ONTRAK Synergy Integra User manual

Synergy IntegraTM
Volume 1 of 5
Operations
Manual Set 20-0200-251 (CD)
Software Version 2.2.3
Revision A
May 2000
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ii INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
COPYRIGHT
The information contained in this document is subject to change without notice.
Lam Research Corporation makes no warranty of any kind with regard to this
material including, but not limited to, the implied warranties of merchantability
and fitness for a particular purpose. Lam Research Corporation shall not be liable
for errors contained herein or for incidental or consequential damages in
connection with the furnishing, performance, or use of this material.
=Copyright 2000 by Lam Research Corporation
All rights reserved.
This document contains proprietary information which is protected by copyright.
All rights are reserved. No part of this document may be photocopied,
reproduced, or translated to another language without the prior written consent of
Lam Research Corporation.
The following are trademarks of Lam Research Corporation and may be used to
identify Lam Research Corporation products: Lam Research®, OnTrakTM, DSS-
150®, DSS-200®, EnvoyTM, SynergyTM, and Synergy IntegraTM.
SOFTWARE
LICENSE
The system software (the "Software"), whether on disk or embedded in ROM, and
related documentation are licensed to the corporation that originally purchased this
equipment (the Corporation). Lam Research Corporation retains the title to the
Software. This license allows the Corporation to use the Software on a single Lam
Research Corporation system. The Corporation may transfer the Software provided
the party reads and agrees to accept the terms and conditions of this license.
RESTRICTIONS The Software contains copyrighted material, trade secrets, and other proprietary
information, and in order to protect them the Corporation may not decompile,
reverse engineer, disassemble, or otherwise reduce the Software to human-
perceivable form. The Corporation may not modify, network, rent, lease, loan, sell,
distribute, or create derivative works based upon this Software in whole or in part.
The Software may not be electronically transferred from one computer to another
over a network.
TERMINATION This license is in effect until terminated. This License will terminate immediately
without notice if the Corporation fails to comply with any provision of this
License.
CONTROLLING LAW This license shall be governed and construed in accordance with the laws of the
State of California.

7/26/00 INTEGRA Operations Revision A iii
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
PREFACE
This manual provides information on safety and operation of the Intergra cleaner.
It is composed of one volume, which contains fifteen chapters of text. The
Operations manual contains seven chapters that are also included in the Maintenance
manual. They are: Chapter 2, Safety; Chapter 11, GEM Configuration; Chapter 12,
System Security; and Chapter 14, Technical Bulletins. Chapter 2, Safety, and Chapter
11, Alarms, are also included in the Troubleshooting manual.
Chapter 1 Introduction, is intended to give those who operate and maintain the Integra
information on the system and a general description of the manuals.
Chapter 2 Safety,is intended for everyone using the system. It presents the safety issues that
apply during operation and maintenance of the system.
Chapter 3 System Configuration, is intended for the system operator, process engineer, and
maintenance technician. It describes the mechanical configuration of each module
in the system.
Chapter 4 Process Description, is intended to lead the operator through the operating
procedures of the system under normal conditions. This includes system pre–start-
up, start-up, and shutdown.
Chapter 5 Normal Operations, is intended for the system operator, process engineer, and
maintenance technician. It presents a pre–start-up checklist, start-up procedure,
initialization sequence, post–start-up checklist, and clearing and shutdown
procedures.
Chapter 6 Start-up After EMO, is intended to assist the operators and technicians in starting
the system after shutdown by EMO or other premature processing shutdown.
Chapter 7 Optional Process Settings, is intended to lead the operator, technician, and
engineer through the following optional procedures: select wafer diameter,
activate/deactivate flat finder, select process recipe, identify Envoy status, set
maintenance alarms, and set/read brush motor alarm.
Chapter 8 Smooth Wafer Travel Checklist, is intended to assist the operator and technician
to visually determine that the system is correctly cleaning/processing wafers.
Chapter 9 Process Recipe, is intended to assist the operator, technician, and process
engineers to change and view the parameters of a Process Recipe.
Chapter 10 Alarms, is intended to assist the operator and technician by presenting all
available system alarm information. Alarm information includes: description,
posting program, type, reason, disposition, and associated GEM information.
Chapter 11 GEM Configuration,is intended for the system operator, process engineer, and
maintenance technician. It describes how to create the GEM interface between the
factory host system and the Integra.
Chapter 12 System Security, is provided to assist the maintenance technician and field
engineer to set/delete password/key security for each operator, technician, and
engineer (maintenance mode).
Chapter 13 Technical Bulletins,is provided to store Lam Technical Bulletins (technical,
procedural, process, etc., updates) that are periodically sent to Field Engineers and
customers.

