ONTRAK II CE Series User manual

OnTrak DSS-200
Series II CETM
Installation
Document 20-0200-017-004 (Clean Room), Revision C
Document 20-0200-018-004 (Paper), Revision C
Software Version 2.0.1a
Revision C
February 1999
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The information contained in this document is subject to change without notice.
OnTrak Systems, Incorporated makes no warranty of any kind with regard to this
material including, but not limited to, the implied warranties of merchantability
and fitness for a particular purpose. OnTrak Systems, Incorporated shall not be
liable for errors contained herein or for incidental or consequential damages in
connection with the furnishing, performance, or use of this material.
Copyright 1999 by OnTrak Systems, Incorporated
All rights reserved.
This document contains proprietary information which is protected by copyright.
All rights are reserved. No part of this document may be photocopied,
reproduced, or translated to another language without the prior written consent of
OnTrak Systems, Incorporated.
The following are trademarks of OnTrak Systems, Incorporated and may be used
to identify OnTrak Systems, Incorporated products: OnTrak Systems, Inc.TM,
TelepartsTM, DSS-150TM, DSS-200TM, DSS-200 Series IITM, DSS-200 Series IIiTM,
EnvoyTM, HF EnvoyTM, CMC-200TM, SynergyTM, and IntegraTM.
SOFTWARE LICENSE
The system software, whether on disk or embedded in ROM, (the “Software”) and
related documentation are licensed to the Corporation that originally purchased
this equipment (The Corporation). OnTrak Systems, Inc. retains the title to the
Software. This license allows the Corporation to use the Software on a single
OnTrak Systems, Inc. system. The Corporation may transfer the Software provided
the party reads and agrees to accept the terms and conditions of this license.
RESTRICTIONS
The Software contains copyrighted material, trade secrets, and other proprietary
information, and in order to protect them the Corporation may not decompile,
reverse engineer, disassemble, or otherwise reduce the Software to human-
perceivable form. The Corporation may not modify, network, rent, lease, loan, sell,
distribute, or create derivative works based upon this Software in whole or in part.
The Software may not be electronically transferred from one computer to another
over a network.
TERMINATION
This license is in effect until terminated. This License will terminate immediately
without notice if the Corporation fails to comply with any provision of this License.
CONTROLLING LAW
This license shall be governed and construed in accordance with the laws of the
State of California.

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PREFACE
This manual is intended for the facility engineer, technician or anyone involved in the
installation of this equipment. The manual recommends system installation procedures,
facility requirements and safety precautions required to install the DSS-200 Series IICE. It
contains the following information:
Introduction A general overview of the manual and how to use it.
Safety Discusses the safety issues that apply during unpacking and installing this system.
Site Preparation Defines the facility requirements required to install and operate the system.
Unpacking Explains the steps required to unpack and inspect the system for damage.
Installation Describes the detailed steps required to install and hook up the system.
Technical Bulletins This section is provided to store OnTrak technical bulletins.
Facility Layout Contains the facility layout drawings.
Lam Research Corporation strives to continually improve products and often creates
custom configurations for our customers on special request. Additional information is
available from Customer Service (Field Service) or through a specially tailored instruction
program.

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REORDER & REVISION HISTORY
REORDER INSTRUCTIONS
Toreorder the complete three volume set of Series II CE System manuals,order the
following:
20-0200-018 PaperManuals
20-0200-017 Clean Room Manuals
Toreorder one of the manuals in the Series II CE System manual set, order the following:
20-0200-018-001 Operation Manual (paper manual)
20-0200-017-001 Operation Manual (clean room manual)
20-0200-018-003 Documentation Manual (paper manual)
20-0200-017-003 Documentation Manual (clean room manual)
20-0200-018-004 Installation Instructions (paper manual)
20-0200-017-004 Installation Instructions (clean roommanual)
CD ROM Electronic copies of the Series IICE system manuals can be obtained by ordering p/n 20-
0200-218. Electronic copies are provided as .PDF files and can be viewed using the
included (free)Adobe Acrobat Reader.
In the US and Canada, direct all orders and inquires formanuals to Lam Research Corporation
at 1-800-LAM-HELP or (1-800-526-4357). Outside the US, directly contact yourlocal Lam
Customer Service center.

