Omron V640-HAM11-ETN User manual

CIDRW SYSTEM
V640 SERIES
USER'S MANUAL
Cat. No. Z308-E1-02
AMPLIFIER UNITS
V640-HAM11-ETN
V640-HAM11-L-ETN
CIDRW HEADS
V640-HS61
V640-HS62

Introduction
Thank you for purchasing the V640-series CIDRW System.
Please observe the following points when operating the V640-series CIDRW System:
• Allow the CIDRW System to be installed and operated only by qualified specialist with a sufficient knowledge
of electrical systems.
• Please read and understand the contents of this manual before using the system.
• After reading this manual, store it in a convenient location for easy reference whenever necessary.

ÇÕǹÇ?Ç ëÊ 1èÕ ëÊ 2èÕ ëÊ 3èÕ ëÊ 4èÕ
INTRODUCTION
SECTION 1 SECTION 2 SECTION 3 SECTION 4 SECTION 5 SECTION 6 SECTION 7
Introduction
SECTION 1
SECTION 2
SECTION 3
SECTION 4
SECTION 5
SECTION 6
SECTION 7
Table of Contents/Precautions in Using the Products
Product Outline
Installation and Connections/Wiring
Preparing for Communications
Reading from/Writing to ID Tags
Browser Interface
Troubleshooting
CIDRW System
V640-HAM11-ETN Amplifier Unit
V640-HAM11-L-ETN Amplifier Unit
V640-HS61 CIDRW Head
V640-HS62 CIDRW Head
User's Manual
Appendix

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READ AND UNDERSTAND THIS DOCUMENT
Please read and understand this document before using the products. Please consult your OMRON representative if you
have any questions or comments.
WARRANTY
OMRON’s exclusive warranty is that the products are free from defects in materials and workmanship for a period of one
year (or other period if specified) from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-
INFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY
BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE
PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL
OTHER WARRANTIES, EXPRESS OR IMPLIED.
LIMITATIONS OF LIABILITY
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF
PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS
BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.
In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is
asserted.
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE
PRODUCTS UNLESS OMRON’S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED,
STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR
INAPPROPRIATE MODIFICATION OR REPAIR.
SUITABILITY FOR USE
THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR
RATED FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT
OR PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OMRON's safety rated
products.
OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of
products in the customer’s application or use of the product.
At the customer’s request, OMRON will provide applicable third party certification documents identifying ratings and
limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the
suitability of the products in combination with the end product, machine, system, or other application or use.
The following are some examples of applications for which particular attention must be given. This is not intended to be an
exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the
products:
• Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not
described in this document.
• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment,
amusement machines, vehicles, safety equipment, and installations subject to separate industry or government
regulations.
• Systems, machines, and equipment that could present a risk to life or property.
Please know and observe all prohibitions of use applicable to the products.
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY
WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND
THAT THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE
OVERALL EQUIPMENT OR SYSTEM.

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PERFORMANCE DATA
Performance data given in this document is provided as a guide for the user in determining suitability and does not
constitute a warranty. It may represent the result of OMRON’s test conditions, and the users must correlate it to actual
application requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability.
CHANGE IN SPECIFICATIONS
Product specifications and accessories may be changed at any time based on improvements and other reasons.
It is our practice to change model numbers when published ratings or features are changed, or when significant
construction changes are made. However, some specifications of the product may be changed without any notice. When
in doubt, special model numbers may be assigned to fix or establish key specifications for your application on your
request. Please consult with your OMRON representative at any time to confirm actual specifications of purchased
products.
DIMENSIONS AND WEIGHTS
Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are
shown.
ERRORS AND OMISSIONS
The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is
assumed for clerical, typographical, or proofreading errors, or omissions.
PROGRAMMABLE PRODUCTS
OMRON shall not be responsible for the user’s programming of a programmable product, or any consequence thereof.
COPYRIGHT AND COPY PERMISSION
This document shall not be copied for sales or promotions without permission.
This document is protected by copyright and is intended solely for use in conjunction with the product. Please notify us
before copying or reproducing this document in any manner, for any other purpose. If copying or transmitting this
document to another, please copy or transmit it in its entirety.

