Pfeiffer Vacuum RPT 010 User manual
OPERATING INSTRUCTIONS
EN
Translation of the Original
RPT 010
Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new sensor is designed to support
you in your individual application with maximum performance and without malfunctions. The
name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and
complete range of top-quality products and first-class service. From this extensive, practical
experience we have gained a large volume of information that can contribute to efficient
deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/32
Table of contents
1 About this manual 5
1.1 Validity 5
1.1.1 Applicable documents 5
1.1.2 Variants 5
1.2 Target group 5
1.3 Conventions 6
1.3.1 Instructions in the text 6
1.3.2 Pictographs 6
1.3.3 Stickers on the product 6
1.3.4 Abbreviations 6
1.4 Trademark proof 7
2 Safety 8
2.1 General safety information 8
2.2 Safety instructions 8
2.3 Safety precautions 9
2.4 Proper use 10
2.5 Foreseeable improper use 10
2.6 Personnel qualification 10
3 Product description 11
3.1 Function 11
3.2 Status display 11
3.3 Identifying the product 11
3.4 Scope of delivery 11
4 Transport and storage 12
4.1 Transporting the product 12
4.2 Storing the product 12
5 Installation 13
5.1 Establishing the vacuum connection 13
5.1.1 Connecting the sensor to HiPace 13
5.1.2 Connecting the sensor to HiScroll 14
5.2 Establishing the electric connection 15
5.2.1 Connecting the sensor with TIC 010 to HiPace 15
5.2.2 Connecting the sensor with a D-Sub adapter to HiScroll 16
5.2.3 Connecting the sensor with micro USB to HiPace neo 16
6 Operation 17
6.1 Evaluating the measurement signal 17
6.2 Determining the effective pressure with calibration factors 17
7 Maintenance 19
7.1 Removing components 19
7.2 Cleaning of components 20
7.3 Calibrating the pressure sensor 20
8 Shipping 22
9 Recycling and disposal 23
9.1 General disposal information 23
9.2 Disposal of sensors 23
10 Service solutions by Pfeiffer Vacuum 24
11 Spare parts 26
Table of contents
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
TC “electronic drive unit” operating instructions (depending on the device used)
HiPace "turbopump" operating instructions (depending on the device used)
HiScroll “scroll pump” operating instructions (depending on the device used)
TIC 010 "adapter for 2 sensors" assembly instructions PT 0484 BN
Declaration of conformity (part of these instructions)
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
This document applies to products with the following part numbers:
Article number Designation Connection
PT R71 035 RPT 010 (G1/8", 0.35 m cable) Molex
PT R71 050 RPT 010 (G1/8", 0.5 m cable) Molex
PT R71 100 RPT 010 (G1/8", 1.0 m cable) Molex
PT R71 150 RPT 010 (G1/8", 1.5 m cable) Molex
PT R71 550 RPT 010 (G1/8", 0.5 m cable) Micro USB
PD 100 100 -T 1) RPT 010 (G1/8", 0.5 m cable) D-Sub, 15-pin
Tbl. 2: Variants
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1) The information on the rating plate is PT R71 050.
About this manual
5/32
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
The pictographs used in the document indicate useful information.
Note
Tip
Wear laboratory gloves
Perform a visual inspection
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meanings.
D-35614 Asslar
Mod.
P/N
S/N
Input
RPT 010
PT R71 xxx
xxxxxxxx
5 V DC 0.25 W
Made in Liechtenstein 2020/10 CUS
TÜV Rheinland
Rating plate
The rating plate is located on
the side of the sensor.
1.3.4 Abbreviations
Abbreviation Explanation
ATM Atmosphere
c Constant for converting measuring signal and pressure
C Calibration factor for calculating the pressure for gases other than air
HV High vacuum
HPU Handheld Programming Unit
DCU Display Control Unit
LPS Limited power source
MSL Mean sea level
About this manual
6/32
Abbreviation Explanation
OR Overrange
[P:000] Electronic drive unit parameter with number
p Pressure
PLC Programmable logical controller
WAF Width Across Flats
TC Turbopump electronic drive unit (turbo controller)
U Measuring signal [V] (output voltage)
UR Underrange
Tbl. 3: Abbreviations used
1.4 Trademark proof
●HiPace® is a registered trademark of Pfeiffer Vacuum GmbH.