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REVISION HISTORY
Release Date October, 1996
Description Release of DSS-200 Series II, Installation Manual, Revision A
Software Level: 1.0.1
Part Numbers: 20-0200-018-004 Rev. A, Standard Version
20-0200-017-004 Rev. A, Clean Room Version
Release Date January, 1998
Description Release of DSS-200 Series II, Installation Manual, Revision B
Software Level: 1.3.0
Part Numbers: 20-0200-018-004 Rev. B, Standard Version
20-0200-017-004 Rev. B, Clean Room Version
Release Date March, 1999
Description Release of DSS-200 Series II CE, Installation Manual, Revision C
Software Level: 2.0.1a
Part Numbers: 20-0200-018-004 Rev. C, Standard Version
20-0200-017-004 Rev. C, Clean Room Version

Manual Change Request
Please provide the information requested below to assist us in correcting mistakes in the manual. Send the form
to Product Support Department, Dept. OT677, CMP/Clean Division, Lam Research Corporation, 47131 Bayside
Parkway, Fremont, CA94538or fax to [phone].
Part 1Contact Information (Who are you?)
Part 2 System Information (What system do you use?)
Part 3 Manual Information (What manual are you commenting on?)
Part 4 Corrections (What needs to be changed in the manual?) (Please provide support documentation.)
Part 5 Comments (What elsedo you want to say?)
Name: _____________________________________________Title: __________________________Date: ____________
Address: ___________________________________________Phone: ________________________
____________________________________________Fax: ___________________________
____________________________________________E-mail:
_________________________
Product:❏ Series II CE _____________________ Software: ______________
❏ Synergy _____________________
❏ Integra _____________________
❏ Other _________________________Top LevelBOM:________________
Title: ____________________________________________Part number: _______________________ Revision : ______

TABLE OF CONTENTS.
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TABLE OF CONTENTS
REORDER & REVISION HISTORY .............................................................................IV
TABLE OF CONTENTS .........................................................................VII
INTRODUCTION ....................................................................................1-1
HOW TO USE THE INSTALLATION MANUAL .......................................................1-1
SAFETY ....................................................................................................2-1
INTRODUCTION ...........................................................................................................2-1
SAFETY NOTATIONS ..................................................................................................2-2
GENERAL SAFETY PROVISIONS ..............................................................................2-4
SAFETY PRECAUTIONS .............................................................................................2-6
ELECTRICAL SAFETY ................................................................................................. 2-6
DSS-200 TYPE 3 AND TYPE 4 TASK HAZARDS......................................................... 2-8
SAFETY INTERLOCKS ................................................................................................. 2-8
EMERGENCY MACHINE OFF ...................................................................................... 2-9
MAINTENANCE ISSUES............................................................................................. 2-10
GENERAL OPERATIONAL SAFETY............................................................................ 2-11
ERGONOMIC ISSUES ................................................................................................. 2-12
CHEMICAL SAFETY USING AMMONIUM HYDROXIDE ...................................2-12
MATERIAL SAFETY DATA SHEET (MSDS).............................................................. 2-12
HEALTH EFFECTS AND FIRST AID ........................................................................... 2-13
STORAGE AND DISPOSAL......................................................................................... 2-16
SPILL AND LEAK PROCEDURES................................................................................ 2-17
PROTECTIVE EQUIPMENT......................................................................................... 2-17
SITE PREPARATION .............................................................................3-1
FACILITY REQUIREMENTS .......................................................................................3-1
PROCESS SUPPLY QUALITY REQUIREMENTS .....................................................3-3
FACILITY CONNECTIONS .........................................................................................3-4
PLUMBING FACILITY HOOKUP................................................................................... 3-4
ELECTRICAL FACILITY HOOKUP................................................................................ 3-4
UNPACKING ...........................................................................................4-1
PACKAGING AND INSPECTION ...............................................................................4-1
WARNING DEVICES.................................................................................................... 4-1
REMOVING THE CRATE.............................................................................................. 4-3
POWER CORDS ........................................................................................................... 4-4
LOCKOUT AND DOOR KEYS....................................................................................... 4-4