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Applicable Standards
The CIDRW System complies with the following international regulations and standards.
1. USA
FCC NOTICE
This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions:
(1) This device may not cause harmful interference.
(2) This device must accept any interference received, including interference that may cause undesired opera-
tion.
FCC WARNING
Changes or modifications not expressly approved by the party responsible for compliance could void the user's
authority to operate the equipment.
Do not remove the ferrite core (TDK-EPC Type ZCAT2749-0430C:V640-HS62) installed on the cables to suppress RF
interference.
FCC Part15 subpart B
NOTICE
This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to part15 of
the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the
equipment is operated in a commercial environment.
This equipment generates, uses and can radiate radio frequency energy and, if not installed and used in accordance
with the instructions, may cause harmful interference to radio communications. Operation of this equipment in a
residential area is likely to cause harmful interference in which case the user will be required to correct the interference
at his own expense.
CAUTION
This device must be professionally installed.
Amplifier Unit CIDRW Head
FCC Part 15 Subpart C
FCC ID: E4EV640HAM11
V640-HAM11-ETN V640-HS61
FCC Part 15 Subpart C
FCC ID: E4EV640HAM11L
V640-HAM11-L-ETN V640-HS62

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2. Europe
3. Canada
This device complies with RSS-Gen of IC (Industry Canada) Rules.
Operation is subject to the following two conditions: (1) this device may not cause harmful interference, and (2)
this device must accept any interference received, including interference that may cause undesired operation.
ICES-003
This class A digital apparatus complies with Canadian ICES-003.
Cet appareil numerique de la classe A est conforme a la norme NMB-003 du Canada.
Amplifier Unit CIDRW Head
(Radio and Telecommunications Terminal Equipment Directive 1999/5/EC) V640-HAM11-ETN V640-HS61
Radio:
EMC:
Safety:
EN 300 330-2
EN 301 489-1
EN 301 489-3
EN 61010-1
V640-HAM11-L-ETN V640-HS62
English Hereby, Omron, declares that this V640-HAM11-ETN / V640-HAM11-L-ETN is in compliance with the essential requirements and other rel-
evant provisions of
Directive 1999/5/EC.
Finnish Omron vakuuttaa täten että V640-HAM11-ETN / V640-HAM11-L-ETN tyyppinen laite on direktiivin 1999/5/EY oleellisten vaatimusten ja
sitä koskevien direktiivin muiden ehtojen mukainen.
Dutch Hierbij verklaart Omron dat het toestel V640-HAM11-ETN / V640-HAM11-L-ETN in overeenstemming is met de essentiële eisen en de
andere relevante bepalingen van richtlijh 1999/5/EG.
French Par la présente Omron déclare que lappareil V640-HAM11-ETN / V640-HAM11-L-ETN est conforme aux exigences essentielles et aux
autres dispositions pertinentes de la directive 1999/5/CE.
Swedish Härmed intygar Omron att denna V640-HAM11-ETN / V640-HAM11-L-ETN stär l överensstämmelse med de väsentliga egenskapskrav och
övriga relevanta bestämmelser som framgår av direktiv 1999/5/EG.
Danish Undertegnede Omron erklærer herved, at følgende udstyr V640-HAM11-ETN / V640-HAM11-L-ETN overholder de væsentlige krav og
øvrige relevante krav i direktiv 1999/5/EF.
German Hiermit erklärt Omron, dass sich dieser/diese/dieses V640-HAM11-ETN / V640-HAM11-L-ETN in Übereinstimmung mit den grundlegenden
Anforderungen und den anderen relevanten Vorschriften der Richtlinie 1999/5/EG befindet. (BMWi)
Greek ΜΕ ΤΗΝ ΠΑΡΟΥΣΑ Omron ΔΗΛΩΝΕΙ ΟΤΙV640-HAM11-ETN / V640-HAM11-L-ETN
ΣΥΜΜΟΡΦΩΝΕΤΑΙ ΠΡΟΣ ΤΙΣ ΟΥΣΙΩΔΕΙΣ ΑΠΑΙΤΗΣΕΙΣ ΚΑΙ ΤΙΣ ΛΟΙΠΕΣ
ΣΧΕΤΙΚΕΣ ΔΙΑΤΑΞΕΙΣ ΤΗΣ ΟΔΗΓΙΑΣ 1999/5/ΕΚ
Italian Con la presente Omron dichiara che questo V640-HAM11-ETN / V640-HAM11-L-ETN é conforme ai requisiti essenziali ed alle altre dispo-
sizioni pertinenti stabilite dalla direttiva 1999/5/CE.
Spanish Por medio de la presente Omron declara que el V640-HAM11-ETN / V640-HAM11-L-ETN cumple con los requisitos esenciales y cuales-
quiera otras disposiciones aplicables o exigibles de la Directiva 1999/5/CE.
Portuguese Omron declara que este V640-HAM11-ETN / V640-HAM11-L-ETN est conforme com os tequisitos essenciais e outras disposições da
Directiva 1999/5/CE.
Amplifier Unit CIDRW Head
IC ID: 850J-V64HAM11 V640-HAM11-ETN V640-HS61
IC ID: 850J-V64HM11L V640-HAM11-L-ETN V640-HS62