●Molex® is a registered trademark of Molex Incorporated, Lisle, Illinois, USA.
About this manual
7/32
2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product’s life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during maintenance
DANGER
Electric shocks due to moisture penetrating into the device
Moisture that has penetrated into the device results in personal injury through electric shocks.
►Only operate the device in a dry environment.
►Operate the device away from fluids and humidity sources.
►Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv-
ice.
►Always disconnect the current supply before cleaning the device.
Safety
8/32
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
WARNING
Health hazards due to cleaning agent
The cleaning agent being used causes health hazards which could include, for example, poisoning,
allergies, skin irritations, chemical burns or damage to the airways.
►When handling cleaning agents, observe the applicable regulations.
►Adhere to safety measures regarding handling and disposal of cleaning agents.
►Be aware of potential reactions with product materials.
Risks when shipping
WARNING
Risk of poisoning from contaminated products
Where products that contain harmful substances are shipped for maintenance or repair purposes, the
health and safety of service personnel is at risk.
►Comply with the instructions for safe distribution.
Risks during disposal
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
2.3 Safety precautions
The product is designed according to the latest technology and recognized safety engineering rules.
Nevertheless, improper use can result in danger to operator all third party life and limb, and product
damage and additional property damage.
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Safety
9/32
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Pass on safety instructions to all other users.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Do not carry out your own conversions or modifications on the device.
►Observe the unit protection degree prior to installation or operation in other environments.
►Provide suitable touch protection, if the surface temperature exceeds 70 °C.
►Inform yourself about any contamination before starting work.
2.4 Proper use
The sensor is used for the integrated pressure measurement at the Pfeiffer Vacuum HiPace or HiScroll
within the permissible total pressure range.
Use the product according to its intended purpose
1. Install, operate and maintain the sensor only as prescribed in these operating instructions.
2. Use the sensor only for the pressure measurement of air, inert gases and gas mixtures outside
their explosion limits.
3. Comply with the application limits.
4. Observe the technical data.
2.5 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:
●Use outside the mechanical and electrical application limits in accordance with the technical data
●Use with corrosive or explosive media, if this is not explicitly permitted
●Use outdoors
●Use after technical changes (on the inside or the outside of the product)
●Use with replacement or accessory parts that are unsuitable or are not approved
2.6 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
Safety
10/32
3 Product description
3.1 Function
The sensor has two measurement systems:
●Pirani measurement system
●Piezo-resistive measurement system
The sensor responds to measured value requests, type requests and adjustment commands. Signals
are evaluated via the interfaces of the electronic drive unit using a Pfeiffer Vacuum display and control
unit or external units (e.g. PLC or PC).
3.2 Status display
Information on the operating status of the sensor is provided via the display and control unit.
You can obtain further details in the display and control unit operating instructions.
3.3 Identifying the product
You will need all the data from the rating plate to safely identify the product when communicating with
Pfeiffer Vacuum.
1. Read the data on the product rating plate.
2. Record this data.
3. Always have all rating plate specifications to hand.
3.4 Scope of delivery
The scope of delivery includes the following parts:
●Sensor with cable and power supply plug
●Operating instructions
Unpacking the product and checking completeness of the shipment
1. Unpack the product.
2. Remove the transport fasteners, transport protection etc.
3. Store the transport fasteners, transport protection etc. in a safe place.
4. Check that the shipment is complete.
5. Ensure that no parts are damaged.
Product description
11/32
4 Transport and storage
4.1 Transporting the product
NOTICE
Damage caused by incorrect transportation
Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod-
uct.
►Comply with the instructions for safe transportation.
Packing
We recommend keeping the transport packaging and original protective cover.
General information regarding safe transport
►Observe the weight specified on the transport packaging.
►Where possible, always transport or ship the product in the original transport packaging.
►Always use dense and impact-proof transport packaging for the product.
►Remove the existing protective cover and transport protections only immediately prior to installa-
tion.
►Reattach transport locks and transport protections prior to each transport.
4.2 Storing the product
NOTICE
Damage caused by improper storage
Improper storage will lead to damage to the product.
