Pfeiffer Vacuum Calibration System Pro User manual

PA 0409 BEN/A (1901)
OPERATING INSTRUCTIONS
EN
Translation of the original instructions
CALIBRATION SYSTEM PRO
for calibration of vacuum gauges

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3 References for standards and guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.4 Liability and warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.5 Target groups . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.5 Requirements for the operator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.6 Requirements for the user . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.2 Transportation lock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.3 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.2 Vacuum layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.3 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
4.4 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5.1 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5.2 Connecting accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
5.3 Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.1 Handling of the calibration system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.2 Requirements for a calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
6.3 Preparation of the calibration system . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.4 Starting the calibration system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
6.5 Zero adjustment <ZERO> and offset correction . . . . . . . . . . . . . . . . . . . . 23
6.6 Calibration of vacuum gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6.7 Switching off the calibration system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
6.8 Interpretation of the data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7.1 General maintenance information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7.2 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 29
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.1 Shutting down for extended periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.2 Re-commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

3
11 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
11.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
11.2 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
11.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
12 Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
12.1 Examples for measurement accuracies . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

4
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of the
unit. The description follows applicable EU guidelines. All information provided in this op-
erating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
Applicable docu-
ments
* also available at www.pfeiffer-vacuum.de
Variants These operating instructions are valid for components with the following part numbers:
The part number is given on the rating plate of the unit.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
Calibration system BASIC Operating Instructions
Operating instructions for vacuum gauges see product descriptions *
Declaration of conformity Part of these operating instructions
Operating instructions for components:
Operating instructions "HiPace 80 with TC 110" PT 0208 BN *
Operating instructions "TC 110" PT 0204 BN *
Operating instructions "DCU 110" PT 0250 BN *
Operating instructions "HiPace Air Cooling Unit" PT 0500 BN *
Operating instructions "DUO 3" PD 0060 BN *
Operating instructions "OME 16 M " PK 0213 BN *
Operating instructions "PKR 360" BG 5164 BN *
Operating instructions "TPG 361" BG 5195 BN *
Operating instructions "EVN 116" BP 5005 BN *
Operating instructions "AVC 016 SA" BP 5261 BN *
Part number Designation Difference
PS A30 110 Calibration system PRO Nominal diameter (DN) of the flange connections
on the vacuum chamber (see p. 33, chap. 11.2)
PS A30 111 Calibration system PRO
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.

About this manual
5
Pictographs
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations ATM: Atmospheric Pressure
DCU: Display Control Unit
GAV: Gas dosing valve mit separate shut-off valve
TC: Turbo Control (Electronic Drive Unit)
TPS: Turbo Power Supply (Power Supply Pack)
UUC: Unit Under Calibration
UUT: Unit Under Test
VAC: High vacuum
[P:000]: Parameter of the electronic drive unit with number
1.3 References for standards and guidelines
ISO 3567 Calibration of vacuum gauges by direct comparison with a reference gauge
This standard defines the physical, technical and metrological conditions, which must be
fulfilled, when vacuum gauges are calibrated by direct comparison with a reference
gauge.
DAkkS-DKD-R 6-2 Calibration of measuring equipment for vacuum
This directive determines the minimum requirements for the calibration of measuring
equipment. It does not replace the necessary work instructions for DAkkS calibrations.
The parts of this directive contain the details for calibration of various kinds of vacuum
gauges.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document

6
About this manual
1.4 Liability and warranty
Pfeiffer Vacuum takes no responsibility or warranty if the user or third parties:
●disregard this document,
●use the product improperly,
●does any kind of modifications on the product (conversions, changes, etc.), which are
not documented in the corresponding product documentations,
●operates the product with accessories, which are not documented in the correspond-
ing product documentations.
The responsibility associated with the process used media is with the operator.
1.5 Target groups
These operating instructions are aimed at operators of the calibration system and at
technically qualified personnel with experience in calibration of vacuum gauges.

Safety
7
2Safety
2.1 Safety precautions
The unit is manufactured according to the latest state of the art and the recognized safety
rules. However, improper use can cause danger to life of the operator or third parties or
can cause damage to the unit and other material.
Information require-
ments
Operation of acces-
sories
Risk of improper
changes
Improper changes can have extensive consequences:
– dangerous electrical malfunctions can occur.
– mechanical malfunctions can occur and the safety of the unit can be affected.
Do not modify the unit.
General safety in-
structions
Do not expose any body parts to the vacuum.
Observe all safety and accident prevention regulations.
Regularly check the proper observance of all safety measures.
Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
Do not loosen any plug connection during operations.
Wait for the rotor to reach standstill before peforming work on the high vacuum flange.
Keep leads and cables well away from hot surfaces (> 70 °C).
Never fill or operate the calibration system with cleaning agent.
Do not operate the calibration system with open high vacuum flange.
Do not carry out any unauthorised modifications or conversions to the pumps.
The unit has been accredited with protection class IP 20. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
Note the shipping instructions, when returning the unit.
Ensure the proper filling of the backing pump with operating fluid and lubricant.
Information requirements regarding possible risks
Every person, who does installation, operation or maintenance on the calibration sys-
tem, must read, understand and obey the safety relevant parts of these operating in-
structions.
The operator is obligated to indicate risks to every user, which come from the vacuum
pump, the pumped medium or the complete calibration system.
Installation and Operation of Accessories
Pfeiffer Vacuum pumps can be equipped with various adapted accessories. Installation,
operation and maintenance of connected devices are described in detail in the operat-
ing instructions of the single devices.
Refer to chapter "Accessories" for information about order numbers of components.
Only use original accessories.

