Sigma SQC-122c User manual

SQC-122c
Thin Film Deposition Controller
User’s Guide
Version 2.0
© Copyright Sigma Instruments, Inc. 1999 - 2002
Sigma
instruments

Safety Information
Read this manual before installing, operating, or servicing equipment. Do not install
substitute parts, or perform any unauthorized modification of the product. Return the
product to Sigma Instruments for service and repair to ensure that safety features are
maintained.
Safety Symbols
WARNING: Calls attention to a procedure, practice, or condition that could
possibly cause bodily injury or death.
CAUTION: Calls attention to a procedure, practice, or condition that could
possibly cause damage to equipment or permanent loss of data.
Refer to all manual Warning or Caution information before using this product
to avoid personal injury or equipment damage.
Hazardous voltages may be present.
Earth ground symbol.
Chassis ground symbol.
Equipotential ground symbol.

Warranty Information
This Sigma Instruments product is warranted against defects in material and
workmanship for a period of 1 year from the date of shipment, when used in accordance
with the instructions in this manual. During the warranty period, Sigma Instruments will,
at its option, either repair or replace products that prove to be defective.
Limitation of Warranty
Defects from, or repairs necessitated by, misuse or alteration of the product, or any
cause other than defective materials or workmanship are not covered by this warranty.
NO OTHER WARRANTIES ARE EXPRESSED OR IMPLIED, INCLUDING BUT NOT
LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS
FOR A PARTICULAR PURPOSE. UNDER NO CIRCUMSTANCES SHALL SIGMA
INSTRUMENTS BE LIABLE FOR CONSEQUENTIAL OR OTHER DAMAGES
RESULTING FROM A BREACH OF THIS LIMITED WARRANTY, OR OTHERWISE.
Return Policy
The purchaser may return this product in new condition within 30 days after shipment
for any reason. In case of return, purchaser is liable and responsible for all freight
charges in both directions.
Sigma Instruments
120 Commerce Drive, Unit 1
Fort Collins, CO 80524 USA
970-416-9660
970-416-9330 (fax)

Table of Contents
Chapter 1 Quick Start
1.0 Introduction................................................................................................1-1
1.1 Thin Film Process Overview........................................................................1-1
1.2 System Connections...................................................................................1-2
1.3 Front Panel................................................................................................1-3
1.4 Rear Panel ................................................................................................1-4
1.5 Installation.................................................................................................1-5
1.6 Process Setup ...........................................................................................1-6
1.7 Depositing a Film .......................................................................................1-8
Chapter 2 Operation
2.0 Introduction................................................................................................2-1
2.1 Definitions..................................................................................................2-1
2.2 Defining a Film...........................................................................................2-1
2.3 Defining a Process.....................................................................................2-5
2.4 Sensor Setup.............................................................................................2-7
2.5 Source Setup.............................................................................................2-10
2.6 Running a Process.....................................................................................2-11
2.7 Loop Tuning...............................................................................................2-15
2.8 Troubleshooting .........................................................................................2-17
Chapter 3 Menus
3.0 Introduction................................................................................................3-1
3.1 Main Menu.................................................................................................3-2
3.2 Next Menus...............................................................................................3-4
3.3 Quick Setup Menu......................................................................................3-5
3.4 Process Menus..........................................................................................3-7
3.5 Film Menus................................................................................................3-11
3.6 System Parameters Menu...........................................................................3-18
3.7 I/O Setup...................................................................................................3-21
Chapter 4 Options
4.0 Introduction................................................................................................4-1
4.1 Options Cards............................................................................................4-1
4.2 Full Rack Extender Installation....................................................................4-1

Appendix
A. Material Parameters
B. Specifications
C. I/O Connections
D. Handheld Remote Controller
E. Declaration of Conformity

Chapter 1 Quick Start
1-1
1.0 Introduction
The SQC-122c is a multi-channel quartz crystal monitor and deposition controller. It
measures up to six 1MHz to 6 MHz quartz crystal sensors, and controls two evaporation
sources. Twenty-five processes, consisting of 250 layers and 25 materials, can be
stored for easy retrieval. Eight process control relays, and eight digital inputs are easily
configured to support a broad range of external functions, including source pocket
rotation.
The SQC-122c can also be controlled via the standard RS-232 interface and Windows
control program. An optional handheld remote power control is also available.
Note: The SQC-122 (color display) replaces our original (monochrome) SQC-122.
Operation and programming of the two models are identical.
This chapter will aid you in the initial setup and operation of your system. Please review
the entire manual for detailed operational, programming, and safety information.
1.1 Thin Film Process Overview
The SQC-122c stores the recipes, and provides the operating functions, required to
control thin film deposition processes. A typical thin film deposition cycle is shown
below.
The cycle can be broken into three distinct phases: pre-conditioning (ramp/soak),
deposition, and post-conditioning (feed/idle). During pre-conditioning, power is supplied
in steps to prepare the evaporation source for deposition. Once the material is near the
desired deposition rate, material deposition begins. During deposition, the PID loop
adjusts the evaporation source power as required to maintain the desired deposition
rate. When the desired thickness is reached, the evaporation source is set to idle
power. At this point the process may be complete, or deposition of another film layer
may begin.

