersSet ............................235
7.2.1.156 PositionerCompensatedFastPCOSet ......................................................236
7.2.1.157 PositionerCompensatedPCOAbort.........................................................238
7.2.1.158 PositionerCompensatedPCOCurrentStatusGet.......................................240
7.2.1.159 PositionerCompensatedPCOEnable.......................................................241
7.2.1.160 PositionerCompensatedPCOFromFile ...................................................243
7.2.1.161 PositionerCompensatedPCOLoadToMemory........................................245
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7.2.1.162 PositionerCompensatedPCOMemoryReset............................................247
7.2.1.163 PositionerCompensatedPCOPrepare......................................................248
7.2.1.164 PositionerCompensatedPCOSet.............................................................250
7.2.1.165 PositionerCompensationDisturbanceDisable .........................................252
7.2.1.166 PositionerCompensationDisturbanceEnable ..........................................253
7.2.1.167 PositionerCompensationDisturbanceFileLoad.......................................254
7.2.1.168 PositionerCompensationDisturbanceStatusGet......................................255
7.2.1.169 PositionerCompensationDualLoopNotchFilterGet ................................256
7.2.1.170 PositionerCompensationDualLoopNotchFilterSet.................................258
7.2.1.171 PositionerCompensationDualLoopPhaseCorrectionFilterGet................260
7.2.1.172 PositionerCompensationDualLoopPhaseCorrectionFilterSet ................262
7.2.1.173 PositionerCompensationEncoderNotchFilterGet ...................................264
7.2.1.174 PositionerCompensationEncoderNotchFilterSet....................................266
7.2.1.175 PositionerCompensationFrequencyNotchsGet.......................................268
7.2.1.176 PositionerCompensationFrequencyNotchsSet .......................................270
7.2.1.177 PositionerCompensationLowPassTwoFilterGet ....................................272
7.2.1.178 PositionerCompensationLowPassTwoFilterSet .....................................273
7.2.1.179 PositionerCompensationNotchFilterGet ................................................274
7.2.1.180 PositionerCompensationNotchFilterSet .................................................275
7.2.1.181 PositionerCompensationNotchModeFiltersGet......................................277
7.2.1.182 PositionerCompensationNotchModeFiltersSet ......................................279
7.2.1.183 PositionerCompensationPhaseCorrectionFilterGet................................281
7.2.1.184 PositionerCompensationPhaseCorrectionFilterSet.................................283
7.2.1.185 PositionerCompensationPhaseCorrectionFiltersGet ..............................285
7.2.1.186 PositionerCompensationPhaseCorrectionFiltersSet...............................287
7.2.1.187 PositionerCompensationPositionFilterGet .............................................289
7.2.1.188 PositionerCompensationPositionFilterSet..............................................290
7.2.1.189 PositionerCompensationPostExcitationFrequencyNotchFilterGet.........291
7.2.1.190 PositionerCompensationPostExcitationFrequencyNotchFilterSet .........292
7.2.1.191 PositionerCompensationPostExcitationLowPassFilterGet.....................294
7.2.1.192 PositionerCompensationPostExcitationLowPassFilterSet .....................295
7.2.1.193 PositionerCompensationPostExcitationNotchModeFilterGet ................296
7.2.1.194 PositionerCompensationPostExcitationNotchModeFilterSet.................298
7.2.1.195 PositionerCompensationPostExcitationPhaseCorrectionFilterGet.........300
7.2.1.196 PositionerCompensationPostExcitationPhaseCorrectionFilterSet .........302
7.2.1.197 PositionerCompensationPreFeedForwardFrequencyNotchFilterGet .....304
7.2.1.198 PositionerCompensationPreFeedForwardFrequencyNotchFilterSet......305
7.2.1.199 PositionerCompensationPreFeedForwardPhaseCorrectionFilterGet .....307
7.2.1.200 PositionerCompensationPreFeedForwardPhaseCorrectionFilterSet ......309
7.2.1.201 PositionerCompensationPreFeedForwardSpatialNotchFilterGet...........311
7.2.1.202 PositionerCompensationPreFeedForwardSpatialNotchFilterSet............312
7.2.1.203 PositionerCompensationSpatialPeriodicNotchsGet ...............................314
7.2.1.204 PositionerCompensationSpatialPeriodicNotchsSet................................316
7.2.1.205 PositionerCorrectorAutoTuning.............................................................318
7.2.1.206 PositionerCorrectorDamperFilterGet .....................................................320
7.2.1.207 PositionerCorrectorDamperFilterSet......................................................321
7.2.1.208 PositionerCorrectorDualGet...................................................................323
7.2.1.209 PositionerCorrectorDualSet ...................................................................325
7.2.1.210 PositionerCorrectorExcitationSignalGainGet ........................................327
7.2.1.211 PositionerCorrectorExcitationSignalGainSet.........................................328
7.2.1.212 PositionerCorrectorNotchFiltersGet.......................................................329
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7.2.1.213 PositionerCorrectorNotchFiltersSet .......................................................331
