SMC Networks ZQ A Series User manual

Doc. No. ZQ-OM01301-A
Product name
Space Saving Vacuum Ejector Unit
Model/ Series/ Product Number
ZQ□A Series

Doc. No. ZQ-OM01301-A
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Contents
Safety Instructions 2
1. How to Order 5
2. Summary of Product Parts 9
3. Mounting and Installation 11
3.1. Installation 11
3.2. Operating Environment 12
3.3. Air Supply 13
3.4. Piping 14
3.5. Wiring 16
4. Solenoid Valve 17
5. Vacuum Pressure Switch 18
6. Vacuum release flow adjusting needle 19
7. Structural Drawing and Replacement of Parts 20
8. Maintenance 26
9. Specifications 28
10. Pneumatic Circuit 31
11. Exhaust Characteristics, Flow Characteristics, 33
Vacuum Pump Flow Characteristics, and Vacuum Release Flow Rate Characteristics
12. Handling Precautions 37
13. Trouble shooting 38

Doc. No. ZQ-OM01301-A
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Space Saving Vacuum Ejector Unit/ZQ□A Series
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC)*1) and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems
ISO 4413: Hydraulic fluid power -- General rules relating to systems
IEC 60204-1: Safety of machinery -- Electrical equipment of machines.(Part 1: General requirements)
ISO 10218: Manipulating industrial robots-Safety.
etc.
Caution
CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in
minor or moderate injury.
Warning
WARNING indicates a hazard with a medium level of risk which, if not avoided, could result
in death or serious injury.
Danger
Danger indicates a hazard with a high level of risk which, if not avoided, could result in death
or serious injury.
Warning
1. The compatibility of the product is the responsibility of the person who designs the equipment
or decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with
specific equipment must be decided by the person who designs the equipment or decides its
specifications based on necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the
person who has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when
configuring the equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3) Do not service or attempt to remove product and machinery/equipment until safety is confirmed.
1.The inspection and maintenance of machinery/equipment should only be performed after measures
to prevent falling or runaway of the driven objects have been confirmed.
2. When the product is to be removed, confirm that the safety measures as mentioned above are
implemented and the power from any appropriate source is cut, and read and understand the specific
product precautions of all relevant products carefully.
3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and
malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is to
be used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place
exposed to direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food
and beverages, emergency stop circuits, clutch and brake circuits in press applications, safety
equipment or other applications unsuitable for the standard specifications described in the product
catalog.
3. An application which could have negative effects on people, property, or animals requiring special
safety analysis.
4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by
using a mechanical protective function, and periodical checks to confirm proper operation. Inspect
the product periodically to confirm proper operation.

Doc. No. ZQ-OM01301-A
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Space Saving Vacuum Ejector Unit/ZQ□A Series
Safety Instructions
Caution
The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange specifications
or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited Warranty and Disclaimer/ Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.
Limited Warranty and Disclaimer
1. The warranty period of the product is 1 year in service or 1.5 years after the product is delivered,
whichever is first.*3) *
Also, the product may have specified durability, running distance or replacement parts. Please
consult your nearest sales branch.
2. For any failure or damage reported within the warranty period which is clearly our responsibility,
a replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage
incurred due to the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms and disclaimers
noted in the specified catalog for the particular products.
*3) Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or
failure due to the deterioration of rubber material are not covered by the limited warranty.
Compliance Requirements
1. The use of SMC products with production equipment for the manufacture of weapons of mass
destruction(WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are governed by the relevant
security laws and regulation of the countries involved in the transaction. Prior to the shipment of a SMC
product to another country, assure that all local rules governing that export are known and followed.
Caution
SMC products are not intended for use as instruments for legal metrology.
Measurement instruments that SMC manufactures of sells have not been qualified by type approval tests
relevant to the metrology (measurement) laws of each country.
Therefore, SMC products cannot be used for business or certification ordained by the metrology
(measurement) laws of each country.

