Pfeiffer Vacuum TMH 262 User manual

Operating Instructions
Turbomolecular Drag Pumps
With Electronic Drive Unit With TC 100
TMH 262 / TMU 262
TMH 262 P / TMU 262 P
PT 800 043 BE/B (0101)

2
Index
Page Page
1. Safety Instructions.................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2. Understanding The Pumps
TMH 262/TMU 262.................................... 4
2.1. Main Features..................................................................... 4
2.2. Differences Between The Pump Types.......................... 4
3. Installation............................................... 5
3.1. Preparations For Installation............................................ 5
3.2. Installing The Pump,
Connecting The High Vacuum Side ................................ 5
Fitting The Splinter Shield................................................. 6
3.3. Connecting The Fore-Vacuum Side ................................ 6
3.4. Connecting The Cooling Unit............................................ 7
3.5. Connecting The Venting Valve......................................... 7
3.6. Connecting The Casing Heating Unit.............................. 7
3.7. Connecting The Electronic Drive Unit TC 100................ 8
3.8. Installing The Power Unit ................................................. 8
3.9. Installing The Operating And Display
Control UniT DCU 001/DCU 150 ........................................ 8
3.10. Connecting The Sealing Gas Valve................................. 8
3.11. Remote Control Unit........................................................... 9
3.12. Connecting The Serial Interface RS 485 ...................... 10
Connection ........................................................................ 10
Connecting The RS 485 ................................................... 10
3.13. Connections Diagram...................................................... 11
4. Operations.............................................. 12
4.1. Before Switching ON....................................................... 12
4.2. Switching ON.................................................................... 12
4.3. Operations Via The Remote Control Unit ..................... 12
Local/Remote.................................................................... 12
Accessory Inputs ............................................................. 12
Pumping Station ............................................................... 12
Standby/Reset .................................................................. 12
Switch Outputs ................................................................. 13
Accessory Outputs .......................................................... 13
Analog Outputs................................................................. 13
4.4. Gas Type Dependent Operations .................................. 13
4.5. Switching OFF And Venting............................................ 13
4.6. Shutting Down For Longer Periods ............................... 14
4.7. Operations With The DCU 001/DCU 150 ....................... 14
5. Monitoring Operations ......................... 14
5.1. Operations Display Via LED............................................ 14
5.2. Turbopump Temperature Management....................... 14
6. What To Do In Case Of
Breakdowns ?........................................ 15
7. Maintenance.......................................... 16
7.1. Replacing The Lubricant Reservoir............................... 16
8. Service ................................................... 17
9. Technical Data....................................... 18
9.1. Dimensions Diagram ....................................................... 19
10. Spare Parts............................................. 20
11. Accessories ........................................... 21
Declaration of Contamination.................... 22
Manufacturer’s Declaration ........... (last page)
Please note: Current operating instructions are available via
www.pfeiffer-vacuum.de under ”Infoservice”.

3
☞Read and follow all instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞Avoid exposing any part of the body to vacuum.
☞Observe the safety and accident prevention regulations.
☞Regularly check that all accident prevention measures are
being complied with.
☞Do not operate the turbopump with open high vacuum
flange.
☞Do not carry out any unauthorised conversions or
alterations to the turbopump with TC 100.
☞When returning the turbopump observe the shipping
instructions.
☞Use at least 4 bracket screws to connect the high vacuum
flange (ISO-flange).
☞The turbopump must be anchored in accordance with the
installation instructions.
☞Do not disconnect the plug between the TC 100 and
accessory components during operations.
☞Disconnect the voltage supply for the TC 100 before
opening the turbopump.
☞When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞If a heater is in use temperatures of up to 120 °C can be
present in the area of the high vacuum flange. Take care to
avoid burns !
☞During operations, temperatures of up to 65 °C can arise in
the lower part of the turbopump. Take care to avoid burns!
☞Keep leads and cables well away from hot surfaces
( > 70 °C).
☞Operate the turbopump with TC 100 only in conjunction
with the relevant power unit (accessory).
☞The unit has been accredited protection class IP 30. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken. Protection class IP 54 is afforded for the Electronic
Drive Unit TC 100 by using a suitable 15 pole D-Sub plug
(accessory).
☞The mains connection must be subject to a safe
connection to the PE (protection class 1).
1.1. For Your Orientation
Instruction in the text
➡Working instruction: here, you have to do something.
Abbreviations used
DCU = Operating and display control unit
TC = Electronic drive unit, turbopump
TCS = Pumping station control unit
TMP = Turbomolecular pump
TPS = Power Unit
Modifications reserved.
1. Safety Instructions
Symbols used
The following symbols are used throughout in all illustrations.
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Air cooling
Electric connection
Sealing gas connection
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions
Danger of burns from touching hot parts.
Danger of personal injury.
Danger of damage to the pump or to the system.
Danger of injury from rotating parts.
Attention to particularly important information
on the product, handling the product or to a
particular part of the documentation.
Modifications reserved.
☞
PLEASE NOTE

