NT-MDT NTEGRA Aura Probe NanoLaboratory User manual

NTEGRA Aura
Probe NanoLaboratory
(configuration for vacuum
measurements, up to 10 –2Torr)
Instruction Manual
2011
Copyright © “NT-MDT”
Web Page: http://www.ntmdt.com
General Information: [email protected]
Technical Support: [email protected]
NT-MDT Co., building 100,
Zelenograd, 124482, Moscow, Russia
Tel.: [phone]
Fax: [phone]

Read me First!
Observe safety measures for operation with devices containing sources of laser radiation.
Do not stare into the beam. A label warning about the presence of laser radiation is
attached to the laser sources (Fig. 1).
Fig. 1
Before you start working with the instrument, get acquainted with the basic safety
measures and the operation conditions for the instrument!
If you are a beginner in scanning probe microscopy, we recommend you to familiarize with
basic SPM techniques. “Fundamentals of Scanning Probe Microscopy” by V.L. Mironov
gives a good introduction to the subject. This book is available free of charge at
http://www.ntmdt.com/manuals.
Feedback
Should you have any questions, which are not explained in the manuals, please contact the
Service Department of the company ([email protected]) and our engineers will give you
comprehensive answers. Alternatively, you can contact our staff on-line using the ask-on-
line service (http://www.ntmdt.com/online).

User’s documentation set
The following manuals are included into the user’s documentation set:
−Instruction Manual – is the guidance for the preparation of the instrument and other
equipment for operation on various techniques of Scanning Probe Microscopy. The
contents of the user’s documentation set may differ in dependence on the delivery set
of the instrument.
−SPM Software Reference Manual – is the description of the control program
interface functions, all commands and functions of the menu and, also a description of
the Image Analysis module and the Macro Language “Nova PowerScript”.
−Control Electronics. Reference Manual – is the guide to SPM controller,
Thermocontroller and Signal Access module.
Some equipment, which is described in the manuals, may not be included into your
delivery set. Read the specification of your contract for more information.
The manuals are updated regularly. Their latest versions can be found in the site of the
company, in the section “Customer support” (http://www.ntmdt.com/support).

NTEGRAAura Probe NanoLaboratory
NTEGRA Aura Probe NanoLaboratory
Table of Contents
1. BASIC INFORMATION ......................................................................................................................... 5
1.1. DESIGN ............................................................................................................................................. 5
1.1.1. Base unit............................................................................................................................6
1.1.2. Exchangeable mount and the positioning device...............................................................8
1.1.3. Vacuum system ..................................................................................................................9
1.2. BASIC SAFETY MEASURES.............................................................................................................. 12
1.3. OPERATING CONDITIONS ................................................................................................................ 14
1.4. STORAGE AND TRANSPORT INSTRUCTIONS..................................................................................... 15
2. SETUP AND INSTALLATION ............................................................................................................ 16
2.1. MAIN PROCEDURES......................................................................................................................... 16
2.2. VACUUM SYSTEM INSTALLATION ................................................................................................... 16
2.3. SPECIFICS OF THE OPTICAL VIEWING SYSTEM PREPARATION........................................................... 17
3. PREPARATION FOR MEASUREMENTS AND OPERATIONS.................................................... 19
3.1. PREPARATION OF THE INSTRUMENT AND MEASUREMENTS IN AIR ................................................... 19
3.2. PUMPING ........................................................................................................................................ 19
3.3. PERFORMING MEASUREMENTS........................................................................................................ 21
3.4. COMPLETION OF OPERATION........................................................................................................... 21
3.5. OPERATIONS IN GAS ENVIRONMENTS.............................................................................................. 21

