Pfeiffer Vacuum CompactTurbo TPD 011 N User manual

Betriebsanleitung • Operating Instructions
PT 0187 BE/B (0706)
CompactTurbo™
TurboDrag Pump
TPD 011 N
Translation of the Original Operating Instructions

2
Table of contents
Table of contents
1 About this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.3 Improper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3 Transport and storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1 Transport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
4 Product description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.1 Product identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.2 Preparatory work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.3 Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.4 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5.5 Connecting Pfeiffer Vacuum display and control units or PC . . . . . 12
5.6 Connecting the remote control . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.7 Connections diagram TC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.1 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.2 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.4 Montioring of the operation conditions . . . . . . . . . . . . . . . . . . . . . . 18
6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
7 Maintenance / replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . 19
7.2 Replacing the operating fluid reservoir . . . . . . . . . . . . . . . . . . . . . . 20
7.3 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.4 Replacing the integrated power supply . . . . . . . . . . . . . . . . . . . . . 23
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . 24
8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
11 Spare parts TPD 011 N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
13 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
13.1 Dimension diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the func-
tioning of the designated product and provides the most important information for
safe use of the unit. The description follows applicable EU guidelines. All informa-
tion provided in this operating manual refer to the current state of the product's de-
velopment. The documentation remains valid as long as the customer does not
make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.net.
Applicable docu-
ments
*also available via www.pfeiffer-vacuum.net
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk
evaluations and hazard analyses and are oriented on international certification
standards as specified by UL, CSA, ANSI Z-535, Semi-S1, ISO 3864 and DIN 4844.
In this document, the following hazard levels and information are considered:
TPD 011 N Operating instructions
Safety information for vacuum pumps "Safety Guide" PT 0300 BN*
Operating instructions "Pumping operations with DCU" PM 0547 BN*
Operating instructions "Pfeiffer Vacuum protocol" PM 0488 BN*
Manufacturer’s declaration Part of this document
Operating instructions for accessories see section "accessories"*
DANGER
Immediate danger
Death or very severe injuries occur.
WARNING
Possible danger
Death or injuries may occur.
CAUTION
Possible danger
Medium to slight injuries may occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
About this manual
Piktograph
definitions
Instructions in the
text
ÎWork instruction: here you have to do something.
Abbreviations used DCU:Display and operating unit
HPU:Handheld programming unit
TC:Electronic drive unit for turbopump
Symbols used The following symbels are used consistently throughout the diagrams:
High vacuum flange
Fore-vacuum flange
Venting connection
Prohibition of an action or activity in connection with a
source of danger, the disregarding of which may result in
serious accidents.
Warning of a displayed source of danger in connection
with operation of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in
serious accidents.
H
VV
F

5
Safety
2 Safety
2.1 Safety precautions
• Do not loosen any plug connection during operations.
• Wait for the rotor to reach standstill before peforming work on the high vacuum
flange.
• Keep leads and cables well away from hot surfaces (> 70 °C).
• Always ensure a safe connection to the protective earthing conductor (PE, pro-
tection class I).
• Only seperate the turbopump and the electronic drive unit from each other after
disconnecting the supply voltage and the complete standstill of the pump.
• Discrete operating of the turbopump and the electronic drive unit is only allo-
wed after authorisation by Pfeiffer Vacuum. In this case the turbopump must be
connected to the PE.
• The danger of an electrical shock in the case of ground leakage must be elimi-
nated immediately (red LED flashes).
• Never fill or operate turbopump with cleaning agent.
• Never use the fore-vacuum flange to fix the pump.
2.2 Proper use
• Only operate the turbopump with a prooved backing pump.
• Only operate the turbopump with TC 100 in ambient conditions up to protection
class IP 30.
NOTE
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum
pump must read and observe the safety-related parts of these operating instructions.
ÎAbsolute observe the safety information for vacuum pumps (PT 0300 BN) !
ÎThe operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The
installation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
ÎFor information on the operating instructions of components, see "Accessories".
ÎUse original accessory parts only.
NOTE
CE conformity
The manufacturer's declaration becomes invalid if the operator modifies the original
product or installs additional components!
ÎFollowing installation into a plant and before commissioning, the operator must
check the entire system for compliance with the valid EU directives and reassess it
accordingly.

