Pfeiffer Vacuum HiPace 800 P User manual

Translation of the original instructions
Operating Instructions
EN
PT 0319 BEN/F (1211)
HiPace 800 P
Turbopump

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.2 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.3 Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.4 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.4 Monitoring of the operation conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 26
7.2 Replacing the operating fluid reservoir . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.3 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
11 Spare parts HiPace 800 P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
13.2 HiPace 800 P, 48 V DC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
13.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

About this manual
3
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refer to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacu-
um.com.
Applicable docu-
ments
*also available via www.pfeiffer-vacuum.com
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
HiPace 800 P Operating instructions
Operating instructions "Electronic drive unit TC 400" PT 0203 BN*
Declaration of conformity Part of this document
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
About this manual
Pictograph
definitions
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used DCU: Display and control unit
HPU: Handheld programming unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
Symbols used The following symbols are used consistently throughout the diagrams:
High vacuum flange
Fore-vacuum flange
Electric connection
Cooling water connection
Venting connection
Sealing gas connection
Prohibition of an action or activity in connection with a source of danger,
the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document

Safety
5
2Safety
2.1 Safety precautions
●Do not expose any body parts to the vacuum.
●Observe all safety and accident prevention regulations.
●Regularly check the proper observance off all safety measures.
●Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the reg-
ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use
exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum
is able to guarantee the compliance of the European and North American guidelines.
●A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump
must read and observe the safety-related parts of these operating instructions.
The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.
NOTICE
Checking the safety system against excess rotation speed
To provide the functioning of the integrated safety system for avoiding excess rotation
speed, the pump must run-up from the standstill at least once a year.
Switch off the pump and await the complete standstill (rotation speed = 0 Hz).
Run-up the pump according to this operating instructions.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device as defined in SEMI-S2
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

6
Safety
●Do not loosen any plug connection during operations.
●Wait for the rotor to reach standstill before peforming work on the high vacuum flange.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Never fill or operate turbopump with cleaning agent.
●Do not operate the turbopump with open high vacuum flange.
●Do not carry out any unauthorized modifications or conversions to the pump.
●When returning the turbopump observe the shipping instructions.
2.2 Protective equipment
Determined situations concerning the handling of vacuum pumps require wearing of per-
sonal protective equipment. The owner, respectively the employer are obligated to pro-
vide adequate equipment to any operating persons.
DANGER
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be con-
taminated by toxic, reactive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.
kg
WARNING
Risk of injury through falling objects
When transporting vacuum pumps by hand, there is a danger through loads slipping and
falling down.
Carry small and mid-size vacuum pumps two-handed.
Carry vacuum pumps > 20 kg by a suitable lifting device.
Wear safety shoes with steel toe cap according to directive EN 347.
CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.
If necessary wear protective gloves according to directive EN 420.
CAUTION
Risk of injury through sharp edges
Rotor and stator disks of turbopumps have very sharp edges.
Before any working wait for the complete standstill of the pump.
Do not reach in the high vacuum flange.
If necessary wear protective gloves according directive EN 420.

Safety
7
2.3 Proper use
●The vacuum pump may only be used to generate a vacuum.
●Only operate the turbopump with an approved backing pump.
2.4 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●pumping of corrosive or explosive media
●pumping of condensing vapors
●pumping of liquids
●pumping of dusts without using of sealing gas
●operation with improper high gas throughput
●operation with improper high fore-vacuum pressures
●operation with improper gas mode
●operation with improper high levels of insulated heat input
●venting with improper high venting rates
●use of the vacuum pump to generate pressure
●operation of the devices in areas with ionizing radiation
●operation in potentially explosive areas
●use of the devices in systems in which impact-like stress and vibrations or periodically
forces affect the devices
●use of accessories or spare parts, which are not named in this manual
NOTICE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accor-
dingly.
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

8
Transport and storage
3 Transport and storage
3.1 Transport
Reuse the transport container. Vacuum pumps should be transported or shipped in the
original packing only.
Only remove the protective covers from the high vacuum and the fore-vacuum side
immediately before connection.
Keep the original protective covers.
Always transport the turbopump in an upright position.
3.2 Storage
Close the flange openings by using the original protective covers.
Close further connection ports by using the corresponding protective covers.
Store the pump only indoors at temperatures between -25 °C and +55 °C.
In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-
wrapped in a plastic bag together with a bag of desiccant.