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4. China
5. Korea
6. Taiwan
7. Singapore
Amplifier Unit CIDRW Head
CMIIT ID: 2010DJ5964 V640-HAM11-ETN V640-HS61
CMIIT ID: 2010DJ5965 V640-HAM11-L-ETN V640-HS62
Amplifier Unit CIDRW Head
OMR-V640-HAM11-ETN V640-HAM11-ETN V640-HS61
OMR-V640-HAM11-L-E V640-HAM11-L-ETN V640-HS62
Amplifier Unit CIDRW Head
CCAB10LP461AT0 V640-HAM11-ETN V640-HS61
CCAB10LP462AT3 V640-HAM11-L-ETN V640-HS62
Amplifier Unit CIDRW Head
N2294-10 V640-HAM11-ETN V640-HS61
V640-HAM11-L-ETN V640-HS62

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●Definition of Precautionary Information
The following notation and alert symbols are used in this User's Manual to provide precautions required to
ensure safe usage of a V640-series CIDRW System. The safety precautions that are provided are extremely
important to safety. Always read and heed the information provided in all safety precautions.
The following signal words are used in this manual.
●Meanings of Alert Symbols
●Alert Statements in this Manual
Indicates a potentially hazardous situation which, if not avoided, will result in minor or
moderate injury, or may result in serious injury or death. Additionally there may be signif-
icant property damage.
Prohibition
Indicates general prohibitions for which there is no specific symbol.
The product is not designed or rated for ensuring the safety of persons.
Do not use it for such purposes.
Safety Precautions
WARNING
WARNING

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Please observe the following precautions for safe use of the products.
• Never use the product in an environment where combustible or explosivegas is present.
• Please separate from a high-pressure equipment and the power equipment to secure the safety of the operation and
maintenance.
• In the installation, please tighten the screw surely. (Recommended 1.2N·m)
• Please do not insert foreign bodies such as water and the wires from the space of the case.
• Please do not dismantle, repair or modify this product.
• Please process as industrial waste when you abandon this product.
• When you work on wiring and put on and take off cables, CIDRW head, please perform it after switching off this product.
• Provide enough space around this product for ventilation.
• Please avoid installing this product near the machinery (a heater, a transformer, large-capacity resistance) that has high
the calorific value. hen you felt abnormality to this product, and having switched it off.
Confirm the effects of radio waves on medical devices. The following guideline is from JAISA (Japan
Automatic Identification Systems Association).
This product is a reader-writer that uses radio waves for RFID equipment. The application
and location of this product may affect medical devices. The following precaution must be
observed in the application of the product to minimize the effects on medical devices.
Any person with an implanted medical device must keep the area where the device is
implanted at least 22 cm away from the antenna of a stationary or modular RFID device.
Precautions for Safe Use