iv INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
In addition to the Operations manual, the other Integra manuals are the
Maintenance manual (Volume 2 of 5), Troubleshooting manual (Volume 3 of 5),
Spare Parts manual (Volume 4 of 5), and Installation manual (Volume 5 of 5). The
Spare Parts manual contains assembly drawings and part lists for the system and
its major modules: Input Station, Brush Station #1, Brush Station #2, and Spin
Station. The Troubleshooting manual includes system schematics, electrical
interconnect diagrams, and facility layout drawings.
Lam Research Corporation strives to continually improve products and often
creates custom configurations for our customers on special request. Additional
information is available from Lam Customer Service (Field Service) or through a
specially tailored instruction program.

7/26/00 INTEGRA Operations Revision A v
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
REORDER & REVISION HISTORY
Reorder
Instructions
To reorder one of the manuals in the Integra system manual set, order the
following:
20-0200-231 Operations (clean room manual)
20-0200-232 Operations (standard manual)
20-0200-233 Maintenance (clean room manual)
20-0200-234 Maintenance (standard manual)
20-0200-235 Troubleshooting (clean room manual)
20-0200-236 Troubleshooting (standard manual)
20-0200-237 Spare Parts (clean room manual)
20-0200-238 Spare Parts (standard manual)
20-0200-239 Installation (clean room manual)
20-0200-240 Installation (standard manual)
NOTE The highest current revision level of a manual is always sent unless a specific revision level
is requested.
CD ROM Electronic copies of the Integra system manual set (20-0200-251) can be ordered from Lam
Research Corporation. Electronic copies are provided as .PDF files and can be viewed
using the included (free) Adobe Acrobat Reader.
In the US and Canada, direct all orders and inquires for manuals to Lam at
1-800 LAM-HELP (1-800-526-4357). Outside the US, directly contact your
Lam Customer Service Center.

vi INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Revision History This manual is new. It includes updated material from the five-volume Synergy
Integra manual set, p/n 20-0200-222 (standard) and p/n 20-0200-221 (clean room),
as follows:
Chapter 1—Introduction. Revised version of Chapter 1, Introduction, in Volume 1,
Operations.
Chapter 2—Safety. Revised version of Chapter 2, Safety, in Volume 2, Operations.
Chapter 3—System Configuration. Revised version of Chapter 3, System
Configuration, in Volume 2, Operations.
Chapter 4—Process Description. Revised version of Chapter 4, Process
Description, in Volume 2, Operations.
Chapter 5—Normal Operation. Revised version of Chapter 5, Normal Operation,
in Volume 2, Operations.
Chapter 6—Start-up After EMO. Revised version of Chapter 6, Start-up After EMO
& Wafer Recovery, in Volume 2, Operations.
Chapter 7—Optional Process Settings. Revised version of Chapter 7, Optional
Process Settings, in Volume 2, Operations.
Chapter 8—Smooth Wafer Travel Checklist. Revised version of Chapter 8, Smooth
Wafer Travel Checklist, in Volume 2, Operations.
Chapter 9—Process Recipe. Revised version of Chapter 9, Process Recipe, in
Volume 2, Operations.
Chapter 10—Alarms. Revised version of Chapter 10, Alarms, in Volume 2,
Operations. The contents of pages 4-12 through 4-86 of this chapter (alarm
handling and alarm descriptions) are also included in Chapter 4, Alarms, in
Volume 3, Troubleshooting.
Chapter 11—GEM Configuration & Messages. Revised version of Chapter 11,
GEM Configuration & Messages, in Volume 2, Operations.
Chapter 12—System Security. Revised version of Chapter 12, System Security, in
Volume 2, Operations.
Chapter 13—Technical Bulletins (provided to store Lam Technical Bulletins). No
change.

Manual Change Request
Please provide the information requested below to assist us in correcting mistakes in the manual. Send the form by mail to
Cleaning Product Support, CA-10, Lam Research Corporation, 4650 Cushing Parkway, Fremont, CA 94538-6470; or by
fax to 510-572-1389; or by e-mail to CMP/CLN Documentation (on Global Address List) or
[e-mail].
Part 1 Contact Information (Who are you?)
Part 2 System Information (What system do you use?)
Part 3 Manual Information (What manual are you commenting on?)
Part 4 Corrections (What needs to be changed in the manual?) (Please provide support documentation.)
Part 5 Comments (What else do you want to say?)
Name: _____________________________________________ Title: __________________________ Date: ____________
Address: ___________________________________________ Phone: ________________________
____________________________________________ Fax: ___________________________
____________________________________________ E-mail: ________________________
Product: ❏✝Series II CE _____________________ Software: ❏✝______________
❏✝Synergy _____________________ ✝
❏✝Integra _____________________
❏✝Other _________________________ Top Level BOM: ________________
Title: ____________________________________________ Part number: _______________________ Revision: _____