Product description
9
4 Product description
4.1 Product identification
Pump types The product designation consists of a family designation (1), the size (2), which is orient-
ed on the pumping speed, and if applicable the additional properties (3) of the pump.
HiPace(1) 800(2)P(3)
Pump features
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec-
ond edition, including Amendment 1, or a later version of the same standard incorporat-
ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod-
uct or:
●www.tuvdotcom.com
●TUVdotCOM-ID 0000021320
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Example for a rating plate
Scope of delivery ●HiPace 800 P with TC 400 and 48 V DC ± 5 %
●Mating plug for the connection "remote"on the TC 400 (type dependent)
●Mating plug for the connection "E74" on the TC 400 (type dependent)
●Protective cover for the high vacuum flange and the fore-vacuum flange
●Operating instructions
1. Family designation 2. Model designation 3. Property designation
HiPace 800 = Model designation of
the pump related to its pump-
ing speed class
none = Standard version
U= Upside-down installation orientation
C= Corrosive gas version
P= Process
M= Active magnetic bearing
T= Temperature management system
Characteristics HiPace 800 P
HV flange DN 200 ISO-K DN 200 ISO-F DN 200 CF-F
Flange material Aluminium Aluminium Stainless steel
Mod.:
M.-No.:
Ser. -No.:
Oil:
S(N
2
):
n,f:
Made in Germany
HiPace 300
DN 100 ISO-K, 3P
PM P03 900
---
260 l/s
60000 1/min, 1000 Hz
Weight: 6.7 kg
D-35614 Asslar

10
Product description
4.2 Function
The turbopump HiPace 800 P forms a complete unit together with the electronic drive
unit TC 400. For the voltage supply only Pfeiffer Vacuum power supplies may be used
(e.g.TPS or DCU).
Cooling ●Water cooling
●Air cooling (optional)
In the case of excess temperature the electronic drive unit reduces the drive power au-
tomatically. Depending on the application and the HiPace different cooling variants are
selectable.
Rotor bearing Hybrid bearing TurboDrag pump
●High vacuum side: maintenance-free permanent magnetic bearing
●Fore-vacuum side: ceramic ball bearing
Drive Electronic drive unit TC 400
Fig. 2: View of HiPace 800 P with TC 400
4 Pump housing / High vacuum
flange
8 Electronic drive unit TC 400
14 Cooling water connection
16 Sealing gas connection
17 Venting connection
20 Fore-vacuum connec-
tion
4
14
20
8
17
16
F
H
SG

Product description
11
4.3 Range of application
The pump HiPace 800 P must be installed and operated under the following ambient
conditions:
Installation location weather protected (indoors)
Protection category IP 54
Protection class III
Ambient temperature +5 °C to +35 °C with air cooling
+5 °C to +40 °C with water cooling
Relative humidity max. 50% at T ≤40 °C, up to
max. 80 %, at T ≤31 °C
Atmospheric pressure 75 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Permissible surr. magnetic field ≤6 mT
Overvoltage category II
Connection voltage electronic drive
unit (depending on the variant)
48 V DC ±5%
Remarks to ambient conditions
The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible fore-vacuum pressure or at maximum gas throughput depending
on the cooling method. The turbopump is intrinsically safe by a redundant temperature
monitoring.
●By reducing the fore-vacuum pressure or gas throughput, the turbopump can be ope-
rated at higher ambient temperatures.
●If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit reduces drive power first and switches off then, if necessary.

12
Installation
5 Installation
5.1 Set-up
When installing the pump, observe the following conditions:
●the ambient conditions specified for the range of application
●When using a casing heating and a water cooling unit the temperature of the connect-
ed flange of the vacuum chamber must not exceed 120 °C.
●The pump may be fastened to the floor only after consultation with Pfeiffer Vacuum.
●It is not allowed to operate the device in systems where impact-like stresses and vi-
brations or periodically forces occur.
5.2 Preparatory work
Ensure sufficient cooling for the turbopump.
Where magnetic fields > 6 mT are involved, a suitable shielding must be used. Check
installation location and consult Pfeiffer Vacuum if needed!
The maximum permissible rotor temperature for the turbopump is 90 °C. If high tem-
peratures arise for process reasons, the radiated heat input must not exceed 4.2 W.
Install suitable screening sheets, if necessary (design information on request).
5.3 Assembly
●Ensure the greatest possible cleanliness when installing any high vacuum parts. Un-
clean components prolong the pump-down time.
●All flange components must be grease-free, dust-free and dry at installation.
●The operating fluid reservoir is already installed and filled for the turbopump HiPace
800 P.
Earthquake safety An earthquake can result in contact with the safety bearings. All forces occuring hereby
are safely absorbed by the properly installed flange connections.
The vacuum chamber must be secured by the customer against shifting and tipping.
WARNING
Risk of the turbopump being torn-off
In case of sudden blocking of the rotor, torques of up to 4200 Nm can occur, which can
lead with incorrect attachment to tearing the turbopump off. The energy released there-
by can hurl the entire pump or fragments from their inside around the area. This can
cause severest injuries (possibly resulting in death) and large property damage.
Precisely follow installation instructions.
Only use Pfeiffer Vacuum original components (accessories) for installation.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.

