Rion KS-93 User manual

INSTRUCTION MANUAL
PROCESS COUNTER
KS-93
3-20-41 Higashimotomachi, Kokubunji, Tokyo 185-8533, Japan
http://www.rion.co.jp/english/

i
Organization of this manual
This manual describes the features and operation principles of the light-scattering
type in-line process counter sensor KS-93. For information regarding the operation of
other equipment in the case of incorporating the KS-93 into a measurement system
with other equipment, always make sure refer to the documentation of the other
equipment.
This manual contains the following sections.
Outline
Provides an outline of the unit and descriptions of measurement sys-
tem configuration examples.
Controls and Features
Briefly identifies and explains all parts of the unit.
Preparations
Describes how to make sampling tube, purge gas, and sample fluid
connections and how to set the unit up for use.
Measurement
Describes the basic steps and procedures for measurement.
Maintenance
Describes how to clean and prepare the unit for storage, how to replace
a fuse, etc.
Serial Interface
Explains the functions and commands of the serial interface.

ii
* All company names and product names mentioned in this manual are
trademarks or registered trademarks of their respective owners.
Multi-point Monitoring System
Explains the basics of setting up a multi-point monitoring system us-
ing the multi-point interface.
Specifications
Lists the technical specifications of the unit.

iii
FOR SAFETY
In this manual, important safety instructions are specially marked as shown
below. To prevent the risk of death or injury to persons and severe damage to
the unit or peripheral equipment, make sure that all instructions are fully
understood and observed.
Caution
WARNING
Important
Disregarding instructions
printed here incurs the risk of
death or severe injury to per-
sons.
Disregarding instructions
printed here incurs the risk of
injury to persons and/or dam-
age to peripheral equipment.
Disregarding instructions
printed here incurs the risk of
damage to the product.
Mentioned about the tips to use
this unit properly. (This mes-
sages do not have to do with
safety.)
Note
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iv

v
Caution
Types of sample gases
This unit is designed to measure the size and number of particles in certain
gases.
Do not make measurements on the types of gases listed below. Otherwise
correct measurement is not assured and there is a severe risk of accidents.
- Gases such as hydrogen fluoride which can corrode the gas-contacting
parts
- Gases with a temperature higher than 35ºC or lower than 15ºC
Also, ensure that the pressure of the sample gas does not exceed 500 kPa
(gauge pressure) at the SAMPLE inlet/outlet connectors.

vi
WARNING
Sample gas danger prevention
When sample gas leaks from the system, toxicity may lead the risk of severe
injury or death. There is also a risk of fire, explosion, excessive heat, corrosion,
etc. Carefully observe the following points to prevent such risks.
zDo not use the following gases in the system:
- Gases such as hydrogen fluoride which can corrode the gas-contacting
parts. (These parts are made of synthetic quartz, SUS316L, and fluorine
rubber.)
- Gases with a temperature higher than 35ºC or lower than 15ºC.
zEnsure that no impurities such as moisture or oxygen which can react with
the sample gas remain in the system.
zEnsure that the pressure of the sample gas does not exceed 500 kPa (gauge
pressure) at the SAMPLE inlet/outlet connectors.
zEnsure that the pressure of the parge gas does not exceed 100 kPa (gauge
pressure) at the PERGE inlet/outlet connectors.
zAlways perform a leak test before starting to use the system to ensure that
there are no leaks in the system.
zProtect the SAMPLE inlet/outlet connectors and the PERGE inlet/outlet
connectors from shocks and any strong force. Otherwise deformation may
occur which prevents correct measurement and may lead to gas leaks.
zTake care to protect joints from stress when designing the pipe layout of
the system. Otherwise gas leaks may occur.
zVerify the toxicity and other risks associated with the sample gas before
starting a measurement.

vii
zBefore starting a measurement with toxic or reactive gases, be sure to
perform the following measures.
- Install and operate the system only as described in this manual.
- Connect a constant source of inert gas to the PURGE inlet connector
and connect the PURGE outlet connector to a suitable exhaust system.
- Before use, perform a leak test on the system and all piping including
the sample gas supply and exhaust piping, and the purge gas supply
and exhaust piping.
- Before introducing the sample gas, purge the piping with inert gas.
- Install gas sensors and suitable equipment to ensure that any gas leak
will be detected quickly and a suitable alarm will be activated.
- Be sure to have the unit serviced and checked regularly, at least once a
year. To arrange for servicing, contact the supplier.
zRion Co., LTD. does not bear any liability for any accident or damage
occurring due to use of this product in a way not described in the manual.
Be sure to follow the instructions in this manual closely.

viii

ix
WARNING
The unit uses a laser source
This unit is designated as a class 1 laser product
according to IEC 60825-1 (2001). The internal
particle detector mechanism uses a laser, but it is
fully shielded so that the beam cannot exit from the
enclosure. The identification label shown at right is
affixed to the top of the unit.
Laser Precautions
The particle detector mechanism in this
unit uses a laser classified as a class
3B laser product according to IEC
60825-1 (2001). The laser source can
cause blindness if viewed directly, and
can cause skin injuries if the skin is
exposed directly to the beam.
Never open the cover, because this involves the risk of exposure to the laser
beam.
The warning label shown at right is affixed to the top of the unit.
Caution
Use of controls or adjustments or performance of procedures other than those
specified herein may result in hazardous radiation exposure.

x
WARNING
The following types of warning labels are used with this unit.
zz
zz
zSample gas accident prevention warning label
To prevent accidents in connection with the sample gas, a label with the
following points is affixed to the top of the unit.
- Types of gas that may not be used
- Sample gas and purge gas pressure
- Precautions when removing the sensor from the measurement system

xi
zz
zz
zLaser product warning label
This unit is designated as a class 1 laser product
according to IEC 60825-1 (2001).
The label is affixed to the top of the unit.
zz
zz
zLaser product description label
The particle detector mechanism in
this unit uses a laser classified as a
class 3B laser product according to
IEC 60825-1 (2001). The laser source
can cause blindness if viewed directly,
and can cause skin injuries if the skin
is exposed directly to the beam.
The label is affixed to the top of the unit.

