Pfeiffer Vacuum IKT 010 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
IKT 010 ∣IKT 011
Cold cathode sensor for integrated pressure measurement

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new sensor is designed to support
you in your individual application with maximum performance and without malfunctions. The
name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and
complete range of top-quality products and first-class service. From this extensive, practical
experience we have gained a large volume of information that can contribute to efficient
deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 8
1.3.1 Instructions in the text 8
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
1.4 Trademark proof 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety precautions 12
2.4 Proper use 12
2.5 Foreseeable improper use 13
2.6 Responsibilities and warranty 13
2.7 Owner requirements 13
2.8 Personnel qualification 13
2.8.1 Ensuring personnel qualification 14
2.8.2 Personnel qualification for maintenance and repair 14
2.8.3 Advanced training with Pfeiffer Vacuum 14
2.9 Operator requirements 14
3 Product description 15
3.1 Function 15
3.2 Switch and status display 15
3.3 Identifying the product 15
3.4 Scope of delivery 15
4 Transport and storage 16
4.1 Transporting the product 16
4.2 Storing the product 16
5 Installation 17
5.1 Establishing the vacuum connection 17
5.2 Establishing the electric connection 18
5.2.1 Connecting the sensor with TIC 010 to HiPace 18
5.2.2 Connecting the sensor with micro USB to HiPace neo 19
6 Operation 20
6.1 Determining the effective pressure with calibration factors 20
6.2 Ignition delay 22
6.3 Pollution 22
7 Removal 23
8 Maintenance 25
8.1 Sensor maintenance 25
8.2 Disassembling the sensor 25
8.3 Replacing the ignition aid 26
8.4 Cleaning of components 28
8.5 Installing the sensor 29
9 Malfunctions 31
Table of contents
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9.1 Troubleshooting 31
9.2 Identifying errors at the measurement chamber 31
10 Shipping 33
11 Recycling and disposal 34
11.1 General disposal information 34
11.2 Dispose of sensors 34
12 Service solutions by Pfeiffer Vacuum 35
13 Spare parts 37
14 Accessories 38
14.1 Accessory information 38
14.2 Order accessories 38
15 Technical data and dimensions 39
15.1 General 39
15.2 Technical data 39
15.3 Dimensions 42
Certification 43
Declaration of conformity 44
Table of contents
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List of tables
Tbl. 1: Applicable documents 7
Tbl. 2: Variants 7
Tbl. 3: Abbreviations used 9
Tbl. 4: Electronic drive units and required firmware versions 19
Tbl. 5: Illuminating diodes 20
Tbl. 6: Required firmware versions 20
Tbl. 7: Calibration factors for the pressure range < 10 hPa 21
Tbl. 8: Malfunctions 31
Tbl. 9: Measurement 32
Tbl. 10: Spare parts 37
Tbl. 11: Conversion table: Pressure units 39
Tbl. 12: Conversion table: Units for gas throughput 39
Tbl. 13: Measured and pressure values 39
Tbl. 14: Electrical data 40
Tbl. 15: Internal volume and weight 40
Tbl. 16: Ambient conditions 40
Tbl. 17: Temperatures 40
Tbl. 18: Substances in contact with the media 41
Tbl. 19: Technical data, TIC 010 41
List of tables
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List of figures
Fig. 1: Switch and LED 15
Fig. 2: Establishing the vacuum connection 18
Fig. 3: Micro USB connection (type B) 19
Fig. 4: Displayed pressure 21
Fig. 5: Removing the sensor 24
Fig. 6: Disassembling the sensor 26
Fig. 7: Removing the ignition aid 27
Fig. 8: Inserting the ignition aid in the mounting tool 27
Fig. 9: Inserting the ignition aid 27
Fig. 10: Switch for CAL calibration value 29
Fig. 11: Installing the sensor 30
Fig. 12: Contact pins of the measurement chamber 32
Fig. 13: Complete measurement chamber (replacement sensor) 37
Fig. 14: Dimensions 42
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
TC “electronic drive unit” operating instructions (depending on the device used)
HiPace "turbopump" operating instructions (depending on the device used)
DCU “display and control unit” operating instructions PT 0250 BN
HPU 001 “display and control unit” operating instructions PT 0101 BN
TIC 010 “adapter” operating instructions PT 0484 BN
Declaration of conformity (part of these instructions)
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
This document applies to products with the following part numbers:
Article number Designation Connection Version
PT R72 050 IKT 010 (DN 25 ISO-KF, 0.5 m cable) Molex Low current
PT R73 050 IKT 011 (DN 25 ISO-KF, 0.5 m cable) High current
PT R72 100 IKT 010 (DN 25 ISO-KF, 1.0 m cable) Molex Low current
PT R73 100 IKT 011 (DN 25 ISO-KF, 1.0 m cable) High current
PT R72 150 IKT 010 (DN 25 ISO-KF, 1.5 m cable) Molex Low current
PT R73 150 IKT 011 (DN 25 ISO-KF, 1.5 m cable) High current
PT R72 550 IKT 010 (DN 25 ISO-KF, 0.5 m cable) Micro USB Low current
PT R73 550 IKT 011 (DN 25 ISO-KF, 0.5 m cable) High current
Tbl. 2: Variants
You can find the part number on the rating plate of the product.
