Pfeiffer Vacuum CMR 361 User manual

BG 5136 BEN / B (2013-11)
A PASSION FOR PERFECTION
CMR 361 … CMR 365
Ceramic Capacitance Gauge
Operating Instructions

2BG 5136 BEN / B (2013-11)
Product Identification
In all communications with Pfeiffer Vacuum, please specify the
information given on the product nameplate. For convenient re-
ference copy that information into the space provided below.
Pfeiffer Vacuum, D-35614 Asslar
Typ:
Range:
No:
F-No:
V W

BG 5136 BEN / B (2013-11) 3
Validity
This document applies to products with the following part num-
bers:
Measurement range
min. (0 V) F.S. (9 V) max. (9.8 V)
Type Part number Flange [hPa]
[Pascal]
[hPa]
[Pascal]
[hPa]
[Pascal]
PT R24 600 ½" tube
PT R24 601 DN 16 ISO-KF
PT R24 602 DN 16 CF-R
CMR 361
PT R24 603 8 VCR®
10-1
101
1000
100'000
1100
110'000
PT R24 610 ½" tube
PT R24 611 DN 16 ISO-KF
PT R24 612 DN 16 CF-R
CMR 362
PT R24 613 8 VCR®
10-2
100
100
10'000
110
11'000
PT R24 620 ½" tube
PT R24 621 DN 16 ISO-KF
PT R24 622 DN 16 CF-R
CMR 363
PT R24 623 8 VCR®
10-3
10-1
10
1'000
11
1'100
PT R24 630 ½" tube
PT R24 631 DN 16 ISO-KF
PT R24 632 DN 16 CF-R
CMR 364
PT R24 633 8 VCR®
10-4
10-2
1
100
1.1
110
PT R24 640 ½" tube
PT R24 641 DN 16 ISO-KF
PT R24 642 DN 16 CF-R
CMR 365
PT R24 643 8 VCR®
10-5
10-3
0.1
10
0.11
11
The part number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to CMR 361 gauges with the
DN 16 ISO-KF vacuum connection. They apply to other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice. All dimensions in mm.

4BG 5136 BEN / B (2013-11)
Intended Use
The Ceramic Capacitance Gauges of the CMR 36X series are
intended for absolute pressure measurement of gases in their
respective pressure ranges (→3).
Function
The Ceramic Capacitance Gauge consists of a capacitive sensor
element made of aluminum oxide ceramics and electronics
which convert the capacitance into a DC voltage output signal.
The output signal is linear to the measured pressure and inde-
pendent of the gas type.
Trademark
VCR®Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge CMR 36X
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Instructions German
1× Operating Instructions English
1× Operating Instructions French

BG 5136 BEN / B (2013-11) 5
Contents
Product Identification 2
Validity 3
Intended Use 4
Function 4
Trademark 4
Patents 4
Scope of Delivery 4
1Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2Technical Data 8
3Installation 13
3.1 Vacuum Connection 13
3.2 Power Connection 16
4Operation 18
4.1 Displays 18
4.2 Zeroing the Gauge 18
4.2.1 <ZERO>Adjustment 19
4.3 Activating the Factory Setting (Factory Reset) 22
5Deinstallation 23
6Maintenance, Repair 24
7Returning the Product 25
8Disposal 25
Conversion Table 26
EC Declaration of Conformity 27
For cross-references within this document, the symbol (→XY)
is used.

6BG 5136 BEN / B (2013-11)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

BG 5136 BEN / B (2013-11) 7
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.

