Nikon NWL860 Series User manual

M232 E 04.7.CF.3
Wafer Loader NWL860 Series
IFC Function
(SECS Communications)
Specifications

i
Thank you for purchasing a Nikon Product. Communications requirements for the Nikon Wafer Loader
NWL860 series are specified in this IFC Function (SECS Communications) Specifications. To ensure
correct usage, please read this manual before using.
●No part of this manual may be reproduced or transmitted in any form without the prior consent of
Nikon.
●This manual is subject to change in part or in full without prior notice.
●Every effort has been made to ensure the accuracy of this manual. If you find that parts of the manual
are unclear or in error, please contact your nearest Nikon representative.
●Please be sure to read the manuals for the NWL wafer loader, microscope, and other products used
with the wafer loader.
■Purpose
This specification described the requirements for serial communications between the model
NWL860TMB-SP or NWL860INX and the customer's computer. The specification has the following
purposes:
<Online Remote Control Mode>
All operations except those involving the stage and the joystick can be performed with external devices,
including PCs, after communications have been set up correctly.
<Online Local Control Mode>
During manual operation, information on sampling/inspection patterns, the carrier, wafer loader, and
inspection results can be accessed both by the host computer and by the wafer loader.
■Wafer Loader
●NWL860TMB-SP using interface communications (NWL3R-IFC)
●NWL860INX using interface communications (NWL3A-IFC)
(See “5. Hardware and Setting” in Chapter 1.)
■ROM
●NWL3R-IFC, Ver 2.30 or later
●NWL3A-IFC, Ver 2.30 or later
The IFC function is available only with the models shown above, using the indicated ROMs.

1
Chaper 1 General Description
1
2
3
4
Table of Contents
Chaper 1 General Description .............................................................................. 4
1. Wafer Loader Model No. ............................................................................ 4
2. Summary ..................................................................................................... 4
3. IFC Protection .............................................................................................. 4
4. Standard Compliance ................................................................................. 4
5. Hardware and Setting................................................................................. 5
Chaper 2 System Specification ............................................................................ 6
1. Communications Port ................................................................................. 6
2. Control Mode .............................................................................................. 6
2-1. Online Remote Control Mode ...................................................................... 6
2-2. Online Local Control Mode ........................................................................... 6
2-3. Offline Control Mode .................................................................................... 7
3. External Connection ................................................................................... 7
Chaper 3 Interface Specification .......................................................................... 8
1. Physical Interface (Common to all ports).................................................. 8
1-1. Interactive Signal Connection Circuit .......................................................... 8
1-2. Connector ....................................................................................................... 8
1-3. Data Rate ........................................................................................................ 8
1-4. Pin Connection .............................................................................................. 8
1-5. Synchronization System ............................................................................... 8
1-6. Transmission .................................................................................................. 8
1-7. Connection ..................................................................................................... 8
2. Character ..................................................................................................... 9
2-1. Character Length ........................................................................................... 9
2-2. Format ............................................................................................................ 9
2-3. Start Bit .......................................................................................................... 9
2-4. Data Bit ........................................................................................................... 9
2-5. Parity Bit ......................................................................................................... 9
2-6. Stop Bit ........................................................................................................... 9
3. Block Transfer Protocol ............................................................................ 10
3-1. System ......................................................................................................... 10
3-2. Transmission Control Character................................................................. 10
3-3. Protocol Parameter ..................................................................................... 10
4. Message..................................................................................................... 11
4-1. Format .......................................................................................................... 11
4-2. Message Length .......................................................................................... 11
4-3. Header .......................................................................................................... 11
4-4. Message Data .............................................................................................. 11
4-5. Checksum ..................................................................................................... 11
4-6. Header .......................................................................................................... 11
4-7. Message Data .............................................................................................. 14