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■Safety Instructions
Warning
Disassembly
prohibited
■Do not disassemble, modify (including the replacement of board) or repair other than
instructed in this manual.
Otherwise, an injury or failure can result.
Do not
■Do not operate the product outside of the specifications.
Do not use the product with flammable or harmful fluids.
Fire, malfunction, or damage to the product may result.
Check the specifications before use.
Do not
■Do not use in an atmosphere containing flammable or explosive gases.
Fire or an explosion may result.
This product is not explosion-protected.
Do not
■Do not use the product in a place where static electricity is a problem.
Otherwise failure or malfunction of the system can result.
Do not
■Do not cut off the power and compressed air supplied to this product while it is
operating.
Otherwise it can cause injury due to dropping of workpieces or damage to the
system.
Instruction
■If using the product in an interlocking circuit
- Provide a double interlocking system, for example a mechanical system.
- Check the product regularly for proper operation.
Otherwise malfunction can result, causing an accident.
Instruction
■The following instructions must be followed during maintenance
- Turn off the power supply
- Stop the air supply, exhaust the residual pressure in piping and verify that the air
is released before performing maintenance work.
Otherwise an injury can result.
Do not touch
■Do not touch the terminals and connectors while the power is on.
Otherwise electric shock, malfunction and damage to the product can result.
Instruction
■Perform sufficient trial run.
Otherwise, injury or damage to the system can result due to suction failure depending on the
conditions of the suction of the workpiece or the pressure switch settings.
Perform sufficient verification before using this product.
Instruction
■After maintenance is complete, perform appropriate functional inspections and leak
test.Stop operation if the equipment does not function properly or there is leakage of fluid.
If there is leakage from parts other than the piping, the product might be broken.
Cut off the power supply and stop the fluid supply.
Do not supply fluid if there is leakage.
Safety cannot be assured in the case of an unexpected malfunction.

Doc. No. ZQ-OM01301-A
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1.How to Order
Vacuum Ejector System (without energy saving function)
Model of a single unit
ZQ 05 1U A-K15L B-EA M G -3 3-N
(1) (2) (3) (4)(5) (6) (7) (8)(9)(10)(11)(12)
(1) Nozzle nominal size
05
0.5
07
0.7
10
1.0
(2) Exhaust type
1U
With silencer for single unit
3M
With silencer for manifold
(3) Solenoid valve combination
K1
Supply valve (N.C.),
Release valve (N.C)
K2
Supply valve (N.O.),
Release valve (N.C)
J1
Supply valve (N.C.)
J2
Supply valve (N.O.)
(4) Electrical entry
L
L-type plug connector, with 0.3 m lead
wire,with light/surge voltage suppressor
LO
L-type plug connector, without connector,
with light/surge voltage suppressor
(5) Manual override
Nil
Non-locking push type
B
Slotted locking type
(7) Vacuum pressure switch unit specifications
NilNote 3)
With unit selection function
M
Fixed SI unit (kPa)
P Note 3)
With unit selection function
(Initial value psi)
Note 3) The unit selection function is not for use in Japan due
to a new measurement law. (October 1999)
(8) Lead wire specifications
Nil
No lead wire with connector
G
Lead wire with connector
(2 m, included in the package)
(9) Check valve Note 4)
Nil
None
K Note 5)
With check
valve
Note 4) The check valve has
the function of preventing the
exhaust air from the exhaust
unit from overflowing to the v
acuum port side when a mani
fold is used. However, depen
ding on usage conditions, it d
oes not completely suppress
air overflow.
Please thoroughly inspect the
actual machine before use.
Also, in order to completely p
revent the overflow of exhaust
air, leave plenty of space
between the check valve unit
and adjacent ejector to avoid
interference from the ejector's
exhaust unit.
Note 5) The check valve option
cannot be selected when “1U” is
selected for (2) and “J1” or “J2”
is selected for (3).
Warning
- The check valve cannot be
used for vacuum retention.
- Use a release valve.
Without a release valve, the
workpiece may not be released.
(10) Fitting (V port) Note
Symbol
Applicable tubing
O.D.
0
Without fitting (M5
x 0.8)
1
φ3.2 (Straight)
2
φ4 (Straight)
3
φ6 (Straight)
4
φ3.2 (Elbow)
5
φ4 (Elbow)
(11) Fitting (P port)
Symbol
Applicable
tubing O.D.
Object
spec.
Nil
Without port
Manifold
0
Without fitting
(M5 x 0.8)
Single
unit
2
ø4
(Straight)
3
φ6
(Straight)
5
ø4
(Elbow)
(6) Combination of Solenoid Valve, Pilot Valve and Power
Supply Voltage Note 1
Symbol
Pressure range
[kPa]
output specifications
EA
0 to -100
NPN2 output
EB
PNP2 output
EC
NPN1 output + analog
voltage
EE
PNP1 output + analog
voltage
FA
-100 to 100
NPN2 output
FB
PNP2 output
FC
NPN1 output + analog
voltage
FE
PNP1 output + analog
voltage
F Note 2)
Suction filter only
Note 1) The suction filter used in this product is a low-cost
filter. When used in a dusty or dirty environment, the
Filter will quickly clog. If this is the case, consider using th
e ZFC series or other air suction filter along with it.
Note 2) (7) and (8) do not need to be selected.
(12) Option
Symbol
Bracket for single
unit
Return spring for
release valve
Nil Note 6)
Provided
None
N Note 7)
None
None
S Note 8)
None
Provided
Note 6) The bracket is not included when “3M” is selected for (2).
Note 7) This option cannot be selected when “3M” is selected for (2).
Note 8) The check valve option cannot be selected when “1U” is selected
for (2) and “J1” or “J2” is selected for (3).
Also select “C” in (4) for the manifold type.