7.2.1.214 PositionerCorrectorPIDAccelerationFilterGet .......................................333
7.2.1.215 PositionerCorrectorPIDAccelerationFilterSet........................................334
7.2.1.216 PositionerCorrectorPIDBaseGet ............................................................335
7.2.1.217 PositionerCorrectorPIDBaseSet.............................................................337
7.2.1.218 PositionerCorrectorPIDDualFFVoltageGet ...........................................339
7.2.1.219 PositionerCorrectorPIDDualFFVoltageSet ............................................341
7.2.1.220 PositionerCorrectorPIDFFAccelerationGet ...........................................344
7.2.1.221 PositionerCorrectorPIDFFAccelerationSet ............................................346
7.2.1.222 PositionerCorrectorPIDFFVelocityGet..................................................348
7.2.1.223 PositionerCorrectorPIDFFVelocitySet...................................................350
7.2.1.224 PositionerCorrectorPIPositionGet..........................................................352
7.2.1.225 PositionerCorrectorPIPositionSet...........................................................353
7.2.1.226 PositionerCorrectorPlantFeedForwardDelayGet....................................355
7.2.1.227 PositionerCorrectorPlantFeedForwardDelaySet ....................................356
7.2.1.228 PositionerCorrectorPostFFGet ...............................................................357
7.2.1.229 PositionerCorrectorPostFFSet................................................................358
7.2.1.230 PositionerCorrectorTypeGet ..................................................................359
7.2.1.231 PositionerCurrentVelocityAccelerationFiltersGet .................................360
7.2.1.232 PositionerCurrentVelocityAccelerationFiltersSet ..................................361
7.2.1.233 PositionerDriverFiltersGet .....................................................................363
7.2.1.234 PositionerDriverFiltersSet......................................................................364
7.2.1.235 PositionerDriverPositionOffsetsGet.......................................................366
7.2.1.236 PositionerDriverStatusGet......................................................................367
7.2.1.237 PositionerDriverStatusStringGet............................................................368
7.2.1.238 PositionerEncoderAmplitudeValuesGet ................................................369
7.2.1.239 PositionerEncoderCalibrationParametersGet.........................................370
7.2.1.240 PositionersEncoderIndexDifferenceGet.................................................372
7.2.1.241 PositionerErrorGet .................................................................................373
7.2.1.242 PositionerErrorRead...............................................................................374
7.2.1.243 PositionerErrorStringGet........................................................................375
7.2.1.244 PositionerExcitationSignalGet ...............................................................376
7.2.1.245 PositionerExcitationSignalSet................................................................377
7.2.1.246 PositionerExcitationSignalCorrectorOutSet...........................................380
7.2.1.247 PositionerFeedforwardAccDisable.........................................................383
7.2.1.248 PositionerFeedforwardAccEnable..........................................................384
7.2.1.249 PositionerFeedforwardAccGet...............................................................385
7.2.1.250 PositionerFeedforwardAccSet................................................................386
7.2.1.251 PositionerFeedforwardPositionDisable ..................................................388
7.2.1.252 PositionerFeedforwardPositionEnable ...................................................389
7.2.1.253 PositionerFeedforwardPositionGet ........................................................390
7.2.1.254 PositionerFeedforwardPositionSet .........................................................391
7.2.1.255 PositionerGantryEndReferencingPositionGet........................................392
7.2.1.256 PositionerHardInterpolatorFactorGet.....................................................393
7.2.1.257 PositionerHardInterpolatorFactorSet......................................................394
7.2.1.258 PositionerHardInterpolatorPositionGet..................................................396
7.2.1.259 PositionerHardwareStatusGet ................................................................397
7.2.1.260 PositionerHardwareStatusStringGet.......................................................398
7.2.1.261 PositionerJogMaximumVelocityAndAccelerationGet...........................399
7.2.1.262 PositionerMagneticTrackPositionAtHomeGet.......................................400
7.2.1.263 PositionerMaximumVelocityAndAccelerationGet ................................401
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7.2.1.264 PositionerMotionDoneGet .....................................................................402
7.2.1.265 PositionerMotionDoneSet ......................................................................403
7.2.1.266 PositionerMotorDualSinForceBalanceGet.............................................404
7.2.1.267 PositionerMotorDualSinForceBalanceSet..............................................405
7.2.1.268 PositionerPositionCompareAquadBAlwaysEnable ...............................406