Static charging, moisture, etc. lead to defects on the electronic components.
►Comply with the instructions for safe storage.
Packing
We recommend storing the product in its original packaging.
General information for safe storage
►Store the product in a cool, dry, dust-free place, where it is protected against impacts and me-
chanical vibration.
►Always use dense and impact-proof packaging for the product.
►Where possible, store the product in its original packaging.
►Store electronic components in antistatic packaging.
►Maintain the permissible storage temperature.
►Avoid extreme fluctuations of the ambient temperature.
►Avoid high air humidity.
►Seal connections with the original protective caps.
►Protect the product with the original transport protection (where available).
Transport and storage
12/32
5 Installation
5.1 Establishing the vacuum connection
NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
►When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
►Only use clean tools.
►Make sure that the connection flanges are free of grease.
►Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
►Carry out all work in a well lit area.
NOTICE
Damage to housing or cable connection
Any improper use of force will damage the sensor.
►Do not apply any force with a tool to the housing or cable connection.
Vacuum pump operating instructions
Observe the information on the connection in the operating instructions for the vacuum
pump.
5.1.1 Connecting the sensor to HiPace
Required tools
●Open-end wrench, WAF 19, ≤ 4 mm flat
●Calibrated torque wrench (tightening factor ≤ 2.5)
Prerequisites
●Vacuum pump switched off and vented
●Sealing gas connection or fore-vacuum connection with intermediate piece for the sensor selected
●Appropriate ambient conditions
●Sufficient space for electrical connection (e.g. permissible bending radii of cables)
5
1
2
3
4
Fig. 2: Example: Connect the sensor to HiPace
1 Electronic drive unit 4 Sensor cable
2 1/8” connector (here: sealing gas connection) 5 Pump bottom part
3 Sensor
Installation
13/32
Procedure
1. Remove the protective cap from the sensor and store it in a safe place.
2. Remove the locking screw from the desired connector of the turbopump.
3. Mount the sensor on the vacuum side on the desired G 1/8" connector of the turbopump.
–Tightening torque: max. 3 Nm
5.1.2 Connecting the sensor to HiScroll
Required tools
●Open-end wrench, WAF 19, ≤ 4 mm flat
●Allen key, WAF 3
●Allen key, WAF 4
●Calibrated torque wrench (tightening factor ≤ 2.5)
Prerequisites
●Vacuum pump switched off and vented
●Appropriate ambient conditions
●Sufficient space for electrical connection (e.g. permissible bending radii of cables)
●Fan cover of HiScroll removed according to operating instructions
1
3
4
5
6
2
7
Fig. 3: Example: Connecting the sensor to HiScroll
1 Spiral housing 5 Plastic clamps and interior hexagon socket screws
2 Pressure sensor connection 6 D-Sub adapter of the sensor
3 Sensor 7 Remote connection
4 Sensor cable
Procedure
1. Remove the protective cap from the sensor and store it in a safe place.
2. Remove the locking screw from the pressure sensor connector of the HiScroll.
3. Mount the sensor on the vacuum side on the pressure sensor connector of the HiScroll.
4. Tighten the sensor at the hexagon socket (WAF 19) on the HiScroll.
–Tightening torque: max. 2.5 Nm
5. Route the sensor cable on the spiral housing.
6. Fasten the sensor cable to the spiral housing with two plastic clamps and interior hexagon socket
screws.
–Tightening torque: max. 1.25 Nm
Installation
14/32
5.2 Establishing the electric connection
NOTICE
Property damage to the electronics or the sensor
Disconnecting the plug-and-socket connection with the voltage supply switched on may lead to the
destruction of electronic components.
►Always interrupt the voltage supply before you plug in or unplug the sensor connection cable.
5.2.1 Connecting the sensor with TIC 010 to HiPace
Electronic drive unit operating instructions
Observe the information on the connection in the operating instructions for the electronic
drive unit.
Assembly instructions for the TIC 010
Observe the information on assembly in the assembly instructions for the TIC 010.
The plug-in contacts of the adapter TIC 010 are numbered on its circuit board and correspond to param-
eters and output values in the further course. You can select the plug-in position of the sensor as de-
sired.
