Pfeiffer Vacuum CCR 371 User manual

BG 5139 BEN / A (2012-11)
A PASSION FOR PERFECTION
CCR 371 … CCR 375
Ceramic Capacitance Gauge
Operating Instructions

2BG 5139 BEN / A (2012-11)
Product Identification
In all communications with Pfeiffer Vacuum, please specify the
information given on the product nameplate. For convenient re-
ference copy that information into the space provided below.
Pfeiffer Vacuum, D-35614 Asslar
Typ:
Range:
No:
F-No:
V W; LPS

BG 5139 BEN / A (2012-11) 3
Validity
This document applies to products with the following part num-
bers:
Type Part number Flange Torr Pascal mbar
PT R28 100 ½" Rohr
PT R28 101 DN 16 ISO-KF
PT R28 102 DN 16 CF-R
CCR 371
PT R28 103 8 VCR®
10-1
…
1000 (F.S.)
1.33×101
…
133'322 (F.S.)
1.33×10-1
…
1333 (F.S.)
PT R28 110 ½" Rohr
PT R28 111 DN 16 ISO-KF
PT R28 112 DN 16 CF-R
CCR 372
PT R28 113 8 VCR®
10-2
…
100 (F.S.)
1.33×100
…
13'332.2 (F.S.)
10-2
…
133 (F.S.)
PT R28 120 ½" Rohr
PT R28 121 DN 16 ISO-KF
PT R28 122 DN 16 CF-R
CCR 373
PT R28 123 8 VCR®
10-3
…
10 (F.S.)
1.33×10-1
…
1'333.22 (F.S.)
10-3
…
13.3 (F.S.)
PT R28 130 ½" Rohr
PT R28 131 DN 16 ISO-KF
PT R28 132 DN 16 CF-R
CCR 374
PT R28 133 8 VCR®
10-4
…
1 (F.S.)
1.33×10-2
…
133.322 (F.S.)
10-4
…
1.3 (F.S.)
PT R28 140 ½" Rohr
PT R28 141 DN 16 ISO-KF
PT R28 142 DN 16 CF-R
CCR 375
PT R28 143 8 VCR®
10-5
…
0.1 (F.S.)
1.33×10-3
…
13.3322 (F.S.)
10-5
…
0.13 (F.S.)
The part number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to CCR 37X gauges with the
DN 16 ISO-KF vacuum connection. They apply to other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.

4BG 5139 BEN / A (2012-11)
Intended Use
The temperature controlled Capacitance Diaphragm Gauges of
the CCR 37X series are intended for absolute pressure
measurement of gases in their respective pressure ranges
(→3).
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a com-
pensation of changes in the ambient conditions and a reduced
deposition of process products and by-products in process appli-
cations.
Trademark
VCR®Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge CCR 37X in clean room packaging
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Instructions German
1× Operating Instructions English

BG 5139 BEN / A (2012-11) 5
Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademark 4
Patents 4
Scope of Delivery 4
1Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2Technical Data 8
3Installation 13
3.1 Vacuum Connection 13
3.2 Power Connection 16
4Operation 19
4.1 Status Indication 19
4.2 Zeroing the Gauge 20
4.3 Switching Functions 25
4.4 Activating the Factory Setting (Factory Reset) 28
5Deinstallation 29
6Maintenance, Repair 30
7Returning the Product 31
8Disposal 32
Conversion Table 33
ETL Certification 33
EC Declaration of Conformity 34
For cross-references within this document, the symbol (→XY)
is used.

6BG 5139 BEN / A (2012-11)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

BG 5139 BEN / A (2012-11) 7
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.

8BG 5139 BEN / A (2012-11)
2 Technical Data
Measurement range →"Validity"
Accuracy 1) 0.15% of reading
Temperature effect on zero
PT R28 100 … PT R28 133
PT R28 140 … PT R28 143
0.0025% F.S./ °C
0.0050% F.S./ °C
Temperature effect on span 0.01% of reading / °C
Resolution 0.003% F.S.
Gas type dependence none
Output signal analog
(measuring signal)
Voltage range 0 … +10 V
Measuring range –5 … +10.24 V
(limited to +10.24 V)
Relationship voltage-pressure linear
Output impedance 0 Ω(short-circuit proof)
Loaded impedance >10 kΩ
Response time 2)
PT R28 100 … PT R28 133
PT R28 140 … PT R28 140
30 ms
130 ms
Gauge identification
Resistance Rident
Resistance 13.2 kΩrefer-
enced to supply common
Voltage ≤5 V
1) Non-linearity, hysteresis, repeatability in the calibrated range at
25 °C ambient operating temperature without temperature effects
after operation of 2 h.
2) Increase 10 … 90 % F.S.R.

BG 5139 BEN / A (2012-11) 9
Switching functions SP1, SP2
Setting range 0 … 99% F.S. (0 … 9.9 V)
Hysteresis 1% F.S.
Relay contact 30 VDC/ ≤0.5 ADC
floating (n.o.)
closed p ≤pSP (LED on)
open p ≥pSP (LED off)
Switching time ≤50 ms
Status relay
closed measurement mode
warning
open no supply voltage
warming up
error
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Supply voltage
at the gauge +14 … +30 VDC or
±15 V (±5%)
Class 2 / LPS
Ripple ≤1 Vpp
Power consumption
while being heated
at operating temperature
≤12 W
≤8 W
The gauge is protected against reverse polarity of the supply
voltage and overload.