TABLE OF CONTENTS
7/26/00 INTEGRA Operations Revision A ix
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
TABLE OF CONTENTS
COPYRIGHT .....................................................................................................................II
PREFACE ........................................................................................................................III
REORDER & REVISION HISTORY .............................................................................. V
INTRODUCTION ....................................................................................1–1
INTEGRA SYSTEM INTEGRATION ......................................................................... 1–1
MANUAL SET ORGANIZATION ............................................................................... 1–2
MANUAL CONTENTS ................................................................................................ 1–2
SAFETY ....................................................................................................2–1
INTRODUCTION .......................................................................................................... 2–1
SAFETY NOTATIONS ................................................................................................. 2–2
SAFETY PRECAUTIONS ............................................................................................ 2–3
PERSONAL PROTECTIVE EQUIPMENT (PPE) KIT ...................................................... 2–3
GENERAL SAFETY PROVISIONS ............................................................................. 2–4
SAFETY PRECAUTIONS ............................................................................................ 2–6
ELECTRICAL SAFETY ................................................................................................ 2–6
Safety Shields..................................................................................................... 2–6
Component Maintenance.................................................................................... 2–6
High Voltage ...................................................................................................... 2–6
Electrical Lockout/Tagout.................................................................................. 2–6
Electrical Hazard Rating .................................................................................... 2–7
Integra Type 3 and Type 4 Task Hazards .......................................................... 2–8
SAFETY INTERLOCKS ................................................................................................ 2–8
STATION COVER LIDS/DOORS .................................................................................. 2–8
ELECTRICAL ENCLOSURE.......................................................................................... 2–9
EMERGENCY MACHINE OFF ................................................................................... 2–10
MAINTENANCE ISSUES............................................................................................ 2–11
Chemical Exposure .......................................................................................... 2–11
Purge Procedure ............................................................................................... 2–11
N2 Purge for Long Term Storage..................................................................... 2–11
Pneumatics System........................................................................................... 2–12
ULPA Filter...................................................................................................... 2–12
GENERAL OPERATIONAL SAFETY ........................................................................... 2–12
Removing Wafer Fragments ............................................................................ 2–12
Heavy Loads..................................................................................................... 2–12
Purge Procedure ............................................................................................... 2–12
Spin Motor Protection ...................................................................................... 2–12
UV/IR Radiation .............................................................................................. 2–12
RF Radiation .................................................................................................... 2–12
Ergonomic Issues ............................................................................................. 2–13

TABLE OF CONTENTS
7/26/00 INTEGRA Operations Revision A x
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
SYSTEM CONFIGURATION ................................................................3–1
INTRODUCTION .......................................................................................................... 3–1
SYSTEM OPTIONS ...................................................................................................... 3–1
Flat Rotate Enable .............................................................................................. 3–1
Maintenance Alarms .......................................................................................... 3–1
Enable/Disable Brush Motor Alarms ................................................................. 3–1
First Wafer Clean ............................................................................................... 3–1
Light Tower Options .......................................................................................... 3–2
INPUT STATION .......................................................................................................... 3–3
INPUT STATION DOOR .............................................................................................. 3–3
WAFER CONVEYOR................................................................................................... 3–3
ENTRANCE RINSE...................................................................................................... 3–3
INPUT STATION LID .................................................................................................. 3–3
WAFER CONVEYOR................................................................................................... 3–3
SENSORS ................................................................................................................... 3–3
SENSOR DEFINITIONS................................................................................................ 3–4
BRUSH STATION COMMON COMPONENTS ......................................................... 3–6
DOUBLE CONTAINMENT STATION LID ..................................................................... 3–6
DOUBLE CONTAINMENT STATION SHELL................................................................. 3–6
CHEMICAL DISPENSE DRAWERS ............................................................................... 3–6
NH4OH Dispense Drawer.................................................................................. 3–6
HF Dispense Drawer .......................................................................................... 3–7
BRUSH STATION #1 ................................................................................................... 3–8
ENTRANCE SPRAY..................................................................................................... 3–8
BRUSHES ................................................................................................................... 3–8
ROLLERS AND EDGE CLEAN (OPTION)...................................................................... 3–8
PROCESS SOLUTION DRIP: NH4OH (PRIMARY SYSTEM USE) ................................. 3–9
PROCESS SOLUTION INJECTION: HF (OPTIONAL CONFIGURATION) ......................... 3–9
EXIT SPRAY (RINSE)................................................................................................. 3–9
SENSORS ................................................................................................................. 3–10
SENSOR DEFINITIONS.............................................................................................. 3–10
BRUSH STATION #2 ................................................................................................. 3–16
GENERAL DESCRIPTION .......................................................................................... 3–16
PROCESS SOLUTION DRIP: NH4OH (OPTIONAL CONFIGURATION)........................ 3–16
PROCESS SOLUTION INJECTION: HF (PRIMARY SYSTEM CONFIGURATION)........... 3–16
EXIT SPRAY ............................................................................................................ 3–16
EDGE CLEAN (OPTION) ........................................................................................... 3–16
FLAT FINDER (OPTION) ........................................................................................... 3–17
SENSORS ................................................................................................................. 3–17
SENSOR DEFINITIONS.............................................................................................. 3–17
SPIN STATION ........................................................................................................... 3–24
RETRACTABLE CARRIAGE (CONVEYOR PLATFORM) .............................................. 3–24
Wafer Transfer and Positioning ....................................................................... 3–24
SPIN ASSEMBLY...................................................................................................... 3–25
Catch Cup......................................................................................................... 3–25