8
Safety
Risk of contamination
Risk of electrical
power
Risk of contamination
WARNING
Contamination of the calibration system by contaminated devices
Contact with hazardous substances can cause health hazard.
Do not contaminate the calibration system by the use of contaminated devices.
In case of a contamination take appropriate safety measures to prevent health risks
from hazardous substances.
Decontaminate concerned parts before doing any maintenance.
WARNING
Danger of elektric shock
The calibration system is only de-energized with the power plug disconnected.
Switch off the master switch and disconnect the power plug before you do any work.
Prevent the unit from unintentional energizing and switching-on.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so that you can disconnect it at
any time.
WARNING
Danger due to lack of power disconnection device
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
NOTICE
Protect vacuum components against contamination
Dirt and damages affect the function of the calibration system.
Keep the calibration system and the gauges connected and in operation in order to
keep the calibration system clean and efficient.
Pay attention to cleanliness and damage protection when operating vacuum compo-
nents.
Ensure clean, greaseless and dry connection flanges.

Safety
9
Risk of incorrect han-
dling
Risk of overpressure
during venting
NOTICE
Risk of damage to the turbo pump because of contamination
No parts, particles or dusts may get into the calibration system.
Only remove blank flanges from the vacuum chamber for connection of vacuum
gauges!
NOTICE
Risk of damaging vavuum gauges
The calibration system or vacuum gauges can be damaged by incorrect handling during
the calibration process.
Obey the operating instructions of the vacuum gauges before the calibration.
NOTICE
Process stability due to constant rotation speed of the turbo pump
Inconstant rotation speed of the turbo pump can lead to negative influence on the cali-
bration process.
Make sure, that the rotation speed of the turbo pump remains stable throughout the
whole calibration process and does not decrease below the nominal value.
Obey the operating instructions of the display control unit DCU 110 regarding the
speed control of the turbo pump.
DANGER
Danger of excessive pressure in the vacuum chamber
For the connection of nitrogen or other pressurized gases to the vacuum chamber, ad-
ditional measures are necessary, to prevent a venting of the vacuum chamber to pres-
sures > 500 hPa (relative pressure).
Install a safety valve to the vacuum chamber.
Contact Pfeiffer Vacuum for selecting an appropriate safety valve.
NOTICE
Damage to vacuum gauges by venting
Some vacuum gauges must be switched off before venting them to atmospheric pres-
sure to prevent damage.
Obey the operating instructions of the used vacuum gauges.
NOTICE
Damage by excessive pressure in the vacuum chamber
Excessive pressure in the vacuum chamber can cause damage to connected compo-
nents and vacuum gauges.
Do not vent the vacuum chamber in excess of atmospheric pressure.
Connect a safety valve to the vacuum chamber.

10
Safety
Correctionfactorsfor
Pirani vacuum
gauges
2.2 Protective equipment
Determined situations concerning the handling of vacuum pumps require wearing of per-
sonal protective equipment. The owner, respectively the employer are obligated to pro-
vide an adequate equipment to any operating persons.
NOTICE
Risk of excessive inlet pressure at the turbo pump
The turbo pump can be damaged by a high rate of pressure rise during venting. When
the turbo pump is running, do the following:
Do not disconnect the vacuum gauges or blank flanges from the vacuum chamber.
Switch off the turbo pump and let it reach standstill (0 Hz).
Set the gas flow to the minimum on the gas dosing valve before you open the internal
shut-off valve.
Do not open the butterfly valve as long as the pressure in the vacuum chamber is
>1 hPa.
If you use pressurized venting gas, maintain the allowed rate of pressure rise, be-
cause the gas flow of the venting gas supply rises in accordance with the inlet pres-
sure.
Restart: Reduce the pressure in the calibration system with the backing pump to ≤
22 hPa.
NOTICE
Risk of overpressure in the calibration system with pressurized gas connection
The max. permitted pressure at the inlet of the gas dosing valve is 500 hPa (relative
pressure).
Install a safety valve on the vacuum chamber.
Use a pressure reducer.
Set the inlet pressure on the pressure reducer to < 500 hPa (relative pressure).
Close the gas dosing valve, when normal atmospheric pressure has been reached in
the vacuum chamber.
Avoid venting with pressure higher than normal atmospheric pressure.
Close the pressurized gas supply again after venting.
NOTICE
Correction factors for Pirani vacuum gauges
The applicable correction factors for Pirani vacuum gauges are given in the related op-
erating instructions, in order to convert the indicated equivalent nitrogen pressure into
the correct pressure for the measured gas.
Take and obey the correction factors given in the operating instructions of the vacuum
gauges.
DANGER
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be con-
taminated by toxic, reactive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.