6
Transport and storage
2.3 Improper use
Improper use will cause all claims for liability and guarantees to be forfeited. Im-
proper use is deemed to be all use for purposes deviating from those mentioned
above, especially:
• Pumping of corrosive or explosive media.
• Pumping of condensing vapors.
• Operation with improper high levels of gas loads.
• Operation with improper high fore-vacuum pressures.
• Operation with improper gas mode.
• Operation with improper high levels of insulated heat input.
• Venting with improper high venting rates.
• Operation of the pump in potentially radioactive areas.
• Installation in systems where the turbopumps are subjected to impact-like stress
and vibrations or the effect of periodically occurring forces.
• The connection to a power supply with earthing of a direct voltage pole.
• The use of accessories, which are not named in this manual or not authorised
by Pfeiffer Vacuum.
3 Transport and storage
3.1 Transport
ÎReuse the transport container. Vacuum pumps should be transported or shipped
in the original packing only.
ÎOnly remove the protective covers from the high vacuum and the fore-vacuum
side immediately before connection.
ÎPreserve the original protective covers.
3.2 Storage
ÎClose the flange openings by using the original protective covers.
ÎClose further connection ports by using the corresponding protective covers.
ÎStorage the pump only indoors with an ambient temperature between -25 °C
and +55 °C.
ÎIn rooms with moist or aggressive atmospheres, the turbopump must be air-see-
led in a plastic bag together with a bag of dessicant.

7
Product description
4 Product description
4.1 Product identification
Pump types The product designations of Pfeiffer vacuum turbomolecular pumps are self-ex-
planatory and permit conclusions about the different versions. The product desig-
nation consists of a family designation (1), the size (2), which is oriented on the
pumping speed, and the properties (3) of the pump.
TPD(1) 011(2) N(3)
To correctly identify the product when communicating with Pfeiffer Vacuum, al-
ways have the information from the rating plate available.
Fig. 1: Example for a rating plate
Pump features
Scope of delivery • Turbopump
• Integrated power supply
• Protective cover for the high vacuum and the fore-vacuum flange
• Operating instructions
1. Family designation 2. Model designation 3. Properties
T= Turbopump
011 = Model designa-
tion of the pump related
to its pumping speed
class
U= Upside down version
P= Purge sealing gas system
M= Magnetic bearing
C= for corrosive gases
H= High throughput
T= Temerature management
Y= Installation in any orientation
N= Integrated power supply
P= Pure turbopump
M= Turbo with Holweck stage
H= ISO-flange variants for high
vacuum applications
U= CF-flange variants for ultra-
high vacuum applications
D= "Drag" pump for the medium
vacuum range
Mod.:
Mod.-No.:
Ser. No.:
Oil:
S(N2):
Mass:
Made in
Germany 2006/03
TMH 261 P
DN 100 ISO-K, 3P
PM P02 821 H
PM 063 265 -T
210 l/s
6 kg
D-35614 Asslar
Characteristics TPD 011 N
HV flange DN 25 ISO
HV seal Elastomer
Attainable final pressure < 5·10-5 mbar

8
Product description
4.2 Function
The turbopumps CompactTurbo™ TPD 011 N form a complete unit together with
the electronic drive unit TC 100. The voltage supply is performed via the integrated
power supply pack.
Fig. 2: View of the CompactTurbo™ TPD 011 N
Cooling • Convection cooling
In the case of excess temperature the electronic drive unit reduces the rotor rota-
tion speed automatically. Depending on the application and the CompactTurbo™
different cooling variants are selectable.
Rotor bearings • Ceramic ball bearing
4.3 Range of application
The pumps CompactTurbo™ TPD 011 N must be installed and operated in the fol-
lowing ambient conditions.
1 Rotor, High vacuum flange
8 Integrated power supply
10Electronic drive unit TC 100
18 Fore-vacuum flange
X1 Mains connection X1
X3 Connection plug X3
18
1
8
X3
X1
10
V
H
Installation location weather protected (indoors)
Temperature +5 °C to +35 °C
Protection class IP 30
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure: 77 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Permissible surrounding magnetic field ≤3 mT
Overvoltage category II
Connection voltage TC 24 VDC ±5%

