NT-MDT NTEGRA Spectra Probe NanoLaboratory User manual

NTEGRA Spectra
Probe NanoLaboratory
Inverted Configuration with Solar TII spectrometer
Instruction Manual
12 April 2010
Copyright © NT-MDT
Web Page: http://www.ntmdt.com
General Information: [email protected]
Technical Support: [email protected]
NT-MDT Co., building 100,
Zelenograd, 124482, Moscow, Russia
Tel.: [phone]
Fax: [phone]

Read me First!
Observe safety measures for operation with devices containing sources of laser radiation.
Do not stare into the beam. A label warning about the presence of laser radiation is
attached to the measuring head (Fig. 1) as well as to the laser sources.
Fig. 1
Before you start working with the instrument, get acquainted with the basic safety
measures and the operation conditions for the instrument!
If you are a beginner in scanning probe microscopy, we recommend you to familiarize with
basic SPM techniques. “Fundamentals of Scann ing Probe Microscopy” by V.L. Mironov
gives a good introduction to the subject. T his book is available on the Internet,
http://www.ntmdt.com/manuals.
Feedback
Should you have any questions, which are not explained in the manuals, please contact
the Service Department of the company ([email protected]) and our engineers will
give you comprehensive answers. Alternatively, you can contact our staff on-line using
the ask_on-line service.

User’s documentation set
The following manuals are included into the user’s documentation set:
-Instruction Manual – is the guidance on preparation of the instrument and other
equipment for operation on various techniques of Scanning Probe Microscopy. The
contents of the user’s documentation set may differ depending on the delivery set of the
instrument.
-SPM Software Reference Manual – is the description of the control program
interface functions, all commands and functions of the menu and, also a description of
the Image Analysis module and the Macro Language “Nova PowerScript”.
-Control Electronics. Reference Manual – is the guide to SPM controller,
Thermocontroller and Signal Access module.
Some equipment, which is described in the manuals, may not be included into your
delivery set. Read the specification of your contract for more information.
The manuals are updated regularly. Their latest versions can be found in the site of the
company, in the section “Customer support” (http://www.ntmdt.com/support).

NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer)
NTEGRA Spectra Probe NanoLaboratory. Inverted Configuration
with Solar TII spectrometer
Table of Contents
1. OVERVIEW .............................................................................................................................................5
2. DESIGN.....................................................................................................................................................7
2.1. INVERTED OPTICAL MICROSCOPE .................................................................................................... 8
2.2. NTEGRA BASE UNIT....................................................................................................................... 9
2.3. XY SCANNING OPTICAL EXCHANGEABLE MOUNT......................................................................... 10
2.4. MEASURING HEADS........................................................................................................................ 12
2.5. SPECTROMETER .............................................................................................................................. 16
2.6. DETECTORS .................................................................................................................................... 16
2.7. LASER............................................................................................................................................. 20
2.8. OPTICAL FIBER TRANSPORT SYSTEM ............................................................................................. 21
2.9. ADDITIONAL CABLES ..................................................................................................................... 22
2.10. CONTROLLERS................................................................................................................................23
2.11. COMPUTER ..................................................................................................................................... 24
3. PRINCIPLE OF OPERATION OF THE NTEGRA SPECTRA PNL..............................................25
4. BASIC SAFETY MEASURES..............................................................................................................28
5. OPERATING CONDITIONS...............................................................................................................31
6. STORAGE AND TRANSPORT REGULATION ...............................................................................33
7. GENERAL REQUIREMENTS ON INSTALLATION......................................................................34
8. SETUP AND INSTALLATION............................................................................................................35
8.1. PREPARING THE SPECTROMETER .................................................................................................... 35
8.1.1. Installing and Aligning the Optical Fiber Transport System........................................... 35
8.1.2. Installing the Spectrometer and the Optical Microscope ................................................ 38
8.2. CONNECTING THE ELECTROMECHANICAL UNITS............................................................................ 39
8.3. POWERING SEQUENCE .................................................................................................................... 41
9. PREPARING FOR OPERATION........................................................................................................44
9.1. LAUNCHING THE CONTROL PROGRAM............................................................................................ 44
9.2. VERIFYING ADJUSTMENT OF THE DISPLACEMENT SENSORS........................................................... 45
9.3. ADJUSTING THE SPECTRAL UNIT .................................................................................................... 46
9.4. MOUNTING THE SAMPLE ................................................................................................................ 50
10. MEASURING WITH THE CONFOCAL MICROSCOPY MODE..................................................51
10.1. FOCUSING THE LASER BEAM .......................................................................................................... 51
10.2. ADJUSTING CHANNELS OF DETECTION........................................................................................... 52
10.2.1. Adjusting Detection Parameters of the CCD-camera ..................................................... 52
10.2.2. Adjusting Detection Parameters of the PMT Module...................................................... 57
10.2.3. Adjusting Detection Parameters of the APD Module...................................................... 59
10.3. ADJUSTING SCAN PARAMETERS ..................................................................................................... 61
10.4. ADDITIONAL ADJUSTING FOR SCANNING WITH AFM HEAD ........................................................... 63
10.5. SCANNING ...................................................................................................................................... 68
10.5.1. Scanning with Recording by the CCD-Camera............................................................... 68
10.5.2. Scanning with Recording by the PMT Module ................................................................ 71
10.5.3. Scanning with Recording by the APD Module ................................................................ 72
10.6. SAVING DATA................................................................................................................................. 73
10.7. FINISHING THE WORK..................................................................................................................... 73
11. AFM AND SNOM MEASUREMENTS ...............................................................................................75