Pfeiffer Vacuum reserves the right to make technical changes without prior notification.
The figures in this document are not to scale.
Dimensions are in mm unless stated otherwise.
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
About this manual
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●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
The pictographs used in the document indicate useful information.
Note
Tip
Wear laboratory gloves
Perform a visual inspection
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meanings.
D-35614 Asslar
Mod.
P/N
S/N
Input
IKT 01x
PT R7x xxx
xxxxxxxxx
5 V DC 2 W
Made in Liechtenstein 2019/04
Rating plate
The rating plate is located on the side of the sensor’s
electronic unit.
About this manual
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1.3.4 Abbreviations
Abbreviation Explanation
ATM Atmosphere
c Constant for converting measuring signal and pressure
C Calibration factor for calculating the pressure for gases other than air
CAL Calibration
EEPROM Electrically erasable programmable read-only memory
HV High vacuum
HV-ST High vacuum status
HPU Handheld Programming Unit
DCU Display Control Unit
LPS Limited power source
MSL Mean sea level
OR Overrange
[P:000] Electronic drive unit parameter with number
p Pressure
PLC Programmable logical controller
ST Status
WAF Width Across Flats
TC Turbopump electronic drive unit (turbo controller)
U Measuring signal [V] (output voltage)
UR Underrange
Tbl. 3: Abbreviations used
1.4 Trademark proof
●HiPace® is a registered trademark of Pfeiffer Vacuum GmbH.
●Molex® is a registered trademark of Molex Incorporated, Lisle, Illinois, USA.
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product’s life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during installation
DANGER
Risk to life due to electric shock
An improperly earthed product is potentially fatal in the event of a fault.
►Connect the product galvanically with the earthed vacuum chamber.
►Ensure that the connection complies with the requirements of a protective bonding according to
EN 61010. (CF and VCR connections comply with this requirement.)
►Use electrically conductive centering rings and circlips for KF connections.
Safety
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Risks during operation
WARNING
Risk of injury resulting from overpressure in the vacuum system
Opening tensioning pieces with an overpressure > 1000 hPa in the vacuum system can lead to inju-
ries as a result of flying parts, and escaping process medium could prove harmful to health.
Elastomer seals in KF connections (e.g. O-rings) are not resistant to pressures > 2500 hPa. This
could prove harmful to health due to escaping process medium.
►Do not open any tensioning pieces when overpressure is prevalent in the vacuum system.
►Use suitable tensioning pieces for overpressure.
►Use tensioning pieces which can only be opened and closed using a tool (e.g. tightening strap-
circlip).
►Use sealing rings with an outer centering ring.
Risks during maintenance
DANGER
Risk to life due to electric shock
If no earth connection is established, voltage flows become hazardous to the touch and could lead to
electronic components sustaining damage.
►Always tighten the electronic unit with the grub screw.
►Ensure that the grub screw of the electronic unit has been tightened correctly.
DANGER
Electric shocks due to moisture penetrating into the device
Moisture that has penetrated into the device results in personal injury through electric shocks.
►Only operate the device in a dry environment.
►Operate the device away from fluids and humidity sources.
►Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv-
ice.
►Always disconnect the current supply before cleaning the device.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
WARNING
Health hazards due to cleaning agent
The cleaning agent being used causes health hazards which could include, for example, poisoning,
allergies, skin irritations, chemical burns or damage to the airways.
►When handling cleaning agents, observe the applicable regulations.