9
Installation
5 Installation
5.1 Set-up
When installing the pump, observe the following conditions:
• The ambient conditions named for the area of use.
• The temperature of the high vacuum flange must not exceed 120 °C.
• The pump may be fastened to the floor only after consultation with Pfeiffer Va-
cuum.
• The pumps must not be installed in systems in which sporadic loads and vibra-
tions or periodic forces have an effect on the pump.
5.2 Preparatory work
ÎEnsure sufficient cooling for the turbopump.
ÎWhere magnetic fields > 3 mT are involved, a suitable shielding must be used.
Check installation location and consult Pfeiffer Vacuum if needed!
ÎThe maximum permissible rotor temperature for the turbopump is 90 °C. If high
temperatures arise for process reasons, the radiated heat input must not exceed
4 W. Install suitable screening sheets, if necessary (design information on re-
quest).
5.3 Assembly
• Ensure the greatest possible cleanliness when installing any high vacuum parts.
Unclean components prolong the pump-down time.
• All flange components must be grease-free, dust-free and dry at installation.
WARNING
Danger from the turbopump being ripped off.
If the rotor is suddenly blocked, torques of up to 80 Nm can occur; if the turbopump is
not properly fastened, it can be ripped off.
ÎPrecisely follow installation instructions.
ÎOnly use original components for the installation.
WARNING
Safe electrical installation
Safe operation after installation is the responsibility of the operator.
ÎDo not independently modify or change the pump and electrical equipment.
ÎMake sure that the system is integrated in an emergency off safety circuit.
– If an emergency off situation is triggered, the voltage supply must be imme-
diately interrupted.
ÎConsult Pfeiffer Vacuum for special requirements.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The
installation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
ÎFor information on the operating instructions of components, see "Accessories".
ÎUse original accessory parts only.

10
Installation
• The operating fluid reservoir is already installed and filled for the TPD 011 N tur-
bopumps.
Installing the high
vacuum flange
In the case the rotor is suddenly blocked, the torques arising from the system and
the high vacuum flange must be absorbed. Only the components listed in the fol-
lowing can be used to fasten the turbo pumps to the high vacuum flange. The com-
ponents for installing the turbo pumps are special designs of Pfeiffer Vacuum. Ob-
serve the minimum strength of 170 N/mm2 for the flange material.
Installation
For the installation of the designated flange connections the following components
are available:
ÎMind that the sealing surfaces are not damaged.
ÎFlange the turbopump according to the drawing and together with the compo-
nent parts in the mounting material kit.
ÎUse 4 claw grips.
ÎTighten the claw grips crosswise in three steps.
ÎTightening torque: 5 Nm.
5.4 Connections to the turbopump
The connection of Pfeiffer Vacuum display and control units and two optional ac-
cessory components is possible by using the connection box TCS 010.
ÎAttach and fix the TCS 010 to the electronic drive unit.
NOTE
Possible damage to the pump
If a pump with an ISO-K flange is fastened to a vacuum chamber with an ISO-F flange
or if ISO-KF flanges are used, sudden blocking of the rotor can result in twisting
despite proper installation.
Connection nominal diameter Designation Ordering no.
DN 25 ISO Centering ring PF 110 125-T
4 claw grips with screws and washers PF 104 000-T
A Pump housing with thread
B Claw grip
C Centering ring
D Small flange port
ABCD
TC 100 TCS 010

