Omron V640 User manual

V640 SERIES
Cat. No. Z218-E1-01A AMPLIFIER UNIT
V640-HAM12
CIDRW HEAD
V640-HS62
CIDRW CONTROLLER
V700-L22
LINK UNIT
V700-L11
USER’S MANUAL

Introduction
Thank you for purchasing the V640 Series CIDRW System.
Please observe the following points when operating the V640 Series:
• Please read and understand the content of this manual before using the system.
• After reading this manual, store it in a handy location for easy reference whenever necessary.

READ AND UNDERSTAND THIS DOCUMENT
Please read and understand this document before using the products. Please consult your OMRON representative if you
have any questions or comments.
WARRANTY
OMRON’s exclusive warranty is that the products are free from defects in materials and workmanship for a period of one
year (or other period if specified) from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-
INFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY
BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE
PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL
OTHER WARRANTIES, EXPRESS OR IMPLIED.
LIMITATIONS OF LIABILITY
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF
PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS
BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.
In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is
asserted.
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE
PRODUCTS UNLESS OMRON’S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED,
STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR
INAPPROPRIATE MODIFICATION OR REPAIR.
SUITABILITY FOR USE
THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR
RATED FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT
OR PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OMRON's safety rated
products.
OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of
products in the customer’s application or use of the product.
At the customer’s request, OMRON will provide applicable third party certification documents identifying ratings and
limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the
suitability of the products in combination with the end product, machine, system, or other application or use.
The following are some examples of applications for which particular attention must be given. This is not intended to be an
exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the
products:
• Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not
described in this document.
• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment,
amusement machines, vehicles, safety equipment, and installations subject to separate industry or government
regulations.
• Systems, machines, and equipment that could present a risk to life or property.
Please know and observe all prohibitions of use applicable to the products.
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY
WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND
THAT THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE
OVERALL EQUIPMENT OR SYSTEM.

PERFORMANCE DATA
Performance data given in this document is provided as a guide for the user in determining suitability and does not
constitute a warranty. It may represent the result of OMRON’s test conditions, and the users must correlate it to actual
application requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability.
CHANGE IN SPECIFICATIONS
Product specifications and accessories may be changed at any time based on improvements and other reasons.
It is our practice to change model numbers when published ratings or features are changed, or when significant
construction changes are made. However, some specifications of the product may be changed without any notice. When
in doubt, special model numbers may be assigned to fix or establish key specifications for your application on your
request. Please consult with your OMRON representative at any time to confirm actual specifications of purchased
products.
DIMENSIONS AND WEIGHTS
Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are
shown.
ERRORS AND OMISSIONS
The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is
assumed for clerical, typographical, or proofreading errors, or omissions.
PROGRAMMABLE PRODUCTS
OMRON shall not be responsible for the user’s programming of a programmable product, or any consequence thereof.
COPYRIGHT AND COPY PERMISSION
This document shall not be copied for sales or promotions without permission.
This document is protected by copyright and is intended solely for use in conjunction with the product. Please notify us
before copying or reproducing this document in any manner, for any other purpose. If copying or transmitting this
document to another, please copy or transmit it in its entirety.

ÇÕǹÇ?Ç ëÊ 1èÕ ëÊ 2èÕ ëÊ 3èÕ ëÊ 4èÕ
INTRODUCTION
SECTION 1 SECTION 2 SECTION 3 SECTION 4 SECTION 5 SECTION 6
Introduction
SECTION 1
SECTION 2
SECTION 3
SECTION 4
SECTION 5
SECTION 6
Table of Contents/Precautions in using the product
Product Outline
Installation and Connections/Wiring
Preparing for Communications
Reading from/Writing to ID Tags
Troubleshooting
Appendix
CIDRW System
V640-HAM12 Amplifier Unit
V640-HS62 CIDRW Head
V700-L22 CIDRW Controller
V700-L11 Link Unit
User's Manual