Doc. No. ZQ-OM01301-A
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Vacuum Ejector System (with energy saving function)
Model of a single unit
ZQ 05 1U A-K15LO B-VA M W-3 3-N
Vacuum ejector system
Manifold
ZZQ108A-B S C-A
(1) (2) (3) (4) (5) (6) (7)(8)(9)
(1) Nozzle nominal size
05
0.5
07
0.7
10
1.0
(2) Body type
1U
For single unit
3M
For manifold
(3) Manual override
Nil
Non-locking push type
B
Slotted locking type
(4) Vacuum pressure switch (with suction filter Note 1))
Symbol
Pressure range [kPa]
output specifications
VA
-100 to 100
NPN1 output + Energy
Saving Function
VB
PNP1 output + Energy
Saving Function
Note 1) The suction filter used in this product is a low-cost filter. When
used in a dusty or dirty environment, the filter will quickly clog. If this is
the case, consider using the ZFC series or other air suction filter along
with it.
(5) Vacuum pressure switch unit specifications
Nil Note 2)
With unit conversion function
M
Fixed SI unit (kPa)
Note 2) The unit conversion function is not for use in Japan
due to a new measurement law. (October 1999)
(6) Lead wire specifications
Nil
No lead wire with connector
W
Lead wire for energy saving switch
(2 m, included in the package)
(7) Fitting (V port)
Symbol
Applicable tubing
O.D.
0
Without fitting
(M5x0.8)
1
ø 3.2 (Straight)
2
ø 4 (Straight)
3
ø 6 (Straight)
4
ø 3.2 (Elbow)
5
ø 4 (Elbow)
(8) Fitting (P port)
Symbol
Applicable tubing
O.D.
Object spec.
Nil
Without port
Manifold
0
Without fitting
(M5x0.8)
Single unit
2
ø 4 (Straight)
3
ø 6 (Straight)
5
ø 4 (Elbow)
(9) Option
Symbol
Bracket for single unit
Nil Note 3)
Provided
N Note 4)
None
Note 3) The bracket is not included when “3M” is
selected for (2).
Note 4) This option cannot be selected when “3M” is
selected for (2).
(1) Number of stations
01
1 stations
02
2 stations
：
:
08
8 stations
(2) Exhaust
S
With silencers
(Both sides)
(3) Vacuum release pressure supply port (PD port)
B
None (Release pressure is
supplied from the P port.)
C Note 1)
Provided (Breaking pressure: Supplied
from D port)
Note 1) If the standalone product does not have the energy saving function,
select “S” in (12) for the individual unit.
(4) Shipping condition
Nil
Vacuum unit is assembled
A
Manifold unit only
(1) (2)(3) (4)

