Pfeiffer Vacuum Calibration System Pro User manual

PA 0409 BEN/A (1901)
OPERATING INSTRUCTIONS
EN
Translation of the original instructions
CALIBRATION SYSTEM PRO
for calibration of vacuum gauges

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3 References for standards and guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.4 Liability and warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.5 Target groups . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.5 Requirements for the operator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.6 Requirements for the user . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.2 Transportation lock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.3 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.2 Vacuum layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.3 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
4.4 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5.1 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5.2 Connecting accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
5.3 Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.1 Handling of the calibration system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.2 Requirements for a calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
6.3 Preparation of the calibration system . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.4 Starting the calibration system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
6.5 Zero adjustment <ZERO> and offset correction . . . . . . . . . . . . . . . . . . . . 23
6.6 Calibration of vacuum gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6.7 Switching off the calibration system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
6.8 Interpretation of the data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7.1 General maintenance information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7.2 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 29
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.1 Shutting down for extended periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.2 Re-commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

3
11 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
11.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
11.2 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
11.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
12 Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
12.1 Examples for measurement accuracies . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

4
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of the
unit. The description follows applicable EU guidelines. All information provided in this op-
erating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
Applicable docu-
ments
* also available at www.pfeiffer-vacuum.de
Variants These operating instructions are valid for components with the following part numbers:
The part number is given on the rating plate of the unit.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
Calibration system BASIC Operating Instructions
Operating instructions for vacuum gauges see product descriptions *
Declaration of conformity Part of these operating instructions
Operating instructions for components:
Operating instructions "HiPace 80 with TC 110" PT 0208 BN *
Operating instructions "TC 110" PT 0204 BN *
Operating instructions "DCU 110" PT 0250 BN *
Operating instructions "HiPace Air Cooling Unit" PT 0500 BN *
Operating instructions "DUO 3" PD 0060 BN *
Operating instructions "OME 16 M " PK 0213 BN *
Operating instructions "PKR 360" BG 5164 BN *
Operating instructions "TPG 361" BG 5195 BN *
Operating instructions "EVN 116" BP 5005 BN *
Operating instructions "AVC 016 SA" BP 5261 BN *
Part number Designation Difference
PS A30 110 Calibration system PRO Nominal diameter (DN) of the flange connections
on the vacuum chamber (see p. 33, chap. 11.2)
PS A30 111 Calibration system PRO
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.

About this manual
5
Pictographs
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations ATM: Atmospheric Pressure
DCU: Display Control Unit
GAV: Gas dosing valve mit separate shut-off valve
TC: Turbo Control (Electronic Drive Unit)
TPS: Turbo Power Supply (Power Supply Pack)
UUC: Unit Under Calibration
UUT: Unit Under Test
VAC: High vacuum
[P:000]: Parameter of the electronic drive unit with number
1.3 References for standards and guidelines
ISO 3567 Calibration of vacuum gauges by direct comparison with a reference gauge
This standard defines the physical, technical and metrological conditions, which must be
fulfilled, when vacuum gauges are calibrated by direct comparison with a reference
gauge.
DAkkS-DKD-R 6-2 Calibration of measuring equipment for vacuum
This directive determines the minimum requirements for the calibration of measuring
equipment. It does not replace the necessary work instructions for DAkkS calibrations.
The parts of this directive contain the details for calibration of various kinds of vacuum
gauges.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document

6
About this manual
1.4 Liability and warranty
Pfeiffer Vacuum takes no responsibility or warranty if the user or third parties:
●disregard this document,
●use the product improperly,
●does any kind of modifications on the product (conversions, changes, etc.), which are
not documented in the corresponding product documentations,
●operates the product with accessories, which are not documented in the correspond-
ing product documentations.
The responsibility associated with the process used media is with the operator.
1.5 Target groups
These operating instructions are aimed at operators of the calibration system and at
technically qualified personnel with experience in calibration of vacuum gauges.