4
2.1. Main Features
Turbopumps TMH 262/TMU 262 with the TC 100 form an unit.
Voltage is supplied by the power unit (see ”Accessories”).
Cooling
Air cooling or water cooling is required (”Accessories”).
Integrated protective measures against excess temperatures:
The Electronic Drive Unit TC 100 reduces
the rotor rotation speed.
Bearings
High vacuum side: wear free permanent magnetic bearing.
Fore-vacuum side: oil circulatory lubricated ball bearing
with ceramic balls.
Proper use
– The Turbomolecular Pumps TMH 262/TMU 262 may only be
used for the purpose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used (only for version ”P”).
– If the pump to be operated with more then 50% of the
permissible gas load, sealing gas must be used (only for
version ”P”).
Feature TMH 262 TMU 262
High vacuum flange ISO-K CF-F
High vacuum seal Viton MetalAttainable
final < 1 · 10-8 mbar < 5 · 10-10 mbar
pressure (without baking-out) (with baking-out)
2. Understanding The Pumps TMH 262/TMU 262
Abbreviations on the rating plate of the pump
Suffix ”P”: Pumps with the designation TMH/TMU 262 P
have been designed for the connection
of purge gas (see Section 3.10.).
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– Only PFEIFFER power units may be used to operate. The
use of other power units requires the express agreement
of the manufacturer.
– The pumps with TC 100 may only be operated providing the
ambient conditions in compliance with Protection Type IP
30 are observed.
Improper use
The following is regarded, inter alia, as improper:
– The pumping of explosive or corrosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 9. ”Technical Data”).
– Operating the pump in environments which require a pro-
tection class superior to IP 30.
– Operations without the use of cooling equipment.
– The use of other power units or accessories which are not
named in this manual or which have not been agreed by
the manufacturer.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
Turbomolecular Drag Pump TMU 262 P with TC 100
1 High vacuum flange
2 Fore-vacuum flange
4 Venting srew
8 Electronic Drive Unit TC 100
9 Sealing gas connection (only for ”P” version, see rating plate)
1
4
2
9
8

5
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
– The option to connect two of accessory components is
provided on the Connection Box TCS 010 (please see
"Accessories") which is secured into the Electronic Drive
Unit TC 100.
– With Pumping Station Control Unit TCS 010 it is possible to
connect accessory units (please see "Accessories").
– The maximum permissible rotor temperature of the pump is
90 °C. If the vacuum chamber or parts in the vacuum
chamber are heated must be fitted if necessary, suitable
shielding in the vacuum chamber before the turbopump
(constructional suggestions available on request).
– Only remove the blank flange from the high and fore-vacu-
um side immediately before connection.
– On Turbopumps TMH 262/TMU 262 the lubricant reservoir
is already fitted and filled.
– Where magnetic fields of > 5.5 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the heating sleeve and the body
of the pump must be insulated to prevent burns from
accidental contact.
– In the event of a sudden standstill of the rotor, torques of
up to 750 Nm can arise and these must be taken up by the
turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 4 bracket screws, or
– CF flange with the complete set of M8 screws, or
– Underside of the pump with 4 screws M8,
screws quality 8.8.
– For operating the pump air or water cooling is necessary.
3.2. Installing The Pump,
Connecting The High Vacuum Side
The utmost cleanliness must be observed when
fitting all high vacuum parts. Unclean
components prolong the pumping time.
Using the splinter shield
The use of a splinter shield in the high vacuum flange
protects the turbopump against foreign bodies coming from
the vacuum chamber but does reduce the volume flow rate of
the pump by approximately 15%.
For fitting splinter shields please refer to “Fitting the splinter
shield”
The high vacuum side can be flanged directly to the vacuum
chamber or via a bellows or a vibration compensator from
Pfeiffer (please see ”Accessories”).
Connecting via a bellows
If the high vacuum side is to be flanged via a bellows, the tur-
bopump must be secured for example via the holes on the
underside of the turbopump must be secured for example via
the holes on the underside of the pump. The fastening must
be able to withstand the torque referred to in Section 3.1.
Connecting via a Pfeiffer vibration compensator (Accessory)
The maximum permissible temperature at the
vibration compensator is 100 °C.
Where a Pfeiffer vibration compensator from Pfeiffer is in
use, a freely suspended turbopump can be flanged onto the
vacuum chamber. Additional fastening is unnecessary.
☞
PLEASE NOTE