7.2.1.269 PositionerPositionCompareAquadBPrescalerGet ..................................407
7.2.1.270 PositionerPositionCompareAquadBPrescalerSet...................................408
7.2.1.271 PositionerPositionCompareAquadBWindowedGet ...............................409
7.2.1.272 PositionerPositionCompareAquadBWindowedSet ................................410
7.2.1.273 PositionerPositionCompareDisable........................................................412
7.2.1.274 PositionerPositionCompareEnable.........................................................413
7.2.1.275 PositionerPositionCompareGet ..............................................................414
7.2.1.276 PositionerPositionComparePulseParametersGet....................................415
7.2.1.277 PositionerPositionComparePulseParametersSet.....................................416
7.2.1.278 PositionerPositionCompareScanAccelerationLimitGet .........................418
7.2.1.279 PositionerPositionCompareScanAccelerationLimitSet..........................419
7.2.1.280 PositionerPositionCompareSet...............................................................420
7.2.1.281 PositionerPreCorrectorExcitationSignalGet...........................................422
7.2.1.282 PositionerPreCorrectorExcitationSignalSet ...........................................423
7.2.1.283 PositionerRawEncoderPositionGet ........................................................425
7.2.1.284 PositionerSGammaExactVelocityAjustedDisplacementGet..................426
7.2.1.285 PositionerSGammaParametersGet .........................................................427
7.2.1.286 PositionerSGammaParametersSet..........................................................428
7.2.1.287 PositionerSGammaPreviousMotionTimesGet .......................................430
7.2.1.288 PositionerSGammaVelocityAndAccelerationSet...................................431
7.2.1.289 PositionerStageParameterGet.................................................................432
7.2.1.290 PositionerStageParameterSet .................................................................433
7.2.1.291 PositionerTimeFlasherDisable ...............................................................434
7.2.1.292 PositionerTimeFlasherEnable ................................................................435
7.2.1.293 PositionerTimeFlasherGet......................................................................436
7.2.1.294 PositionerTimeFlasherSet ......................................................................437
7.2.1.295 PositionerUserTravelLimitsGet .............................................................439
7.2.1.296 PositionerUserTravelLimitsSet ..............................................................440
7.2.1.297 PositionerWarningFollowingErrorGet ...................................................441
7.2.1.298 PositionerWarningFollowingErrorSet....................................................442
7.2.1.299 Reboot....................................................................................................443
7.2.1.300 RestartApplication .................................................................................444
7.2.1.301 SingleAxisSlaveModeDisable................................................................445
7.2.1.302 SingleAxisSlaveModeEnable.................................................................446
7.2.1.303 SingleAxisSlaveParametersGet..............................................................447
7.2.1.304 SingleAxisSlaveParametersSet ..............................................................448
7.2.1.305 SingleAxisThetaClampDisable ..............................................................450
7.2.1.306 SingleAxisThetaClampEnable ...............................................................451
7.2.1.307 SingleAxisThetaFeedforwardJerkParametersGet...................................452
7.2.1.308 SingleAxisThetaFeedforwardJerkParametersSet ...................................453
7.2.1.309 SingleAxisThetaFeedforwardParametersGet .........................................454
7.2.1.310 SingleAxisThetaFeedforwardParametersSet..........................................455
7.2.1.311 SingleAxisThetaSlaveModeDisable.......................................................456
7.2.1.312 SingleAxisThetaSlaveModeEnable........................................................457
7.2.1.313 SingleAxisThetaSlaveParametersGet.....................................................458
7.2.1.314 SingleAxisThetaSlaveParametersSet .....................................................459
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7.2.1.315 SpindleSlaveModeDisable .....................................................................461
7.2.1.316 SpindleSlaveModeEnable ......................................................................462
7.2.1.317 SpindleSlaveParametersGet ...................................................................463
7.2.1.318 SpindleSlaveParametersSet....................................................................464
7.2.1.319 TCLScriptExecute..................................................................................466
7.2.1.320 TCLScriptExecuteAndWait ...................................................................467
7.2.1.321 TCLScriptExecuteWithPriority..............................................................469
7.2.1.322 TCLScriptKill ........................................................................................471