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Spindle.............................................................................................................. 3–25
Spindle Fingers................................................................................................. 3–25
Spin Motor........................................................................................................ 3–26
Finger Close Safety Spring .............................................................................. 3–26
Z_Lock ............................................................................................................. 3–26
Spindle Lock .................................................................................................... 3–26
MEGASONIC ASSEMBLY (OPTION) .......................................................................... 3–27
Megasonic Arm ................................................................................................ 3–27
DI Water, Megasonic Flow Sensor .................................................................. 3–27
Megasonic Generator ....................................................................................... 3–27
Megasonic Sweep Timing................................................................................ 3–28
TOWER WAFER (ROBOT PRESENT) SENSOR ........................................................... 3–28
DRYING LAMP ........................................................................................................ 3–28
SPIN STATION ULPA FILTER (OPTION) .................................................................. 3–28
SENSORS ................................................................................................................. 3–29
SENSOR DEFINITIONS.............................................................................................. 3–30
ELECTRICAL ENCLOSURE ..................................................................................... 3–40
ELECTRICAL ENCLOSURE INTERLOCK OVERRIDE .................................................. 3–40
HIGH VOLTAGE....................................................................................................... 3–40
PROCESS DESCRIPTION .....................................................................4–1
INTRODUCTION .......................................................................................................... 4–1
WAFER/INPUT ROBOT (ARM) .................................................................................. 4–1
GEM INTERFACE ...................................................................................................... 4–1
INPUT ROBOT ............................................................................................................ 4–1
INPUT STATION DOOR (CASSETTE) SENSOR............................................................. 4–1
INPUT STATION .......................................................................................................... 4–1
PLACING WAFER ININPUT STATION ........................................................................ 4–1
SPRAY RINSE ............................................................................................................ 4–2
WAFER TRANSFER .................................................................................................... 4–2
INPUT STATION READY SIGNAL ............................................................................... 4–2
BRUSH STATION #1 ................................................................................................... 4–3
WAFER TRANSPORT IN............................................................................................. 4–3
WAFER CENTERING .................................................................................................. 4–3
WAFER CLEANING .................................................................................................... 4–3
Introduction ........................................................................................................ 4–3
2% NH4OH Application (Standard) .................................................................. 4–4
29% NH4OH TTB Processing (Option) ............................................................ 4–4
EDGE CLEAN (OPTION) ............................................................................................. 4–5
CLEAN CYCLE TIMING.............................................................................................. 4–5
WAFER TRANSFER OUT ............................................................................................ 4–5
PROCESS IDLE TIME.................................................................................................. 4–6
First Wafer Effect............................................................................................... 4–7
BRUSH STATION #2 ................................................................................................... 4–8
WAFER TRANSFER IN............................................................................................... 4–8
WAFER CENTERING .................................................................................................. 4–8

