ONTRAK II CE Series User manual

OnTrak DSS-200
Series II CETM
Installation
Document 20-0200-017-004 (Clean Room), Revision C
Document 20-0200-018-004 (Paper), Revision C
Software Version 2.0.1a
Revision C
February 1999
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The information contained in this document is subject to change without notice.
OnTrak Systems, Incorporated makes no warranty of any kind with regard to this
material including, but not limited to, the implied warranties of merchantability
and fitness for a particular purpose. OnTrak Systems, Incorporated shall not be
liable for errors contained herein or for incidental or consequential damages in
connection with the furnishing, performance, or use of this material.
Copyright 1999 by OnTrak Systems, Incorporated
All rights reserved.
This document contains proprietary information which is protected by copyright.
All rights are reserved. No part of this document may be photocopied,
reproduced, or translated to another language without the prior written consent of
OnTrak Systems, Incorporated.
The following are trademarks of OnTrak Systems, Incorporated and may be used
to identify OnTrak Systems, Incorporated products: OnTrak Systems, Inc.TM,
TelepartsTM, DSS-150TM, DSS-200TM, DSS-200 Series IITM, DSS-200 Series IIiTM,
EnvoyTM, HF EnvoyTM, CMC-200TM, SynergyTM, and IntegraTM.
SOFTWARE LICENSE
The system software, whether on disk or embedded in ROM, (the “Software”) and
related documentation are licensed to the Corporation that originally purchased
this equipment (The Corporation). OnTrak Systems, Inc. retains the title to the
Software. This license allows the Corporation to use the Software on a single
OnTrak Systems, Inc. system. The Corporation may transfer the Software provided
the party reads and agrees to accept the terms and conditions of this license.
RESTRICTIONS
The Software contains copyrighted material, trade secrets, and other proprietary
information, and in order to protect them the Corporation may not decompile,
reverse engineer, disassemble, or otherwise reduce the Software to human-
perceivable form. The Corporation may not modify, network, rent, lease, loan, sell,
distribute, or create derivative works based upon this Software in whole or in part.
The Software may not be electronically transferred from one computer to another
over a network.
TERMINATION
This license is in effect until terminated. This License will terminate immediately
without notice if the Corporation fails to comply with any provision of this License.
CONTROLLING LAW
This license shall be governed and construed in accordance with the laws of the
State of California.

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PREFACE
This manual is intended for the facility engineer, technician or anyone involved in the
installation of this equipment. The manual recommends system installation procedures,
facility requirements and safety precautions required to install the DSS-200 Series IICE. It
contains the following information:
Introduction A general overview of the manual and how to use it.
Safety Discusses the safety issues that apply during unpacking and installing this system.
Site Preparation Defines the facility requirements required to install and operate the system.
Unpacking Explains the steps required to unpack and inspect the system for damage.
Installation Describes the detailed steps required to install and hook up the system.
Technical Bulletins This section is provided to store OnTrak technical bulletins.
Facility Layout Contains the facility layout drawings.
Lam Research Corporation strives to continually improve products and often creates
custom configurations for our customers on special request. Additional information is
available from Customer Service (Field Service) or through a specially tailored instruction
program.

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REORDER & REVISION HISTORY
REORDER INSTRUCTIONS
Toreorder the complete three volume set of Series II CE System manuals,order the
following:
20-0200-018 PaperManuals
20-0200-017 Clean Room Manuals
Toreorder one of the manuals in the Series II CE System manual set, order the following:
20-0200-018-001 Operation Manual (paper manual)
20-0200-017-001 Operation Manual (clean room manual)
20-0200-018-003 Documentation Manual (paper manual)
20-0200-017-003 Documentation Manual (clean room manual)
20-0200-018-004 Installation Instructions (paper manual)
20-0200-017-004 Installation Instructions (clean roommanual)
CD ROM Electronic copies of the Series IICE system manuals can be obtained by ordering p/n 20-
0200-218. Electronic copies are provided as .PDF files and can be viewed using the
included (free)Adobe Acrobat Reader.
In the US and Canada, direct all orders and inquires formanuals to Lam Research Corporation
at 1-800-LAM-HELP or (1-800-526-4357). Outside the US, directly contact yourlocal Lam
Customer Service center.