7.2.1.323 TCLScriptKillAll ...................................................................................472
7.2.1.324 TCLScriptRunningListGet.....................................................................473
7.2.1.325 TCP_CloseSocket ..................................................................................474
7.2.1.326 TCP_ConnectToServer ..........................................................................475
7.2.1.327 TCP_GetError........................................................................................476
7.2.1.328 TCP_SetTimeout....................................................................................477
7.2.1.329 TimerGet ................................................................................................478
7.2.1.330 TimerSet.................................................................................................479
7.2.1.331 TZEncoderCouplingMatrixGet ..............................................................480
7.2.1.332 TZEncoderCouplingMatrixSet...............................................................482
7.2.1.333 TZEncoderCouplingModeGet................................................................484
7.2.1.334 TZEncoderCouplingModeSet ................................................................485
7.2.1.335 TZFocusModeDisable............................................................................486
7.2.1.336 TZFocusModeEnable.............................................................................487
7.2.1.337 TZMappingModeGet .............................................................................488
7.2.1.338 TZMappingModeSet..............................................................................489
7.2.1.339 TZMotorDecouplingMatrixGet..............................................................490
7.2.1.340 TZMotorDecouplingMatrixSet ..............................................................492
7.2.1.341 TZMotorDecouplingModeGet ...............................................................494
7.2.1.342 TZMotorDecouplingModeSet................................................................495
7.2.1.343 TZPTExecution......................................................................................496
7.2.1.344 TZPTLoadToMemory............................................................................498
7.2.1.345 TZPTParametersGet...............................................................................500
7.2.1.346 TZPTPulseOutputGet.............................................................................501
7.2.1.347 TZPTPulseOutputSet .............................................................................503
7.2.1.348 TZPTResetInMemory ............................................................................505
7.2.1.349 TZPTVerification...................................................................................506
7.2.1.350 TZPTVerificationResultGet...................................................................508
7.2.1.351 TZPVTExecution ...................................................................................510
7.2.1.352 TZPVTLoadToMemory.........................................................................512
7.2.1.353 TZPVTParametersGet............................................................................514
7.2.1.354 TZPVTPulseOutputGet..........................................................................515
7.2.1.355 TZPVTPulseOutputSet ..........................................................................517
7.2.1.356 TZPVTResetInMemory .........................................................................519
7.2.1.357 TZPVTVerification ................................................................................520
7.2.1.358 TZPVTVerificationResultGet ................................................................522
7.2.1.359 TZTrackingCutOffFrequencyGet...........................................................524
7.2.1.360 TZTrackingCutOffFrequencySet ...........................................................525
7.2.1.361 TZTrackingUserMaximumZZZTargetDifferenceGet............................526
7.2.1.362 TZTrackingUserMaximumZZZTargetDifferenceSet.............................527
7.2.1.363 XYCrossTalkCompensationMotorDecouplingGet ................................528
7.2.1.364 XYCrossTalkCompensationMotorDecouplingSet.................................529
7.2.1.365 XYGroupPositionCorrectedProfilerGet .................................................530
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7.2.1.366 XYGroupPositionPCORawEncoderGet.................................................532
7.2.1.367 XYLineArcExecution ............................................................................533
7.2.1.368 XYLineArcParametersGet .....................................................................535
7.2.1.369 XYLineArcPulseOutputGet ...................................................................536
7.2.1.370 XYLineArcPulseOutputSet....................................................................538
7.2.1.371 XYLineArcVerification .........................................................................540
7.2.1.372 XYLineArcVerificationResultGet .........................................................542
7.2.1.373 XYMappingGet......................................................................................543
7.2.1.374 XYMappingSet ......................................................................................545