2
Chaper 1 General Description
15. Message Protocol ..................................................................................... 17
5-1. Detection of Double Block .......................................................................... 17
5-2. Handling of Multi-Block .............................................................................. 17
5-3. Multi-Transaction ......................................................................................... 17
5-4. Size of Incoming Message .......................................................................... 17
5-5. Size of Outgoing Message .......................................................................... 17
6. Examples of Data Link Protocol ............................................................... 18
6-1. Normal Transmission and Receipt ............................................................. 18
6-2. Contention ................................................................................................... 18
Chaper 4 Communications Specification ......................................................... 20
1. Compliance with GEM .............................................................................. 20
1-1. GEM Compliance Level Shown by E30 GEM Compliance Sheet
(E30 Table 8.3).............................................................................................. 20
1-2. GEM Basic Requirements ........................................................................... 21
1-3. Equipment Processing State ...................................................................... 23
1-4. Saving of Settings ....................................................................................... 24
2. List of SECS Messages to and from the Host ......................................... 25
3. Functions Implemented in Communications with Host and
Scenario ..................................................................................................... 27
3-1. Establishment of Communications ............................................................ 27
3-2. Online Check ................................................................................................ 27
3-3. Sample File Management ........................................................................... 27
3-4. Carrier File Management ............................................................................ 28
3-5. Equipment Information Management ....................................................... 29
3-6. Event Report ................................................................................................ 29
3-7. Control Mode Selection .............................................................................. 31
3-8. Remote Control ........................................................................................... 33
3-9. Alarm Management .................................................................................... 33
3-10. Status Data Collection ................................................................................. 34
3-11. Error Message ............................................................................................. 34
4. Detailed Message Format ........................................................................ 36
4-1. Stream 1 ....................................................................................................... 36
4-2. Stream 2 ....................................................................................................... 42
4-3. Stream 5 ....................................................................................................... 49
4-4. Stream 6 ....................................................................................................... 52
4-5. Stream 7 ....................................................................................................... 56
4-6. Stream 9 ....................................................................................................... 61
5. Definition of Message Variable (Data Item) ............................................ 65
5-1. ACKC5 .......................................................................................................... 65
5-2. ACKC6 .......................................................................................................... 65
5-3. ACKC7 .......................................................................................................... 65
5-4. ACKC7A ........................................................................................................ 65
5-5. ALCD ............................................................................................................. 65
5-6. ALED ............................................................................................................. 66

3
Chaper 1 General Description
1
5-7. ALID .............................................................................................................. 66
5-8. ALTX ............................................................................................................. 68
5-9. CCODE .......................................................................................................... 69
5-10. CEED ............................................................................................................. 72
5-11. CEID .............................................................................................................. 73
5-12. COMMACK ................................................................................................... 75
5-13. CPNAME ....................................................................................................... 75
5-14. CPACK .......................................................................................................... 75
5-15. CPVAL ........................................................................................................... 75
5-16. DATALENGHTH ............................................................................................ 76
5-17. DATAID ......................................................................................................... 76
5-18. DRACK .......................................................................................................... 76
5-19. EAC ............................................................................................................... 76
5-20. ECDEF ........................................................................................................... 77
5-21. ECID .............................................................................................................. 77
5-22. ECMAX ......................................................................................................... 80
5-23. ECMIN .......................................................................................................... 80
5-24. ECNAME ....................................................................................................... 80
5-25. ECV ............................................................................................................... 80
5-26. EDID .............................................................................................................. 81
5-27. ERACK .......................................................................................................... 81
5-28. ERRW7 .......................................................................................................... 81
5-29. GRANT6 ....................................................................................................... 81
5-30. LENGTH ........................................................................................................ 81
5-31. LRACK .......................................................................................................... 82
5-32. HCACK .......................................................................................................... 82
5-33. MDLN ........................................................................................................... 82
5-34. MEXP ............................................................................................................ 82
5-35. MHEAD ......................................................................................................... 83
5-36. OFLACK ........................................................................................................ 83
5-37. ONLACK ....................................................................................................... 83
5-38. PPARM .......................................................................................................... 83
5-39. PPGNT .......................................................................................................... 83
5-40. PPID .............................................................................................................. 84
5-41. RCMD ........................................................................................................... 84
5-42. RPTID ............................................................................................................ 87
5-43. SEQNUM ...................................................................................................... 87
5-44. SHEAD .......................................................................................................... 87
5-45. SOFTREV ...................................................................................................... 88
5-46. SV ................................................................................................................. 88
5-47. SVID .............................................................................................................. 88
5-48. SVNAME ...................................................................................................... 89
5-49. UNITS ........................................................................................................... 89
5-50. V .................................................................................................................... 89
5-51. VID ................................................................................................................ 89