11
Installation
Connecting the fore-
vacuum side
Recommendation: As backing pump, use a dry-compressing diaphragm pump or
rotary vane pumps from the Pfeiffer Vacuum programme. The backing pump must
generate a vacuum pressure of ≤ 5 mbar.
ÎWith rigid pipe connections: Install bellows for attenuation of vibrations in the
connection line.
ÎConnect the fore-vacuum line with small-flange components or threaded hose
couplings. Do not narrow the free cross section of the fore-vacuum flange!
ÎThe backing pump is connected electrically via a relay box to:
– a connection box TCS 010 or
– the accessory output on the TC 100 according to the connections diagram.
Connecting the
power supply
The turbopumps CompactTurbo™ TPD 011 N form a single unit with the electronic
drive unit and the power supply pack. The power supply is mounted to the pump
and connected to the electronic drive unit ex factory. The supply voltage for the
power supply amounts 90 - 265 VAC, 50/60 Hz type dependant.
ÎOrder the mains cable for the power supply separately (see "accessories").
ÎInsert the mains cable into the connection X1 on the power supply.
ÎConnect the mains cable to the mains.
After the mains voltage is applied to the power supply, the TC 100 performs a self-
test to check the supply voltage. The provided supply voltage for the TC 100 is
24 VDC ± 5% in accordance with standard EN 60 742. The turbopump is set into op-
eration.
WARNING
Damage to health due to poisonous gases
Process gases can damage health and contaminate the environment.
ÎSafely guide away the gas emission from the backing pump!
ÎObserve all safety recommendations of the gas producer.
CAUTION
Impermissible attachment
Avoid damage to the pump and system from insufficient and impermissible installa-
tion.
ÎNever use the fore-vacuum flange to fix the pump.
ÎAffix the turbopump with 4 x M5 tapped holes to the pump housing.
WARNING
Danger of electric shock
In case of defect, the parts connected to the power supply are under voltage.
ÎAlways keep the mains connection freely accessible so you can disconnect it at any
time.

12
Installation
5.5 Connecting Pfeiffer Vacuum display and control units or PC
Fig. 3: Connecting the serial interface RS485
An external operating part (DCU or HPU 001) or an external computer can be con-
nected via the connection with the designation "RS485" on the connection box
TCS 010. Use a shielded, 8-pole modular connection cable for this purpose (includ-
ed with the DCU/HPU). The interface is securely separated galvanically from the
maximum occurring supply voltage of the TC 100. The electrical couplings are op-
tically decoupled internally.
Connections The connection of a RS232- oder USB-interface is possible via a TIC 001 or the
USB/RS485-converter.
Cross-linking via the
connection RS485
DCU
TC 100 + TCS 010
RS-232
TIC 001
RS-485
USB/RS485-converter
HPU 001
TC 100
TC 100
Designation Value
Serial interface RS485
Baud rate 9600 Baud
Data file word length 8 bit
Parity keine (no parity)
Start bits 1
Stop bits 1..2
1 .... 8
Pin Assignement
1 not connected
2 +24 V output ladable with ≤210 mA
3 not connected
4 not connected
5 RS485: D+
6Gnd
7 RS485: D-
8 not connected
D+ D-
TC
D+ D-
TC
D+ D-
D+
D-
TIC 001/
USB/RS485-converter
RS 485

13
Installation
ÎThe connections must be made in accordance with the specification of the inter-
face RS485.
ÎConnect all units with D+ (pin 5 / RS485) and D- (pin 7 / RS485) to the bus.
• The group address of the TC 100 is 960.
• All units connected to the bus must have differing serial interface addresses (pa-
rameter 797).
• All switched on remote functions have priority over the serial interface func-
tions.
• Refer to the component operating instructions for detailed information concer-
ning operation procedures and electrical data of the interface RS485.
5.6 Connecting the remote control
Remote control options are provided via the 15-pole D-Sub connector with the des-
ignation ”REMOTE“ on the TC 100. The inputs 2 - 6 are activated by connecting
them with +24 VDC* at Pin 7 (active high) (see p. 15, chap. 5.7). When connecting
supply voltage the turbopump is started.
•On delivery: Pin 3, Pin 4, Pin 5 and Pin 7 are bridged in the mating plug.
ÎShielded cable must be used.
ÎConnect the shielding on the plug side for the TC 100 to the TC housing.
ÎNote the voltage supply by the power supply pack via Pin 1 and Pin 15 !
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
ÎConnect only suitable devices to the bus system.
NOTE
Connection to an external bus system
The integration into an external bus system (e.g. Profibus DP, DeviceNet) is possible
via connection gateway TIC 250 or TIC 260. Thus a synchronous use of interface
RS485 on the TC 100 is not possible.
15 9
81