►Adhere to safety measures regarding handling and disposal of cleaning agents.
►Be aware of potential reactions with product materials.
Safety
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Risks when shipping
WARNING
Risk of poisoning from contaminated products
Where products that contain harmful substances are shipped for maintenance or repair purposes, the
health and safety of service personnel is at risk.
►Comply with the instructions for safe distribution.
Risks during disposal
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
2.3 Safety precautions
The product is designed according to the latest technology and recognized safety engineering rules.
Nevertheless, improper use can result in danger to operator all third party life and limb, and product
damage and additional property damage.
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Pass on safety instructions to all other users.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Do not carry out your own conversions or modifications on the device.
►Observe the unit protection degree prior to installation or operation in other environments.
►Provide suitable touch protection, if the surface temperature exceeds 70 °C.
►Inform yourself about any contamination before starting work.
2.4 Proper use
The sensor is used for integrated pressure measurements on Pfeiffer Vacuum HiPace turbopumps
throughout the permissible pressure range.
Safety
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Use the product according to its intended purpose
1. Install, operate and maintain the sensor only as prescribed in these operating instructions.
2. Use the sensor only for the pressure measurement of air, inert gases and gas mixtures outside
their explosion limits.
3. Connect the sensor with the corresponding connector:
●Molex with TIC 010 adapter to Pv.can of the electronic drive unit of an HiPace
●Micro USB to HiPace neo
4. Comply with the application limits.
5. Observe the technical data.
2.5 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:
●Use outside the mechanical and electrical application limits in accordance with the technical data
●Use with corrosive or explosive media, if this is not explicitly permitted
●Use outdoors
●Use after technical changes (on the inside or the outside of the product)
●Use with replacement or accessory parts that are unsuitable or are not approved
2.6 Responsibilities and warranty
Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party:
●disregards this document
●does not use the product for its intended purpose
●carries out any modifications to the product (conversions, changes, etc.) that are not listed in the
corresponding product documentation
●operates the product with accessories that are not listed in the corresponding product documenta-
tion
The operator is responsible for the process media used.
2.7 Owner requirements
Safety-conscious working
1. Only operate the product in a technically flawless state.
2. Operate the product in line with its intended purpose, safety and hazard-conscious and only in
compliance with these operating instructions.
3. Fulfill the following instructions and monitor the observation of the following instructions:
–Proper use
–Generally applicable safety instructions and accident prevention regulations
–International, national and locally applicable standards and guidelines
–Additional product-related guidelines and regulations
4. Only use original parts or parts approved by Pfeiffer Vacuum.
5. Keep the operating instructions available at the place of installation.
6. Ensure personnel qualification.
2.8 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
Safety
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2.8.1 Ensuring personnel qualification
Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this document, special-
ists are people responsible for construction, mechanical installation, troubleshooting and maintenance
of the product, and who have the following qualifications:
●Qualification in the mechanical field in accordance with nationally applicable regulations
●Knowledge of this documentation
Specialist for electrotechnical work
Only a trained electrician may carry out electrical engineering work. Within the meaning of this docu-
ment, electricians are people responsible for electrical installation, commissioning, troubleshooting, and
maintenance of the product, and who have the following qualifications:
●Qualification in the electrical engineering field in accordance with nationally applicable regulations
●Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as well as the
other standards, guidelines, and laws referred to in this documentation. The above individuals must
have an explicitly granted operational authorization to commission, program, configure, mark, and earth
devices, systems, and circuits in accordance with safety technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, operation and
disposal fields. Such training must ensure that individuals are capable of carrying out the required activi-
ties and work steps safely and properly.
2.8.2 Personnel qualification for maintenance and repair
Advanced training courses
Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Adequately trained individuals are:
●Maintenance level 1
─Customer (trained specialist)
●Maintenance level 2
─Customer with technical education
─Pfeiffer Vacuum service technician
●Maintenance level 3
─Customer with Pfeiffer Vacuum service training
─Pfeiffer Vacuum service technician
2.8.3 Advanced training with Pfeiffer Vacuum
For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of
courses and technical trainings.
For more information, please contact Pfeiffer Vacuum technical training.
2.9 Operator requirements
Observing relevant documents and data
1. Read, observe and follow this operating instruction and the work instructions prepared by the op-
erating company, in particular the safety and warning instructions.
2. Install, operate and maintain the product only in accordance with these operating instructions.
3. Carry out all work only on the basis of the complete operating instructions and applicable docu-
ments.