Doc. No. ZQ-OM01301-A
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Vacuum pump system
Model of a single unit
ZQ000 U A-K15L B-EA M G-3 3-N
(1) (2) (3)(4) (5) (6) (7) (8)(9)(10)
(1) Body type
U
For single unit
M
For manifold
(2) Solenoid valve combination
K1
Supply valve (N.C.),
Release valve (N.C)
K2
Supply valve (N.O.),
Release valve (N.C)
J1 Note 1)
Supply valve (N.C.)
J2 Note 1)
Supply valve (N.O.)
Note 1) This product does not allow the
adsorbing part to be released to the air
at vacuum stop. Install a separate circuit
for breaking vacuums.
(3) Electrical entry
L
L-type plug connector, with 0.3 m lead wire,
with light/surge voltage suppressor
LO
L-type plug connector, without connector,
with light/surge voltage suppressor
(4) Manual override
Nil
Non-locking push type
B
Slotted locking type
(5) Vacuum pressure switch (with suction filter Note 2) )
Symbol
Pressure range
[kPa]
output specifications
EA
0 to -100
NPN2 output
EB
PNP2 output
EC
NPN1 output +
analog voltage
EE
PNP1 output +
analog voltage
FA
-100 to 100
NPN2 output
FB
PNP2 output
FC
NPN1 output +
analog voltage
FE
PNP1 output +
analog voltage
F Note 3)
Suction filter only
Note 2) The suction filter used in this product is a low-cost filter.
When used in a dusty or dirty environment, the filter will quickly
clog. If this is the case, consider using the ZFC series or other air
suction filter along with it.
Note 3) (6) and (7) do not need to be selected.
(6) Vacuum pressure switch unit specifications
Nil Note 4)
With unit selection function
M
Fixed SI unit (kPa)
P Note 4)
With unit selection function
(Initial value: psi)
Note 4) The unit selection function is not for use in Japan
due to a new measurement law. (October 1999)
(7) Lead wire specifications
Nil
No lead wire with connector
G
Lead wire with connector
(2 m, included in the package)
(8) Fitting (V port) Note
Symbol
Applicable tubing
O.D.
0
Without fitting
(M5x0.8)
1
ø 3.2 (Straight)
2
ø 4 (Straight)
3
ø 6 (Straight)
4
ø3.2 (Elbow)
5
ø 4 (Elbow)
(9) Fitting (P port)
Symbol
Applicable tubing
O.D.
Object spec.
Nil
Without port
Manifold
0
Without fitting
(M5x0.8)
Single unit
2
ø 4 (Straight)
3
ø 6 (Straight)
5
ø 4 (Elbow)
(10) Option
Symbol
Bracket for
single unit
Return spring for
release valve
Nil Note 5)
Provided
None
N Note 6)
None
None
S Note 7)
None
Provided
Note 5) The bracket is not included when “M” is selected for (1).
Note 6) This option cannot be selected when “M” is selected for (1)
Note 7) The check valve option cannot be selected when “U” is
selected for (1) and “J1” or “J2” is selected for (2).Also select “C”
in (3) for the manifold type.