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REVISION HISTORY
Release Date October, 1996
Description Release of DSS-200 Series II, Installation Manual, Revision A
Software Level: 1.0.1
Part Numbers: 20-0200-018-004 Rev. A, Standard Version
20-0200-017-004 Rev. A, Clean Room Version
Release Date January, 1998
Description Release of DSS-200 Series II, Installation Manual, Revision B
Software Level: 1.3.0
Part Numbers: 20-0200-018-004 Rev. B, Standard Version
20-0200-017-004 Rev. B, Clean Room Version
Release Date March, 1999
Description Release of DSS-200 Series II CE, Installation Manual, Revision C
Software Level: 2.0.1a
Part Numbers: 20-0200-018-004 Rev. C, Standard Version
20-0200-017-004 Rev. C, Clean Room Version

Manual Change Request
Please provide the information requested below to assist us in correcting mistakes in the manual. Send the form
to Product Support Department, Dept. OT677, CMP/Clean Division, Lam Research Corporation, 47131 Bayside
Parkway, Fremont, CA94538or fax to [phone].
Part 1Contact Information (Who are you?)
Part 2 System Information (What system do you use?)
Part 3 Manual Information (What manual are you commenting on?)
Part 4 Corrections (What needs to be changed in the manual?) (Please provide support documentation.)
Part 5 Comments (What elsedo you want to say?)
Name: _____________________________________________Title: __________________________Date: ____________
Address: ___________________________________________Phone: ________________________
____________________________________________Fax: ___________________________
____________________________________________E-mail:
_________________________
Product:❏ Series II CE _____________________ Software: ______________
❏ Synergy _____________________
❏ Integra _____________________
❏ Other _________________________Top LevelBOM:________________
Title: ____________________________________________Part number: _______________________ Revision : ______

TABLE OF CONTENTS.
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TABLE OF CONTENTS
REORDER & REVISION HISTORY .............................................................................IV
TABLE OF CONTENTS .........................................................................VII
INTRODUCTION ....................................................................................1-1
HOW TO USE THE INSTALLATION MANUAL .......................................................1-1
SAFETY ....................................................................................................2-1
INTRODUCTION ...........................................................................................................2-1
SAFETY NOTATIONS ..................................................................................................2-2
GENERAL SAFETY PROVISIONS ..............................................................................2-4
SAFETY PRECAUTIONS .............................................................................................2-6
ELECTRICAL SAFETY ................................................................................................. 2-6
DSS-200 TYPE 3 AND TYPE 4 TASK HAZARDS......................................................... 2-8
SAFETY INTERLOCKS ................................................................................................. 2-8
EMERGENCY MACHINE OFF ...................................................................................... 2-9
MAINTENANCE ISSUES............................................................................................. 2-10
GENERAL OPERATIONAL SAFETY............................................................................ 2-11
ERGONOMIC ISSUES ................................................................................................. 2-12
CHEMICAL SAFETY USING AMMONIUM HYDROXIDE ...................................2-12
MATERIAL SAFETY DATA SHEET (MSDS).............................................................. 2-12
HEALTH EFFECTS AND FIRST AID ........................................................................... 2-13
STORAGE AND DISPOSAL......................................................................................... 2-16
SPILL AND LEAK PROCEDURES................................................................................ 2-17
PROTECTIVE EQUIPMENT......................................................................................... 2-17
SITE PREPARATION .............................................................................3-1
FACILITY REQUIREMENTS .......................................................................................3-1
PROCESS SUPPLY QUALITY REQUIREMENTS .....................................................3-3
FACILITY CONNECTIONS .........................................................................................3-4
PLUMBING FACILITY HOOKUP................................................................................... 3-4
ELECTRICAL FACILITY HOOKUP................................................................................ 3-4
UNPACKING ...........................................................................................4-1
PACKAGING AND INSPECTION ...............................................................................4-1
WARNING DEVICES.................................................................................................... 4-1
REMOVING THE CRATE.............................................................................................. 4-3
POWER CORDS ........................................................................................................... 4-4
LOCKOUT AND DOOR KEYS....................................................................................... 4-4