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WAFER CLEANING .................................................................................................... 4–8
Introduction ........................................................................................................ 4–8
EDGE CLEAN (OPTION) ........................................................................................... 4–10
CLEAN CYCLE TIMING............................................................................................ 4–10
FLAT FINDER (OPTION) ........................................................................................... 4–10
WAFER TRANSFER OUT (WITH FLAT FINDER) ....................................................... 4–10
WAFER TRANSFER OUT (NOFLAT FINDER)........................................................... 4–11
SPIN STATION ........................................................................................................... 4–12
WAFER TRANSFER IN............................................................................................. 4–12
WAFER TOSPINDLE TRANSFER.............................................................................. 4–13
SPIN PROCESS ......................................................................................................... 4–13
MEGASONIC SWEEP ................................................................................................ 4–13
HALOGEN (HEAT) LAMP......................................................................................... 4–13
PROCESS TIMING..................................................................................................... 4–14
WAFER/OUTPUT ROBOT (ARM) ............................................................................ 4–15
GEM INTERFACE .................................................................................................... 4–15
OUTPUT ROBOT (ARM)........................................................................................... 4–15
OUTPUT ROBOT & SPIN STATION EXIT TUNNEL.................................................... 4–15
ELECTRICAL ENCLOSURE ..................................................................................... 4–16
HIGH VOLTAGE....................................................................................................... 4–16
SIGNAL LIGHT TOWER ........................................................................................... 4–17
NORMAL OPERATION .........................................................................5–1
INTRODUCTION .......................................................................................................... 5–1
PRE START-UP CHECKLIST ..................................................................................... 5–1
START-UP PROCEDURE ............................................................................................ 5–3
START-UP PROCEDURE FOR HF2 CONFIGURATION.................................................. 5–4
INITIALIZATION SEQUENCE....................................................................................... 5–6
POST START-UP CHECKLIST ................................................................................... 5–8
CLEARING PROCEDURE ......................................................................................... 5–11
SYSTEM IDLE SIGNAL ............................................................................................ 5–12
SYSTEM HALT SIGNAL ........................................................................................... 5–12
SHUTDOWN PROCEDURE ...................................................................................... 5–13
TEMPORARY PROCESSING HALT............................................................................. 5–13
Less Than An Hour .......................................................................................... 5–13
Several Hours ................................................................................................... 5–14
SYSTEM SHUTDOWN ............................................................................................... 5–14
START-UP AFTER EMO & WAFER RECOVERY ...........................6–1
INTRODUCTION .......................................................................................................... 6–1
EMERGENCY STOP .................................................................................................... 6–1
PRE PROCESSING CHECKLIST ................................................................................ 6–2
START-UP PROCEDURE AFTER EMO .................................................................... 6–3
START-UP AFTER OPENING BRUSH BOX LID ..................................................... 6–4
WAFER RECOVERY ................................................................................................... 6–5

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CHEMICAL DISPENSE DURING WAFER RECOVERY .................................................. 6–5
LOST WAFER ............................................................................................................ 6–5
RECOVERY PROCEDURE FOR PROCESS FAILURE ...................................................... 6–6
RECOVERY PROCEDURE FOLLOWING POWER FAILURE (OR EMO).......................... 6–7
SEQUENCE OF EVENTS DURING WAFER RECOVERY ................................................ 6–8
FOUR WAFER RECOVERY SCENARIOS AFTER EMO ....................................... 6–12
WAFER RECOVERY WITH POWER ON (NO EMO) ............................................. 6–16
LOST WAFER RECOVERY - INPUT ROBOT .............................................................. 6–20
LOST WAFER RECOVERY - OUTPUT ROBOT........................................................... 6–21
OPTIONAL PROCESS SETTINGS ......................................................7–1
INTRODUCTION .......................................................................................................... 7–1
SELECT WAFER DIAMETER ..................................................................................... 7–2
ACTIVATE/DEACTIVATE FLAT FINDER ............................................................... 7–4
SELECT PROCESS RECIPE ........................................................................................ 7–8
ENVOY (CHEMICAL DISTRIBUTION UNIT - CDU) STATUS ............................ 7–10
MAINTENANCE ALARMS ....................................................................................... 7–11
BRUSH MOTOR ALARMS ....................................................................................... 7–14
FIRST WAFER DOSE ................................................................................................. 7–15
SMOOTH WAFER TRAVEL CHECKLIST ........................................8–1
INTRODUCTION .......................................................................................................... 8–1
PROCESS RECIPE .................................................................................9–1
CHANGE PROCESS RECIPE ...................................................................................... 9–1
MODIFY BRUSH #1 RECIPE ...................................................................................... 9–5
Set or Change EVENT Parameters .................................................................... 9–6
Change EVENT TIME....................................................................................... 9–8
Change EVENT ROLLER SPEED.................................................................... 9–9
Change EVENT BRUSH SPEED .................................................................... 9–10
Change EVENT Application Of NH4OH Or HF............................................. 9–10
Change EVENT Application Of DI HIGH FLOW.......................................... 9–11
Change EVENT Application Of DI LOW FLOW........................................... 9–12
Change EVENT Application Of EDGE CLEAN ............................................ 9–12
Set Or Change Brush Station #1 General (Other) Parameters ......................... 9–13
Change ENTRANCE And EXIT SPRAY ....................................................... 9–15
Change DI LOW FLOW MODE ..................................................................... 9–16
Change PROCESS ALARM TIMEOUT, FLUSH DURATION
and FLUSH DURATION................................................................................. 9–17
Change BRUSH IDLE SPEED ........................................................................ 9–19
Change BRUSH HEIGHT ............................................................................... 9–20
MODIFY BRUSH #2 RECIPE .................................................................................... 9–21
Change FLAT FINDER ................................................................................... 9–22
Brush Station #2 Screen HF2 Key Setting ....................................................... 9–23
Change HF Flow Option .................................................................................. 9–23