Safety
7
2Safety
2.1 Safety precautions
The unit is manufactured according to the latest state of the art and the recognized safety
rules. However, improper use can cause danger to life of the operator or third parties or
can cause damage to the unit and other material.
Information require-
ments
Operation of acces-
sories
Risk of improper
changes
Improper changes can have extensive consequences:
– dangerous electrical malfunctions can occur.
– mechanical malfunctions can occur and the safety of the unit can be affected.
Do not modify the unit.
General safety in-
structions
Do not expose any body parts to the vacuum.
Observe all safety and accident prevention regulations.
Regularly check the proper observance of all safety measures.
Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
Do not loosen any plug connection during operations.
Wait for the rotor to reach standstill before peforming work on the high vacuum flange.
Keep leads and cables well away from hot surfaces (> 70 °C).
Never fill or operate the calibration system with cleaning agent.
Do not operate the calibration system with open high vacuum flange.
Do not carry out any unauthorised modifications or conversions to the pumps.
The unit has been accredited with protection class IP 20. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
Note the shipping instructions, when returning the unit.
Ensure the proper filling of the backing pump with operating fluid and lubricant.
Information requirements regarding possible risks
Every person, who does installation, operation or maintenance on the calibration sys-
tem, must read, understand and obey the safety relevant parts of these operating in-
structions.
The operator is obligated to indicate risks to every user, which come from the vacuum
pump, the pumped medium or the complete calibration system.
Installation and Operation of Accessories
Pfeiffer Vacuum pumps can be equipped with various adapted accessories. Installation,
operation and maintenance of connected devices are described in detail in the operat-
ing instructions of the single devices.
Refer to chapter "Accessories" for information about order numbers of components.
Only use original accessories.

8
Safety
Risk of contamination
Risk of electrical
power
Risk of contamination
WARNING
Contamination of the calibration system by contaminated devices
Contact with hazardous substances can cause health hazard.
Do not contaminate the calibration system by the use of contaminated devices.
In case of a contamination take appropriate safety measures to prevent health risks
from hazardous substances.
Decontaminate concerned parts before doing any maintenance.
WARNING
Danger of elektric shock
The calibration system is only de-energized with the power plug disconnected.
Switch off the master switch and disconnect the power plug before you do any work.
Prevent the unit from unintentional energizing and switching-on.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so that you can disconnect it at
any time.
WARNING
Danger due to lack of power disconnection device
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
NOTICE
Protect vacuum components against contamination
Dirt and damages affect the function of the calibration system.
Keep the calibration system and the gauges connected and in operation in order to
keep the calibration system clean and efficient.
Pay attention to cleanliness and damage protection when operating vacuum compo-
nents.
Ensure clean, greaseless and dry connection flanges.

Safety
9
Risk of incorrect han-
dling
Risk of overpressure
during venting
NOTICE
Risk of damage to the turbo pump because of contamination
No parts, particles or dusts may get into the calibration system.
Only remove blank flanges from the vacuum chamber for connection of vacuum
gauges!
NOTICE
Risk of damaging vavuum gauges
The calibration system or vacuum gauges can be damaged by incorrect handling during
the calibration process.
Obey the operating instructions of the vacuum gauges before the calibration.
NOTICE
Process stability due to constant rotation speed of the turbo pump
Inconstant rotation speed of the turbo pump can lead to negative influence on the cali-
bration process.
Make sure, that the rotation speed of the turbo pump remains stable throughout the
whole calibration process and does not decrease below the nominal value.
Obey the operating instructions of the display control unit DCU 110 regarding the
speed control of the turbo pump.
DANGER
Danger of excessive pressure in the vacuum chamber
For the connection of nitrogen or other pressurized gases to the vacuum chamber, ad-
ditional measures are necessary, to prevent a venting of the vacuum chamber to pres-
sures > 500 hPa (relative pressure).
Install a safety valve to the vacuum chamber.
Contact Pfeiffer Vacuum for selecting an appropriate safety valve.
NOTICE
Damage to vacuum gauges by venting
Some vacuum gauges must be switched off before venting them to atmospheric pres-
sure to prevent damage.
Obey the operating instructions of the used vacuum gauges.
NOTICE
Damage by excessive pressure in the vacuum chamber
Excessive pressure in the vacuum chamber can cause damage to connected compo-
nents and vacuum gauges.
Do not vent the vacuum chamber in excess of atmospheric pressure.
Connect a safety valve to the vacuum chamber.