Doc. No. ZQ-OM01301-A
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Vacuum Pump System
Manifold
ZZQ108A-S O C-A
(1) (2) (3) (4)
(1) Number of stations
01
1 stations
02
2 stations
：
:
08
8 stations
(2) Vacuum pressure supply port
(PV port) Port location Note 1)
L
Left side
R
Right side
Note 1) The position of the vacuum
pressure supply (PV) port when the
vacuum (V) port is facing front. The pilot
pressure supply (PS) port is on the
opposite side.
(3) Vacuum release pressure
supply port (PD port)
B
None (Release pressure is
supplied from the P port.)
C Note 2)
Provided (Breaking pressure: Supplied
from D port)
Note 2) Select S for the Option Symbol (10).
(4) Shipping condition
Nil
Vacuum unit is assembled
A
Manifold unit only

Doc. No. ZQ-OM01301-A
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2. Summary of Product Parts
2.1 Summary of Product Parts
Standalone product (Vacuum ejector system)
Standalone product (Vacuum pump system)
Vacuum pressure switch
Suction filter
Vacuum break flow
adjusting needle
Release pilot valve
Supply pilot valve
Vacuum (V) port
Exhaust port
(Both sides)
Mounting hole
(2 parts)
Pilot pressure
exhaust (PE) port
Vacuum
pressure supply (PV)
port
Pilot pressure supply
(PS) port
Vacuum pressure
supply (PV) port

Doc. No. ZQ-OM01301-A
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Manifold product (Vacuum ejector)
Manifold product (Vacuum pump system)
Exhaust part
Vacuum
pressure supply (PV) port
(2 parts)
Pilot pressure exhaust
(PE) port
(2 parts)
Mounting
hole
(4 parts)
Vacuum pressure supply (PV) port
Pilot pressure supply (PS) port
(One port for each; the right or left
port is to be selected)

Doc. No. ZQ-OM01301-A
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3. Mounting and Installation
3.1 Mounting
3.1.1 Standalone product (Direct mounting)
1) Directly mount the product on the wall surface, etc. by using the mounting holes (2 x ø3.2)
in the body.
2) Use the recommended tightening torque (0.54 to 0.66 Nm) to mount the product.
3.1.2 Standalone product (Mounting with a bracket)
1) Mount the optional bracket (ZQ1-BK1-A) to the mounting holes (2 x ø3.2) on the product
body side using the round head combination screws and hexagon nuts included in the
accessories, and mount the product on the floor, etc. using the mounting holes on the
bracket (4 x ø3.2).
2) Use the recommended tightening torque (0.54 to 0.66 Nm) to mount the bracket.
3.1.3 Manifold product
1) Directly mount the manifold product on the floor, etc. using the mounting holes of the end
plate with the washers included in the accessories, and screws with the following
recommended mounting screw size.
Recommended mounting screw size: M3 without the PD-port / M4 with the PD-port
2) Use the recommended tightening torque (0.54 to 0.66 Nm) to mount the product.
Mounting hole
(2 parts)
Round head
combination screws
Hexagon nuts
Bracket
Washer included in
the accessories
(4 pcs.)
Mounting hole
(4 parts)
Mounting hole
(4 parts)