2
INTRODUCTION
Precautions in using the product
CIDRW System
User’s Manual
INTRODUCTION
Applicable Standards
The CIDRW System complies with the following standards.
1. FCC (USA Federal Communications Commission)
FCC Part 15 Subpart C
FCC ID: E4E6CYCIDV6400304
Note: Do not remove the ferrite core from the cable attached to the CIDRW Head.
2. Europe Radio and EMC Standards
The requirements of the EC/R&TTE Directive (Radio and Telecommunications Terminal Equipment Directive
1999/5/EC) have been met.
Radio: EN300330 (2001)
EMC: EN301489-3 (EN301489-1)
Safety: EN61010-1:1993+A2
Note: When using the CIDRW System in Europe, the connecting cable between the CIDRW and the DC
power supply must be 3 m or less.
Applicable SEMI Standards
The CIDRW System complies with the following SEMI standards.
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.

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CIDRW System
User’s Manual
INTRODUCTION
Precautions in using the product
INTRODUCTION
The following signal words are used in this manual.
The following alert symbol is used in this manual.
The following alert statements apply to the products in this manual. Each alert statement also appears at the
locations needed in this manual to attract your attention.
Please observe the following precautions for safe use of the products.
• Do not allow water to enter or insert wires through gaps in the case. This could cause fire or electric shock.
• In the event of a malfunction, stop using the product immediately, turn off the power, and consult your
OMRON dealer.
• Dispose of this product as industrial waste.
• Do not remove the CIDRW Head from the Amplifier Unit while power is being supplied.
Please observe the following precautions to prevent failure to operate, malfunctions, or undesirable effects on
product performance.
■Installation Site
Install the product at a location where:
• It is not exposed to direct sunlight.
• It is not exposed to corrosive gases, dust, metal chips, or salt.
• The working temperature is within the range stipulated in the specifications.
Meanings of Signal Words
!WARNING Indicates a potentially hazardous situation which, if not avoided, will result in minor
or moderate injury, or may result in serious injury or death. Additionally there may
be significant property damage.
Meanings of Alert Symbols
Indicates general prohibitions for which there is no specific symbol.
Alert Statements in this Manual
!WARNING
The product is not designed or rated for ensuring safety of persons.
Do not use it for such purposes.
Precautions for Safe Use
Precautions for Correct Use

4
INTRODUCTION
Precautions in using the product
CIDRW System
User’s Manual
INTRODUCTION
• There are no sudden variations in temperature (no condensation).
• The relative humidity is within the range stipulated in the specifications.
• No vibration or shock exceeding the values stipulated in the specifications is transmitted directly to
the body of the product.
• It is not subject to splashing water, oil, or chemical substances.
■Mounting
• This product communicates with ID Tags using the 134 kHz frequency band. Some transceivers,
motors, monitoring equipment, and power supplies (power supply ICs) generate electrical waves
(noise) that interfere with communications with ID Tags. If you are using the product in the vicinity of
any of these devices, check the effect on communications in advance.
• In order to minimize the effects of noise, ground nearby metal bodies with a grounding resistance not
exceeding 100 ohms.
• When mounting Amplifier Units, tighten the screws with a torque no greater than 1.2 N·m.
• When mounting CIDRW Heads, tighten the screws with a torque no greater than 0.6 N·m.
• When multiple CIDRW Heads are mounted next to each other, communications performance could
be impaired by mutual interference. Read and follow the information in this manual on mutual inter-
ference when installing multiple heads.
Refer to page 111.
■Power and Ground Cables
• Use the power supply voltage specified in this manual.
• Ensure correct polarity when connecting to the +/- power supply terminals.
• The ground terminals must be connected to a ground with a grounding resistance not exceeding 100
ohms.
• When using the CIDRW System in Europe, the connecting cable between the CIDRW and the DC
power supply must be 3 m or less.
■Wiring Work
• Always turn the power off before starting wiring work or connecting/disconnecting cables.
• Do not run high-voltage lines and power lines though the same conduit.
• To prevent damage by static electricity, wear a wrist strap or equivalent, and take measures to pre-
vent charging, before touching terminal components or parts inside connectors.
■Screw Locking Adhesive
• Screw locking adhesive (screw lock) may cause deterioration and cracking of resin parts; do not use
it for screws in resin parts or anywhere where resin washers are used.
■Cleaning
• Use standard grade alcohol.
• Do not use organic solvents such as thinner or benzene.