Installation
13
Fig. 3: Example: How to secure against shifting and tipping by external tremors
Use of a splinter
shield or protection
screen
The installation of a Pfeiffer Vacuum centering ring with splinter shield or protection
screen in the high vacuum flange protects the turbopump against foreign bodies coming
from the chamber. The pumping speed is reduced.
Vibration damper
Mounting orientation When using dry backing pumps, Pfeiffer Vacuum HiPace pumps are designed for instal-
lation in any orientation.
Support pipes in front of the vacuum pump or remove them. No force from the pipe
system may be exerted on the fixed pump.
To avoid contamination via the fore-vacuum line when using oil-sealed backing pumps
the fore-vacuum flange should always point vertically downward (± 25°).
Fig. 4: Recommended orientation of the fore-vacuum flange
The maximum axial loading capacity of the high vacuum flange is 1000 N (equals
100 kg). A one-sided load on the high vacuum flange is not permitted.
SC SC
SC
SC SC
SC = Safety Connection
Vacuum chamber
Volume flow rate reduction in %
H2He N2Ar
Splinter shield DN 200 7 11 23 26
Protection screen DN 200 2 3 7 8
WARNING
Danger from the turbopump and vibration damper being torn-off
In case of sudden blocking of the rotor, an applied vibration damper cannot compensate
any of the occurring forces. There is a danger of the turbopump being torn-off and the-
reby resulting severest injuries and property damages. Applicable safeguards must be
taken to compensate possible occurring torques.
Definitely consult with Pfeiffer Vacuum.
Do not exceed the max. permissible temperature at the vibration damper (100° C).
25° max
VV
VV

14
Installation
Installing the high
vacuum flange In the case the rotor suddenly blocks, the torques arising from the system and the high
vacuum flange must be absorbed. Only the components listed in the following can be
used to fasten the turbopumps to the high vacuum flange. The components for installing
the turbopumps are special designs of Pfeiffer Vacuum. Observe the minimum strength
of 170 N/mm2 for the flange material.
Installation of ISO-K
flange with ISO-K
flange
For the installation of the flange connections the following components are available:
●the valid mounting kit of the Pfeiffer Vacuum accessories programme
●protection screen or splinter shield are optionally
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 8claw clamps.
Tighten the claw clamps crosswise in three steps.
Tightening torque: 5, 15, 25 ±2 Nm
Installation of ISO-F
with ISO-F flange The connection types for installation of ISO-F to ISO-F flange are "hex screw and blind
hole", "stud screw and blind hole" as well as "stud screw and through hole". The following
elements are required:
●the valid mounting kit of the Pfeiffer Vacuum accessories programme
●protection screen or splinter shield are optionally
Hexagon screw and blind hole
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 12 hex screws with washer.
For a flange material with a strength of > 270 N/mm2screw in the hex screw 1.5 d into
the blind hole.
Tighten the hex screws crosswise in three steps.
Tightening torque DN 200: 10, 20, 38 ± 3 Nm
DANGER
Danger to life - impermissible fastening
Twisting or tearing-off is possible in case the rotor is suddenly blocked due to the faste-
ning of pumps on a vacuum chamber with different flange variants.
The combination of different flange types is impermissible in any case.
Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis-
sible fastening.
NOTICE
Observe shape tolerances for the counter flange!
Unevennesses of the customer supplied counter flange can lead to warping of the pump
casing despite proper fastening. Leakiness and negative running characteristics can be
the result.
Do not exceed an evenness of max. 0.05 mm for the whole surface.
Mounting of ISO flanges
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or
ISO-K can lead to twisting despite proper installation.
●The tightness of the high vacuum flange is not at risk thereby.
1.5d