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INSTALLATION PROCEDURE ...........................................................5-1
REMOVING THE COMPONENT RESTRAINTS ....................................................... 5-1
INSTALLATION SEQUENCE ..................................................................................... 5-2
CUSTOMER (INSTALLATION) ENGINEER ............................................................. 5-6
FACILITY CONFIRMATION REPORT - SERIES II CE................................................... 5-7
INSTALLATION START-UP ................................................................6-1
PREREQUISITES .......................................................................................................... 6-1
MATERIALS ............................................................................................................... 6-3
EQUIPMENT ............................................................................................................... 6-4
INSTALLATION START-UP CHECKLIST ................................................................ 6-6
RELIABILITY TESTING TERMS................................................................................. 6-20
DETAIL INSTALLATION PROCEDURE ................................................................. 6-21
APPENDIX .........................................................................................APX-1
FORMS CONTENTS ............................................................................................... APX-1
PROCEDURES CONTENTS .................................................................................. APX-1
FACILITY CONFIRMATION REPORT-SERIES II CE .........................................FOR-1
INSTALLATION REPORT ......................................................................................FOR-5
INSTALLATION DEFICIENCY LOG SHEET .......................................................FOR-7
PARTS REQUIREMENTS FOR THIS INSTALLATION ......................................FOR-8
SYSTEM OFFSETS -SERIES II ..............................................................................FOR-9
SMOOTH WAFER TRAVEL CHECKLIST ..........................................................FOR-11
PROCESS OF RECORD .........................................................................................FOR-17
PARTICLE NEUTRALITY DATA COLLECTION FORM .................................FOR-21
ENVIRONMENTAL DATA COLLECTION FORM ............................................FOR-22
WATER TEST .........................................................................................................FOR-22
MEGASONIC TEST ...............................................................................................FOR-22
CHEMICAL DATA COLLECTION FORM ..........................................................FOR-23
NH4OH ....................................................................................................................FOR-23
MEGASONIC TEST ...............................................................................................FOR-23
ENVIRONMENTAL DATA COLLECTION FORM ............................................FOR-24
AIR TEST ................................................................................................................FOR-24
STATION-1 BRUSH MATRIX DATA FORM .....................................................FOR-25
STATION-2 BRUSH MATRIX DATA FORM .....................................................FOR-26
DSS-200 PROCESS INSTALLATION DATA TABLE ........................................FOR-27
INSTALLATION START UP PROCEDURE CHECKLIST .................................FOR-31
SYSTEM WARRANTY ACTIVATION ................................................................FOR-33
DI WATER LINE PURGE ................................................................PUR-1
EQUIPMENT AND MATERIAL REQUIREMENTS .............................................PUR-1
PURGE SETUP .........................................................................................................PUR-2
PURGE PROCEDURE .............................................................................................PUR-3

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USING HYDROGEN PEROXIDE................................................................................ PUR-3
USING AMMONIUM HYDROXIDE............................................................................ PUR-3
NH4OH USAGE GUIDELINES .................................................NH4OH-1
BRUSH HEIGHT OPTIMIZATION ...............................................OPT-1
SYSTEM BASELINE DI WATER .......................................................................... OPT-3
MEGASONIC STATION BASELINE ..................................................................... OPT-4
SYSTEM BASELINE AMMONIUM HYDROXIDE ............................................. OPT-5
ACCEPTANCE PROCEDURE ......................................................... DIP-1
POST CMP ILD OXIDE CLEANING EVALUATION ........................................... DIP-1
SLURRY DIP TEST .................................................................................................. DIP-3
TECHNICAL BULLETINS ...............................................................TSB-1
FACILITIES DRAWINGS ................................................................DOC1

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CHAPTER 1
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INTRODUCTION
1The DSS-200 Series II is designed to scrub, rinse and dry wafers. The
CE and SEMI S2-93 compliant system is run through a rigorous
functional testing procedure to ensure dependable operation and
freedom from defects in materials and workmanship. Prior to being
packaged for shipment, the system is inspected to ensure that its
fluid lines are purged, and its components are clean, dry and
properly secured.
HOW TO USE THE INSTALLATION MANUAL
This installation manual is intended as a reference and procedural
guide for site preparation, receiving, unpacking and installing the
DSS-200 Series II system.
Initial start-up and qualification of the system for production
processing is ONLY performed by the OnTrak Customer Service
(Installation) Engineer at the installation site.
These sections are arranged to be used chronologically. The activities
in each section prepare the user for the upcoming instructions. Each
section should be read carefully and the instructions followed as
written to avoid complications or missed requirements.
The Installation Manual contains five sections and an appendix.
Chapter 1 - Introduction
●How to use the Installation Guide
Chapter 2 - Safety
●Installation Safety and Terminology
Chapter 3 - Site Preparation
●Facility Requirements List
●Plumbing
●Electrical
●Facility Quality Requirements