Prerequisites
Electronic drive unit Firmware version (or higher)
TC 110 012500
TC 120 010300
TC 400 012400
TC 1200 012400
TM 700 010600
Tbl. 4: Electronic drive units and required firmware versions
Accessories required
●TIC 010, adapter for two sensors
Procedure
1. Make sure that the cable has zero potential.
2. Check the firmware version of the electronic drive unit.
3. Connect the cable to the TIC 010 at the "PV.can" connector of the electronic drive unit.
4. Make the settings and perform the control via the interfaces of the electronic drive unit.
Installation
15/32
5.2.2 Connecting the sensor with a D-Sub adapter to HiScroll
2
3
4
5
6
7
10
11
8
9
12
13
14
15
1
DI
n.c.
DI2
DI
DI
24 V DC* (V+)
DO1
DO2
RS 485 D+
RS 485 D-
FE
2
3
4
5
6
7
10
11
8
9
12
13
14
15
1RPT DaI
RPT DaO
n.c.
n.c.
13
14
15
9
8
11
10
7
6
5
4
3
2
HiScroll RPT 010
Fig. 4: D-Sub adapter connection diagram
The D-Sub adapter of the sensor guides contacts 2 to 11 and 13 to 15 of the remote interface to the D-
Sub socket on the back. Contacts 1 and 12 are used to control the sensor.
Connecting the sensor to remote
1. Make sure that the cable has zero potential.
2. Connect the cable to the connector of the electronic drive unit.
3. Make the settings and perform the control via the interfaces of the electronic drive unit.
5.2.3 Connecting the sensor with micro USB to HiPace neo
Vacuum pump operating instructions
Observe the information on the connection in the operating instructions for the vacuum
pump.
5
4
3
2
1
Fig. 5: Micro USB connection (type B)
1 + 5 V (blue) 4 Not connected (red)
2 Sensor RxD / master TxD (white) 5 GND (black)
3 Sensor TxD / master RxD (green)
Procedure
1. Make sure that the cable has zero potential.
2. Connect the cable to a free micro USB connector of the vacuum pump.
3. Make the settings and perform the control via the interfaces of the electronic drive unit.
Installation
16/32
6 Operation
The connected sensor unit is ready for operation as soon as the supply voltage is supplied to the elec-
tronic drive unit.
The pressure measured in the Pirani range depends on the gas type.
Recommendations
►Observe a minimum stabilization period of 5 to 10 minutes.
►Note the relationship between measuring signal and pressure.
6.1 Evaluating the measurement signal
Signal evaluation via output interfaces
The output interfaces of the electronic drive unit with the applicable Pfeiffer Vacuum proto-
col and the Pfeiffer Vacuum parameter set are used to operate the connected accessory
devices on a Pfeiffer Vacuum vacuum pump.
See the valid operating instructions for the electronic drive unit used.
Prerequisites
Control unit RS-485 parameter Firmware version (or higher)
DCU Data type "u_expo_new" 020300
HPU 001 010300 2)
Tbl. 5: Required firmware versions
Checking the firmware versions
►Request the firmware version of the electronic drive unit via parameter [P:312] of the electronic
drive unit (TC)
►Request the firmware version of the display and control unit via parameter [P:351] of the display
and control unit (DCU or HPU)
6.2 Determining the effective pressure with calibration factors
Gas and vapor mixtures
Process gases are mostly mixtures of gas and vapor. Precise measuring of gas and vapor
mixtures is only possible using partial pressure measurement instruments, for example a
quadrupole mass spectrometer.
The measurement signal of the pressure sensor depends on the type of gas in the Pirani area. The pre-
set correction factor = 1 applies for nitrogen (N2), oxygen (O2), dry air, and carbon monoxide (CO).
Gas type Calibration factor (C)
Air, oxygen (O2), carbon monoxide (CO), nitrogen (N2) 1.0
Hydrogen (H2) 0.5
Carbon dioxide (CO2) 0.9
Water vapor 0.5
Helium (He) 0.8
Neon (Ne) 1.4
Argon (Ar) 1.7
Krypton (Kr) 2.4
The calibration factors provided are mean values.
2) Read-only access up to firmware version 010300
Operation
17/32
Gas type Calibration factor (C)
Xenon (Xe) 3.0
Freon 12 0.7
The calibration factors provided are mean values.