10
Safety
Correctionfactorsfor
Pirani vacuum
gauges
2.2 Protective equipment
Determined situations concerning the handling of vacuum pumps require wearing of per-
sonal protective equipment. The owner, respectively the employer are obligated to pro-
vide an adequate equipment to any operating persons.
NOTICE
Risk of excessive inlet pressure at the turbo pump
The turbo pump can be damaged by a high rate of pressure rise during venting. When
the turbo pump is running, do the following:
Do not disconnect the vacuum gauges or blank flanges from the vacuum chamber.
Switch off the turbo pump and let it reach standstill (0 Hz).
Set the gas flow to the minimum on the gas dosing valve before you open the internal
shut-off valve.
Do not open the butterfly valve as long as the pressure in the vacuum chamber is
>1 hPa.
If you use pressurized venting gas, maintain the allowed rate of pressure rise, be-
cause the gas flow of the venting gas supply rises in accordance with the inlet pres-
sure.
Restart: Reduce the pressure in the calibration system with the backing pump to ≤
22 hPa.
NOTICE
Risk of overpressure in the calibration system with pressurized gas connection
The max. permitted pressure at the inlet of the gas dosing valve is 500 hPa (relative
pressure).
Install a safety valve on the vacuum chamber.
Use a pressure reducer.
Set the inlet pressure on the pressure reducer to < 500 hPa (relative pressure).
Close the gas dosing valve, when normal atmospheric pressure has been reached in
the vacuum chamber.
Avoid venting with pressure higher than normal atmospheric pressure.
Close the pressurized gas supply again after venting.
NOTICE
Correction factors for Pirani vacuum gauges
The applicable correction factors for Pirani vacuum gauges are given in the related op-
erating instructions, in order to convert the indicated equivalent nitrogen pressure into
the correct pressure for the measured gas.
Take and obey the correction factors given in the operating instructions of the vacuum
gauges.
DANGER
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be con-
taminated by toxic, reactive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.

Safety
11
2.3 Proper use
●The calibration system is intended for test, adjustment and calibration of vacuum
gauges.
2.4 Improper use
Improper use voids any liability and warranty. Examples of improper use is any use for
purposes that are different from the above.
2.5 Requirements for the operator
Safety conscientious
work behaviour
Only operate the unit in perfect technical condition.
Only operate the unit in its intended use and safety consciously. Always be aware of
dangers and obey these operating instructions.
Fulfill the following regulations and supervise their adherence:
– Intended use
– General safety and accident prevention regulations
– International, national und local valid standards and directives
– Additional regulations related to the unit itself
Only use original parts or parts which have been approved by Pfeiffer Vacuum.
Keep these operating instructions available at the place of installation.
kg
WARNING
Danger from falling parts
If you transport the unit by hand, parts can fall or slip and can thus cause danger.
Always transport the unit with 2 persons two-handed.
Wear safety shoes with toe protection according to EN 347.
CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.
If necessary wear protective gloves according to EN 420.
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

12
Safety
Qualification of per-
sonnel
Worksteps described in these operating instructions may only be carried out by person-
nel, who have the suitable technical quialification and have the necessary experience or
have been trained by the operator respectively.
Instruct technical personnel on the unit.
Personnel to be instructed must only work on or with the unit with supervision by ex-
perienced personnel.
Only allow instructed personnel to work with the unit.
Make sure, that authorized personnel have read and understood these operating in-
structions as well as all further applicable documents before starting with the work, es-
pecially the safety instructions, maintenance instructions and overhaul instructions.
Manage all responsibilities and the supervision of the personnel.
2.6 Requirements for the user
Read, understand and obey these operating instructions and instructions made by the
operator, especially the safety instructions and warnings.
Only do the work with the help of the complete operating instructions and the further
applicable documents.
If you have any questions regarding operation or maintenance of the unit, which are
not answered in these operating instructions, please contact the Pfeiffer Vacuum field
service.

Transport and storage
13
3 Transport and storage
3.1 Transport
Only transport the calibration system by hand with 2 persons and two-handed.
Always transport the calibration system upright and preferably plain.
Keep the original protective caps and blank flanges.
3.2 Transportation lock
The backing pump of the calibration system is protected against damage during trans-
port.
Follow instructions concerning the installation location!
Before putting into operation loosen the backing pump's transportation lock device at
the installation location.
3.3 Storage
Store the calibration system in a cool, dry and dust-free place.
Close the flanges with the original protective caps and blank flanges.
Close further connection ports by using the corresponding protective covers.
Store the calibration system only indoors at temperatures of between -10 °C to +40 °C
(preferably at room temperature of 20°C).
In rooms with humid or aggressive atmosphere or during long-term storage: Store the
calibration system together with a desiccant (e.g. silica gel) shrink-wrapped in an air-
tight plastic bag.
kg
WARNING
Danger from falling parts
If you transport the unit by hand, parts can fall or slip and can thus cause danger.
Always transport the unit with 2 persons two-handed.
Wear safety shoes with toe protection according to EN 347.
NOTICE
Damage due to transport
The unit can be damaged during transport in an unsuitable packing.
Only transport the unit in its original packing.
Keep the original packing.
NOTICE
Damage due to improper storage
Improper storage increases the desorption rate and/or leads to mechanical damage of
the unit.
Keep the vacuum connections closed with protective caps at all times.
Observe the permitted storage temperature and the ambient conditions.