Chapter 1. Basic information
1. Basic information
NTEGRA Aura PNL is represented by several configurations. This manual considers the
corresponding configuration intended for vacuum measurements, up to 10-2 Torr. When
operating in vacuum, measurement sensitivity is increased due to the higher Q-factor of the
cantilever and, in addition, the influence of adsorbats is minimized. If required, the
NTEGRA Aura PNL can be used to perform measurements in an atmosphere with
controlled gas composition.
1.1. Design
This manual describes the configuration of NTEGRA Aura intended for vacuum
measurements (Fig. 1-1).
The NTEGRA Aura configuration for vacuum measurements consists of the following
basic systems and units:
−base unit;
−measuremen unit:
−measuring head;
−exchangeable mount;
−scanner;
−heating stage;
−vacuum system:
−vacuum hood;
−vacuum pump;
−vacuum gauge with a power supply unit;
−vacuum components (valves, pipeline, coupling gaskets etc.);
−optical viewing system;
−vibration isolation system;
−control system:
−SPM controller;
−thermocontroller;
−computer.
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NTEGRAAura Probe NanoLaboratory
Fig. 1-1. NTEGRA Aura
1 – base unit; 2 – measuring head; 3 – vibration isolation system;
4 – optical viewing system; 5 – vacuum pump; 6 – vacuum gauge
Description of the basic parts of the NTEGRA PNL is provided in Performing
measurements and Control electronics. Specifics of the NTEGRA Aura configuration for
vacuum measurements are addressed in the item below.
1.1.1. Base unit
An overall view of the base unit is given in Fig. 1-1.
Fig. 1-2. Main components of the base unit
1 – exchangeable mount; 2 – stepper motor; 3 – temperature and humidity sensor;
4 – LC-display; 5 – vacuum system flange
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Chapter 1. Basic information
The base module accommodates the stepper motor 2, which provides the approach of the
sample to the probe. There is no function of manual approach of the sample in the vacuum
measurement configuration. Therefore control of the stepper motor is provided only
through the control program Nova.
The LC-display 4 contains information about temperature and humidity inside the vacuum
hood, which is measured by sensor 3.
Fig. 1-3 provides a diagram of connectors located in the base unit of the instrument.
Fig. 1-3. Diagram of connectors located in the base unit
There are the following female connectors for connecting devices mounted on the
base unit:
HEAD – for connecting measuring heads.
SCANNER – for connecting scanners. It is used for connecting either
exchangeable scanners or the measuring head scanner.
SCAN+SENSOR – for connecting scanners with built-in sensors. It is used for
connecting either exchangeable scanners or the measuring head
scanner.
Т°– for connecting the heater. It is used to connect heating stages, fluid
cells with heaters etc.
SM – for connecting the stepper motor.
AFAM – for connecting the sample holder to perform the AFAM technique.
BV – bias voltage feed line.
There are the following male connectors for connecting the base unit to the
controllers of the control system:
CONTROLLER 1 – for connecting the PNL controller;
CONTROLLER 2 - for connecting the PNL controller;
CONTROLLER T - for connecting the thermocontroller.
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NTEGRAAura Probe NanoLaboratory
1.1.2. Exchangeable mount and the positioning device
The exchangeable mount is set into the base unit of the instrument and is fastened with
three screws.
Fig. 1-4 illustrates the positions of the main parts of the exchangeable mount.
Fig. 1-4. Exchangeable mount
1, 2 – measuring head seats; 3 – mirror slots; 4 – positioning device;
5 – measuring head cables holder; 6 - approach system cylinder; 7 – grounding terminal;
8 – fastening screws for the base unit
The exchangeable mount has two types of seats (see positions 1, 2 in Fig. 1-4) used for
mounting measuring heads.
Slots 3 are used to hold an auxiliary mirror during operation with the optical viewing
system.
The positioning device 4 accommodates the sample holder (Fig. 1-5), the scanner or other
device with the sample fastened to it.
Sample
holder
Fig. 1-5. Sample holder installed in the positioning device
The positioning device is installed on the movable cylinder 6 of the approach system
(Fig. 1-4). This makes it possible to translate the sample in the vertical direction.
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Chapter 1. Basic information
Positioning in the XY plane is performed by means of the micrometer screws 1 (Fig. 1-6)
and the spring seats 2.
Fig. 1-6. Main components of the positioning device
1 – micrometer screws; 2 – spring clips
1.1.3. Vacuum system
The vacuum system contains:
−Vacuum hood;
−Vacuum pump;
−Vacuum gauges with a power supply unit;
−Vacuum components (valves, pipeline, coupling gaskets etc.).
Technical characteristics of the vacuum system:
Residual pressure 5×10-2 Torr;
Evacuation time 120 min (10-2 Torr).
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NTEGRAAura Probe NanoLaboratory
Vacuum hood
The vacuum hood (Fig. 1-7) provides enclosed volume for vacuum or controlled gas
environment measurements. In addition, it can be used as a shield against electromagnetic
fields, acoustic noise and temperature variations.
Fig. 1-7. Vacuum hood
There are two viewing windows in the top part of the hood. They are employed by the
optical viewing system to aim laser beam at the cantilever, to select an area of the sample
for measurement and to control the approach and scanning procedures. A viton seal is used
for sealing the hood.
Depending on the vacuum system connection scheme, the hardware set may include a
special adapter flange (Fig. 1-8). This flange is fitted to the base unit and is used for
connecting the pumping system and the pressure gauge. The adapter flange accommodates
flanges for connecting the vacuum pump (position 1 in Fig. 1-8) and the pressure gauge 2.
Fig. 1-8. Adapter flange
1 – flange for the vacuum pump; 2 – flange for the pressure gauge; 3 – viton seal
Viton seal 3 is used for sealing the adapter flange. Surfaces of viton gaskets are greased
with a thin layer of vacuum grease (APIEZON or similar). If required a new layer of
grease should be applied to the hood sealing.
*ATTENTION! Treat the sealing surfaces of the instrument with care. Protect
the viton gasket from accidental damage.
Depending on the instrument configuration, the vacuum system can be assembled
following two variants. These two variants are described in Fig. 1-9 and Fig. 1-10.
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