7.2.1.375 XYPTExecution .....................................................................................547
7.2.1.376 XYPTLoadToMemory...........................................................................549
7.2.1.377 XYPTParametersGet..............................................................................551
7.2.1.378 XYPTPulseOutputGet............................................................................552
7.2.1.379 XYPTPulseOutputSet ............................................................................554
7.2.1.380 XYPTResetInMemory ...........................................................................556
7.2.1.381 XYPTVerification..................................................................................557
7.2.1.382 XYPTVerificationResultGet ..................................................................559
7.2.1.383 XYPVTExecution ..................................................................................561
7.2.1.384 XYPVTLoadToMemory........................................................................563
7.2.1.385 XYPVTParametersGet...........................................................................565
7.2.1.386 XYPVTPulseOutputGet.........................................................................566
7.2.1.387 XYPVTPulseOutputSet..........................................................................568
7.2.1.388 XYPVTResetInMemory ........................................................................570
7.2.1.389 XYPVTVerification ...............................................................................571
7.2.1.390 XYPVTVerificationResultGet ...............................................................573
7.2.1.391 XYZGroupPositionCorrectedProfilerGet...............................................575
7.2.1.392 XYZGroupPositionPCORawEncoderGet ..............................................577
7.2.1.393 XYZSplineExecution .............................................................................579
7.2.1.394 XYZSplineParametersGet......................................................................581
7.2.1.395 XYZSplinePulseOutputGet....................................................................582
7.2.1.396 XYZSplinePulseOutputSet ....................................................................584
7.2.1.397 XYZSplineVerification..........................................................................586
7.2.1.398 XYZSplineVerificationResultGet ..........................................................588
7.2.2 Extended Functions ...........................................................................................589
7.2.2.1 AbortMove.............................................................................................589
7.2.2.2 EndJog....................................................................................................590
7.2.2.3 GetAccParams........................................................................................591
7.2.2.4 GetBrakeState ........................................................................................592
7.2.2.5 GetCurrentPosition.................................................................................593
7.2.2.6 GetGantryMode .....................................................................................594
7.2.2.7 GetJogAcceleration................................................................................595
7.2.2.8 GetJogVelocity.......................................................................................596
7.2.2.9 GetPistonState........................................................................................597
7.2.2.10 GetVarX.................................................................................................599
7.2.2.11 GetVarXSecondary ................................................................................600
7.2.2.12 GetVarY.................................................................................................601
7.2.2.13 GetVelParams ........................................................................................602
7.2.2.14 GetVerCommand ...................................................................................603
7.2.2.15 GetXVelParams .....................................................................................604
7.2.2.16 GetYVelParams .....................................................................................605
7.2.2.17 GetZone..................................................................................................606
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7.2.2.18 InitializeAndHomeX ..............................................................................607
7.2.2.19 InitializeAndHomeXY ...........................................................................609
7.2.2.20 InitializeAndHomeY ..............................................................................611
7.2.2.21 MoveAbsolute........................................................................................613
7.2.2.22 MoveSlice ..............................................................................................615
7.2.2.23 RequestType1.........................................................................................617
7.2.2.24 RequestType2.........................................................................................619
7.2.2.25 RequestType3.........................................................................................620