14
Product description
4 Product description
4.1 Product identification
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Example for a rating plate
Scope of delivery Calibration system BASIC, inclusive
●Calibration recipient
●Turbo pump HiCube 80
●Rotary vane pump DUO 3
●Control unit DCU 110
●Calibration set consisting of
– Display unit TPG 361
– Pirani/Cold cathode transmitter PKR 360
– DKD Certificate
●GAV EVN 116
●Manually actuated valve AVC 016 SA
●Butterfly valve
●Mains cable
●Adapter attachment
●Operating instructions (incl. turbo pumping station HiCube 80 Eco and single compo-
nents)

Product description
15
4.2 Vacuum layout
1 - Pirani/Cold cathode transmitter (PKR 360) 7 - Valve V2
2 - Flange connections for vacuum gauges 8 - Valve V1
3 - GAV (EVN 116) 9 - Backing pump (DUO 3)
4 - Vacuum chamber (figure exemplified) 10 - Display control unit (DCU 110)
5 - Butterfly valve 11 - Display unit (TPG 361)
6 - Turbo pump (HiPace 80)
TPG 361
DCU
1222 3222224
5
11
10
6
8
9
7

16
Product description
4.3 Structure
Controls and compo-
nents
Description
The calibration system consists of a turbo pump HiCube 80, a backing pump DUO 3 and
a vacuum chamber, mounted on a mobile housing. The vacuum chamber can be closed
off from the turbo pump with the butterfly valve. With the two manually actuated valves
in the bypass the backing pump could be connected directly with the vacuum chamber
and/or the fore-vacuum line of the turbo pump.
The calibration system can be switched on and off with the master switch. The display
control unit (3) takes over the control and monitoring.
The backing pump (6) generates the necessary fore-vacuum for the turbo pump.
On top of the vacuum chamber are - depending on the unit model - several flange con-
nections with different nominal diameters for vacuum gauges (11). They are closed with
blank flanges ex works.
1 - Pirani/Cold cathode transmitter (PKR 360) 7 - Turbo pump (HiPace 80)
2 - Vacuum chamber (figure exemplified) 8 - Butterfly valve V3
3 - Display control unit (DCU 110) 9 - Valve V1 (AVC 016 M)
4 - Electronic drive unit (TC 110) 10 - Valve V2 (AVC 016 M)
5 - Roll wheels (4x) with clip breaks (2x) 11 - Flange connections for vacuum gauges
6 - Backing pump (DUO 3) 12 - GAV (EVN 116)
6
7
9
10
8
12
11
1
2
3
4
5

Installation
17
The centrally positioned GAV (12) on the vacuum chamber is for central manual gas inlet
regulation. The Pirani/cold cathode transmitter (1) on the vacuum chamber controls the
calibration system.
The vacuum chamber can be closed off from the turbo pump with the manual butterfly
valve. The T handle indicates the valve position.
The electronic drive unit (4) is supplied with power by the power supply pack and is an
inherent part of the turbo pump. It is for inducement, monitoring and control of the turbo
pump. The turbo pump is additionally equipped with a venting valve, which vents the tur-
bo pump automatically in case of deactivation or a power cut-off.
The HiPace air cooling unit cools the turbo pump during operation. Additionally, the
pumping station is equipped with a housing fan.
4.4 Range of application
The calibration system must be installed and operated in the following ambient condi-
tions.
5 Installation
5.1 Preparatory work
The installation location should be chosen so that components which need servicing are
freely accessible at all times. No special foundation or base is necessary for installation.
The unit must not be used outdoors.
Prerequisites
●The ambient conditions specified for the area of use
Installation location weather protected (indoors)
Protection category IP 20
Protection class I
Ambient temperature +5 °C to +30 °C with convection cooling without gas throughput
+5 °C to +35 °C with air cooling
+5 °C to +40 °C with water cooling
Relative humidity max. 80 %, at T 31 °C, up to max. 50 % at T 40 °C
Atmospheric pressure 750 hPa - 1060 hPa
Installation altitude 2000 m max.
Degree of pollution 2
Permissible surr. magnetic field 3.3 mT
Overvoltage category II
Connection voltage TC 110 24 V DC ± 5 %
Remarks to ambient conditions
The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible fore-vacuum pressure or at maximum gas throughput depending
on the cooling method. The turbopump is intrinsically safe by a redundant temperature
monitoring.
●By reducing the fore-vacuum pressure or gas throughput, the turbopump can be op-
erated at higher ambient temperatures.
●If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit reduces drive power first and switches off then, if necessary.