Chapter 1. Overview
1. Overview
NTEGRA Spectra PNL combines measurement capabilities of spectrometry, SNOM and
AFM, which are enhanced by SNOM-spectrometry and AFM-spectrometry.
Theses capabilities are illustrated by the conceptual scheme of Fig. 1-1.
Fig. 1-1. Conceptual scheme of the NTEGRASpectra PNL
The spectrometer is based on the infinity-corrected confocal optical scheme that provides
submicron spatial resolution (200÷300 nm in the lateral (XY) and 500÷700 nm in the
normal (Z) directions). High spectral resolution (several tenths of angstrom) is achieved
due to the Czerny-Turner optical schematics of the spectrometer. For excitation of
secondary emission, a gas or solid-state laser is employed. The spatial (XYZ) information
is acquired with a special scanning system. A more detailed description of the instrument is
provided below.
NTEGRA Spectra PNL provides the following options of measurements:
-performing spectral measurements at a certain point and acquiring spectral
characteristics of various materials when the instrument operates as a regular
spectrometer;
-measuring secondary signal intensity in the selected wavelength range in the mode of
layer-specific volumetric scanning of the area 100x100x30 μm;
-acquiring optical images of the object when the instrument operates as a regular laser
confocal microscope.
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NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer)
6
In addition to measurements, the NTEGRA Spectra PNL facilitates to perform volumetric
lithography.
The SNOM-Spectrometer configuration allows the following:
-measuring surface topography with the Shear Force Microscopy;
-in the transmission mode, measuring optical and spectral properties of the object with
the resolution achievable by the Scanning Near-field Optical Microscopy.
The AFM-Spectrometer configuration allows the following:
-detecting the object landscape with atomic resolution as well as collecting its electrical,
magnetic and nanomechanical pro;
-perties with force microscopy techniques;
-measuring optical properties relevant to the Scanning Near-Field Optical Microscopy
in scales down to atomic sizes.
The NTEGRA Spectra PNL application area includes technology processes control in
chemical, food and medicine industries, environment monitoring, isotope composition
analysis, defects control, control of impurities in pure substances, analysis of materials of
quantum electronics and semiconductor industry, fundamental research in physics,
chemistry, medicine etc.
The instrument layout is quite flexible for the experimenter to change the configuration
with units designed especially for a given purpose. The software is advanced to facilitate:
-performing spectral measurements;
-controlling the scanning mechanism, the automated optical mechanical units, the light
detection systems (CCD camera and APD module);
-displaying 3D data, filtering, analysis and saving the collected data.