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Please observe the following precautions to prevent failure to operate, malfunctions, or undesirable effects on
product performance.
■About installation Site
Do not install this product in the locations subject to the following conditions.
• Place where direct sunshine strikes.
• Place with corroded gas, dust, metallic powder, and salinity.
• Place with condensation due to rapid temperature fluctuations.
• Place with condensation due to high humidity.
• Place where vibration and impact more than being provided by specification are transmitted directly
to main body.
• Place with spray of water, oil, and chemical medicine.
• The working temperature is within the range stipulated in the specifications.
■About depositoty Site
• Please follow the save ambient temperature / humidity, and keep this product.
■About wiring
• Use the power supply voltage specified in this cocument.
• Ensure correct polarity when connecting to the +/- power supply terminals.
• Do not run high-voltage lines and power lines though the same conduit.
• To avoid static-induced failure, wear a wrist band or equivalent means to release a static charge
before touching a terminal or a signal line within a connector.
• When you put on and take off a CIDRW head, please do not add excessive power to a connector.
• Please connect the correct CIDRW head to the amplifier unit.
■About cleaning
• Use alcohol to clean this product.
• Never use an organic solvent such as thinner, benzene, acetone or kerosene, as it will attack resin
components or case coating.
■Power and Graound Cables
• Use an appropriate ground. An insufficient ground can affect this product operation or result in dam-
age to this product.
■About the communication range and time
• Do the communication test with Transponder in the installation environment because the metal,
noise and ambient temperature around CIDRW head damage to the communication range and time.
• Install CIDRW head and ID tag in the appropriate distance because the communication range can
change by the difference of ID tag specifications.
Precautions for Correct Use

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■About mounting
• This product communicates with ID Tags using the 134 kHZ frequency band. Some transceivers,
motors, monitoring equipment, and power supplies (power supply ICs) generate electrical waves
(noise) that interfere with communications with ID Tags, If you are using the product in the vicinity of
any of these devices, check the effect on communications in advance.
• In order to minimize the effects of noise, ground nearby metal bodies with a grounding resistance not
exceeding 100 ohms.
• When mounting CIDRW Heads, tighten the screws tightly.(Recommended 0.6N·m)
• When multiple CIDRW Heads are mounted next to each other, communications performance could
be impaired by mutual interference. Read and follow the information in this manual on mutual inter-
ference when installing multiple heads.
Refer to page 90.
■Screw Locking Adhesive
• Screw locking adhesive (screw lock) may cause deterioration and cracking of resin parts; do not use
it for screws in resin parts or anywhere where resin washers are used.
■Startup Precaution
Never turn OFF the power supply while the CIDRW Controller is starting, including when power is
turned ON, when the mode is changed, or when the CIDRW Controller is being reset. Doing so may
damage the CIDRW Controller.
■Application Precaution
Never turn OFF the power supply while setting the IP address, subnet mask, or Web password. Doing
so may damage the Amplifier Unit.

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Reading this Manual
Visual Aids
Indicates an explanation of a point that must be observed to ensure that the product is capable of its proper functions and perfor-
mance. Read this information carefully and follow the cautions. If the product is used incorrectly, data or the equipment itself
could be destroyed.
Indicates summaries of points of particular importance relating to product performance, e.g., points to note during operation and
advice on how to use the product.
Indicates the number of a page where related information can be found.
Indicates information for reference when you encounter a problem.
Indicator Status
The following symbols are used to show the status of the indicators on the CIDRW Controller and Amplifier
Units.
OFF
Flashing
ON