6
Fitting The Splinter Shield (Accessory)
Insert the splinter shield in the high vacuum flange in such a
way that the corrugation of the strainer points outwards.
➡Bend the clamping lugs 12a slightly outwards so that sub-
sequently the splinter shield 12 is seated firmly in the high
vacuum flange (to avoid noise).
➡Insert the splinter shield in the high vacuum flange while
pressing the clamping lugs slightly inwards.
➡Press the outer ring of the splinter shield up to the limit
stop point in the high vacuum flange.
12a
12
H
Inserting the splinter shield
12 Splinter shield
12a Clamping lug
3.3. Connecting The Fore-Vacuum Side
Backing pump: Vacuum pressure ≤5 mbar
Recommendation: Oil-Free Diaphragm Pump or Rotary
Vane Vacuum Pumps from the PFEIFFER
range (note installation position,
turbopump, see Section 3.2.).
Connecting the backing pump
All connections of the fore-vacuum line: with the usual small
flange components or hose screw connections.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all gas manufacture's safety
instructions.
➡With rigid pipe connections: fit a bellows in the connecting
line to reduce vibration.
➡The fore-vacuum pump is controlled via a relay box
(accessory) and Connection Box Unit TCS 010 (accessory)
or in accordance with the connections diagram (please
see Section 3.13.).
Please refer to Operating Instructions PT 800 030 BN for
details on the relay box, backing pump and its installation.
Please refer to Operating Instructions PT 800 045 BN for
details on the Pumping Control Unit TCS 010.
The maximum loading capacity of the high vacu-
um flange is 500 N (equivalent to 50 kg).
Assymetric loading on the high vacuum flange
must be avoided.
With horizontal pump installation and oil-sealed backing
pumps (e.g. rotary vane pumps) the fore-vacuum flange of the
turbopump must be aligned vertically downwards (maximum
deviation ±20°), otherwise the turbopump could become
dirty.
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the pump.
Permissible installation positions for the turbopump
11 Vacuum chamber
20°20°
C40-904
Installation position with oil-sealed backing pump
Directly flanging the pump

7
3.4. Connecting The Cooling Unit
The Turbopumps TMH 262/TMU 262 must be water or air
cooled.
Air cooling may only be used where the ambient temperature
is < 35 °C.
Use and installation:
– For water cooling please refer to Operating Instructions
PM 800 546 BN.
– For air cooling please refer to Operating Instructions
PM 800 543 BN.
3.5. Connecting The Venting Valve
The venting valve (accessory) provides automatic venting in
the event of a power failure and switching off.
Fitting the venting valve
➡Unscrew the venting screw from the venting connection of
the turbopump.
➡Screw in venting valve with seal (USIT ring) on hexagonal
SW 14.
Electrical connection
Electrical connection
➡Plug control lead into the connection ”Out 2” of the
TCS 010 or in accordance with the connections diagram
(please see Section 3.13.).
For Details please refer to Operating Instructions for the
Connection Box TCS 010, PT 800 045 BN.
The venting mode of the venting valve is selected via the DCU
or Serial Interface RS 485.
The maximum pressure at the venting valve is
1.5 bar absolute.
Please refer to Operating Instructions PM 800 507 BN for
details on Venting Valve TVV 005.
3.6. Connecting The Casing Heating Unit
In order to accelerate attainment of final pressures,
turbopumps and vacuum chambers can be heated.
Baking out is only practical on pumps with stainless steel
casings (TMU pumps). On account of their aluminium casings,
the temperatures attainable on TMH pumps are not high
enough.
Heating duration is dependent on the level of contamination
and the required final pressure but should be at least four
hours.
Where casing heating is involved the turbopump
must be water cooled.
High temperatures are generated when
turbopumps are heated.
There is a danger of injury from coming into
contact with hot parts even after the casing hea-
ting has been switched off.
Heating sleeve and the pump casing should be thermally
insulated during the installation. During the heating phase be
careful not to come into contact with the heating sleeve or
the pump casing.
Casing heating control is effected via the TCS 010 (please
refer to Operating Instructions PT 800 045 BN for the TCS 010)
or in accordance with the connections diagram (please see
Section 3.13.).
For details regarding the casing heating and its installation
please refer to Operating Instructions PM 800 542 BN.
☞
PLEASE NOTE

8
3.8. Installing The Power Unit
Only PFEIFFER power units (accessory) may be
used for the purpose of supplying voltage. The
agreement of the manufacturer is required if
other power parts are to be used.
For further details regarding Power Unit TPS 150 please refer
to Operating Instructions PM 800 521 BN.
3.9. Installing The Operating And Display
Control Unit DCU 001/150
The connection of an Operating And Display Control Unit
DCU 001/DCU 150 is available with a TCS 010 (accessory) or a
connecting cable TPS - TC 100/DCU (accessory); please refer
to the relevant operating instructions and Section
3.13. Connection Diagram.
3.10. Connecting The Sealing Gas Valve
To protect the turbopump, especially where corrosive and
dusty processes are involved, it is necessary to use sealing
gas. Connection is effected via the sealing gas valve (please
refer to "Accessories").
For the sealing gas connection please refer to Section 9.1.
Dimensions.
For further details regarding the installation of the sealing gas
valve and setting the sealing gas level please refer to
Operating Instructions PM 800 229 BN.
Connecting the Electronic Drive Unit TC 100 with Power Unit TPS 150
X1 Mains connection
X2 Connection, power unit
X3 Connection, TC 100
S1 ON/OFF switch
8 Electronic Drive Unit TC 100
8a Connecting cable TPS - TC 100
8b Screw
105 Power unit TPS 150
105
X2
S1
X1 X2 8a
8
X3 8b
X3
3.7. Connecting The Electronic Drive Unit TC 100
Turbopump and Electronic Drive Unit TC 100 are
fixed together and form a single unit. Connecting
cable 8a to power unit 105 has to be ordered
separately (please see "Accessories").
➡Insert plug X3 on connecting cable 8a into socket X3 on
the TC 100 and secure with screw 8b.
➡Connect plug X2 on connecting cable 8a with Power Unit
TPS 150 (accessory); please refer to Section 3.13.
Connection Diagram.
Once operating voltage has been connected the
unit carries out a self-test to check the supply
voltage level which, for turbomolecular pumps
TMH/TMU 262 is 24 VDC±5% in compliance.
(Connecting with DCU 001/DCU 150 please refer to Operating
Instructions PM 800 477 BN.)
☞
PLEASE NOTE