7.2.2.26 SetAccParams ........................................................................................621
7.2.2.27 SetBrake.................................................................................................622
7.2.2.28 SetGantryMode ......................................................................................623
7.2.2.29 SetJogAcceleration.................................................................................625
7.2.2.30 SetJogVelocity .......................................................................................627
7.2.2.31 SetPiston ................................................................................................629
7.2.2.32 SetVarX..................................................................................................630
7.2.2.33 SetVarXSecondary.................................................................................631
7.2.2.34 SetVarY..................................................................................................632
7.2.2.35 SetVelParams.........................................................................................633
7.2.2.36 SetXVelParams ......................................................................................634
7.2.2.37 SetYVelParams ......................................................................................635
7.2.2.38 SetZone ..................................................................................................636
7.2.2.39 StartJog ..................................................................................................637
7.2.2.40 WaitMotionEnd......................................................................................638
7.2.2.41 ZygoADCDiagnosticStatusGet ..............................................................639
7.2.2.42 ZygoAmplitudeGet ................................................................................640
7.2.2.43 ZygoConnectToServer ...........................................................................641
7.2.2.44 ZygoDisconnectFromServer ..................................................................642
7.2.2.45 ZygoErrorStatusGet ...............................................................................643
7.2.2.46 ZygoErrorStatusStringGet......................................................................644
7.2.2.47 ZygoEthernetCommunicationStatusGet.................................................645
7.2.2.48 ZygoGetPEGLastCommunicationTime .................................................646
7.2.2.49 ZygoGetVerInterfero..............................................................................647
7.2.2.50 ZygoInterferometerStatusGet.................................................................648
7.2.2.51 ZygoPositionGet ....................................................................................649
7.2.2.52 ZygoReadLong.......................................................................................650
7.2.2.53 ZygoReadWord......................................................................................651
7.2.2.54 ZygoRegisterGet ....................................................................................652
7.2.2.55 ZygoRegisterSet.....................................................................................653
7.2.2.56 ZygoReset ..............................................................................................654
7.2.2.57 ZygoResetX ...........................................................................................655
7.2.2.58 ZygoResetY ...........................................................................................656
7.2.2.59 ZygoSendAndReceive............................................................................658
7.2.2.60 ZygoSetOffsetX .....................................................................................659
7.2.2.61 ZygoSetOffsetY .....................................................................................660
7.2.2.62 ZygoSetPEGParams...............................................................................661
7.2.2.63 ZygoStartBoardP2..................................................................................663
7.2.2.64 ZygoStartInterferometer.........................................................................665
7.2.2.65 ZygoStatusGet........................................................................................666
7.2.2.66 ZygoStatusStringGet ..............................................................................667
7.2.2.67 ZygoWriteLong......................................................................................668
7.2.2.68 ZygoWriteWord.....................................................................................669
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8.0 Lists and Tables for XPS Functions .................................................. 670
8.1 Event Triggers List .......................................................................................................670
8.2 Actions List ..................................................................................................................672
8.3 Gathering Data Types...................................................................................................673
8.4 External Gathering Data Types ....................................................................................675
8.5 Positioner Error List .....................................................................................................676