4. Comply with the application limits.
5. Observe the technical data.
6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance
of the product are not answered by these operating instructions.
–You can find information in the Pfeiffer Vacuum service area.
Safety
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3 Product description
3.1 Function
The sensor has a cold cathode measuring system based on the principle of the inverted magnetron.
The sensor outputs the measurement signal numerically.
3.2 Switch and status display
3
1
2
Fig. 1: Switch and LED
1 Switch for calibration value (CAL) 3 LED "HV-ST" (high voltage/cold cathode)
2 LED "ST" (supply voltage/error)
3.3 Identifying the product
You will need all the data from the rating plate to safely identify the product when communicating with
Pfeiffer Vacuum.
1. Read the data on the product rating plate.
2. Record this data.
3. Always have all rating plate specifications to hand.
3.4 Scope of delivery
The scope of delivery includes the following parts:
●Sensor with cable and power supply plug
●Operating instructions
Unpacking the product and checking completeness of the shipment
1. Unpack the product.
2. Remove the transport fasteners, transport protection etc.
3. Store the transport fasteners, transport protection etc. in a safe place.
4. Check that the shipment is complete.
5. Ensure that no parts are damaged.
Product description
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4 Transport and storage
4.1 Transporting the product
NOTICE
Damage caused by incorrect transportation
Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod-
uct.
►Comply with the instructions for safe transportation.
Packing
We recommend keeping the transport packaging and original protective cover.
General information regarding safe transport
►Observe the weight specified on the transport packaging.
►Where possible, always transport or ship the product in the original transport packaging.
►Always use dense and impact-proof transport packaging for the product.
►Remove the existing protective cover and transport protections only immediately prior to installa-
tion.
►Reattach transport locks and transport protections prior to each transport.
4.2 Storing the product
NOTICE
Damage caused by improper storage
Improper storage will lead to damage to the product.
Static charging, moisture, etc. lead to defects on the electronic components.
►Comply with the instructions for safe storage.
Packing
We recommend storing the product in its original packaging.
General information for safe storage
►Store the product in a cool, dry, dust-free place, where it is protected against impacts and me-
chanical vibration.
►Always use dense and impact-proof packaging for the product.
►Where possible, store the product in its original packaging.
►Store electronic components in antistatic packaging.
►Maintain the permissible storage temperature.
►Avoid extreme fluctuations of the ambient temperature.
►Avoid high air humidity.
►Seal connections with the original protective caps.
►Protect the product with the original transport protection (where available).
Transport and storage
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5 Installation
5.1 Establishing the vacuum connection
DANGER
Risk to life due to electric shock
An improperly earthed product is potentially fatal in the event of a fault.
►Connect the product galvanically with the earthed vacuum chamber.
►Ensure that the connection complies with the requirements of a protective bonding according to
EN 61010. (CF and VCR connections comply with this requirement.)
►Use electrically conductive centering rings and circlips for KF connections.
DANGER
Risk to life due to electric shock
If no earth connection is established, voltage flows become hazardous to the touch and could lead to
electronic components sustaining damage.
►Always tighten the electronic unit with the grub screw.
►Ensure that the grub screw of the electronic unit has been tightened correctly.
WARNING
Risk of injury resulting from overpressure in the vacuum system
Opening tensioning pieces with an overpressure > 1000 hPa in the vacuum system can lead to inju-
ries as a result of flying parts, and escaping process medium could prove harmful to health.
Elastomer seals in KF connections (e.g. O-rings) are not resistant to pressures > 2500 hPa. This
could prove harmful to health due to escaping process medium.
►Do not open any tensioning pieces when overpressure is prevalent in the vacuum system.
►Use suitable tensioning pieces for overpressure.
►Use tensioning pieces which can only be opened and closed using a tool (e.g. tightening strap-
circlip).
►Use sealing rings with an outer centering ring.
NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
►When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
►Only use clean tools.
►Make sure that the connection flanges are free of grease.
►Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
►Carry out all work in a well lit area.
NOTICE
Electric flashover from helium
Helium can cause electric flashovers in the unit’s electronics which will destroy the electronics.
►Switch off the unit before carrying out a leak test.
►Remove the electronic unit before carrying out a leak test.