9
3.11. Remote Control Unit
Remote control options for various functions are available via
connection plug X3 (Pin 2 – Pin 6) on the TC 100.
Shielded cable must be used. The shielding on the plug side
of the Electronic Drive Unit TC 100 should be connected to the
metal cap on the plug.
Inputs 2-6 are activated by supplying +24 VDC* to Pin 7
(active high) (please refer to Section 3.13. Connections
Diagram).
Pin arrangement and functions of the 15 pole plug X3
(please refer to the following table)
Pin Arrangement And Functions Of Plug X3
Pin nr. Function
1 Supply voltage +24 VDC ±5% (Idauer = 4,2 A; Imax = 4,6 A)
Inputs: Open (low) Closed (high)
2 Input remote/local1) Remote: priority of Serial Interface RS 485 Local: priority of inputs (Pin 3-6)
3 Input accessory 1
not vent or vent or
heating OFF heating ON
4 Input accessory 2
5 Input pumping station Pumping station OFF Pumping station ON:
turbopump, backing pump and fan
are switched ON
6 Input standby/reset Standby OFF Standby ON:
Pump is accelerated to 66%
of the nominal rotation speed.
Reset:
By supplying a pulse (T < 2 s) with an
amplitude of 24 V a malfunction acknow-
ledgement can be processed.
7 + 24 VDC*
Outputs: low (0 V) high (24 V)
8 Switch output 1 Rotation speed switchpoint not attained Rotation speed switchpoint attained:
Output can be loaded with 24V/50mA
9 Switch output 2 Collective error message trouble free operating:
Output can be loaded with 24V/50mA
10 Accessory output 1 Accessory OFF Accessory ON
Works setting: fan
11 Accessory output 2 Accessory OFF Accessory ON
Works setting: automatic venting
12 Analog output 0 - 10 VDC = 0 - 100% *fend (optional current/power)
13 Serial Interface RS 485 D + (DO/RI)
14 Serial Interface RS 485 D - (DO/RI)
15 Mass (ground)

10
3.12. Connecting Serial Interface RS 485
The connection of the Operating And Control Unit
DCU 001/DCU 100 is possible via the TCS 010 (accessory)
or cable TPS - TC 100/DCU (accessory), please refer to
Operating Instructions for the TCS 010, PT 800 045 BN and the
Operating Instuctions for the DCU 001/100, PN 800 477 BN.
All units connected to the bus must have differing serial inter-
face addresses (parameter 797).
The group address of the Electronic Drive Unit TC 100 is 950.
Only safety low voltage may be connected to
the Serial Interface RS 485.
All switched on remote control functions have priority over
the serial interface functions.
For further details regarding the operation of
the Serial Interface RS 485 and its electrical
data please refer to separate Operating
Instructions PM 800 488 BN.
Profibus DP Gateway TIC 250 is available (accessory) for
connecting an Electronic Drive Unit TC 600 to a Profibus DP.
Please refer to the respective Operating Instructions
PM 800 599 BN for detailed information on the operation of
the TIC 250.
☞
PLEASE NOTE
Pin Arrangement
1 not connected
2 + 24 V output (loadable with ≤210 mA)
3 not connected
4 not connected
5 RS 485: D+ (DO / RI)
6 Gnd
7 RS 485: D- (DO / RI)
8 not connected
RS 485
1 ... 8
Connecting The RS 485
Connection to a fixed bus system
➡Connect all units with D+ (Pin 13/X3) and D- (Pin 14/X3) on
the bus.
➡The bus must be closed at both ends.
The connections must be made in accordance with the Serial
Interface RS 485 specifications.
5:D+, 7:D–
RTRT
PC
Level Converter
TC TC
(View from
the TC 100
plug side)
An external computer can be connected directly to Serial
Interface RS 485 via connection X3 (Pin 13, Pin 14).
Connection
Designation Value
Pin 13: D+
Pin 14: D-
Serial interface type: RS 485
Baud rate: 9600 Baud
Data file word length: 8 bit
Parity: no parity
Start bits: 1
Stop bits: 1..2
It is possible to connect an RS 232 (e.g. PC) via
a level converter (please see ”Accessories”).
☞
PLEASE NOTE