4
1
1General Description
1. Wafer Loader Model No.
This specification applies to the following wafer loader models.
●NWL860TMB-SP
●NWL860INX
In this document, these models will be referred to collectively as NWLs.
This specification applies to the following ROM versions.
●NWL3R-IFC Version 2.30 or later for NWL860TMB-SP
●NWL3A-IFC Version 2.30 or later for NWL860INX
2. Summary
For more information on the following requirements, please see the following chapters.
●External devices and control mode ................................... Chapter 2 “System Specification”
●Connectors, signal standards, mechanical,
and electrical requirements ................................................ Chapter 3 “Interface Specification”
●Transmission timing, messages, and protocols .............. Chapter 3 “Interface Specification”
●Communications scenario and message details .............. Chapter 4 “Communications Specification”
3. IFC Protection
This specification applies when the ROM is NOT IFC-protected and the DipSW (1 of SW1) of the control
circuit board is ON.
4. Standard Compliance
This specification conforms to the following standards.
* For details on GEM standard compliance, see 1 in Chapter 5.
Physical Interface (See 1 in Chapter 3.)
Character (See 2 in Chapter 3.)
Block Transfer Protocol (See 3 in Chapter 3.)
Message (See 4 in Chapter 3.)
Message Protocol (See 5 in Chapter 3.)
State Model
Equipment Behavior and Scenario
Data Item
Collection Event
Behavior Conforming to GEM
SEMI E4-91
SEMI Equipment Communications Standard 1
Message Transfer (SECS-I)
SEMI E5-95
SEMI Equipment Communications Standard 2
Message Content (SECS-II)
SEMI E30-95
Generic Model for Communications and Control
of SEMI Equipment (GEM)
GEM
Defines basic requirements and additions to the
equipment for the equipment only for
communications with the host.
General Description

5
Chaper 1 General Description
1
5. Hardware and Setting
Some ROMs used with the NWL are not designed for IFC function. If the ROM name does not include
“-IFC”, it cannot be used for communications.
Additionally, some NWLs are not designed for IFC function. To add IFC functionality to these NWLs, you
must upgrade the ROM and modify related settings.
<NWL860INX>
The circuit board and the internal cable required for communications are built in.
Use ROMs for NWL3A-IFC version 2.30 or later.
●Setting
①Change the ROM if it is not designed for IFC function.
②Turn on DipSW (1 of SW1) on the control circuit board.
③Turn on power.
④Proceed through the steps below, following the instructions given in the operation panel. (The steps
may vary slightly with different ROM versions.)
A prompt for conversion appears in the display screen.
Select “Cnvrt”. The conversion starts.
Upon completion, the “Welcome NWL860”screen (the screen shown at startup) is displayed.
<NWL860TMB-SP>
The circuit board and internal cable required for communications are built in.
Use ROMs for NWL3R-IFC version 2.30 or later.
* NWL860TMBs other than type SP lack the required circuit board and internal cable. Those models
cannot communicate with external devices, even with upgraded ROMs.
●Setting
①Change the ROM if it is not designed for IFC function.
②Turn on DipSW (1 of SW1) on the control circuit board.
③Turn on power.
④Proceed through the steps below, following the instructions given in the operation panel. (The steps
may vary slightly with different ROM versions.)
A prompt for conversion appears in the display screen.
Select “Cnvrt”. The conversion starts.
Upon completion, the “Welcome NWL860”screen (the screen shown at startup) is displayed.

6
2
2System Specification
1. Communications Port
Three communications ports are available.
①COM1: Used for communications with PC (host)
②COM2: Used for communications with indexer (equipment)
③COM3: Used for debug monitoring (reserved for Remote Box)
2. Control Mode
(Note) Control mode is not a communications mode; rather, it refers to on-line or off-line control of the
equipment.
* For communications modes, see “1-2-1. State Model”in Chapter 4.
Three control modes are available. The control mode is automatically switched by the operations on the
NWL’s option setting screen, commands from the external device, and in the event of an error. At
startup, control mode is factory-set to offline. You can change this setting.
Communications between the NWL860INX and the indexer are always controlled in online mode.
2-1. Online Remote Control Mode
In this mode, all operations (except those involving the joystick and the stage) and file management are
controlled through communications by an external device.
●All switches and control knob settings except the joystick, emergency stop switch and function switch
for turning off communications are disabled. (If any of these switches is turned on, the inhibit buzzer
will sound.)
●The control mode is switched to offline (host offline) mode by a command from the host.
●The control mode is also switched to offline (host offline) mode if the host does not reply and a timer’s
set time elapses.
●When the NWL requires manual initialization of wafer storage and arms at startup, key operation
becomes available, just as in local mode.
2-2. Online Local Control Mode
The equipment is controlled in the same environment as offline, with the difference that this mode allows
the equipment to exchange sample files, result files, carrier files, and status information with the host.
●All operating switches and the control knobs are enabled.
●Files are transmitted by a command from the host at a timing regulated by the host. File transmission
is not controlled by the NWL operation.
●The control mode is switched to offline (host offline) mode by a command from the host.
●The control mode is also switched to offline (host offline) mode if the host does not reply and a timer’s
set time elapses.
System Specification

