Pfeiffer Vacuum RPT 010 User manual

PT 0490 BEN/A (1902)
OPERATING INSTRUCTIONS
RPT 010
Piezo/Pirani sensor for the integrated pressure measurement
Translation of the original instructions
EN

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
4 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
4.1 Vacuum connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
4.2 Electrical connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
5 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
5.1 Adjusting the sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
6 Spare parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
7 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
7.1 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

About this manual
3
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
2Safety
2.1 Safety precautions
●Observe the safety and accident prevention regulations.
●Check regularly that all safety precautions are being complied with.
●The unit has been accredited with protection class IP 54. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●Consider possible reactions between the materials and the process media.
●Consider possible reactions of the process media due to the heat generated by the
product.
●Do not modify or alter the unit yourself.
●Inform yourself about a possible contamination before starting work.
●Adhere to the relevant regulations and take the necessary precautions, when handling
contaminated parts.
●Communicate the safety instructions to other users.
2.2 Proper use
●The piezo/Pirani sensor RPT 010 serves for the integrated pressure measurement
within the permissible total pressure range.
●The RPT 010 sensor is only suitable for pressure measurement of air, inert gases and
gas mixtures outside of their explosion limits.
●Use the RPT 010 in conjunction with the PV.can TIC 010 converter on a Pfeiffer Vac-
uum HiPace® turbo pump.
3 Product description
The RPT 010 sensor is a two-part pressure gauge consisting of a Pirani and a piezo-re-
sistant component.
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.

4
Installation
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Product identification on the rating plate
The sensor responds to measurement value queries, type queries and setting com-
mands.
Signals are evaluated by the interfaces of the drive electronics using a Pffeiffer Vacuum
display and control device or external devices (e.g., PLC or a PC).
The unit RPT 010 must be installed and operated in the following ambient conditions:
4 Installation
4.1 Vacuum connection
Remove and keep safe the protective covers.
Screw the RPT 010 sensor into a suitable G 1/8" connection on the vacuum side of
the turbopump. The following options are available as standard equipment:
– Sealing gas connection
–Fore-vacuum connection with intermediate piece
Tightening torque at the hexagon head (width across flats 19): 2-3 Nm.
–Do not exert any forces through tools on the housing or cable connection!
4.2 Electrical connection
Installation location weather protected (indoor)
Protection class IP 54
Installation altitude max. 2000 m
Ambient temperature +5°C to +60°C
Relative humidity 5 ... 85 %, non-condensing
Atmospheric pressure 860 hPa - 1060 hPa
D-35641 Asslar
Mod.: CPT 100
Range: 2000 - 1 mbar
Mod.-No.: PT R31 130
Ser.-No.: 42000618 Made in
Germany
2014
NOTICE
Vacuum component
Dirt and damage impair the function of the vacuum component.
When handling vacuum components, ensure that they are kept clean and are protect-
ed against damage.
Ensure that the connection flange is clean, dry and free of grease.
NOTICE
Damage to the product
Only connect cables when de-energized.
Never establish a connection using a live cable.
Specify the sensor number
The plug contacts of the converter are numbered on the PCB and correspond in the fur-
ther course with parameters and output values.
●The plug contact can be freely selected.

Operation
5
Connect the sensor RPT 010 to the interface "PV.can" of the electronic drive unit us-
ing the converter TIC 010.
The RPT 010 sensor with converter TIC 010 can be connected to and operated with all
electronic drive units with the following software version or higher:
The software version can be queried via parameter [P:312] of the respective electron-
ic drive unit or via [P:351] of the display and control unit.
5Operation
After applying the operating voltage to the electronic drive unit, the connected sensor is
ready for operation. Measured values are meaningful after a stabilization period of 5-10
min.
The pressure measured in the Pirani range depends on the gas type. To adjust for differ-
ent gases, a corresponding gas type correction factor can be set; this generates correct
measurements in the pressure range below 1 hPa. The gas type correction factor is fac-
tory-set for air and N2to 1.00 (see p. 6, chap. 7).
Set the correction factors using [P:742] and [P:752].
5.1 Adjusting the sensor
The sensor is factory-adjusted. Re-adjusting is necessary in the case of, e.g.:
●Contamination
●modifying the mounting orientation
●extreme temperature fluctuations
●aging
Evacuate the vacuum chamber to the pressure p ≤1·10-5 hPa.
Observe the stabilization period.
Enter pressure value [P:740], resp. [P:750] using the value "000000" for low pressure
(corresponds to p < 1·10-5 hPa).
– ‘’ur’’ (under range)
Vent the vacuum system to atmospheric pressure.
Observe the stabilization period.
Set the actual pressure value [P:740] resp. [P:750] exactly to the present pressure,
– e.g. enter 980 hPa using the value "980022".
Electronic drive unit Software version
TC 110 012500
TC 120 010300
TC 400 012400
TC 1200 012400
TM 700 010600
Access to data types with DCU and HPU
●DCU display and control units up to firmware version 020300 do not support RS-485
parameters of the data type "u_expo_new".
●The HPU 001 display and control device up to firmware version 010300 only supports
read access to RS-485 parameters of the data type "u_expo_new."
Signal evaluation via the interfaces of the electronic drive unit
The electronic drive unit output interfaces serve to the operation of accessories con-
nected to a Pfeiffer Vacuum turbopump using the Pfeiffer Vacuum protocol and the Pfei-
ffer Vacuum parameter set.
Observe valid operating instructions of the used electronic drive unit.

6
Spare parts
6 Spare parts
7 Technical data and dimensions
7.1 Dimensions
Designation RPT 010
Seal ring P 3529 133 -P
Parameter RPT 010
Flange (in) G 1/8"
Method of measurement Piezo/Pirani
Accuracy of measurement 5 · 10-4 – 1 · 10-3 ± 50 %; 1 · 10-3 – 100 hPa ±15 %; 100
– 1200 hPa ±15 hPa
Repeatability of measurement 1 · 10-3 – 100 hPa ±3 %; 100 – 1200 hPa ±3 hPa
Materials in contact with media Ceramic, nickel, stainless steel, tungsten, silicon oxide,
glass, araldite, solder
Pressure max. 2000 hPa
Measurement range max. 1200 hPa
Measurement range min. 5 · 10-4 hPa
Sensor cable length max. 1.5 m
Measuring cycle 100 ms
Interface: Connection Cable with connector for TIC 010
Temperature: Operating +5 – +60 °C
Temperature: Storage -20 – +70 °C
Supply: Voltage 5 V DC
Supply: power consumption 0.25 W
Volume 0.4 cm3
Protection category IP 54
Weight 92 (with cable 1m) g
Parameter TIC 010
Protection category IP 40
Output voltage 5 V DC
Input voltage 24 V DC
Weight 24 g
Pirani correction factor ( for pressures <1 · 10-1 hPa)
N2
Air
H2
He
Ar
CO2
1.00
1.00
0.58
1.02
1.59
0.89
9
28
41
Ø 30.7
5
13
SW 19
G 1/8”

Declaration of conformity
We hereby declare that the product cited below satisfies all relevant provisions accord-
ing to the following EC directives:
●Electromagnetic Compatibility 2014/30/EU
●Low Voltage 2014/35/EU
Piezo/Pirani
RPT 010
Harmonised standards and national standards and specifications which have been ap-
plied:
EN 61326-1: 2013 Group 1 / Class B
EN 50581: 2012
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(Dr. Ulrich von Hülsen)
Managing Director
Asslar, 2019-02-11

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