11
3.13. Connection Diagram
Kontaktstrom max. 6 mA/Kontakt
Fan Venting valve Relay
+U (Supply voltage TC/+24 VDC/4,6 - 6,3 A)
Accessory output 1 24 VDC/max. 200 mA Accessory output 2 24 VDC/max. 200 mA Switch output 1 24 VDC/max. 50 mA Switch output 2 24 VDC/max. 50 mA Analog output RS 485 + /(DO/RI) RS 485 – /(DO/RI)
Ground TC 100
PE
0 - 10 VDC = 0 - 100% *fend
1
3
2
Venting valve Fan Relay
R ≥10 kΩ
1
2
3
4
5
6
7
10
11
8
9
12
13
14
15
X2
n.c.
Power supply/ Power unit
90 - 132/ 185 - 265 VAC
=
≈
B
4
1
10
11
8
9
12
13
14
15
7
2
3
4
5
6
1
10
11
8
9
12
13
14
15
2
3
4
5
6
7
+U
B
PE
Remote/Local
Accessory 1 Accessory 2
Pumping station
Standby/Reset
24 VDC*
or
Cable (with bridge)
PM 051 421 -T
Cable
PM 051 431 -T
or
TPS 100/150; DCU 100/150
10
11
8
9
12
13
14
2
3
4
5
6
7
10 11
8
9
12
13
14
15
1
15
2
3
4
5
6
7
1
PE
+U
B
Remote/Local
Accessory 1 Accessory 2
Pumping station
Standby/Reset
24 VDC*
Accessory output 1
Accessory output 2
Switch output 1 Switch output 2
Analog output
Cable (without bridge)
PM 051 541 -T
TC 100
RS 485 + RS 485 –
X3 X3 X3 X3 X3
RS 485X2
X2
External connection
1
2
3
4
PE
+U
B
TPS 100/150
n.c.
1
2
3
4
PE
+U
B
TPS 100/150
X2
n.c.
1
2
3
4
5
6
7
8
+24 VDC
RS 485 +
RS 485 -
1
2
3
4
PE
+U
B
TPS 100/150 DCU 001
and
DCU 100/150
or
n.c.
n.c.
n.c.
n.c.
n.c.
X1
PM 051 549 -S

12
4. Operations
4.1. Before Switching ON
Sections 4.1. to 4.3. relate only to pump operations in the con-
dition on delivery without Operating Unit DCU.
Turbopump rotors turn at great speed. When
the high vacuum flange is open there is a dan-
ger of personal injury and of damage to the
pump resulting from the falling in of objects.
Therefore, never operate the pump with an
open high vacuum flange.
➡With water cooling: open cooling water supply and check
flow.
Please note:
The following works-settings are programmed:
– Start-up time: 8 min
– Rotation speed switchpoint 80%
– Automatic venting 50%
For further works settings please refer to the parameter over-
view in the operating instructions for the ”Pumping
Operations With the DCU”, PM 800 547 BN.
These settings can only be altered via Serial Interface RS 485
(DCU or PC) (please refer to the respective operating instruc-
tions).
Take care when pumping hazardous gases.
Take note of all safety recommendations of the
gas manufacturer.
4.2. Switching ON
➡Switch on the power unit with S1.
– After successful completion of the self-test on the TC 100
(duration approximately 10 seconds), the turbopump starts
operating.
The turbopump is operated via remote control please refer to
Section 4.3..
Rear Side, TPS 150
S1 ON/OFF switch
X1 Mains connection
X2 Connection TC 100
F1 Fuse
F2 Fuse S1
X2
X1
F2
F1
4.3. Operations Via The Remote Control Unit
(Please refer to the table in Section 3.11. and connection dia-
gram in Section 3.13.)
Remote control options are possible via inputs
Pin 2 – Pin 6/X3 on the TC 100.
Shielded cable must be used. The shielding on the plug side
of the Electronic Drive Unit TC 100 should be connected to the
metal cap on the plug.
Inputs 2 - 6 are activated when they are connected to
24 VDC* on Pin 7/X3 (active high).
Local/Remote
(Pin 2/X3)
This input is used to determine whether the control should be
effected via remote control inputs or Serial Interface RS 485
(only works in conjunction with parameter 028, please refer
to Operating Instructions for Pumping Operations with the
DCU, PM 800 547 BN).
Accessory Inputs
(Pin 3/X3 and Pin 4/X3)
The components backing pump and air cooling (connectable
to the accessory outputs) are switched automatically. The
remote control inputs Pin 3 and Pin 4 are then ineffective.
If the outputs are programmed to venting valve or the heating
there is the option with the respective inputs venting release
after the unit has been switched off and heating ON/OFF
when the rotation speed switchpoint is exceeded.
Works setting: Out1 (Pin 3) = air cooling
Out2 (Pin 4) = venting valve
The accessory inputs and outputs can be assigned several
functions via a DCU or the Serial Interface RS 485.
Pumping Station
(Pin 5/X3)
Connected pumping station components are started (backing
pump, air cooling) and the turbopump is set in motion after
successful completion of the self-test (duration approximately
10 seconds).
Standby/Reset
(Pin 6/X3)
With the use of "standby" the turbopump can be operated
optionally at 66% of the nominal rotation speed (standby ON)
or with the nominal rotation speed (standby OFF).
By supplying a pulse (T <2s) with an amplitude of 24 V a
malfunction acknowledgement can be processed.