7
Chapter 2 System Specification
2
2-3. Offline Control Mode
The equipment is controlled locally.
●All operating switches and control knobs are enabled.
●The control mode is switched to online remote or online local control mode by selecting the option setting.
●When the equipment is in maintenance mode, control mode is automatically set to offline mode.
The offline control mode is further divided into two states.
<Host Offline State>
The equipment is ready for communications, but the host rejects communications with the equipment or
the connection fails.
<Equipment Offline State>
The equipment is in offline mode.
3. External Connection
This specification is based on three different connection methods.
①Communications with Host
②Communications with Indexer
③Communications with Host and Indexer
Host Equipment
COM2
NWL
(Indexer)
INX
Host Equipment
COM2
NWL Host
(Indexer)
INX
COM1
Equipment Host
COM1
NWL Host
For remote control and monitoring of the NWL by the host.
For control of the INX by the NWL.
For remote control and monitoring of
the NWL and the INX by the host.
Equipment Host

8
Interface Specification
2
3
3
1. Physical Interface (Common to all ports)
1-1. Interactive Signal Connection Circuit
RS-232C: Conforms to the EIA Standard.
1-2. Connector
D-Sub 25-pin female (ISO 2110-1980) or equivalent.
Locking: Female 4-40 threaded jack screw lock
1-3. Data Rate
300, 1200, 2400, 4800, 9600 (default) baud
1-4. Pin Connection
1-5. Synchronization System
Start-stop system (asynchronous system)
1-6. Transmission
Half-duplex transmission
1-7. Connection
Point-to-point connection
Interface Specification
FG
TXD
RXD
RTS
CTS
DSR
SG
CD
DTR
②
⑧
⑦
⑥
④
⑤
③
①
⑧
〜
⑨
<NWL ←→ PC Connection>
④
⑥
⑦
⑤
②
③
①
⑳
Shielding
D-sub25pin (male) D-sub9pin (female)
M2.6 Screw #4-40 Screw
Frame
〜
Frame
NWL PC
*The Length of cable must be less than 3M
22

9
Chapter 3 Interface Specification
3
2. Character
2-1. Character Length
10 bits
2-2. Format
2-3. Start Bit
1 bit (0)
2-4. Data Bit
8 bits
2-5. Parity Bit
N/A
2-6. Stop Bit
1 bit (1)
Data Bit
Start Bit Stop Bit
(LSB)
1
(MSB)
8234567

10
Chapter 3 Interface Specification
2
3
3. Block Transfer Protocol
3-1. System
Line contention system (The master is the equipmemt.)
3-2. Transmission Control Character
*“H”stands for hexadecimal numbers.
①ENQ (05H): Request to send
②EOT (04H): Ready to receive
③ACK (06H): Acknowledge
④NAK (15H): Negative acknowledge
3-3. Protocol Parameter
You can set the following parameters in the NWL display screen with the precision shown below.
Typical
Value
Code
9600
101 (65H)
0.5 S
10 S
45 S
45 S
3
Serial communications speed
Equipment identification number
Error detected in characters
No protocol response determination
No reply message determination
Error detected in a multi-block message
The maximum number of retries
BAUD
DEVID
T1
T2
T3
T4
RTY
Function
Baud rate
Device ID
Character time out
Protocol time out
Reply time out
Block time out
Retry limit
300–9600
0–32767
0.1–10 S
0.2–25 S
1–120 S
1–120 S
0–31
—
1
0.1 S
0.2 S
1 S
1 S
1
Description
Range Precision
Parameter