Installation
15
Stud screw and blind hole
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 12 stud screws and nuts.
For a flange material with a strength of 170 - 270 N/mm2screw in the hex screw 2.5 d
into the blind hole.
Tighten the nuts crosswise in three steps.
Tightening torque DN 200: 10, 20, 38 ± 3 Nm
Stud screw and through hole
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 12 stud screws and nuts.
Tighten the nuts crosswise in three steps.
Tightening torque DN 200: 10, 20, 38 ± 3 Nm
Installation of CF-
flanges
The connection types for installation of CF to CF flange are "stud screw and blind hole"
as well as "hex screw and through hole". The following elements are required:
●the valid mounting kit of the Pfeiffer Vacuum accessories programme
●A copper seal
●protection screen or splinter shield are optionally
Stud screw and blind hole
If used: Insert protective screen or splinter shield with the clamping lugs downward
into the high vacuum flange of the turbopump.
Place the seal exactly in the hollow.
Connect the flange using 24 stud screws (M8) with washers and nuts and tighten cir-
cularly with a torque of 22 ±2 Nm. After this, check the torque, since flowing of the
sealing material may make it necessary to tighten the screws.
Hexagon screw and through hole
If used: Insert protective screen or splinter shield with the clamping lugs downward
into the high vacuum flange of the turbopump.
Place the seal exactly in the hollow.
Connect the flange using 24 hex screws (M8) with washers and nuts and tighten cir-
cularly with a torque of 22 ±2 Nm. After this, check the torque, since flowing of the
sealing material may make it necessary to tighten the screws.
2.5d
NOTICE
Preservation of sealing capacity
Observe the following to preserve sealing capacity:
Touch seals only with gloves.
Make sure sealing lips are undamaged.

16
Installation
5.4 Connections to the turbopump
Electronic drive unit Turbopumps with integrated electronic drive unit are designed for various applications.
Therefore different connection panels are available.
●TC 400 in standard version
●TC 400 PB for Profibus linking
●TC 400 E74 in dependence on specification SEMI E74
●TC 400 DN for DeviceNet linking
Detailed description for function, configuration and operation with the respective connec-
tion panel are given in the specific operating instructions for the electronic drive unit.
Connecting the
power supply For voltage supply of the electronic drive unit TC 400, only use original power supplies
(e.g. TPS 400 or DCU 400). Use of other power supplies only after consultation with Pfei-
ffer Vacuum. Connecting cables are available from the Pfeiffer Vacuum accessories.
Make sure that the voltage of the turbopump is valid.
Switch off switch S1 on the power pack (position "0").
Insert the connection cable with the socket in the connection "DC in" on the electronic
drive unit and close the bayonet lock.
Insert the connection cable with the plug in the connection "DC out" on the power sup-
ply and close the bayonet lock.
Remote plug The shipment includes a mating plug for the 26-pin connection with the designation
"remote" on the TC 400. The mating plug bridges the following connections with the sup-
ply voltage (Pin 1), allowing the turbopump to operate without an additional operating unit
or remote control:
●Pin 2, Enable venting "on"
●Pin 3, Motor pump "on"
●Pin 4, Pumping station "on"
●Pin 14, Remote access request
Place and fix the mating plug on the connection "remote" on the TC 400.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
DC out
S1
TPS / DCU Electronic-
drive unit
DC in
PM 061 352 -T

Installation
17
Accessory connec-
tion Up to 4 accessories can be connected to the electronic drive unit TC 400. M12 sockets
with the designation "accessory" are available for this purpose. The accessory connec-
tions have been preconfigured at the factory. If the units listed below are connected with
the preconfigured connection, they are immediately ready for operation according to the
factory settings. It is possible to connect other accessories; to do so, settings must be
made on the electronic drive unit.
To connect two units to one accessory connection, use the appropriate Y-Connector
from the Pfeiffer Vacuum range of accessories.
Connect the adapter to the appropriate red-coded connection on the TC 400.
Settings can be made via the interfaces of the TC 400 (remote, RS-485, Profibus or
DeviceNet).
Overview of factory preset accessory connections on the TC 400
CAUTION
Automatic start
After bridging the contacts Pin 1, 3, 4, 14 on the connection "remote" or using the mating
plug supplied and setting up the supply voltage, the turbopump will run up immediately.
Switch on the mains supply on the turbopump immediately before operation.
12
12
Y-Connector
for Accessories
Accessory connection Connection with Y-connector Preset accessory
Accessory A1 Acc. A to Y-1 Air cooling unit
Accessory A2 Acc. A to Y-2 Backing pump
Accessory B1 Acc. B to Y-1 Venting valve
Accessory B2 Acc. B to Y-2 Casing heating unit