13
➡Set the applicable gas mode on the TC 600 via the DCU
(please refer to Operating Instructions ”Pumping
operations with The DCU” PM 800 547 BN).
Works setting: Gas mode 0
Pumping gases with molecular mass ≥40 with
the incorrect gas mode can cause damage to
the pump.
For the vertex of the power characteristic line please refer to
Section 9. Technical Data.
Maximum power is applied when the pump starts in order to
limit the time required. Once the set rotation speed is
attained, switching to the selected power characteristic line
is automatic.
If the gas dependent maximum power is exceeded, the rotati-
on speed is reduced until equilibrium between the
permissible power and gas friction is attained. The power
limitation serves to protect the pump against thermal over-
loading. In order to avoid rotation speed fluctuations it is
recommended to set, in rotation speed setting mode, the
equilibrium frequency or a somewhat lower frequency.
Owing to the limited drive power on the TC 100,
there is no difference between the two ”gas
modes” settings on these pumps.
☞
PLEASE NOTE
Switch Outputs
(Pin 8/X3 And Pin 9/X3)
The switch outputs 1 and 2 can be loaded with maximum
24V/50 mA per output. The following functions are assigned to
the switch outputs:
Switch output 1: Active high after attainment of the
rotation speed switchpoint. The
switchpoint for the turbopump is set
at 80% of the nominal rotation speed.
It can be used, for example, for a signal
"Pumpe betriebsbereit" ("pump ready to
operate").
Switch output 2: Active low on collective error signal.
The connection of a relay is made between Pin 15 (mass) and
the respective switch output Pin 8 or Pin 9 (please refer to
Section 3.13. Connections Diagram).
Accessory Outputs
(10/X3 and Pin 11/X3)
The accessory outputs can be loaded with a maximum of
24 V/200 mA.
The works setting on the accessory outputs are:
Accessory output 1:
A connected air cooling system is started.
Accessory output 2:
A connected venting valve is started if venting release has
been transmitted via accessory input 2.
Other components can be connected with the respective sel-
ection via the DCU or the RS 485.
Analog Output
(Pin 12/X3)
A rotation speed proportional voltage
(0 - 10 VDC correspond to 0 - 100%*fend) can be tapped via
the analog output (load ≥10 kΩ).
Additional functions (power, current) can be assigned to the
analog output via a DCU or Serial Interface RS 485.
4.4. Gas Type Dependent Operations
Where high level gas loads and rotation speeds are involved,
the resulting friction subjects the rotor to the effect of great
heat. To avoid over-heating, a power rotation speed charac-
teristic line is implemented in the TC 600; this ensures that
where maximum gas loads are involved, the pump will opera-
te at any rotation speed without the danger of damage
arising.
The maximum power is dependent on the type of gas. Two
characteristic lines are available for any type of gas in order
to fully exploit the power potential of the pump:
– "Gas-Mode 0" for gases with molecular mass ≥40 as, for
example, Argon;
– "Gas-Mode 1" for all lighter gases.
Power
Frequency
DB
C
A
D-C = Gas mode «0»
B-A = Gas mode «1»
Run up
fnom
Kennlinie Gasarten
4.5. Switching OFF And Venting
Before coming to rest after switching off, the turbopump must
be vented in order to prevent contamination.
➡Switch off the power unit with switch S1.
➡Open the venting screw (on delivery, screwed in) on the
venting connection slowly about one turn.
➡Where water cooling is involved shut off the supply of
water.
Switching off the turbopump via remote cotrol, please refer to
Section 4.3..

14
5. Monitoring Operations
5.1. Operations Display Via LED
Certain operations modes of the turbopump and the TC 100
can be ascertained via the two integrated LEDs located on
the front panel of the TC 100.
The following operations modes are displayed:
5.2. Turbopump Temperature Management
Where impermissible motor temperatures are involved or the
temperature of the TC 100 casing is too high, the motor
current is reduced. This can lead to dipping below the set
rotation speed switchpoint and results in the turbomolecular
pump being switched off.
LED on the TC 100 glows red: Collective malfunction.
LED Cause
Glows green – power unit OK
– Function ”pumping station ON”
– carried out
Flashes green – power unit OK
– Pumping station OFF
Blinks green – Mains power supply failure
Glows red – Collective malfunction
(for example, run-up time error,
over-temperature, turbopump
or TC 100)
– Switching output 2 active (low)
Blinks red – Warning
(e.g. mains power supply
failure)
➡Close fore-vacuum and venting connection by blank
flanging.
➡Place the pump vertically on its rubber feet.
➡In rooms with moist or aggressive atmospheres, the turbo-
pump must be air-sealed in a plastic bag together with a
bag of dessicant, e.g silicagel.
If the pump has been shut down for 3 years, the
bearing must be changed (please contact
PFEIFFER Service).
4.7. Operations With The DCU 001/DCU 150
Operations with the DCU 001 or DCU 150 should be carried out
in accordance with the relevant Operating Instructions
PM 800 477 BN (DCU description) and
PM 800 547 BN (operating the pump with the DCU).
☞
PLEASE NOTE
Differentiated malfunction and warning signals
are only possible with the use of the DCU.
☞
PLEASE NOTE
4.5. Shutting Down For Longer Periods
If aggressive or hazardous gases are pumped
there is a danger of personal injury resulting
from coming into contact with process gases.
Before removing a turbopump from the system,
first:
– Vent the turbopump with a neutral gas or dry air.
– Ensure that there is no residual process gas in the system
nor in the feeder lines.
If the turbopump is to be shut down for more than a year:
➡Remove turbopump from the system.
➡Change the lubricant reservoir (see Section 7.1.).
Lubricant TL 011 should not be used when the-
re have been no operations for 2 years.
➡Close the high vacuum flange and evacuate the turbopump
via the fore-vacuum flange.
➡Vent turbopump via the venting connection with nitrogen
or dry air.
☞
PLEASE NOTE