Tbl. 6: Calibration factors for the pressure range < 1 hPa
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
8
6
4
2
10–3
10–3 2 4 610–2 2 4 610–1 2 4 61002 4 61012 4 6102
H2He Ne
Xe
Kr
Ar
CO2
Freon 12
Air
O2
CO
N2
p [hPa]
peff [hPa]
Water vapor
Fig. 6: Displayed pressure
Within the pressure range < 1 hPa, the display is linear.
Set calibration factor at electronic drive unit
►Use [P:742] to enter calibration factor and correct displayed measured value.
Alternatively: Calculate pressure for gases other than air
1. Set the calibration factor in the electronic drive unit to 1.
2. Calculate the effective pressure using the following formula:
Peff = C × p
●Peff = Effective pressure
●C = Calibration factor of the gas to be measured
●p = Displayed pressure (gauge calibrated for air)
Operation
18/32
7 Maintenance
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
Maintenance in the Pfeiffer Vacuum Service Center
Pfeiffer Vacuum offers a complete maintenance service for all products.
Pfeiffer Vacuum recommends: Contact your Pfeiffer Vacuum Service Center to arrange the
maintenance of defective products and components.
Cleaning in the Pfeiffer Vacuum Service Center
Pfeiffer Vacuum recommends: Contact your nearest Pfeiffer Vacuum Service Center to ar-
range the cleaning of heavily-soiled products and components.
Warranty claim
Opening the device during the warranty period or damaging/removing the warranty seal will
void the warranty.
Contact the Pfeiffer Vacuum Service Center in the event of process-related shorter mainte-
nance intervals.
First read through the sections completely
Read the section with the work instructions through completely first before you commence
with work.
Utilization in other climatic conditions, long-term operation, extreme temperatures, a different mounting
orientation and aging or contamination can lead to a zero point shift in the Pirani measuring circuit. A
zero point shift will necessitate recalibration or cleaning.
7.1 Removing components
NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
►When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
►Only use clean tools.
►Make sure that the connection flanges are free of grease.
►Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
►Carry out all work in a well lit area.
Prerequisites
●Vacuum system vented to atmospheric pressure
●Supply voltage switched off
Maintenance
19/32
Removing the sensor
1. Disconnect the sensor cable from the connected electronic drive unit.
2. Remove the sensor from the vacuum pump.
3. Fit the protective cap on the connection flange.
7.2 Cleaning of components
DANGER
Electric shocks due to moisture penetrating into the device
Moisture that has penetrated into the device results in personal injury through electric shocks.
►Only operate the device in a dry environment.
►Operate the device away from fluids and humidity sources.
►Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv-
ice.
►Always disconnect the current supply before cleaning the device.
WARNING
Health hazards due to cleaning agent
The cleaning agent being used causes health hazards which could include, for example, poisoning,
allergies, skin irritations, chemical burns or damage to the airways.
►When handling cleaning agents, observe the applicable regulations.
►Adhere to safety measures regarding handling and disposal of cleaning agents.
►Be aware of potential reactions with product materials.
NOTICE
Damage caused by penetrating moisture
Penetrating moisture, e.g. through condensation or dripping water, damages the device.
►Protect the device against moisture penetrating.
►Only operate the device in a clean and dry environment.
►Operate the device away from fluids and humidity sources.
►Take special precautions if there is a risk of dripping water.
►Do not switch on the device if fluid has penetrated into it, instead contact the Pfeiffer Vacuum
Service Center.
NOTICE
Damage caused by unsuitable cleaning agents
Unsuitable cleaning agents damage the product.
►Do not use solvents as they attack the surface.
►Do not use any aggressive or abrasive cleaning agents.
Required consumables
●Industrial alcohol
●Cloth (soft, lint-free)
External cleaning of the device
1. Always use a cloth soaked in industrial alcohol for external cleaning.
2. Allow the surfaces to dry thoroughly after cleaning.
7.3 Calibrating the pressure sensor
Pfeiffer Vacuum calibrated the pressure sensor at the factory.
Required aids
●Vacuum gauge for reference measurement on the vacuum system
●Pfeiffer Vacuum display and control unit or PC
Maintenance
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