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INSTALLATION PROCEDURE ...........................................................5-1
REMOVING THE COMPONENT RESTRAINTS ....................................................... 5-1
INSTALLATION SEQUENCE ..................................................................................... 5-2
CUSTOMER (INSTALLATION) ENGINEER ............................................................. 5-6
FACILITY CONFIRMATION REPORT - SERIES II CE................................................... 5-7
INSTALLATION START-UP ................................................................6-1
PREREQUISITES .......................................................................................................... 6-1
MATERIALS ............................................................................................................... 6-3
EQUIPMENT ............................................................................................................... 6-4
INSTALLATION START-UP CHECKLIST ................................................................ 6-6
RELIABILITY TESTING TERMS................................................................................. 6-20
DETAIL INSTALLATION PROCEDURE ................................................................. 6-21
APPENDIX .........................................................................................APX-1
FORMS CONTENTS ............................................................................................... APX-1
PROCEDURES CONTENTS .................................................................................. APX-1
FACILITY CONFIRMATION REPORT-SERIES II CE .........................................FOR-1
INSTALLATION REPORT ......................................................................................FOR-5
INSTALLATION DEFICIENCY LOG SHEET .......................................................FOR-7
PARTS REQUIREMENTS FOR THIS INSTALLATION ......................................FOR-8
SYSTEM OFFSETS -SERIES II ..............................................................................FOR-9
SMOOTH WAFER TRAVEL CHECKLIST ..........................................................FOR-11
PROCESS OF RECORD .........................................................................................FOR-17
PARTICLE NEUTRALITY DATA COLLECTION FORM .................................FOR-21
ENVIRONMENTAL DATA COLLECTION FORM ............................................FOR-22
WATER TEST .........................................................................................................FOR-22
MEGASONIC TEST ...............................................................................................FOR-22
CHEMICAL DATA COLLECTION FORM ..........................................................FOR-23
NH4OH ....................................................................................................................FOR-23
MEGASONIC TEST ...............................................................................................FOR-23
ENVIRONMENTAL DATA COLLECTION FORM ............................................FOR-24
AIR TEST ................................................................................................................FOR-24
STATION-1 BRUSH MATRIX DATA FORM .....................................................FOR-25
STATION-2 BRUSH MATRIX DATA FORM .....................................................FOR-26
DSS-200 PROCESS INSTALLATION DATA TABLE ........................................FOR-27
INSTALLATION START UP PROCEDURE CHECKLIST .................................FOR-31
SYSTEM WARRANTY ACTIVATION ................................................................FOR-33
DI WATER LINE PURGE ................................................................PUR-1
EQUIPMENT AND MATERIAL REQUIREMENTS .............................................PUR-1
PURGE SETUP .........................................................................................................PUR-2
PURGE PROCEDURE .............................................................................................PUR-3

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USING HYDROGEN PEROXIDE................................................................................ PUR-3
USING AMMONIUM HYDROXIDE............................................................................ PUR-3
NH4OH USAGE GUIDELINES .................................................NH4OH-1
BRUSH HEIGHT OPTIMIZATION ...............................................OPT-1
SYSTEM BASELINE DI WATER .......................................................................... OPT-3
MEGASONIC STATION BASELINE ..................................................................... OPT-4
SYSTEM BASELINE AMMONIUM HYDROXIDE ............................................. OPT-5
ACCEPTANCE PROCEDURE ......................................................... DIP-1
POST CMP ILD OXIDE CLEANING EVALUATION ........................................... DIP-1
SLURRY DIP TEST .................................................................................................. DIP-3
TECHNICAL BULLETINS ...............................................................TSB-1
FACILITIES DRAWINGS ................................................................DOC1

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