8.6 Positioner Hardware Status List ...................................................................................677
8.7 Positioner Driver Status List.........................................................................................679
8.8 Group Status List..........................................................................................................680
8.9 Error List ......................................................................................................................683
8.10 Controller Status List....................................................................................................687
9.0 Process Examples ................................................................................ 688
9.1 Management of Errors Example...................................................................................688
9.2 Firmware Version Example..........................................................................................689
9.3 Gathering with Motion Example ..................................................................................690
9.4 External Gathering Example.........................................................................................692
9.5 Position Output Compare Example ..............................................................................694
9.6 Slave-Master Mode Example .......................................................................................696
9.7 Jogging Example ..........................................................................................................698
9.8 Tracking Example.........................................................................................................700
9.9 Backlash .......................................................................................................................701
9.10 Timer Event and Global Variables ...............................................................................703
9.11 Running Several Motion Processes Simultaneously.....................................................705
Service Form ...................................................................................................... 707
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1.0 Note
This XPS Programmer's Manual describes all the functions available for the XPS family
of controllers.
NOTE
Not all below described functions are available for XPS standard controller. If you
are interested in a function that is described but not available for your controller,
please contact Newport.
NOTE
For more details on XPS features, please refer to XPS User’s Manual.
Universal High
-Performance
Motion Controller/Driver
XPS
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2.0 TCP/IP Communication
XPS is based on a 10/100/1000 Base-T Ethernet communication link with TCP/IP
protocol and uses a web site as the Graphical User Interface (GUI) to access all the
software tools and an FTP server for file transfer. This makes the XPS controller
independent of the user's operating system. When networked, Unix, Linux or Windows
users can access the same controller from any place in the world for remote control,
code development, file transfer or diagnostics. The completely object oriented approach
of the XPS firmware with powerful, multi-parameter Functions (commands) is also
much more consistent and intuitive to use than old-style mnemonic commands.
To connect to the XPS controller you must open a socketThe XPS allows up to 100
open sockets with 30 sockets communicating simultaneously.
Each Function returns a complete or error code. If successful, the return is 0 (zero). In
case of an error, the returned error code can be used for diagnosing the.
The function call is blocked until a reply is sent by the XPS, or until the timeout value is
reached. Running several processes in parallel (for instance getting the position while a
stage is moving), several sockets can be used in parallel. When using the XPS controller
with programming languages that do not support multiple sockets, the timeout value of
the function can be set to a low value (20 ms), in that case you cannot capture errors.
NOTE
When a communication ends with a time out fault, it could be caused by some
hardware failure or the timeout value is lower than the time needed by the
controller to execute the requested function.
For example, setting a timeout of one second and requesting a motion that requires
2 seconds will end with a timeout. In this situation the controller will continue the
move and when accomplished will send the response back to the host.
It is the host responsibility to take the appropriate actions to handle properly these
situations.
XPS controller 2
QNX
Kernel
TCL
Task
TCP / IP
TCL (API driver)
MainController
WebServer
TCL
script
file
XPS controller 1
TCP / IP
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XPS Unified Programmer’s Manual
3.0 XPS .NET Software Drivers
3.1 How to Install .NET Drivers for XPS Controller
3.1.1 Requirements
.Net Framework is a programming infrastructure created by Microsoft for building,
deploying, and running applications and services that use .NET technologies such as
custom desktop applications.
The Windows PC computer requires having at least the .NET Framework installed and
you need to install either 32 bit (x86) or 64 bit (x64) .NET assembly depending on the
Windows version you are using.
When developing your application, refer to the programming environment
documentation to make the installed .NET assembly visible.