Chapter 1 Quick Start
1-2
1.2 Front Panel
SoftKeys Control Knob Remote Jack
Front Panel Controls
SoftKeys Provide access to instrument operations and setup menus.
The functions of the SoftKeys change to adapt to different
operations and are displayed on the left of the screen.
Control
Knob Used to adjust values and select menu items. Pushing the
control knob stores the current setting and moves to the next.
Remote
Jack Connection jack for the optional handheld remote control
module. See Appendix D.

Chapter 1 Quick Start
1-3
1.3 Rear Panel
100-120/200-240 V~
50/60 Hz
25 VA
Sensor 1 Sensor 2 Output 1 Output 2 I/O 1-8
RS-232
Sensor 3 Sensor 4 Output 3 Output 4
instruments
Sigma
Manufactured By
?
I/O 9-16
Fuse T.5A 250V
SQC-122c Deposition Controller
Serial No.
Rear Panel Connections
Sensor 1 & 2 Connects to quartz crystal sensor remote oscillator.
Output 1 & 2 Connects the SQC-122c output to your evaporation supply
control input.
I/O (1-8) Connects 8 relays and 8 digital inputs to external equipment for
process control. See Appendix C for connections.
RS-232 Connects to computer for programming and data acquisition.
Sensor 3 & 4
Output 3 & 4
I/O 9-16
This option card is available only on SQC-222 controllers.
Contact Sigma for upgrade information.
Measurement ground terminal useful for common system and
cable grounding.
Power Input and
Fuse WARNING: For continued protection, replace fuses with the
proper type and rating.
WARNING: Use removable power cords only of the specified
type and rating, attached to a properly grounded receptacle.

Chapter 1 Quick Start
1-4
1.4 System Connections
Sensor
Feedthrough
In-Vac
Cable
6" BNC Cable
Oscillator
Source
Shutter
Ground Wire
Evaporation Supply
Output Control Input
BNC
Cables
This section identifies typical system components and their connection:
System Components
Sensor Holds the quartz crystal used to measure rate and thickness.
Crystals must be replaced occasionally.
In-Vac Cable A coaxial cable that connects the sensor to the feedthrough.
Feedthrough Provides isolation between vacuum and atmosphere for
electrical and cooling lines.
6” BNC Cable Provides a flexible connection from the feedthrough to the
oscillator. Keep this cable as short as possible.
Oscillator Contains the electronics to operate the quartz crystal. Total
cable length to the crystal should be under 40”.
Sensor Input
BNC Cable Connects the oscillator to the SQC-122c input. Lengths up to
100’ are acceptable.
Control Output
BNC Cable Connects the SQC-122c output to the evaporation source’s
control voltage input. Keep the length below 10’.
Ground Wire A wire, typically braided, that connects the vacuum system to
the SQC-122c ground terminal.

Chapter 1 Quick Start
1-5
1.5 Installation
WARNING: Care should be exercised to route SQC-122c cables as far as practical from
other cables that carry high voltages or generate noise. This includes other line voltage
cables, wires to heaters that are SCR-controlled, and cables to source power supplies
that may conduct high transient currents during arc down conditions.
Rack
Installation The SQC-122c occupies a 5.25” high, half-rack space. An
optional installation kit is available to adapt to a full rack (see
Chapter 4). Install the unit in a 19” rack with the supplied
hardware.
Power
Connection The SQC-122c automatically detects mains voltages of 100-
120 and 200-240VAC, 50/60Hz.
WARNING: Verify that the power cable provided is connected to
a properly grounded mains receptacle.
Sensor Input
Connections Connect the BNC cables and oscillators from your vacuum
chamber feedthrough to the desired SQC-122c sensor inputs.
Source Output
Connections Connect the BNC cables from the SQC-122c output
connectors to your evaporation supply control input.
Digital I/O
Connections Refer to Appendix C for details on wiring digital I/O to the SQC-
122c Relay I/O connectors.
Computer
Connection If you would like to use the Windows software to collect data or
program the SQC-122c, attach a 9 pin straight-thru cable from
the RS-232 connector to your computer’s serial port.