8BG 5136 BEN / B (2013-11)
2 Technical Data
Measurement range →"Validity"
Accuracy 1)
PT R24 600 … PT R24 633
PT R24 640 … PT R24 643
0.20% of reading
0.50% of reading
Temperature effect on zero
PT R24 600 … PT R24 623
PT R24 630 … PT R24 633
PT R24 640 … PT R24 643
0.0050% F.S./ °C
0.015% F.S./ °C
0.020% F.S./ °C
Temperature effect on span
PT R24 600 … PT R24 633
PT R24 640 … PT R24 643
0.01% of reading / °C
0.03% of reading / °C
Resolution 0.003% F.S.
Gas type dependence none
Output signal analog
(measuring signal)
Voltage range 0 … +11 V
Measuring range +1.0 … +9.8 V
Relationship voltage-pressure linear
Error signal <0.4 V (no supply,
sensor error)
>9.8 V ("overrange")
Output impedance <10 Ω(short-circuit proof)
Loaded impedance 10 kΩ
Response time
PT R24 600 … PT R24 633
PT R24 640 … PT R24 640
30 ms
130 ms
1) Non-linearity, hysteresis, repeatability in the calibrated range at
25 °C ambient operating temperature without temperature effects
after operation of 2 h.

BG 5136 BEN / B (2013-11) 9
Gauge identification Resistance 13.2 kΩrefer-
enced to supply common
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV). The connection to the gauge
has to be fused.
Supply voltage
at the gauge
ripple
+14 … +30 VDC
≤1 Vpp
Current consumption <500 mA
(max. starting current)
Power consumption
(depending on supply voltage) ≤1 W
Internal fuse 1 AT (slow), automatic reset
(Polyfuse)
The gauge is protected against reverse polarity of the supply
voltage.
Electrical connection Hirschmann compact
connector, type GO 6,
6 poles, pins
Sensor cable 5 poles plus shielding
Cable length ≤120 m (0.25 mm² conductor)
For longer cables, larger conductor cross-sections are required
(Rcable ≤1.0 Ω).
Grounding concept
Vacuum flange - signal common →"Power Connection"
Supply common - signal common conducted separately; for dif-
ferential measurement (10 Ω)

10 BG 5136 BEN / B (2013-11)
Materials exposed to vacuum
Flange, tube
Sensor and diaphragm
Sensor–diaphragm connection
Ceramics–metal connection
stainless steel AISI 316L
ceramics (Al2O3≥99.5%)
glass ceramics solder
AgTiCu hard solder, Vacon 70
(28% Ni, 23% Co, 49% Fe)
Internal volume ≤3.6 cm3
Admissible pressure (absolute)
PT R24 600 … PT R24 603
PT R24 610 … PT R24 633
PT R24 640 … PT R24 643
300 kPa
200 kPa
130 kPa
Bursting pressure (absolute) 500 kPa
Admissible temperatures
Storage
Operation
Bakeout (not in operation)
–40 °C … +65 °C
+5 °C … +50 °C
≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Type of protection IP 30

BG 5136 BEN / B (2013-11) 11
Dimensions [mm]
69 23
55
8 VCR
female
DN 16 ISO-KF DN 16 CF-R
44
26
OD½"
Weight ≤370 g

12 BG 5136 BEN / B (2013-11)
Analog Measuring Signal vs. Pressure
123456789
0.5
100
00.6
0.6
1.0
0.7
0.8
0.9
0.1
0.2
0.3
0.4
1.1
9.8
sensor error
underrange
overrangesensor error
underrange
overrangesensor error
underrange
overrange
sensor error
underrange
overrange
F.S.
Measuring signal U [V]
Pressure p [hPa]
p = (U - 1) × c (F.S.)
hPa Pa Torr
c 0.125 12.5 0.094
Example: Gauge CMR 361 with 1000 hPa F.S.
Measuring signal Uout = 6 V
p = (6 V - 1 V) × 0.125 × 1000 hPa
= 625 hPa

BG 5136 BEN / B (2013-11) 13
3 Installation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>100 kPa
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>250 kPa
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.

14 BG 5136 BEN / B (2013-11)
DANGER
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:
•CF and VCR flanges fulfill this requirement.
•For gauges with a KF flange, use a conductive
metallic clamping ring.
•For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.