15
6. What To Do In Case Of Breakdowns?
Problem Possible Causes Remedy
Pump doesn't start; • Power supply interrupted • Check fuse in the power unit
None of the integrated LEDs • Check plug contacts on the mains
glow on the TC 100 power unit
• Check power unit feeder line
• Check voltage on the power unit
(24 V DC) at connection X2
• Incorrect operations voltage supplied • Supply correct operations voltage
• Pins 3,4,5 and 7 on the plug X3 • Connect pins 3,4,5 and 7 on the
not connected plug X3
• No supply of operations voltage • Check plug contacts on the powe unit
• Defect TC 100 • Inform PFEIFFER Service of need for repair
• Reduction in the voltage in the cable • Use suitable cable
Pump doesn't attain nominal • Fore-vacuum pressure too high • Check backing pump function
rotation speed within the set • Leak or too much gas • Check seals
run-up time • Seek leak and repair
Pump cuts out during operations • Reduce supply of process gas
• Rotor sluggish caused by • Check bearing (noises?):Inform
defective bearing PFEIFFER Service
• TC run-up time too short • Set longer start-up time with the DCU or PC
• Thermal overloading caused by
– Water flow insufficient • Ensure free flow
– Insufficient air supply • Ensure adequate air supply
– Fore-vacuum pressure too high • Reduce fore-vacuum pressure
– Ambient temperature too high • Reduce ambient temperature
Pump doesn't attain final pressure • Pump dirty • Bake out pump
• If seriously contaminated: Request
PFEIFFER Service to clean
• Leak in vacuum chamber, • Seek leak starting with vacuum chamber
lines or pump • Repair leak
Unusual operating noises • Bearing damaged • Inform PFEIFFER Service of need for repair
• Rotor damaged • Inform PFEIFFER Service of need for repair
• Splinter shield (if fitted) • Check seat of splinter shield
not seated firmly (see Section 3.2.)
Red LED on the TC 100 glows • Collective malfunction • Reset via mains OFF/ON when the TMP is at
standstill or remote pin 6
• Different malfunction display with the
DCU possible
Red LED on the TC 100 flashes • Warning through: • Different warning message with
the DCU possible
– Mains power failure • Check power unit voltage
• Check power unit mains
connection

16
7. Maintenance
No liability for personal injury nor material
damage will be accepted for damages and
operational interruptions which have been
caused by improper maintenance; in addition,
all guarantees become invalid.
– You can change the lubricant reservoir yourself (please
see Section 7.1.).
– Your pump can be cleaned on the spot if it is not very dirty.
Your local PFEIFFER Service can advise you regarding
cleaning procedures and any other maintenance and ser-
vice work.
Apply no mechanical stress to the TC 100.
7.1. Replacing The Lubricant Reservoir
The lubricant reservoir should be replaced at least once a
year.
Where extreme operating conditions or unclean processes
are involved, the replacement interval should be checked
with your PFEIFFER Service Center.
➡Switch off the turbopump, vent to atmospheric pressure
(see Section 4.5.) and allow to cool as necessary.
➡If necessary, remove the turbopump from the system.
➡Unscrew locking cover 90 on the underside of the pump
with a big screwdriver; take care with the O-ring 91.
➡Lever out the lubricant reservoir with the help of two
screwdrivers.
Lubricants can contain toxic substances from
the medium pumped. Lubricant must be dispo-
sed of in accordance with the respective regu-
lations.
Safety instructions data sheet on request.
☞
PLEASE NOTE
90
91
92 92
H H
93
➡Clean off any dirt on the pump and locking cover with a
clean, fluff-free cloth.
➡Insert new lubricant reservoir 92 which is already filled
with Lubricant TL 011 up to the O-ring 93 in the pump.
➡Screw in locking cover 90 with O-ring 91. The lubricant
reservoir is brought into the correct axial position with the
locking cover.
Remove locking cover and extract lubricant reservoir
90 Locking cover
91 O-ring
92 Lubricant reservoir
93 O-ring