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CIDRW System
User’s Manual
INTRODUCTION
Precautions in using the product
INTRODUCTION
■Communications with the Host Device
Communicate with the host device only after confirming that the CIDRW Controller has started. Also,
unstable signals may occur at the host interface when the CIDRW Controller is started. When initializ-
ing operation, clear the reception buffer at the host device or take other suitable methods to clear
unwanted signals.
■Startup Precaution
Never turn OFF the power supply while the CIDRW Controller is starting, including when power is
turned ON, when the mode is changed, or when the CIDRW Controller is being reset. Doing so may
damage the CIDRW Controller.

6
INTRODUCTION
Precautions in using the product
CIDRW System
User’s Manual
INTRODUCTION
To Users of Model V700-L21
The V700-L22 is the CIDRW controller complying with the 2003 edition of the SEMI E99 standard. A V700-
L21 cannot simply be replaced with a V700-L22. If you wish to replace a V700-L21, bring the CIDRW
controller control program into line with the new stipulations as described in this manual.
■Main Points of Difference with the V700-L21
• Addition of support attributes
The CIDRW attributes defined as CarrierIDOffset and CarrierIDlength in the 2003 edition of the SEMI
E99 standard have been added.
With the V700-L22, the user can now specify as attributes the position of the MID in the ID tag, and the
data length.
Refer to Support Attributes 130.
• Changes in message specifications
The 2003 edition of SEMI E99 adds a format definition for the message specification data item MID.
The specifications of the data item MID have changed in the V700-L22.
Refer to Message Specifications 66.
• Addition of a data area access function
The V700-L22 has added a function for specifying ID tag data area access destinations as offset
addresses.
The V700-L21 divides the data area into 8-byte units called segments, and reads and writes data to
each segment. Besides this, the V700-L22 also allows you to specify offset addresses referenced to
the first address in the ID tag data area, so that data can be read and written in units of one byte.
Refer to Message Specifications 66.
• Replacing a V700-L21 with a V700-L22
The following settings are required to replace a V700-L21 with a V700-L22.
(1) Set the attributes CarrierIDOffset and CarrierIDlength.
Set CarrierIDOffset to 0 and for CarrierIDlength set the data length of the data item MID specified
by the ID write request (S18F11). If there is a mismatch between the CarrierIDlength attribute and
the MID length in the ID write request (S18F11), a CE (communications error) occurs, and no data
is written.
(2) Change the MID to data comprising displayable ASCII characters only.
With the V700-L22, data that includes undisplayable ASCII characters cannot be read with an ID
read request (S18F9); an EE - execution error - occurs. Data including undisplayable ASCII char-
acters in the MID cannot be specified with an ID write request (S18F11).
With the V700-L21, the MID to be read or written is consigned to an area fixed at 16 bytes. If the specified data length in
the ID write request (S18F11) is less than 16 bytes, NULs are added in internal processing to make the total up to 16
bytes. In contrast, with the V700-L22, the accessible MID data occupies only the area specified by the attributes Car-
rierIDOffset and CarrierIDlength. Remember that data can only be read or written in the area specified by the attributes.