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MEMO

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Table of Contents
INTRODUCTION
Table of Contents
Table of Contents
Introduction
Applicable Standards 4
Applicable SEMI Standards 4
Safety Precautions 6
Precautions for Safe Use 7
Precautions for Correct Use 8
Reading this Manual 10
Table of Contents 11
SECTION 1 Product Outline 13
What Is a CIDRW System 14
Features 15
System Configuration 16
Component Names and Functions 17
Flowchart for Getting Started 20
SECTION 2 Installation and Connections/Wiring 23
Installation 24
Connections and Wiring 27
SECTION 3 Preparing for Communications 31
Setting the Communications Conditions for Amplifier Units 32
Communications Test 33
SECTION 4 Reading from/Writing to ID Tags 35
Command/Response Format 36
SECTION 5 Browser Interface 53
Browser Operation Windows 54
Window Configuration 55

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Table of Contents
SECTION 6 Troubleshooting 69
Troubleshooting 70
SECTION 7 Appendix 77
Specifications and Dimensions 78
Connection Examples 82
Characteristic Data According to Conditions of Use 83
ID Tag Memory Maps 113
Regular Inspection 114
ASCII Code Table 115
Protective Construction 116
SECTION 8 Revision History 118

SECTION 1
Product Outline
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CIDRW System
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SECTION 1
Product Outline
What Is a CIDRW System 16
Features 17
System Configuration 18
Component Names and Functions 19
Flowchart for Getting Started 22

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SECTION 1
What Is a CIDRW System
CIDRW System
User’s Manual
SECTION 1
Product Outline
What Is a CIDRW System
The CIDRW system writes data to, and reads data from, the carrier IDs (ID Tags) mounted on the carriers
(FOUP) in semiconductor manufacturing processes without contacting these ID Tags. CIDRW is the
abbreviation of Carrier ID Reader/Writer and this abbreviation is used throughout this manual.
Reading and writing information such as models, process instructions, lots, and inspection results to and from
ID Tags makes it possible to manage work instruction information from a host device.
Example: Management of information in semiconductor and wafer manufacturing processes
ID Tag
(holder is separate)
CIDRW Head
Reading and writing
information
• Model information
• Process instruction
information
• Completion
information
• Lot information
• Inspection results
Etc.
Host
Amplifier Unit
Ethernet hub
Recommended: W4S1-05B
(OMRON)

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Features
SECTION 1
Product Outline
Features
A V640-series CIDRW Head can be connected to a V640-HAM11-ETN or V640-HAM11-L-ETN Amplifier Unit
to read and write ID Tags manufactured by Texas Instruments (TI). Reading and writing is performed
according to commands from the host device.
■V640-HAM11-ETN
The V640-HAM11-ETN Amplifier Unit is equipped with Ethernet. The host device is connected through
a LAN cable and controls the Amplifier Units using TCP/IP. The Amplifier Units provide a Web browser
function that allows communications to be set and status to be managed using simple command com-
munications.
■V640-HAM11-L-ETN
The V640-HAM11-L-ETN Amplifier Unit is equipped with Ethernet and can be connected to a V640-
HS62 CIDRW Head to perform long-distance communications. The functions of the V640-HAM11-L-
ETN Amplifier Unit are the same as those of the V640-HAM11-ETN Amplifier Unit.

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SECTION 1
System Configuration
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User’s Manual
SECTION 1
Product Outline
System Configuration
V640-HAM11-ETN
V640-HAM11-L-ETN
If the IP address is set on the DIP switch, it will be in the form 192.168.1.@@@. The subnet mask is always 255.255.255.0
The IP address of the Amplifier Unit can be either set on this DIP switch or the desired IP address can be set in ROM. If pins 1 to
5 on the DIP switch are all turned OFF, the IP address that is set in ROM will be used.
CIDRW Head
V640-HS61
Amplifier Unit
V640-HAM11-ETN
Ethernet hub
Recommended: W4S1-05B(OMRON)
Host device
LAN cable LAN cable
Host device
CIDRW Head
V640-HS62
Amplifier Unit
V640-HAM11-L-ETN
Ethernet hub
Recommended: W4S1-05B(OMRON)
LAN cable LAN cable