14
Installation
Pin assignment and
function of the plug
X3
Reference voltage
Inputs
1)Only possible with activated parameter [P:028]. No function on delivery.
Outputs
Pin Function
1 +24 V ± 5 % Supply voltage (Icont = 4,2 A; Imax = 4,6 A)
15 Ground Ground potential for all inputs and outputs
Pin Function Open (low) Closed (high)
2 Remote / Local1) Remote: Priority of interface
RS485
Local: Priority of inputs (Pin 3 -
6)
3 Accessory input 1 "not vent" or "Heating OFF" "Venting release" or "Heating
ON"
4 Accessory input 2 "not vent" or "Heating OFF" "Venting release" or "Heating
ON"
5 Pumping station Pumping station OFF
Pumping station ON: turbo-
pump, backing pump and fan
are switched on
6 Standby / Reset Standby OFF
Standby ON: Pump is cont-
rolled to 66 % of the nominal
rotation speed.
Reset: By supplying a pulse (T
< 2 s) with an amplitude of 24
V a malfunction acknowledge-
ment can be processed.
7 + 24 VDC*
Pin Function low (0V) high (24V)
8 Switch output 1 Rotation speed switchpoint not
attainedt
Rotation speed switchpoint
attained: output can be loaded
with 24 V / 50 mA
9 Switch output 2 Collective error message
Trouble free operating: Output
can be loaded with 24 V /
50 mA
10 Accessory output 1 Accessory OFF Accessory ON; works setting:
fan
11 Accessory output 2 Accessory OFF Accessory ON; works setting:
venting valve
12 Analog output 0 - 10 VDC = 0 - 100 % *fend (optional current / power)
13 Serial interface RS485 D+ (DO/RI)
14 Serial interface RS485 D- (DO/RI)

15
Installation
5.7 Connections diagram TC
venting valve
cooling unit
relay
Accessory output 1
24 VDC/max. 200 mA
Accessory output 2 24 VDC/max. 200 mA
Analog output
Ground TC 100
0-10 VDC
= 0-100 % *fend
R ≥ 10 kΩ
venting valve
cooling unit
relay
1
3
4
5
6
7
9
12
13
14
15
Standby/Reset
X3
2
10
11
8
+UB(supply voltage TC/+24DC/46-6,3 A)
RS 485 - / (DO/RI)
RS 485 + / (DO/RI)
Switch output 2 24 VDC/max. 50 mA
Switch output 1 24 VDC/max. 50 mA
Kontaktstrom max. 6 mA/Kontakt
24 VDC*
Pumping station
Accessory 2
Accessory 1
Remote/Local
=~
1
3
4
5
6
7
9
12
13
14
15
2
10
11
8
X3
+UB
Accessory output 1
Switch output 1
Analog output
Standby/Reset
+UB
RS 485 -
RS 485 +
Switch output 2
24 VDC*
Pumping station
Accessory 2
Accessory 1
Remote/Local
Accessory output 2
PE
X3
TC 100 External connection
Power input
90 - 265 VAC; 50/60 Hz
Power input 90 - 265 VAC; 50/60 Hz
Power supply
Power Supply
PE
N
L
=
~
L
N
PE

16
Operation
6 Operation
6.1 Operation modes
The following operation modes are available:
• Operation without operating panel
• Operation via remote control unit
• Operation via RS485 with Pfeiffer Vacuum display and control units or PC
6.2 Commissioning
The following settings are permanently programmed in the TC 100 ex factory.
• Run-up time: 8 min
• Rotation speed switchpoint: 80%
• Automatic venting: 50%
ÎSettings are possible via the RS485 on the TC 100 by using DCU, HPU or PC.
6.3 Function description
Operation without
operating unit
ÎSwitch on the pump by connecting the power supply with the mains.
When air cooling is used: the cooling fan is switched on automatically. Once the
self test has been successfully completed on the TC 100 (approx. 10 seconds), the
turbopump and the backing pump - if connected - begin to operate.
Operation with
DCU 001 or HPU 001
ÎSwitch on the pump by connecting the power supply with the mains.
ÎSettings are possible via the RS485 on the TC 100 by using DCU, HPU or PC.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The
installation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
ÎFor information on the operating instructions of components, see "Accessories".
ÎUse original accessory parts only.
CAUTION
Re-starting
The serviceability of the operating fluid without operation is a maximum of three years.
Before restarting after a shut-down of 3 years or longer, carry out the following work.
ÎReplace the operating fluid reservoir.
ÎReplace bearings.
ÎFollow the maintenance instructions and inform Pfeiffer Vacuum.
WARNING
Danger due to open high vacuum flange
The rotor of the turbopump turns at high speed. If the high vacuum flange is open,
there is a danger of cut injuries and that the pump can be destroyed by objects falling
into it.
ÎNever operate the pump with an open high vacuum flange.