11
Chapter 3 Interface Specification
3
4. Message
4-1. Format
4-2. Message Length
The first message byte.
This gives the total length (byte count) of the header and the message data.
4-3. Header
See “4-6. Header”in this chapter.
4-4. Message Data
See “4-7. Message Data”in this chapter.
4-5. Checksum
A 2-byte block representing the sum of the binary numbers of the header and the message data without
codes.
The upper-digit byte is sent before the lower-digit byte.
4-6. Header
4-6-1. Format
Message length 1 byte
Header 10 bytes
Message data max 244 bytes
Checksum 2 bytes
Messages consists of the following blocks.
Time
Upper device ID
Lower device ID
Upper message ID
Lower message ID
Upper block No.
Lower block No.
System byte
87 6 54 321
1
2
3
4
5
6
7
8
9
10
Device ID
Message ID
Block No.
System Byte
R
W
E
4-6-2. Device ID
Used as an identification number for each device in an SECS network.

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Chapter 3 Interface Specification
2
3
4-6-3. R-Bit
Defines the direction of message transmission.
R = 0: Host (H) → Equipment (E)
R = 1: Host (H) ←Equipment (E)
4-6-4. Message ID
Consists of 2 bytes; seven upper bits (stream code) + eight lower bits (function code).
See 4-6-6. for the stream code, and 4-6-7. For the function code.
4-6-5. W-Bit
Defines whether the message contains a request for a response.
W = 0: The transmitter does not expect a response.
W = 1: The transmitter expects a response.
4-6-6. Stream Code
Stream code represents the category of a message. Several code numbers are reserved by the
SECS.
Code
S1
S2
S3
S4
S5
S6
S7
S8
S9
S10
Equipment status
Equipment status and diagnosis
Status of the material
Control of the material
Exception report
Data gathering
Control of manufacturing program
Control program
System error
Terminal service
Message Type
4-6-7. Function Code
The Function code represents the specific message contained in a stream. Several code
numbers are reserved by the SECS.
①The code F0 is defined as an abort transaction for all stream codes.
②During information exchange, the first message sent is always assigned an odd code
number, while the response to the message is assigned an even code number, determined by
incrementing the first message code number by one.
Stream Code 0–63: Reserved by the SECS.
64–127: Defined by the user.
Function Code 0–63: Reserved by the SECS.
64–255: Defined by the user.

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Chapter 3 Interface Specification
3
4-6-8. Standard Message ID
For standard stream and function codes, see “4. Detailed Message Format”in Chapter 4.
4-6-9. Block No.
When the length of message data to be transmitted exceeds 244 bytes, the message is divided
into several blocks, and the blocks are sent separately. Block No. represents the order in which
they are transmitted.
* See “4-6-11. Multi-Block”in this chapter.
When the message consists of only one block, it is assigned Block No. 1.
4-6-10. E-Bit
Defines whether additional message blocks follow.
E = 0: More blocks follow.
E = 1: No blocks follow.
4-6-11. Multi-Block
When message data consists of more than one block, the data is referred to as a multi-block
message. One multi-block message can contain up to 32767 blocks (a total length of 7.99
Mbytes).
The first block of a multi-block message is numbered 1. All subsequent blocks are numbered in
order, with each assigned number incremented by one from the preceding.
Defined by the user
Stream
Reserved
by the
SECS
Function Code
01–63 64 –127
0
1
63
64
255
Message to Transmit
Transmitted Message
Header
No. = 1
Header
No. = 2
Header
No. = 3
①② ③
①② ③
System Byte 1
System Byte 2
System Byte 3
System Byte 4
Source ID (Upper)
Source ID (Lower)
Transaction ID (Upper)
Transaction ID (Lower)
4-6-12. System Byte
System byte is classified as follows.