17
8. Service
Do make use of our service facilities
In the event that repairs are necessary a number of options
are available to you to ensure any system down time is kept to
a minimum:
– Have the pump repaired on the spot by our PFEIFFER
Service Engineers;
– Return the pump to the manufacturer for repairs;
– Replace the pump.
Local PFEIFFER representatives can provide full details.
Please take into account that where PFEIFFER
Service replacement service is involved the
standard operating parameters are always pre-
set. If your application requires different
parameters, please modify accordingly.
The turbopump and the Electronic Drive Unit
TC 100 form a single unit and must therefore be
returned complete for repair purposes. Before
returning the unit it should be ensured that the
power unit is not the cause of the malfunction
(please checking the power unit).
Before returning:
➡Please attach a clearly visible notice "Free of harmful sub-
stances" (both on the unit and also on the delivery note
and any accompanying letters).
"Harmful substances" are substances and preparations as
defined in the current, local, dangerous substances regulati-
ons; in the U.S.A. as
"materials in accordance with the Code of Federal
Regulations (CFR) 49 Part 173.240 Definition and Preparation".
We will carry out the decontamination and invoice this work
to you if you have not attached this note. This also applies
where the operator does not have the facilities to carry out
the decontamination work. Units which are contaminated
microbiologically, explosively or radioactively cannot be
accepted as a matter of principle.
Fill out the declaration of contamination
➡In every case the "Declaration of Contamination" must be
completed diligently and truthfully.
➡A copy of the completed declaration must accompany the
unit; any additional copies must be sent to your local
PFEIFFER Service Center.
Please get in touch with your local PFEIFFER representatives
if there are any questions regarding contamination.
☞
PLEASE NOTE
Decontaminate units before returning or possi-
ble disposal. Do not return any units which are
microbiologically, explosively or radioactively
contaminated.
Returning contaminated units
If contaminated have to be returned for maintenance/repair,
the following instructions concerning shipping must be follo-
wed:
➡Neutralise the pump by flushing with nitrogen or dry air.
➡Seal all openings to the air.
➡Seal pump or unit in suitable protective foil.
➡Ship units only in appropriate transport containers.
Repair orders are carried out according to our
general conditions of sale and supply. If repairs
are necessary, please send the pump to your
nearest PFEIFFER Service Center.
Contact addresses and telephone hotline
Contact addresses and telephone numbers can be found on
the back cover of these operating instructions.
☞
PLEASE NOTE

18
Feature Unit TMH 262 TMU 262 TMTMH 262 P TMU 262 P
Connection nominal diameter
Inlet DN 100 ISO-K DN 100 CF-F DN 100 ISO-K DN 100 CF-F
Outlet DN 25 ISO-KF/G 1/4“ DN 25 ISO-KF/G
Venting connection G 1/8” G 1/8”
Nominal rotation speed 1/min 60 000 60 000
Standby rotation speed 1/min 40 000 40 000
Start-up time min 3.5 3.5
Noise level dB (A) < 50 < 50
Final pressure, backing pump mbar < 5 < 5
Maximum permissible rotor temperature °C 90 90
Permissible heat radiation power W 8 8
Volume flow rate for
Nitrogen N2l/s 210 210
Helium He l/s 220 220
Hydrogen H2l/s 190 190
Compression ratio for
N2> 1 · 109> 1 · 109
He 3 · 1053 · 105
H21.3· 1041.3· 104
Maximum fore-vacuum pressure for
N2mbar 10 8.5
He mbar 8 8
H2mbar 4 4
Maximum gas throughput1)
With water cooling N2mbar l/s 4.7 3.2
He mbar l/s 7.2 5.1
H2mbar lIs 35.5 18.2
Maximum gas throughput at intake pressure of 0.1 mbar3)
N2mbar l/s 7 6
He mbar l/s 6 5
H2mbar l/s 3.5 3
Vertex power characteristics line4)
A W / Hz 120/1000 120/1000
B W / Hz 120/1000 120/1000
C W / Hz 120/1000 120/1000
D W / Hz 120/1000 120/1000
Final pressure5)
With rotary vane pumps mbar < 5 · 10-10 < 5 · 10-10
With diaphragm pumps mbar < 1 · 10-8 < 1 · 10-8
Lubricant TL 011 TL 011
Maximum cooling water
consumption with water at 15 ˚C6) l/h 100 100
Cooling water temperature ˚C 5 - 25 5 - 25
Permissible ambient temperature
with air cooling ˚C 0 - 35 0 - 35
Heating power consumption W 60 60
Weight kg 4.8 6.8 4.8 6.8
Permissible magnetic field mT 5.5 5.5
Operating voltage VDC 24 ± 5% 24 ± 5%
Duration6)- / max. current
consumption A 5.4 / 6.3 5.4 / 6.3
Duration6)- / max. power W 130 / 150 130 / 150
Protection class7) IP 30 IP 30
Relative humidity % 5-85 non-condensing 5-85 non-condensing
9. Technical Data
1) Measured with a rotary vane pump 10 m3/h; higher throughputs with
reduced rotation speed.
2) Rotation speed of pump may drop below the nominal rotation speed.
3) For gas type characteristic lines please refer to section 4.4.
4) In accordance with German Industrial Standard 28428 the 48 hours
after baking out.
5) At maximum gas throughput.
6) Protection class IP 54 is afforded for the Electronic Drive Unit TC 100
with a 15 pole D-Sub plug (accessory).

19
9.1. Dimensions Diagram
99.3
89.8
111.3
122
Ø85 ±0.1
113
M8
45°
33°
DN 100 ISO-K
DN 100 CF-F
DN 25 ISO-KF
91
55
101.5
32
98
82
96.5
128.5
194.5
TMH/TMU 262
1)
1) Sealing gas valve only for ”P” version turbopumps (see
rating plate).
1)
1)

20
Pos. Description Pieces Size Number Comments Ordering Quantity
Spare Parts TMH/TMU 262
Set of seals 1 PM 033 315 -T
17 USIT ring 1 P 3529 133 -A
91 O-ring 1 Vi 38x3 P 4070 621 PV
92 Lubricant reservoir 1 PM 063 265-T
10.Spare Parts
Spare Parts
91 92
17