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Chapter 4 - Unpacking
●Packaging
●Warning Devices
●Damage Check
●Removing the Packaging
●Moving the System
Chapter 5 - Installation Procedure
●Removing the Component Restraints
●Leveling the System
●Sequential Order of System Connections
HELECTRICAL HAZARD:Do Not attempt to start the system without the OnTrak
Installation Engineer present. The OnTrak Systems Installation Engineer will perform
the start-up activities after the customer has completed the uncrating, moving,
preliminary installation, and facilities hook-up.
ONLY the OnTrak Systems Customer Service (Installation) Engineer
will perform the final setup activities after the customer has
completed the initial system installation and facilities connections.
Chapter 6 - Installation Start-up Procedure
●Required Documentation
●Technical Service Bulletins (TSB)
●Table of Process of Record (POR)
●Required Materials, Equipment, and Tools
●Detailed (step-by-step) Installation and Acceptance Tasks
Appendix
●Installation Forms
●Installation Start-up Procedure Checklist
●Detailed Process of Record (POR) Installation Process Recipes
●Installation Procedures
Technical Service Bulletins
●Included in the Appendix
Facilities Drawings
●Included in the Appendix at the end of the manual

CHAPTER 2
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SAFETY
INTRODUCTION
2The safe operation of the DSS-200 system is the responsibility of the
user. OnTrak provides safety information regarding the design of the
system and its proper use. This includes hazards which effect the
operating process, the machinery and the operator. OnTrak assumes
no responsibility or liability for the safety procedures adopted by the
user nor for the procedures used while operating the DSS-200.
It is imperative that all personnel who will operate or maintain the
DSS-200 be fully trained in the safe operating procedures for the
system and in the related hazards associated with its use and
maintenance. A description of the hazards and a discussion of
general safe practices are included in this manual so that precautions
may be taken to protect against damage to the processing wafers,
damage to or destruction of system components, and personal injury
or even death.
This chapter includes general warnings and cautions that apply
during the operation and servicing of this system. Material safety
data sheet (MSDS) information for the chemicals normally used with
this equipment is also presented. Safety procedures associated with
original equipment manufactures (OEM) components and options
are presented in the sections that deal with their operation.
There are safety advisories throughout the manual. It is the user’s
responsibility to become familiar with the contents of the manual in
order to understand the hazards and how to avoid them.
In general, if the machine appears to be malfunctioning, stop the
system and contact the appropriate people (maintenance and
supervision). Once the system has been stopped, do not attempt to
reactivate it until:
1. The situation has been assessed by qualified personnel;
2. Any necessary adjustments or repairs have been completed;
3. The system is released back into operation by the person(s)
responsible for correcting the problem.

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SAFETY NOTATIONS
Safety is always a major concern when installing, operating, and
maintaining a new piece of equipment. In order to ensure that the
safety messages presented in this volume are visible and
immediately recognizable, the following symbols will accompany
the various warnings and cautions. They are presented in the
sidehead as shown below:
ANOTE: This symbol identifies a safety issue that could result in a process failure.
BCAUTION: This symbol identifies a safety issue that could result in minor personal
injury, damage or destruction of machine components or damage the processing product.
CWARNING: This symbol forewarns of severe physical damage to equipment and/or
personnel.
DWARNING! ELECTRICAL HAZARD: This symbol forewarns of an electrical
hazard which could result in personal injury or loss of life.
HWARNING! ELECTRICAL HAZARD: This symbol forewarns of an electrical
hazard which could result in personal injury or loss of life.
LWARNING! ELECTRICAL HAZARD: This symbol forewarns of an electrical
hazard which could result in personal injury or loss of life.
FCAUTION! HOT SURFACE: This symbol forewarns of a hot surface that could
cause burns if touched.
YCAUTION! HOT SURFACE: This symbol forewarns of a hot surface that could
cause burns if touched. (SEMI S1-90 standards.)