xii
Precautions
zOperate the unit only as described in this manual.
zDo not touch any parts of the unit other than necessary for operation.
zBefore using the unit, make sure that all cable and pipe connections are
correctly and safely established.
zIn case of malfunction, do not attempt any repairs. Note the condition of
the unit clearly and contact the supplier.
zThe end plugs are required to seal the unit when returning it for maintenance
or servicing. Store the plugs in a safe location for later use.
zBefore removing the unit from the measurement system for maintenance,
servicing, storage, etc., purge the system thoroughly to clean out any
remnants and prevent the risk of accidents. After removing the unit, apply
the end plugs to the SAMPLE inlet/outlet connectors to hermetically seal
the unit.
zDo not use or store the unit in locations which
- may exceed the temperature range specified on page 49 or may be
subject to moisture condensation (If the temperature of the sample gases
is lower than the ambient temperature, condensation may occur. Take
suitable countermeasures such as using purge gas.)
- may be subject to splashes of water or to direct sunlight, or
- may be subject to air with high salt or sulphur content or to gases, or
- do not provide correct power supply conditions (AC 90 to 250 V,
50/60 Hz), or
- do not provide a suitable means for grounding the unit, or
- may be subject vibrations or shock.
- do not store the unit in locations where the temperature may exceed
50°C or drop below -10°C, where relative humidity may exceed 85%,
or where condensation inside the piping may occur.

xiii
zAvoid sudden temperature changes which may cause moisture condensation
on the optical assembly.
zDo not disassemble the unit or attempt internal alterations.

xiv
Contents
FOR SAFETY ................................................................................... iii
Outline ................................................................................................ 1
Light source .................................................................................. 2
Particle size detection ................................................................... 2
Removing the unit from the system .............................................. 2
Block diagram............................................................................... 3
Measurement system configuration example ............................... 4
Controls and Features ......................................................................... 5
Main unit front panel .................................................................... 5
Main unit rear panel ...................................................................... 6
Power supply unit front panel ....................................................... 8
Power supply unit rear panel ........................................................ 9
Preparations ...................................................................................... 10
Power supply unit and power source connection........................ 10
Piping system connections ......................................................... 11
Measurement with toxic or reactive gases .................................. 12
Purge gas ..................................................................................... 13
Before passing sample gas .......................................................... 14
Transfer rate/node address setting .............................................. 16
Turning the system on ................................................................ 17
Initial condition .......................................................................... 17
Measurement .................................................................................... 18
Sample gas flow rate adjustment ................................................ 18
Measurement procedure ............................................................. 19
Maintenance ..................................................................................... 20
Steps after use ............................................................................. 20
Periodic servicing for safety ....................................................... 20
Calibration .................................................................................. 20
When CELL indicator is lit in red .............................................. 20
When the fuse has blown ............................................................ 21

xv
Serial Interface ................................................................................. 22
Transfer principle ........................................................................ 22
Serial connector .......................................................................... 23
Interface cables ........................................................................... 24
Message format........................................................................... 26
Command messages ................................................................... 29
Information request messages .................................................... 35
Information messages ................................................................. 36
Response message ...................................................................... 44
Response example ...................................................................... 45
Multi-point Monitoring System ....................................................... 46
Specifications ................................................................................... 47

xvi

1
Outline
The KS-93 is an in-line process counter sensor which detects the size and
number of particles floating in gas, using the light-scattering method.
Measurement results are output via an interface.
At the time of shipping, the leak rating of gas-contacting parts is 1 × 10-4
Pa·L/s or lower (measured according to the vacuum vessel method). This low-
leak construction allows measurement also of particles in toxic or highly
reactive gases.
The KS-93 consists of the sensor unit and the power supply unit.
The KS-93 is not explosion-proof, but the particle detector is hermetically
sealed and the interior can be purged with inert gas for safety in the event of a
leak due to cell damage.
Particles are measured in five size ranges (≥0.1 µm, ≥0.15 µm, ≥0.2 µm,
≥0.3 µm, ≥0.5 µm), and the rated sample flow is 100 mL per minute. As the
KS-93 does not incorporate a flow control, the flow rate of the sample gas
must be controlled by external means.
A serial interface and a multi-point monitoring system interface are built in as
standard. Except for power on/off, all functions are controlled from external
equipment. The sensor controller KZ-70 (option) can be connected via the
multi-point monitoring system interface, for operation control and display of
measurement results.

2
Outline
Light source
The life expectancy of a laser diode such as used in the KS-93 is shorter than
that of other semiconductor devise. When the laser diode nears the end of its
service life, the optical power falls below the rated level. There are considerable
differences in service life between individual diodes.
The KS-93 detects when the laser diode no longer provides the required output.
In such a case, the LASER indicator flashes in red, which indicates that the
laser diode must be replaced.
Particle size detection
The unit is calibrated at the factory, using particles of known diameter and
refractive index (monodisperse polystyrene latex spheres with a refractive index
of 1.6) in pure water. As the amount of scattered light by such particles is used
as reference to determine the particle size, the measured size corresponds to
the light-scattering size of polystyrene latex particles.
Removing the unit from the system
Before removing the unit
from the measurement
system for maintenance,
servicing, storage, etc.,
purge the system thoroughly
with inert gas. The label
shown at right is affixed to
the top of the unit. After
removing the unit, apply the
end plugs to the SAMPLE
inlet/outlet connectors to
hermetically seal the unit.