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Operation
ÎObserve the following documents for operation with Pfeiffer Vacuum display
and control units:
• Operating instructions DCU
• Operating instructions HPU 001
• Pumping operations with DCU
Operation with re-
mote control
Remote control options are provided via the 15-pole D-Sub connector with the des-
ignation ”REMOTE“ on the TC 100. The inputs 2 - 6 are activated by connecting
them with +24 VDC* at Pin 7 (active high) (see p. 15, chap. 5.7). When connecting
supply voltage the turbopump is started.
Local/Remote
This input is used to determine wether the control should be effected via the re-
mote control inpus or the serial interface RS485 (only works in conjunction with pa-
rameter [P:028]).
Accessory inputs
The components backing pump and air cooling (connectable to the accessory out-
puts) are switched automatically. The remote control inputs Pin 3 and Pin 4 are in-
effective then. If the outputs are programmed to "venting valve" or "heating" there
is the option with the respective inputs "venting release" (after the unit has been
switched off) and "heating ON/OFF" (when the rotation speed switchpoint is ex-
ceeded).
• Additional functions can be assigned to the accessory inputs and outputs via
DCU, HPU or PC.
Pumping station
Connected pumping station components (e.g. backing pump, air cooling) are trig-
gered and the turbopump is set into operation after a successfully completed self-
test (duration approx. 10 seconds).
Standby/Reset
With the use of "Standby", the turbopump can be operated either at 66% of the
nominal rotation speed (Standby ON) or at the nominal rotation speed (Standby
OFF).
By supplying a pulse (T < 2 s) with an amplitude of 24 V a malfunction acknowl-
edgement can be processed.
Switch outputs
The switch outputs 1 and 2 can be loaded with a maximum 24 V / 50 mA per output.
The following functions are assigned to the switching outputs:
• Switching output 1: Active high after the rotation speed switchpoint is reached.
The switch-point for the turbopump is set at 80% of the nominal rotation speed.
It can, for example, be used for a "pump operational" message.
• Switching output 2: Active low in case of malfunction(common error message).
A relay is connected between Pin 15 (earth) and the respective switching output Pin
8 or Pin 9.
Accessory outputs
The accessory outputs can be loaded with a maximum of 24 V / 200 mA per output.
Additional functions can be assigned to the accessory inputs and outputs via DCU,
HPU or PC. Works settings:
• Accessory output 1: A connected air cooling unit is activated.

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Operation
• Accessory output 2: A connected venting valve is activated, if venting release is
transmitted via accessory input 2.
Analogue output
Over the analog output, a speed-proportional voltage (0-10 VDC equals 0 - 100 %
*fend) can be picked up (load R ≥10 kΩ). Additional functions (optionally current/
power) can be assigned to the analog output via DCU, HPU or PC.
Gas-type-dependent
operation
With gas load and high rotation speed, the rotor heats up strongly. To avoid over-
heating, the TC 100 has implemented a power-rotation speed-characteristic,
whereby the pump can be operated at every rotation speed with the maximum al-
lowable gas load without danger of damage. The maximum power depends on the
gas type. Two characteristics are available in order to completely exhaust the
pump's capacity for each gas type.
• "Gas mode 0" (factory setting) for gases with the molecular mass ≥ 40, e.g. Ar
• "Gas mode 1" for all lighter gases.
Fig. 4: Gas mode power characteristic
• Settings are possible via the RS485 on the TC 100 by using DCU, HPU or PC.
• Vertex of the power characteristic (see p. 29, chap. 13)
The turbopump is always run up under maximum power in order to minimise the
run-up time. When the set rotation speed is achieved, the chosen power character-
istic is automatically switched over. When the gas-type-dependent maximum pow-
er is exceeded, the rotation speed of the turbopump is reduced until an equilibrium
between permissible power and gas friction is attained.
ÎTo avoid rotation-speed fluctuations, Pfeiffer Vacuum recommends setting the
equilibrium frequency or a somewhat lower frequency in speed actuation ope-
ration.
6.4 Montioring of the operation conditions
Operating mode dis-
play via LED
LEDs in the front panel of the TC 100 show basic operating conditions of the tur-
bopump and TC. A differentiated malfunction and warning display is possible only
for operation with DCU or HPU.
CAUTION
Danger of the pump being destroyed
Pumping of gases with the molecular mass ≥ 40 in the wrong gas mode can lead to
destruction of the pump.
ÎEnsure the gas mode is correctly set.
ÎContact Pfeiffer Vacuum before using gases with a greater molecular mass.
Leistung
Frequenz
DB
C
A
D-C = Gas mode «0»
B-A = Gas mode «1»
Hoch auf
fnom