Chapter 2 SAFETY
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GCAUTION! IRRITANT MATERIAL: This symbol forewarns of a material that can
cause irritation.
EWARNING! ROLLER CRUSH: This symbol forewarns of possible physical
damage to hands or fingers.
IWARNING! PINCH POINT: This symbol forewarns of possible physical damage
to hands or fingers.
ZDANGER! CHEMICAL HAZARD: This symbol forewarns of possible chemical
hazards.
XDANGER! TRIP HAZARD: This symbol forewarns of the possibility of tripping
over objects.
WWARNING! RF VOLTAGE HAZARD: This symbol forewarns of possible RF
voltage hazards.
VWARNING! RESPIRATORY PROTECTION REQUIRED: This symbol
identifies situations or conditions which require respiratory protection.
UWARNING! RADIATION: This symbol forewarns of possible radiation hazards.
TCAUTION! RADIO FREQUENCY: This symbol forewarns of possible danger
from radio frequencies.
SWARNING! PROHIBITED ACTION: This symbol identifies actions that are
prohibited.

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RDANGER! POISON: This symbol forewarns of the presence of poisonous
substances.
Q
WARNING! PINCH POINT: This symbol identifies Pinch Points that can result in
personal injury. (SEMI S1-90 standards.)
PWARNING! MOVING MACHINERY: This symbol forewarns of possible danger
from moving machinery.
OWARNING! INFRARED RADIATION: This symbol forewarns of possible
danger from infrared radiation.
NCAUTION! HAND PROTECTION REQUIRED: This symbol informs of hand
protection requirements.
M
WARNING! ENTANGLEMENT HAZARD: This symbol forewarns of the
possibility of entanglement in moving machinery.
KWARNING! CORROSION HAZARD: This symbol forewarns of possible danger
from corrosive substances.
JCAUTION! COMPRESSED AIR: This symbol forewarns of possible danger from
compressed air.
GENERAL SAFETY PROVISIONS
The DSS-200 is designed with safety in mind. The system contains
numerous safety provisions including the following:
Electrical Shields are provided in each location where a potential
exists for accidental contact with a component that could cause
electrical shock if its protective shield was removed.

Chapter 2 SAFETY
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Interlocks are included which shut down processing in a particular
station or turn off power to protect the operator from accidental
contact with dangerous moving components, hazardous conditions
or hazardous substances.
Safety Panels and Station Covers (Lids) in the system provide a
protective barrier between the operator and moving parts, electrical
components and hazardous chemicals.
Leak Detection: When a fluid leak or exhaust failure is detected,
chemical delivery stops, the light tower changes color, the sonalert
sounds, an alarm message is displayed on the monitor screen, and
the system goes into clear mode. In clear mode, the input station
stops sending wafers into the brush box, wafers already in the
system are processed using DI water only and the system stops after
processing.
Alarms are generated by the computer in response to specific sensor
signals. Alarms will cause processing shutdown under certain
circumstances which may be hazardous to the machine, the
processing, or the operator/technician.
Emergency Machine Off (EMO) Switches automatically shut down
the system when pressed.
High Voltage Warnings. High voltage warning tags have been
placed on all electrical components and circuitry where high voltage
shock is possible if safety precautions are circumvented.
In general, the machine provides the fully trained and safety
conscious operator all the protection and controls needed to run the
system safely. It is the operators responsibility to learn the safety
procedures and to operate the system in a safe and responsible
manner.