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MODIFY BRUSH CLEANING OPTIONS ................................................................ 9–23
Drip Wafer Count Brush Cleaning................................................................... 9–29
Change DRIP TIME......................................................................................... 9–30
Change DRIP WAFER COUNT...................................................................... 9–31
Change DRIP CHEM ....................................................................................... 9–32
Change DRIP LOW FLOW DI........................................................................ 9–33
Change DRIP HI FLOW DI............................................................................. 9–34
Change Idle Time Brush Cleaning Interval...................................................... 9–35
Change BRUSH IDLE TIME .......................................................................... 9–36
Change BRUSH IDLE ON TIME.................................................................... 9–37
Change BRUSH IDLE OFF TIME .................................................................. 9–38
Change EDGE CLEAN ON TIME .................................................................. 9–39
Change EDGE CLEAN OFF TIME................................................................. 9–40
Change IDLE CHEM ....................................................................................... 9–41
Change IDLE LOW FLOW DI........................................................................ 9–42
Change IDLE HI FLOW DI............................................................................. 9–43
Wafer EFFECT (Brush Conditioning) ............................................................. 9–44
DOSE MODE - 1ST WAFER or ALL WAFERS ........................................... 9–46
Change WAFER IDLE TIME.......................................................................... 9–46
Change WAFER DOSE TIME ........................................................................ 9–47
Change DOSE CHEM...................................................................................... 9–49
Change DOSE LOW FLOW DI....................................................................... 9–49
Change DOSE HI FLOW DI ........................................................................... 9–50
MODIFY SPIN EVENTS ............................................................................................ 9–51
Choose Spin Station EVENT ........................................................................... 9–53
Change UPPER RINSE.................................................................................... 9–53
Change LOWER RINSE.................................................................................. 9–54
Change HEAT LAMP...................................................................................... 9–54
MEGASONIC GENERATOR BUTTONS ................................................................. 9–55
Change MEGASONICS GEN. (Option).......................................................... 9–55
Change Meg Event TIME ................................................................................ 9–56
Change SPINDLE SPEED (During Meg)........................................................ 9–56
Change MEGASONIC SWEEP....................................................................... 9–57
VIEW PROCESS RECIPE .......................................................................................... 9–58
RECIPE TRANSFER PROCEDURE (COPY DISK) ................................................. 9–67
DEFINE DEFAULT PROCESS .................................................................................. 9–70
ALARMS .................................................................................................10–1
INTRODUCTION ........................................................................................................ 10–1
ALARM TYPES .......................................................................................................... 10–2
ALARMS ON THE SCREEN ..................................................................................... 10–3
GEM ALARMS (ERROR MESSAGES)....................................................................... 10–5
ALARM CONFIGURATION SCREEN ..................................................................... 10–6
SELECTABLE ALARMS ............................................................................................ 10–7
Accessing Selectable Alarms ........................................................................... 10–7
PROGRAMMABLE ALARMS...................................................................................... 10–8