To communicate with the XPS controller you will need to:
•Use the OpenInstrument method to connect to the controller
•Communicate with the controller using any of its API e.g. FirmwareVersionGet
•Once your application terminates it needs to disconnect from the controller using the
CloseInstrument method. If it doesn’t close the communication channel and runs
many connections to the controller, it can run out of free channels and gets an error.
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3.1.1 Installing the 32 bit (x86) Windows Platform
The .NET assembly is in the controller in “/Public/Drivers” folder, refer to the
controller user’s manual for more details.
Download the “Newport.XPS.CommandInterface_x86.exe” to your computer.
Once downloaded, run it.
The .NET assembly “Newport.XPS.CommandInterface.dll” is installed in the GAC for
x86 platforms in
“C:\Windows\Microsoft.NET\assembly\GAC_32\Newport.XPS.CommandInterface\”
folder and is ready for use.
3.1.2 Installing the 64 bit (x64) Windows Platform
The .NET assembly is in the controller in “/Public/Drivers” folder, refer to the
controller user’s manual for more details.
Download the “Newport.XPS.CommandInterface_x64.exe” to your computer.
Once downloaded, run it.
The .NET assembly “Newport.XPS.CommandInterface.dll” is installed in the GAC for
x64 platforms in
“C:\Windows\Microsoft.NET\assembly\GAC_64\Newport.XPS.CommandInterface \”
folder and is ready for use.
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3.2 Variables Equivalent for Programming Langages
The table below describes a simple of a prototype model for different languages:
Prototype
int FunctionName (double inputParam, double * outputParam)
C++
int FunctionName(int SocketID, double inputParam, double *
outputParam)
VBasic
Long FunctionName(ByVal SocketID As Long, ByVal inputParam As
Double, outputParam As Double)
Matlab
[Error, outputParam] FunctionName(int32 SocketID, double
inputParam)
Python
[Error, outputParam] FunctionName(integer SocketID, double
inputParam)
TCL
set Error [catch "FunctionName SocketID inputParam outputParam "]
The table below shows parameters types needed for different languages:
Parameter Types
C++
VBasic
Python
Input/Output
Parameters
bool
bool
Boolean
bool
float
float
Single
float
double
double
Double
double
short
short
Short
short
unsigned short
unsigned short
UShort
unsigned short
int
int
Integer
integer
unsigned int
unsigned int
UInteger
unsigned int
long
long
Long
long
unsigned long
unsigned long
ULong
unsigned int
long long int
long long int
Long
long long
unsigned long long
unsigned long long
ULong
unsigned long
long
char * / char[]
char *
String
string
charhex32
char *
String
string
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3.3 How to Use XPS .NET Assembly from Visual Studio C#?
Refer to Microsoft for more information on how to load and use a .NET assembly
depending on your Visual Studio version.
3.3.1 Add Reference to Newport XPS .NET Assembly
In your project add Newport.XPS.CommandInterface.dll in References from Windows
GAC:
3.3.2 C# Code Sources
C# Header
using CommandInterfaceXPS; // Newport.XPS.CommandInterface .NET Assembly
access
Add a Variable to Declare an “XPS” Object
CommandInterfaceXPS.XPS m_xpsInterface = null;
Create an Instance of “XPS” Object
m_xpsInterface = new CommandInterfaceXPS.XPS();
if (m_xpsInterface != null)
…
Open XPS Connection
if (m_xpsInterface != null)
int returnValue = m_xpsInterface.OpenInstrument(m_IPAddress, m_IPPort,
DEFAULT_TIMEOUT);
Call “XPS” Functions
if (m_xpsInterface != null)
{
string XPSVersion = string.Empty;
string errorString = string.Empty;
int result = m_xpsInterface.FirmwareVersionGet(out XPSVersion, out
errorString);
if (result == CommandInterfaceXPS.XPS.FAILURE)
...
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