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SAFETY PRECAUTIONS
ELECTRICAL SAFETY
Safety Shields
Electrical safety shields isolate the high voltage components to
prevent accidental contact by technicians. Use extreme caution when
working around the shielded components. If it is necessary to
remove the safety shield from a component in order to work on it,
first turn the machine OFF and disconnect the power.
Component Maintenance
Do not perform maintenance on any component without
understanding the circuits and voltages/amperage present.
High Voltage
230/120 VAC is present in the Electrical Enclosure even when the
system power has been turned OFF. Use the following common
electrical safety procedures:
1. Use the One-Hand-In-The-Pocket rule when working with high
voltages.
2. Use probes and meters which are rated for the power being mea-
sured.
3. Work with a partner.
4. Remove jewelry and watches from hands and arms before work-
ing with electrical components.
5. The metal frame and protective panels can operate as a ground.
Do not lean on them when working with live components or cir-
cuits.
Electrical Lockout/Tag Out
The electrical enclosure is a lockable cabinet which contains the
circuitry for the system. Circuits in the electrical enclosure are
capable of high currents with voltages of 115 VAC or higher. Only
trained electrical technicians should be allowed to open the cabinet
and work the enclosed components. When electrical work is
performed on the system, use the following procedure.
1. Notify all affected personnel that the system is going to be locked
out for maintenance or servicing prior to continuing this proce-
dure.
2. The person(s) performing the following actions must be properly
trained in lockout/tag out procedures and must be responsible
for the lockout/tag out removal as described in steps 11 and 12.

Chapter 2 SAFETY
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The person(s) must also be familiar with the types and magni-
tudes of electrical services and common electrical safety practices
as they pertain to the specific system.
3. Turn the main circuit breaker to the OFF position.
4. Disconnect the power cord.
5. Get the lockout block (OnTrak part #71-0002-017) and the padlock
(Ontrak part #71-0002-016) from the safety officer. (The system is
shipped with the lockout block and padlock sealed in a plastic
bag inside the electrical enclosure.)
6. Open the lockout block so the spring pins are exposed.
7. Compress the spring pins and install the lockout block on the cir-
cuit breaker so the breaker is prevented from moving to the ON
position. (There are two pin holes on the breaker for securing the
lockout block.)
8. Release the spring pins and close the lockout block.
9. Insert the padlock through the lockout block to prevent the block
from opening.
10. Lock the padlock and take possession of the key.
11. Attach a TAG to the padlock with your name on it. (You are the
only person authorized to remove the padlock.)
12. Upon completion of maintenance/servicing, you are responsible
for lockout/tagout removal and notification of all affected per-
sonnel when the lockout/tagout has been removed.
Electrical Hazard Rating
The SEMI S2 standards define and classify risks associated with
electrical task hazards. The following is a list of the four
classifications.
Type 1 Equipment is fully de-energized
Type 2 Equipment is energized but live circuits are covered or insulated to
preclude accidental shock.
Type 3 Equipment is energized and live circuits of less than 30 Vrms, 240
VA, and 20 joules are exposed to accidental contact.
Type 4 Equipment is energized and live circuits of greater than 30 Vrms, 240
VA, or 20 joules are exposed to accidental contact; or radio frequency
(rf) is present.
Type 5 Equipment is energized and adjustment requires physical entry into
the equipment, or equipment configuration will not allow the use of
clamp-on probes.

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DSS-200 TYPE 3 AND TYPE 4 TASK HAZARDS
DWARNING! ELECTRICAL HAZARD: The following procedures are DSS-200
type 3and type 4task hazards. These procedures should be performed by qualified
electrical technicians only.
Power Supply Calibration
All power supply calibration procedures are classified as Type 4
Electrical Task Hazards.
High Speed Spindle Motor Calibration
This is a Type 4 Electrical Task Hazard.
DC Motor Calibration
This is a Type 3 Electrical Task Hazard.
Stepper Motor Calibration
This is a Type 3 Electrical Task Hazard.
Sensor Calibration
This is a Type 3 Electrical Task Hazard.
SAFETY INTERLOCKS
The DSS-200 is equipped with safety interlock switches for station
cover lids, station doors and the key-only access electronic enclosure
door.
Station Cover Lids/Doors
All station cover lids and doors are equipped with safety interlock
switches. The operation of the individual stations is effected when
the switches are activated. Below is a list of the switches and how
each one effects the system when its corresponding door or lid is
opened or removed during processing.
Input Station Lid If the system START button is active, the Input Station indexer and
cassette spray operations STOP when the lid is opened. When the lid
is closed, the system returns to normal operation.
Brush Station Lid If the lid is opened during wafer processing, the brush station activity
STOPS. The system will NOT START for wafer processing if the lid is
open. The lid must be closed for the system to start of continue
processing.