Chapter 2. Design
2. Design
Fig. 2-1 shows general view of the NTEGRA Spectra PNL instrument.
Fig. 2-1. NTEGRASpectra PNL
NTEGRA Spectra PNL consists of the following main parts:
-Inverted optical microscope Olympus IX71.
-Base Unit of NTEGRA.
-XY scanning optical exchangeable mount.
-Measuring heads:
-SNOM;
-AFM.
-Spectrometer.
-Light detection systems:
-CCD camera;
-APD module;
-PMT module.
-Lasers.
-Optical fiber transport system (OTS).
-Main and slave controllers.
-Computer.
The main units of the NTEGRA Spectra PNL are shown in the block diagram of the
Fig. 2-2.
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NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer)
Fig. 2-2. NTEGRASpectra PNL block diagram
2.1. Inverted Optical Microscope
An inverted optical microscope Olympus IX71 (Fig. 2-3) serves for taking common optical
images. The base unit of the instrument is mounted on it.
Fig. 2-3. Inverted optical microscope Olympus IX71
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Chapter 2. Design
The microscope is equipped with an optical system that provides the following options for
NTEGRA Spectra:
-delivering laser beam to the sample;
-delivering the light reflected from the sample to the spectrometer;
-monitoring the process of approaching the lens to the sample;
-displaying the sample image taken from the video camera of the microscope.
2.2. NTEGRA Base Unit
The base unit of NTEGRA (Fig. 2-4) is the base platform for mounting the exchangeable
mount and the protective hood.
Fig. 2-4. Main components of the base unit
1 – approach lever; 2 – manual approach knob;
3 – temperature and humidity sensor; 4 – LC-display
The base unit includes the approach system that is used to approach the lens to the sample.
For manual operation, the manual approach knob 2 is used.
Data on ambient temperature and humidity are measured with the sensor 3 and then
displayed by the LC-display 4.
Base unit electrical slots
Slots for connecting the devices installed on the base unit:
HEAD – two identical connectors for connecting the measuring head;
SCANNER – scanner connector, used for connecting either the exchangeable
scanner or the measuring head scanner;
SCAN+SENSOR – connector for the scanner or for the scanner with built-in sensors,
used for connecting either the exchangeable scanner or the measuring
head scanner;
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NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Solar TII spectrometer)
Т–connector of a heating element, used for connecting a heating stage, heating
liquid cells etc.;
SM – connector of the stepper motor;
AFAM – connector of the ultrasonic piezoelectric transducer;
BV – bias voltage jack, used for applying bias voltage to the sample.
Slots for connecting the bias unit to the control system:
CONTROLLER 1 – connector for connecting to the HEAD connector of the SPM
controller;
CONTROLLER 2 – connector for connecting to the CONTROLLER 2 connector of the
SPM controller;
CONTROLLER T– connector for connecting to the thermocontroller.
2.3. XY Scanning Optical Exchangeable Mount
XY Scanning Optical Exchangeable Mount (Fig. 2-5) allows:
-manual positioning of the measuring head in the XY plane;
-manual positioning of the sample by means of micrometer screws;
-precise positioning of the sample by means of the built-in XY scanner;
-manual approaching the lens to the sample by means of a stepper motor;
-fine focusing by means of the Z piezo drive of the lens.
The XY Scanning Optical Exchangeable Mount holds the investigated sample, the
measuring head, and the lens of the inverted optical microscope.
A substrate with a mounted sample is fastened to the sample stage 4 with the spring clips 5.
The seats 1 of the exchangeable mount hold the measuring head. Positioning of the
measuring head with respect to the lens is performed by means of screws 2. To select the
scan area, the sample is moved using the micrometer screws 3 of the XY positioning
device and inspected with the optical viewing system.
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