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CIDRW System
User’s Manual
INTRODUCTION
Precautions in using the product
INTRODUCTION
Editor’s Note
Visual Aids
Indicates an explanation of a point that must be observed to ensure that the product is capable of its proper functions and perfor-
mance. Read this information carefully and follow the cautions. If the product is used incorrectly, data or the equipment itself
could be destroyed.
Indicates summaries of points of particular importance relating to product performance, e.g. points to note during operation and
advice on how to use the product.
Indicates the number of a page where related information can be found.
Indicates information for reference when you encounter a problem.
Indicator Statuses
The following symbols are used to show the status of the indicators on the CIDRW Controller and Amplifier
Units.
OFF
Flashing
ON

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INTRODUCTION
Precautions in using the product
CIDRW System
User’s Manual
INTRODUCTION
MEMO

9
CIDRW System
User’s Manual
INTRODUCTION
Table of Contents
INTRODUCTION
Table of Contents
Table of Contents
Introduction 0
Applicable Standards 2
Applicable SEMI Standards 2
Precautions for Safe Use 3
Precautions for Correct Use 3
To Users of Model V700-L21 6
Editor’s Note 7
Table of Contents 9
SECTION 1 Product Outline 11
What is a CIDRW System? 12
Features 13
System Configuration 14
Component Names and Functions 15
Flowchart for Getting Started 19
SECTION 2 Installation and Connections/Wiring 21
Installation 22
Connections and Wiring 27
SECTION 3 Preparing for Communications 43
Set the Communications Conditions for the CIDRW Controller 44
Set the Communications Conditions for Amplifier Units 57
Set the Communications Conditions for Link Units 59
Communications Test 61
SECTION 4 Reading from/Writing to ID Tags 65
When SECS is Used 66
When SECS is Not Used 77

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INTRODUCTION
Table of Contents
CIDRW System
User’s Manual
INTRODUCTION
Table of Contents
SECTION 5 Troubleshooting 87
When SECS is Used 88
When SECS is Not Used 94
SECTION 6 Appendix 99
Specifications and Dimensions 100
System Configuration Examples 104
Characteristic Data depending on Conditions of Use 106
Data Segment Area 125
Regular Inspection 126
SECS Protocol Specifications 127
ASCII Code Table 132
Protective Construction 133

SECTION 1
Product Outline
11
CIDRW System
User’s Manual
SECTION 1
Product Outline
What is a CIDRW System? 12
Features 13
System Configuration 14
Component Names and Functions 15
Flowchart for Getting Started 19

12
SECTION 1
What is a CIDRW System?
CIDRW System
User’s Manual
SECTION 1
Product Outline
What is a CIDRW System?
The CIDRW system writes data to, and reads data from, the carrier IDs (ID Tags) mounted on the carriers
(FOUP) in semiconductor manufacturing processes without contacting these ID Tags. CIDRW is the
abbreviation of Carrier ID Reader/Writer and this abbreviation is used throughout this manual.
Reading and writing information such as models, process instructions, lots, and inspection results to and from
ID Tags makes it possible to manage work instruction information from a host device.
Example: Management of information in semiconductor and wafer manufacturing processes
ID Tag
(holder is separate)
CIDRW Head
Reading and writing
information
• Model information
• Process instruction
information
• Completion
information
• Lot information
• Inspection results
Etc.
Host
Amplifier Unit
CIDRW Controller

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CIDRW System
User’s Manual
SECTION 1
Features
SECTION 1
Product Outline
Features
■CIDRW Systems that Conform to SEMI Standards (SEMI E99, E5, E4)
List of Applicable Standards
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.
Host
SECS I/II
CIDRW Controller
V700-L22
Amplifier Unit
V640-HAM12
CIDRW Head
V640-HS62
ID Tag
RI-TRP-DR2B/
RI-TRP-WR2B
(Made by Texas
Instruments)
CIDRW System Conforming to SEMI Standards
RS-232C RS-232C