18
Installation
Connecting the fore-
vacuum side Recommendation: As backing pump, use a dry-compressing vacuum pump or a rotary
vane pump from the Pfeiffer Vacuum programme. The backing pump must generate a
vacuum pressure of ≤ 5 hPa.
With rigid pipe connections: Install bellows for attenuation of vibrations in the connec-
tion line.
Connect the fore-vacuum line with small-flange components or threaded hose cou-
plings. Do not narrow the free cross section of the fore-vacuum flange!
The backing pump is connected electrically via a relay box.
Plug in and fix the accessory’s control lead to the corresponding accessory connection
port on the TC 400.
Default for the backing pump is "accessory A2".
Establish the mains supply for the relay box according to the accessory operating in-
structions.
– Make sure the supply voltage for the backing pump is valid.
WARNING
Damage to health due to poisonous gases
Process gases can damage health and contaminate the environment.
Safely lead away the gas emission from the backing pump!
Observe all safety recommendations of the gas producer.
Fig. 5: Connecting the backing pump
20 Fore-vacuum connection
20a Backing pump
20b Backing pump relay box
20.1 Centering ring
20.2 Clamping ring
V
20b
20a
20.2
20.1
20
NOTICE
Design of the fore-vacuum connection regarding sudden twisting of the pump
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or
ISO-K can lead to twisting despite proper installation.
Keep masses small, which can be installed directly to the pump.
Connect flexible line elements directly to the turbopump, if necessary.

Installation
19
Air cooling As an option, turbopumps with the electronic drive unit TC 400 may be operated with air
cooling up to an ambient temperature of +35 °C.
Fix the Pfeiffer Vacuum air cooling unit to the holes of the turbopump using two
screws.
Plug in and fix the accessory’s control lead to the corresponding accessory connection
port on the TC 400.
Default for air cooling is "accessory A1".
Venting valve The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut-down or
power failure.
The permissible connection pressure is max. 150 kPa absolute.
Unscrew the venting screw with seal ring from the venting connection.
Screw in the venting valve with seal ring.
Plug in and fix the accessory’s control lead to the corresponding accessory connection
port on the TC 400.
Default for the venting valve is "accessory B1".
If neccessary install a venting gas supply (e.g. inert gas) to the intake (G 1/8") of the
solenoid valve.
Fig. 6: Connecting the air cooling
3 Pump lower part
3a Air cooling unit
3b Allen head screw
3c Counter-sunk screw
3a
3b
3c
3
Fig. 7: Connecting the venting valve
18 Seal ring 17 Venting screw 17a Venting valve
17a
17
18

20
Installation
Heating jacket The turbopump and vacuum chamber can be heated to reach the final pressure more
quickly. Use of a heating jacket is only permissible for pumps with the high vacuum flange
in stainless steel design. The heating duration depends on the degree of contamination
as well as the final pressure to be reached and should be at least 4 hours.
●When using a casing heating and a water cooling unit the temperature of the connect-
ed flange of the vacuum chamber must not exceed 120 °C.
●The maximum permissible rotor temperature for the turbopump is 90 °C. If high tem-
peratures arise for process reasons, the radiated heat input must not exceed 4.2 W.
Install suitable screening sheets, if necessary (design information on request).
Bend open the outer heating jacket on the tensioning strap and place it sidewards on
to the cylindrical segment of the pump casing.
– Do not bend the heating straps!
– The heating jacket must seat completely on the casing segment.
Fix the heating jacket with the fixing screw on the casing.
– Observe the tightening torque for the fixing screw!
Tightening torques for fixing screws of heating jackets
Plug in and fix the accessory’s control lead to the corresponding accessory connection
port on the TC 400.
Default for the casing heating is "accessory B2".
NOTICE
Dangerous excess temperatures
Process-related high temperatures can result in impermissible excess temperatures
and thus damage to the turbopump.
Always use water cooling when a casing heating is used or when the pump is con-
nected to a heated vacuum chamber.
CAUTION
Risk of burns
High temperatures arise when the turbopump or vacuum chamber are baked out. As a
result, there is a danger of burns from touching hot parts, even after the casing heating
is switched off!
Thermally insulate heating jacket, pump housing and vacuum chamber, if possible
during installation.
Do not touch heating jacket, pump casing and vacuum chamber during bake out.
Fig. 8: Connecting the heating jacket
4 Pump casing
4a Heating jacket
4b Fixing screw
4c Heating relay box
4d Warning sticker
Fixing screw Tightening torque
in cold condition Tightening torque during the heating-up Singular retightening af- ter the cooling down
M5 6 Nm 7 Nm 7 Nm
M6 11 Nm 12 Nm 12 Nm
H
4a
4d
4b
2x
4c
4