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WARNING
Sample gas danger prevention
When sample gas leaks from the system, toxicity may lead the risk of severe
injury or death. There is also a risk of fire, explosion, excessive heat, corrosion,
etc. Carefully observe the following points to prevent such risks.
zDo not use the following gases in the system:
- Gases such as hydrogen fluoride which can corrode the gas-contacting
parts. (These parts are made of synthetic quartz, SUS316L, and fluorine
rubber.)
- Gases with a temperature higher than 35ºC or lower than 15ºC.
zEnsure that no impurities such as moisture or oxygen which can react with
the sample gas remain in the system.
zEnsure that the pressure of the sample gas does not exceed 500 kPa (gauge
pressure) at the SAMPLE inlet/outlet connectors.
zEnsure that the pressure of the parge gas does not exceed 100 kPa (gauge
pressure) at the PERGE inlet/outlet connectors.
zAlways perform a leak test before starting to use the system to ensure that
there are no leaks in the system.
zProtect the SAMPLE inlet/outlet connectors and the PERGE inlet/outlet
connectors from shocks and any strong force. Otherwise deformation may
occur which prevents correct measurement and may lead to gas leaks.
zTake care to protect joints from stress when designing the pipe layout of
the system. Otherwise gas leaks may occur.
zVerify the toxicity and other risks associated with the sample gas before
starting a measurement.