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Chapter 3 Interface Specification
2
3
●Source ID
An identification code given to the message for every source in the application level.
The source ID of a primary message is a copy of the transaction ID. When a message is
retransmitted due to errors or for other reasons, the source ID is incremented.
The source ID of a secondary message is a copy of the system byte of the received primary
message.
●Transaction ID
An integer, incremented each time a primary message is transmitted.
The same transaction ID is assigned to all blocks of a multi-block message.
4-7. Message Data
4-7-1. Format
The data in a message is written in the form of an item (item header) or list (list header).
4-7-2. Item Header Format
Item header consists of format byte (upper 6 bits) and length byte (lower 2 bits).
4-7-3. Format Byte
Format byte consists of item format code and length byte count.
4-7-4. Item Format Code
Defines the format of data.
(DATA) . . . . . . . . . . . . . . . . . . . . . . . . .
Item or
List DATA Item or List
87 654 321
Item Format Code Length Byte Count
MSB Data Length Byte LSB
MSB Data Length Byte LSB
MSB Data Length Byte LSB
1
2
3
4
MS Byte
LS Byte
Format Byte
Length Byte
Data Format
List
Binary
Truth value
ASCII
8-byte binary integer (with sign)
2-byte binary integer (with sign)
8-byte floating point
4-byte floating point
1-byte integer (without sign)
2-byte integer (without sign)
4-byte integer (without sign)
00
10
11
20
30
32
40
44
51
52
54
octal
000000
001000
001001
010000
011000
011010
100000
100100
101001
101010
101100
bit — 876543
Format Code

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Chapter 3 Interface Specification
3
4-7-5. Length Byte Count
Defines the number of bytes making up the length byte.
0 = Illegal, data format error
1 = 1-byte binary length byte (max. 255)
2 = 2-byte binary length byte (max. 64 K)
3 = 3-byte binary length byte (max. 7.99 M)
For list format, length represents the number of elements (lists or items) in the list.
The length byte of 0 has a special meaning, which is defined by the individual specification.
4-7-6. Length Byte
Defines the byte count required for the following data.
When the length byte is made up of more than one byte, the bytes are sent out in order, from
the upper byte.
The length byte consists of 1 to 3 bytes.
4-7-7. List
Defines the number of component data (elements) when the data consists of data in different
formats.
The format of the list header is the same as that of the item header.
Individual component data are defined by the item header.
4-7-8. Examples of Item and List
(a) Item containing one binary code 10101010
bit 87654321
00100001 Item with length byte 1
00000001 Byte length 1
10101010 Data byte
(b) Item containing three ASCII characters A, B, and C
01000001 Item ASCII, length byte 1
00000011 Byte length 3
01000001 ASCII character A
01000010 ASCII character B
01000011 ASCII character C
(c) Item containing (b) above and three binary numbers in 2-byte format
00000001 List, length byte 1
00000100 Number of elements 4
01000001 Item ASCII, length byte 1
00000011 Byte length 3
01000001 ASCII character A
01000010 ASCII character B
01000011 ASCII character C
01101001 Item 2-byte integer, length byte 1
00000010 Byte length 2
xxxxxxxx Upper byte for a number X
xxxxxxxx Lower byte for a number X

16
Chapter 3 Interface Specification
2
3
01101001 Item 2-byte integer, length byte 1
00000010 Byte length 2
yyyyyyyy Upper byte for a number Y
yyyyyyyy Lower byte for a number Y
01101001 Item 2-byte integer, length byte 1
00000010 Byte length 2
zzzzzzzz Upper byte for a number Z
zzzzzzzz Lower byte for a number Z
4-7-9. Examples of Message
Response, from the equipment (device ID = 0487H) to the host, to an inquiry into online status.
00011100 Message length 28 bytes
10000100 From host (Device ID) to equipment
10000111 0487H
00000001 Not expecting response message
00000010 S1F2
10000000 Single block
00000001 Block No. 1
00000000 System byte ‘0’
00000001 ‘1’
00000000 ‘0’
00000001 ‘1’
00000001 List
00000010 2 elements
01000001 ASCII 1 byte
00000110 6 bytes
00110001 MDLN ‘1’
00110010 ‘2’
00110011 ‘3’
00110100 ‘4’
00110101 ‘5’
00110110 ‘6’
01000001 ASCII 1 byte
00000110 6 bytes
01000001 SOFTREV ‘A’
01000010 ‘B’
01000011 ‘C’
01000100 ‘D’
01000101 ‘E’
01000110 ‘F’

17
Chapter 3 Interface Specification
3
5. Message Protocol
5-1. Detection of Double Block
Double blocks are detected by checking the block header system byte. If a double block is detected, the
data is ignored.
5-2. Handling of Multi-Block
Multi-block messages are handled at both the transmitting and receiving ends.
5-3. Multi-Transaction
The NWLs do not apply to multi-transactions (interleaving messages).
5-4. Size of Incoming Message
An incoming message should not exceed 17 blocks.
5-5. Size of Outgoing Message
An outgoing message should not exceed 17 blocks.