19
Maintenance / replacement
Temperature monito-
ring
The motor current is reduced in case of impermissible motor temperature or im-
permissibly high housing temperature. This can cause the motor to fall below the
set rotation speed switchpoint and so result in switching off of the turbomolecular
pump.
6.5 Switching off and venting
After the turbopump is switched off, it must be vented to avoid contamination due
to particles streaming back from the fore-vacuum side.
ÎClose the fore-vacuum line. Switch off the backing pump or close a fore-vacuum
valve.
ÎSwitch off the turbopump with switch S1 on the control unit or via remote cont-
rol.
ÎVent the pump on the high vacuum side for minimum 5 s to atmospheric pres-
sure.
7 Maintenance / replacement
7.1 Maintenance intervals and responsibilities
• Clean the turbopump externally with a lint-free cloth and little industrial alcohol.
• You can replace the operating fluid reservoir and electronic drive unit yourself.
• Change the operating fluid reservoir at least every 3 years.
LED green LED red Cause
glows power supply is o.k.
function ”pumping station on“ is carried out
flashes short
(1/12s active)
power supply is o.k.
pumping station is off
blinks
(1/2s active) voltage drop; mains power failure
glows
Collective malfunction, e.g.
– run-up time failure
– excess temperature of the pump
– switching output 2 active (low)
blinks
(1/2s active)
Warning, e.g.
– ground leak of the supply voltage
– mains power failure
WARNING
Contamination of parts and operating fluid by pumped media is possible.
Poisoning hazard through contact with materials that damage health.
ÎIn the case of contamination, carry out appropriate safety precautions in order to pre-
vent danger to health through dangerous substances.
ÎDecontaminate affected parts before carrying out maintenance work.
NOTE
Disclaimer of liability
Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or
operating malfunctions due to improperly performed maintenance. The liability and
warranty entitlement expires.

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Maintenance / replacement
– Clarify shorter change intervals for extreme loads or impure processes with
Pfeiffer Vacuum Service.
• Change the turbopump bearing at least every 3 years.
– Contact Pfeiffer Vacuum Service.
– Clarify shorter change intervals for extreme loads or impure processes.
• For all other cleaning, maintenance or repair work, please contact your Pfeiffer
Vacuum service location.
7.2 Replacing the operating fluid reservoir
ÎTurn off the vacuum pump, vent to atmospheric pressure and allow to cool, if
necessary.
ÎRemove the vacuum pump from the system, if necessary.
ÎClose the flange openings by using the original protective covers.
ÎPlace the turbopump upright.
ÎScrew out the end cover on the respective bearing side of the turbopump with
an allen key. Pay attention to the bearing mounting and the O-ring!
ÎUsing tweezers, lift out the lubricant reservoir.
WARNING
Poisoning hazard through contact with materials that damage health.
The operating fluid reservoir and parts of the pump may contain toxic substances from
the pumped media.
ÎDispose of operating fluid reservoir in accordance with the applicable regulations.
Safety data sheet on request or under www.pfeiffer-vacuum.net
ÎPrevent health hazards or environmental damage due to contamination by means of
appropriate safety precautions.
ÎDecontaminate affected parts before carrying out maintenance work.
NOTE
Lubricant filling
The lubricant reservoir is sufficiently filled with TL 011 lubricant.
ÎDo not add additional lubricant.
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