BG 5136 BEN / B (2013-11) 15
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep conden-
sates and particles from getting into the measuring
chamber preferably choose a horizontal to upright posi-
tion and possibly use a seal with a centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the but-
tons can be accessed with a pin (→18).
Remove the protective lid and connect the product to the vac-
uum system.
Clamp
Seal with centering ring
or
Seal with centering ring
and filter
Protective lid
Keep the protective lid.

16 BG 5136 BEN / B (2013-11)
3.2 Power Connection
Make sure the vacuum connection is properly made
(→13).
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV). The connection to the gauge
has to be fused.
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
•Connect the cable shield to ground on one side via
the chassis ground. Do not connect the other side of
the shield.
•Connect the supply common with protective ground
directly at the power supply.
•Use differential measurement input (signal common
and supply common conducted separately).
•Potential difference between supply common and
housing ≤18 V (overvoltage protection).

BG 5136 BEN / B (2013-11) 17
If no sensor cable is available, make one according to the
following diagram.
Electrical connection
Pin 1 Identification
Pin 2 Signal output (measuring signal)
Pin 3 Signal common
Pin 4 Supply
Pin 5 Supply common
Pin 6 Screening
Connector,
soldering side
2
5
31
6
4
–
+
–
+
2
3
1
4
5
100nF
18 V
6
13K2
1MΩ
Connect the sensor cable to the gauge and secure it using
the lock screw.
Connect the sensor cable to the controller.

18 BG 5136 BEN / B (2013-11)
4 Operation
Put the gauge into operation.
A warm-up time of at least 15 minutes should be allowed; for
exact pressure measurements a warm-up time of at least
2 hours is required.
4.1 Displays
ZERO
RUN
For factory
setting only
LED State Meaning
<RUN> lit Measurement mode
flashing Other mode, error,
under/overrange
4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright"
(→"Calibration Test Report").
We recommend performing a zero adjustment, when the
gauge is operated for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same con-
stant ambient conditions and in the same mounting orientation
as normally.

BG 5136 BEN / B (2013-11) 19
The output signal (measuring signal) is depending on the moun-
ting orientation. The signal difference between the vertical and
horizontal mounting orientation is:
F.S. ΔU / 90°
1000 hPa ≈2 mV
100 hPa ≈10 mV
10 hPa ≈50 mV
1 hPa ≈300 mV
0.1 hPa ≈1.8 V
If the gauge is operated via a controller, the zero of the
whole measuring system has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.
4.2.1 <ZERO>Adjustment
Evacuate the gauge to a pressure according to the table
below:
F.S.
Recommended final pressure for
zero adjustment
1100 hPa
110 hPa
11 hPa
1.1 hPa
0.11 hPa
<5×10-2 hPa
<5×10-3 hPa
<5×10-4 hPa
<5×10-5 hPa
<5×10-6 hPa
<6.65×100Pa
<6.65×10-1 Pa
<6.65×10-2 Pa
<6.65×10-3 Pa
<6.65×10-4 Pa
If the final pressure in the gauge is too high for zero ad-
justment (>25% of the F.S.), the zero cannot be reached
and the <RUN> LED flashes. If this is the case, activate the
factory setting and adjust the zero again (→22).
Operate the gauge for at least 15 minutes (until the signal
is stable).

20 BG 5136 BEN / B (2013-11)
Press the <ZERO> button briefly with a pin (max.
ø1.1 mm). The zero adjustment runs automatically. The
<RUN> LED flashes until the adjustment (duration ≤8 s) is
completed.
max. ø1.1 mm
Press the button briefly
After zero adjustment the gauge automatically returns to
measurement mode. The <RUN> LED lit.
The <RUN> LED flashes if
•the signal output is negative (>22 mV) when the final pressure
has been attained
•the zero adjustment has failed.
4.2.2 <ZERO>Adjustment with Ramp Function
The ramp function allows to adjust the zero at a known reference
pressure within the measurement range of the gauge.
It also permits to adjust an offset of the characteristic curve in
order to
•compensate for the offset of the measuring system or
•obtain a slightly positive zero for a 0 … 10 V AD-converter.