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Accessing Alarm Configuration Menu ............................................................ 10–8
Alarm Configuration Menu Screen Description .............................................. 10–8
Alarm Description ............................................................................................ 10–9
Configuration Options - Message Box............................................................. 10–9
Choosing an Alarm for Configuration ........................................................... 10–10
Configuring the Alarm ................................................................................... 10–10
HANDLING ALARMS ............................................................................................. 10–13
ALARM DESCRIPTION 1 -161 ............................................................................... 10–13
ALARM ID: 1 ........................................................................................................ 10–13
ALARM ID: 2 ........................................................................................................ 10–13
ALARM ID: 3 ........................................................................................................ 10–14
ALARM ID: 4 ........................................................................................................ 10–14
ALARM ID: 5 ........................................................................................................ 10–14
ALARM ID: 6 ........................................................................................................ 10–15
ALARM ID: 7 ........................................................................................................ 10–15
ALARM ID: 8 ........................................................................................................ 10–15
ALARM ID: 9 ........................................................................................................ 10–16
ALARM ID: 10 ...................................................................................................... 10–16
ALARM ID: 11 ...................................................................................................... 10–16
ALARM ID: 12 ...................................................................................................... 10–17
ALARM ID: 13 ...................................................................................................... 10–17
ALARM ID: 14 ...................................................................................................... 10–17
ALARM ID: 15 ...................................................................................................... 10–18
ALARM ID: 16 ...................................................................................................... 10–18
ALARM ID: 17 ...................................................................................................... 10–19
ALARM ID: 18 ...................................................................................................... 10–19
ALARM ID: 19 ...................................................................................................... 10–19
ALARM ID: 20 ...................................................................................................... 10–20
ALARM ID: 21 ...................................................................................................... 10–20
ALARM ID: 22 ...................................................................................................... 10–20
ALARM ID: 23 ...................................................................................................... 10–21
ALARM ID: 24 ...................................................................................................... 10–21
ALARM ID: 25 ...................................................................................................... 10–22
ALARM ID: 26 ...................................................................................................... 10–22
ALARM ID: 27 ...................................................................................................... 10–22
ALARM ID: 28 ...................................................................................................... 10–23
ALARM ID: 29 ...................................................................................................... 10–23
ALARM ID: 30 ...................................................................................................... 10–23
ALARM ID: 31 ...................................................................................................... 10–24
ALARM ID: 32 ...................................................................................................... 10–24
ALARM ID: 33 ...................................................................................................... 10–25
ALARM ID: 34 ...................................................................................................... 10–25
ALARM ID: 35 ...................................................................................................... 10–25
ALARM ID: 36 ...................................................................................................... 10–26
ALARM ID: 37 ...................................................................................................... 10–26
ALARM ID: 38 ...................................................................................................... 10–26

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7/26/00 INTEGRA Operations Revision A xvi
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
ALARM ID: 39 ...................................................................................................... 10–27
ALARM ID: 40 ...................................................................................................... 10–27
ALARM ID: 41 ...................................................................................................... 10–27
ALARM ID: 42 ...................................................................................................... 10–28
ALARM ID: 43 ...................................................................................................... 10–28
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ALARM ID: 45 ...................................................................................................... 10–29
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ALARM ID: 49 ...................................................................................................... 10–31
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ALARM ID: 69 ...................................................................................................... 10–38
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ALARM ID: 71 ...................................................................................................... 10–39
ALARM ID: 72 ...................................................................................................... 10–39
ALARM ID: 73 ...................................................................................................... 10–40
ALARM ID: 74 ...................................................................................................... 10–40
ALARM ID: 75 ...................................................................................................... 10–41
ALARM ID: 76 ...................................................................................................... 10–41
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ALARM ID: 78 ...................................................................................................... 10–42
ALARM ID: 79 ...................................................................................................... 10–42
ALARM ID: 80 ...................................................................................................... 10–43
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TABLE OF CONTENTS
7/26/00 INTEGRA Operations Revision A xvii
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
ALARM ID: 85 ...................................................................................................... 10–45
ALARM ID: 86 ...................................................................................................... 10–45
ALARM ID: 87 ...................................................................................................... 10–45
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ALARM ID: 110 .................................................................................................... 10–54
ALARM ID: 111 .................................................................................................... 10–54
ALARM ID: 112 .................................................................................................... 10–55
ALARM ID: 113 .................................................................................................... 10–55
ALARM ID: 114 .................................................................................................... 10–55
ALARM ID: 115 .................................................................................................... 10–56
ALARM ID: 116 .................................................................................................... 10–56
ALARM ID: 117 .................................................................................................... 10–57
ALARM ID: 118 .................................................................................................... 10–57
ALARM ID: 119 .................................................................................................... 10–58
ALARM ID: 120 .................................................................................................... 10–58
ALARM ID: 121 .................................................................................................... 10–58
ALARM ID: 122 .................................................................................................... 10–59
ALARM ID: 123 .................................................................................................... 10–59
ALARM ID: 124 .................................................................................................... 10–60
ALARM ID: 125 .................................................................................................... 10–60
ALARM ID: 126 .................................................................................................... 10–61
ALARM ID: 127 .................................................................................................... 10–61
ALARM ID: 128 .................................................................................................... 10–62
ALARM ID: 129 .................................................................................................... 10–62
ALARM ID: 130 .................................................................................................... 10–62