18
Installation
●Level, vibration-free surface
●Distance to side walls or adjacent devices: at least 50 cm
Selecting an installation site
●Ensure sufficient cooling for the pumping station.
●Use suitable shielding if the maximum permitted surrounding magnetic fields are ex-
ceeded.
●If the process results in high temperatures, install suitable shielding to ensure that the
radiated heat output does not exceed the permissible values.
●Secure the pumping station at the final installation site with the clip breaks.
5.2 Connecting accessories
5.3 Connecting to the mains power supply
Connect the mains cable to the mains.
Always ensure a secure connection to the protective earth (PE) (protection class I).
Installation and operation of accessories
Pfeiffer Vacuum pumping stations can be equipped with a series of adapted accesso-
ries. The installation, operation, and maintenance of connected devices are described
in detail in the operating manuals of the individual components.
Information about approved accessories see chapter "Accessories".
Use original accessories only.
NOTICE
Note the factory settings
The accessory connections on the turbopump have been preconfigured at the factory.
If the control lines on the connector are mixed up, this can cause the pumping station to
malfunction or fail.
Accessory connector for the electronic drive unit TC 110
●Pfeiffer Vacuum accessory devices can be connected to the electronic drive unit
TC 110 only by using the appropriate connection cable or adapter.
●Use Pfeiffer Vacuum display and control devices or a PC to configure the desired ac-
cessory output via RS-485.
●See the operating manual for the "Electronic Drive Unit TC 110.”
WARNING
Danger to life from electric shock due to unsafe electrical installation
The device uses mains voltage as the electrical supply. Unsafe or unprofessional elec-
trical installation can lead to life-threatening situations.
Ensure that the system is integrated in an emergency-off safety circuit.
Do not perform any unauthorized conversions or modifications to the device.

Operation
19
6Operation
This chapter contains a description of all necessary steps to do a calibration with the cal-
ibration system.
6.1 Handling of the calibration system
You can use the calibration system for various purposes:
●Analysis of vacuum gauge malfunctions and verification of characteristics
●Adjustment of vacuum gauge range limits
●Calibration of vacuum gauges
Analysis You can analyse UUT of process systems which have malfunctions.
The process vacuum system, in which you use the UUT, does not have to be blocked or
switched off for this.
The small volume and the high pumping speed allow quick pressure changes in the cal-
ibration system.
Because of that you can check the UUT at the crucial operating pressures quickly.
Adjustment The measuring range limits of vacuum gauges can shift in the course of their service life.
Some types of vacuum gauges require occasional adjustment of their measuring range
limits, for example
●Pirani gauges at ATM and VAC,
●Diaphragm gauges at zero of scale.
You can easily establish the required pressure conditions for this adjustment with the cal-
ibration system, compared to many process vacuum systems.
Calibration Calibrating a UUC means the comparison of the UUC with a reference gauge.
The calibration can cover the entire range of measurement of the UUC or a limited range
of interest.
The reference gauge has been calibrated before in a calibration process with a smaller
measurement uncertainty.
The calibration chain is thereby linked to a national metrological laboratory, which pro-
vides standards with the lowest possibe measurement uncertainty.
In commercial documents (catalogs, brochures) the measurement uncertainty is fre-
quently denoted as accuracy.
You must do a careful consideration of the required accuracy of the UUC in order to
choose the appropriate reference gauge.
In general, capacitance diaphragm gauges (Pfeiffer Vacuum ActiveLine types CMR,
CCR) offer the highest accuracy as long as you use these gauges in the pressure decade
below full scale.
For verification of a UUC a reference gauge of the same type is sufficient in most cases.

20
Operation
6.2 Requirements for a calibration
Before you can start a calibration, you must fulfil the the following 5 requirements:
Base pressure < calibration pressure
For a calibration according to ISO 3567 the base pressure p
0
of the calibration system
must be lower than the lowest calibration pressure p
min
.
The following applies: p
0
is lower than p
min
divided by 10 (p
0
< p
min
/10)
Ambient temperature constant at 23°C
The ambient temperature must be at 23°C (± 3°C).
Temperature changes of more than ± 1°C during the calibration can lead to non-negligi-
ble measuring uncertainty.
Vacuum gauges at operating temperature
All UUC must be at operating temperature.
●UUC (thermally stabilized): min. 3 hours operating time
●UUC (not thermally stabilized): min. 30 minutes operating time
Thermal stability of the components
The calibration system and all components used during the calibration procedure need
to be thermally stable.
To meet this requirement, all components must be located in a room with constant tem-
perature for at least 2 hours prior to the calibration.
Zero adjustment <ZERO> and offset correction
Toachieve the best possible result, every calibration requires a preceding zero adjust-
ment and an offset correction of all vacuum gauges (see p. 23, chap. 6.5).