14
SECTION 1
System Configuration
CIDRW System
User’s Manual
SECTION 1
Product Outline
System Configuration
When SECS Is Used
Communication with the host device is possible using the SECS protocol.
When SECS Is Not Used
Communications with the host device follow the OMRON proprietary protocol.
The Amplifier Units are connected directly to the host device without using a CIDRW Controller.
Refer to the following page for specific connection examples.
page 104
Using Link Units (V700-L11) to make connections makes it possible to remove and replace just the relevant
Amplifier Unit while leaving the power to the CIDRW system on in the event of a failure or during mainte-
nance.
These are antennae for
reading the carrier IDs
from the ID Tags and
writing the carrier IDs.
These are units that
control a CIDRW Head.
This is e.g. a host,
or equipment con-
troller.
CIDRW Head
V640-HS62
Amplifier Unit
V640-HAM12
CIDRW Controller
V700-L22
Host
Multiple Amplifier Units
are controlled in
response to commands
(SECS) from the host
device.
RS-232C
SECS I/II RS-232C
These are antennae for
reading the carrier IDs
from the ID Tags and
writing the carrier IDs.
These are units that
control a CIDRW Head.
This is e.g. a host,
or equipment con-
troller.
CIDRW Head
V640-HS62
Amplifier Unit
V640-HAM12
Host
RS-232C
OMRON proprietary protocol

15
CIDRW System
User’s Manual
SECTION 1
Component Names and Functions
SECTION 1
Product Outline
Component Names and Functions
CIDRW Controller V700-L22
No. Name Function
1 Power indicator (green) An LED that indicates whether the power is ON or OFF. Lit while the power is ON.
2 OPERATING indicator (green) Lit while the CIDRW system status model is operating.
3 ALARMS indicator (green) Lit when the status in "Alarm Status" of the CIDRW system is Alarm (1).
4 BUSY indicator (green) Lit when the status in "Operational Status" of the CIDRW system is BUSY.
5 ERROR indicator (red) When a processing error is detected (when SSACK is other than NO), this indicator is lit
for 50 ms.
6 24 VDC power supply termi-
nals
(with cover)
Connect to the 24 VDC power supply.
7 Frame ground terminal
(with cover)
The grounding wire is connected here. (Ground to 100 Ωor less)
8 MODE switch Used to select the mode of operation.
Refer to page 44.
0: Normal Operation mode. When mounting the Controller, set the switch to this posi-
tion.
3: Setting mode, selected to set information such as the communication conditions.
When the switch on the bottom face of the Controller cannot be accessed, the opera-
tion mode can be changed from the host device while the switch is left at the 0 set-
ting.
1 - 2, 4 - 7: Setting prohibited
9 RESET switch Restarts the CIDRW Controller.
10 SECS port Port for connecting the host device. Conforms to SECS I/II.
11 ID port An Amplifier Unit or Link Unit is connected here.
12 Maintenance port (with cover) Not used. Do not remove the cover.
RS-232C
SECS ID MAINTENANNCE

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SECTION 1
Component Names and Functions
CIDRW System
User’s Manual
SECTION 1
Product Outline
Amplifier Unit V640-HAM12
No. Name Function
1 Dedicated power supply con-
nector
Connect to the 24 VDC power supply.
2 RS-485 port When using multiple CIDRW Heads, connect this to the RS-485 port of another Amplifier
Unit or to the multi-connection port of a Link Unit.
3 RS-232C port Connected to a CIDRW Controller or a host device.
Uses the OMRON proprietary communications protocol.
4 RUN indicator (green) Turns ON when the Amplifier Unit is in normal operation.
5 COMM indicator (yellow) Turns ON during communications with the host device or during communications with an
ID Tag.
6 NORM indicator (green) Turns ON when the communications finish with no error.
7 ERROR indicator (red) Turns ON when an error occurs during communication with the host device, or during
communication with an ID Tag.
8 CIDRW Head connection port A CIDRW Head is connected here.
9 Setting DIP switches Used to set the node number, the communications conditions, and the RS-485 terminal
resistance.
V640-HAM12
MADE IN JAPAN
CIDRW HEADDIP SW
24VDC GR10W
RS-485
AMPLIFIER UNIT
RUN
COMM
NORM
ERROR
RS-232C