Prerequisites
●Appropriate ambient conditions
●Operating temperature within permissible range
●Adequate room available for electrical connection (e.g. permissible bending radii for cables)
Installation
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1
4
5
3
2
Fig. 2: Establishing the vacuum connection
1 Seal with centering ring 4 Seal with centering ring and filter
2 Electronic unit 5 Tensioning piece
3 Protective cap
Recommendations
►Where possible, ensure that the sensor is not exposed to any vibrations during operation, as vi-
brations in general will lead to deviations in the measured values.
►Mount the sensor in a horizontal to upright mounting orientation (flange facing downwards).
–This prevents condensate and particles from accumulating in the measurement chamber.
►Fit a seal with centering ring and filter for applications susceptible to pollution and to protect the
measuring system against contamination.
Procedure
1. Remove the protective cap and store in a safe place.
2. Install the sensor on the high vacuum system, using vacuum components from the Pfeiffer Vac-
uum Components Shop.
5.2 Establishing the electric connection
NOTICE
Property damage to the electronics or the sensor
Disconnecting the plug-and-socket connection with the voltage supply switched on may lead to the
destruction of electronic components.
►Always interrupt the voltage supply before you plug in or unplug the sensor connection cable.
5.2.1 Connecting the sensor with TIC 010 to HiPace
Electronic drive unit operating instructions
Observe the information on the connection in the operating instructions for the electronic
drive unit.
Assembly instructions for the TIC 010
Observe the information on assembly in the assembly instructions for the TIC 010.
The plug-in contacts of the adapter TIC 010 are numbered on its circuit board and correspond to param-
eters and output values in the further course. You can select the plug-in position of the sensor as de-
sired.
Installation
18/46

Prerequisites
Electronic drive unit Firmware version (or higher)
TC 110 012500
TC 120 010300
TC 400 012400
TC 1200 012400
TM 700 010600
Tbl. 4: Electronic drive units and required firmware versions
Accessories required
●TIC 010, adapter for two sensors
Procedure
1. Make sure that the cable has zero potential.
2. Check the firmware version of the electronic drive unit.
3. Connect the cable to the TIC 010 at the "PV.can" connector of the electronic drive unit.
4. Make the settings and perform the control via the interfaces of the electronic drive unit.
5.2.2 Connecting the sensor with micro USB to HiPace neo
Vacuum pump operating instructions
Observe the information on the connection in the operating instructions for the vacuum
pump.
5
4
3
2
1
Fig. 3: Micro USB connection (type B)
1 + 5 V (blue) 4 Not connected (red)
2 Sensor RxD / master TxD (white) 5 GND (black)
3 Sensor TxD / master RxD (green)
Procedure
1. Make sure that the cable has zero potential.
2. Connect the cable to a free micro USB connector of the vacuum pump.
3. Make the settings and perform the control via the interfaces of the electronic drive unit.
Installation
19/46

6 Operation
The connected sensor unit is ready for operation as soon as the supply voltage is supplied to the elec-
tronic drive unit.
LED Meaning
"ST" "HV-ST"
Off Off No power supply
Lights up yellow Off Supply voltage OK, cold cathode off
Lights up yellow Flashes green Supply voltage OK, pressure in cold cathode range, cold cath-
ode not ignited
Lights up green Lights up green Cold cathode ignited
Flashes red Off EEPROM error
Lights up yellow Lights up green Measuring range not reached or exceeded
Lights up red Off Unstable supply voltage
Tbl. 5: Illuminating diodes
Signal evaluation via output interfaces
The output interfaces of the electronic drive unit with the applicable Pfeiffer Vacuum proto-
col and the Pfeiffer Vacuum parameter set are used to operate the connected accessory
devices on a Pfeiffer Vacuum vacuum pump.
See the valid operating instructions for the electronic drive unit used.
Prerequisites
Control unit RS-485 parameter Firmware version (or higher)
DCU Data type "u_expo_new" 020300
HPU 001 010300 1)
Tbl. 6: Required firmware versions
Checking the firmware versions
►Request the firmware version of the electronic drive unit via parameter [P:312] of the electronic
drive unit (TC)
►Request the firmware version of the display and control unit via parameter [P:351] of the display
and control unit (DCU or HPU)
6.1 Determining the effective pressure with calibration factors
The measuring signal is gas type-dependent. The characteristics apply for nitrogen (N2), oxygen (O2),
dry air and carbon monoxide (CO).
1) Read-only access up to firmware version 010300
Operation
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