10 BG 5139 BEN / A (2012-11)
Power connection 15-pin D-Sub, male
Sensor cable 15-pin plus shielding
Cable length
Supply voltage 15 V ≤8 m (0.14 mm²/conductor)
≤15 m (0.25 mm²/conductor)
Supply voltage 24 V ≤43 m (0.14 mm²/conductor)
≤75 m (0.25 mm²/conductor)
Supply voltage 30 V ≤88 m (0.14 mm²/conductor)
≤135 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required
(Rcable ≤1.0 Ω).
Grounding concept →"Power Connection"
Materials exposed to vacuum ceramics (Al2O3≥99.5%),
stainless steel AISI 316L
Internal volume ≤4.2 cm3
Admissible pressure (absolute)
1000 F.S.
1 / 10 / 100 F.S.
0.1 F.S.
300 kPa
200 kPa
130 kPa
Bursting pressure (absolute) 600 kPa
Admissible temperatures
Storage
Operation
Bakeout (not in operation)
–40 °C … +65 °C
+10 °C … +40 °C
≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40

BG 5139 BEN / A (2012-11) 11
Dimensions [mm]
8 VCR
female
DN 16 ISO-KF
82
110.4
DN 16 CF-R
OD½"
31.5
3.8
13
Weight 837 … 897 g

12 BG 5139 BEN / A (2012-11)
Analog Measuring Signal vs. Pressure
12 345678910
0
0.9×F.S.
0.5×F.S.
0.6×F.S.
1.0×F.S.
0.7×F.S.
0.8×F.S.
0.1×F.S.
0.2×F.S.
0.3×F.S.
0.4×F.S.
1.1×F.S.
Pressure p
Measuring signal Uout [V]
0.0×F.S.
p = (Uout / 10 V) × p (F.S.)
Conversion Torr ↔Pascal
Torr mbar
3) Pa 3)
c 1.00 1013.25 / 760 =
1.3332…
101325 / 760 =
133.3224…
Example: Gauge with 10 Torr F.S.
Measurement signal Uout = 6 V
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
3) Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum,
ISBN 0904457x / 1998

BG 5139 BEN / A (2012-11) 13
3 Installation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.

14 BG 5139 BEN / A (2012-11)
DANGER
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:
•CF and VCR flanges fulfill this requirement.
•For gauges with a KF flange, use a conductive
metallic clamping ring.
•For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

BG 5139 BEN / A (2012-11) 15
Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep conden-
sates and particles from getting into the measuring
chamber preferably choose a horizontal to upright posi-
tion. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the but-
tons can be accessed with a pin.
Remove the protective lid and connect the product to the vac-
uum system.
Seal with centering ring
Protective lid
Clamp
Keep the protective lid.

16 BG 5139 BEN / A (2012-11)
3.2 Power Connection
Make sure the vacuum connection is properly made
(→13).
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
•Use an overall metal braided shielded cable. The
connector must have a metal case.
•Connect the cable shield to ground at one side via the
connector case. Make sure the connector case has
direct contact to the cable's shield on its whole cir-
cumference. Do not connect the other side of the
shield.
•Connect the supply common with protective ground
directly at the power.
•Use differential measurement input (signal common
and supply common conducted separately).
•Potential difference between supply common and
housing ≤18 V (overvoltage protection).

BG 5139 BEN / A (2012-11) 17
If no sensor cable is available, make one according to the
following diagram (cable length and conductor cross-
sections →10).
Electrical connection
Pin 1, 4 Relay SP1, closing contact
Pin 2 Signal ouput (measurement signal)
or thresholds SP1/2
Pin 3 Status
Pin 5 Supply common
Pin 6 Supply (-15 V)
Pin 7, 11 Supply (+14 ... +30 V or +15 V)
Pin 8, 9 Relay SP2, closing contact
Pin 10 Gauge identification
or Remote Zero Adjust
Pin 12 Signal common
Pin 15 Housing (Chassis Ground)
case Connector case
15 8
91
15-pin
D-Sub female
soldering side
case
15 V
15 V
14…30 V
Remote
Zero Adjust
1MΩ
4
1
8
9
10
Ident 2
12
7
11
5
15
100nF
18 V
10 Ω
6
3
SP1
SP2
Status

18 BG 5139 BEN / A (2012-11)
Connect the sensor cable to the gauge and secure it using
the lock screw.
Connect the sensor cable to the controller.

BG 5139 BEN / A (2012-11) 19
4 Operation
Put the gauge into operation.
A warm-up time of at least ½ hour should be allowed; for exact
pressure measurements a warm-up time of at least 2 hours is
required.
If the gauge is used for fast downstream pressure con-
trol we recommend setting its signal filter to "fast".
4.1 Status Indication
For factory
setting only
LED LED status Meaning
<STATUS> off no supply voltage
lit solid green measurement mode
blinking green
short blinks
long blinks
warning, over/underrange
warming up
lit solid red error
<SP1> lit green green
p ≤setpoint 1
blinking green waiting for setpoint 1 input
off p > setpoint 1
<SP2> lit solid green p ≤setpoint 2
blinking green waiting for setpoint 2 input
off p > setpoint 2

20 BG 5139 BEN / A (2012-11)
4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright"
(→"Calibration Test Report").
We recommend performing a zero adjustment, when the
gauge is operated for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same con-
stant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the moun-
ting orientation. The signal difference between the vertical and
horizontal mounting orientation is:
F.S. ΔU / 90°
1000 Torr ≈2 mV
100 Torr ≈10 mV
10 Torr ≈50 mV
1 Torr ≈300 mV
0.1 Torr ≈1.8 V
If the gauge is operated via a controller, the zero of the
whole measuring system has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.