TABLE OF CONTENTS
7/26/00 INTEGRA Operations Revision A xviii
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
ALARM ID: 131 .................................................................................................... 10–63
ALARM ID: 132 .................................................................................................... 10–63
ALARM ID: 133 .................................................................................................... 10–64
ALARM ID: 134 .................................................................................................... 10–64
ALARM ID: 135 .................................................................................................... 10–64
ALARM ID: 136 .................................................................................................... 10–65
ALARM ID: 137 .................................................................................................... 10–65
ALARM ID: 138 .................................................................................................... 10–66
ALARM ID: 139 .................................................................................................... 10–66
ALARM ID: 140 .................................................................................................... 10–66
ALARM ID: 141 .................................................................................................... 10–67
ALARM ID: 142 .................................................................................................... 10–67
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ALARM ID: 144 .................................................................................................... 10–68
ALARM ID: 145 .................................................................................................... 10–68
ALARM ID: 146 .................................................................................................... 10–68
ALARM ID: 147 .................................................................................................... 10–69
ALARM ID: 148 .................................................................................................... 10–69
ALARM ID: 149 .................................................................................................... 10–69
ALARM ID: 150 .................................................................................................... 10–70
ALARM ID: 151 .................................................................................................... 10–70
ALARM ID: 152 .................................................................................................... 10–70
ALARM ID: 153 .................................................................................................... 10–71
ALARM ID: 154 .................................................................................................... 10–71
ALARM ID: 155 .................................................................................................... 10–72
ALARM ID: 156 .................................................................................................... 10–72
ALARM ID: 157 .................................................................................................... 10–72
ALARM ID: 158 .................................................................................................... 10–73
ALARM ID: 159 .................................................................................................... 10–73
ALARM ID: 160 .................................................................................................... 10–73
ALARM ID: 161 .................................................................................................... 10–74
GEM MESSAGES ..................................................................................................... 10–75
INTEGRA INPUT STATION GEM INTERFACE SEQUENCE....................................... 10–75
INTEGRA OUTPUT STATION GEM INTERFACE SEQUENCE ................................... 10–77
GEM ALARMS (ERROR MESSAGES)..................................................................... 10–78
INTEGRA (CMP) SPECIFIC GEM MESSAGES ........................................................ 10–79
GEM CONFIGURATION & MESSAGES .........................................11–1
INTRODUCTION ........................................................................................................ 11–1
GEM CONFIGURATION CONTROL ....................................................................... 11–2
MANUAL CONTROL BUTTONS ................................................................................ 11–2
ENABLE Button .............................................................................................. 11–3
ONLINE Button ............................................................................................... 11–4
REMOTE Button.............................................................................................. 11–4
AUTOMATIC CONNECTION: CONTROL STATE DEFAULT PARAMETERS .. 11–6
ESTABLISH COMM TIMEOUT:................................................................... 11–6

TABLE OF CONTENTS
7/26/00 INTEGRA Operations Revision A xix
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
HEARTBEAT TIMER:.................................................................................... 11–7
INITIAL COMM STATE: ............................................................................... 11–7
INITIAL CONTROL STATE:......................................................................... 11–7
ONLINE FAILED STATE: ............................................................................. 11–7
OFFLINE SUBSTATE: ................................................................................... 11–8
ONLINE SUBSTATE:..................................................................................... 11–8
PROTOCOL PARAMETERS ..................................................................................... 11–8
DEVICE ID:..................................................................................................... 11–8
T1 - T4 TIMEOUTS: ....................................................................................... 11–9
RETRY LIMIT:................................................................................................ 11–9
COLLECTION EVENTS (CEIDS) ........................................................................... 11–10
TROUBLESHOOTING SECS/GEM RS232 COMMUNICATION ......................... 11–12
SYSTEM SECURITY ............................................................................12–1
INTRODUCTION ........................................................................................................ 12–1
UNDERSTANDING MAINTENANCE SECURITY ................................................. 12–1
LOGON WITHOUT THE SECURITY KEY .............................................................. 12–2
SECURITY SCREEN .................................................................................................. 12–5
DELETING A USER FROM THE SYSTEM ............................................................. 12–9
TECHNICAL BULLETINS ..................................................................13–1

TABLE OF CONTENTS
7/26/00 INTEGRA Operations Revision A xx
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
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