Doc. No. ZQ-OM01301-A
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3.1.4 Precautions
1) When installing the product, allow sufficient space for maintenance and inspection.
2) Tightening torques exceeding the recommended values may damage the product and
mounting screws. Insufficient torque can cause displacement of the body from its proper
position as well as looseness of the mounting screws.
3) Do not drop, hit or apply excessive shock to the product. The exterior and internal parts,
solenoid valve and pressure switch may get damaged and malfunction.
3.2 Operating environment
1) Do not use in an environment where corrosive gases, chemicals, sea water, water or steam are
present. These can cause failure or malfunction.
2) Do not use the product in a place where the product could be splashed by oil or chemicals. If the
product is to be used in an environment containing oils or chemicals such as coolant or cleaning
solvent, even for a short time, it may be adversely affected (damage, malfunction, or hardening of
the lead wires).
3) Do not use the product in an area where surge is generated.
When there are machines or equipment that generate large surge near the pressure switch
(magnetic type lifter, high frequency inductive furnace, motor, etc.), this can result in deterioration
and damage of the internal elements. Take measures against the surge sources, and prevent the
lines from coming into close contact.
4) Do not use a load which generates surge voltage.
When a surge-generating load such as a relay or solenoid is directly driven, use the product with
a surge absorbing element built-in.
5) Take measures against surge voltages due to lightning strikes in the system.
The product is CE marked but not immune to lightning strikes, so take measures against lightning
strikes.
6) Be aware of excessive surrounding noise
The product is CE marked and has passed the EMC test, but excessive noises in the surrounding
area may affect the functioning of the product.
7) Mount the product in a location that is not affected by vibration or impact.
Failure and malfunction can occur.
8) Do not let foreign matter, such as wire debris, get inside the product.
In order to avoid failure and malfunction, do not let foreign matter, such as wire debris, get inside
the product.
9) Do not use this product in places where there are cyclic temperature changes.
Heat cycles other than ordinary changes in temperature can adversely affect the inside of the
product.
10) Do not use where the product is exposed to direct sunlight.
Shade the sunlight in locations where the product is exposed to direct sunlight.
Failure and malfunction can result.
11) Keep within the specified operating fluid and ambient temperature range.
The operating fluid and ambient temperature range is 5 to 50oC. Operation under low
temperature may lead to damage or operation failure due to frozen moisture in the fluid or air.
Protection against freezing is necessary. Mounting of an air dryer is recommended for elimination
of drainage and water. Avoid abrupt temperature changes even within the specified temperature
range.
12) Do not use in a location where the product is exposed to radiant heat from surrounding heat
sources. This can cause operating failure.

Doc. No. ZQ-OM01301-A
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3.3 Air supply
3.3.1 Air quality
1) Using compressed air which contains chemicals, synthetic oils containing organic solvents,
salts or corrosive gases, etc. can cause damage or malfunction. Do not use with fluid or in an
environment which contains harmful impurities.
2) If the compressed air contains excessive drainage or carbon powder, it can stick to the vacuum
generating part (the nozzle diffuser) or inside of the solenoid valve or the pressure switch for
vacuum and cause deterioration of the performance or operation failure.
3) It is recommended to use supply air which purity class is 2:6:3 of ISO08573-1:2010（JISB8392-
1:2012）. Supply air containing foreign matter, water, oil or condensate, etc. can cause malfunction
of supply valve or release valve. Install an air filter or mist separator to the upper stream to prevent
condensate from entering to the product and perform maintenance periodically to control the
supply air properly.
* Air quality class based on ISO8573-1:2010 (JIS B8392-1:2012)
● Solid particles
● Moisture
● Adhesion of oil
Clas
s
Maximum particle count per m3 for particle diameter d(μm)
Clas
Pressure
dew
point(oC)
Clas
Oil
concentration
(mg/m3)
0.1 ˂ d ≤ 0.5
0.5 ˂ d ≤ 1.0
1.0 ˂ d ≤ 5.0
1
≤20,000
≤ 400
≤ 10
1
≤ -70
1
≤ 0.01
2
≤ 400,000
≤ 6,000
≤ 100
2
≤ -40
2
≤ 0.1
3
Not specified
≤ 90,000
≤ 1,000
3
≤ -20
3
≤ 1
4
Not specified
Not specified
≤ 10,000
4
≤ +3
4
≤ 5
5
Not specified
Not specified
≤ 100,000
5
≤ +7
6
≤ +10
3.3.2 Air pressure
1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of
the product.
2 : 6 : 3
Air preparation
equipment
Screw
Air compressor
Main Line Filter
AFF Series
Refrigerated Air
Dryer
Air filter
AF Series
Regulator
AR Series
Mist separator
AFM Series
Vacuum ejector
Screw air
compressor
Main line filter
AFF series
Refrigerated
Air Dryer
Air filter
AF series
Mist separator
AFM series
Regulator
AF series
Air preparation equipment
vacuum ejector

Doc. No. ZQ-OM01301-A
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3.4 Piping
3.4.1 Port size
The port sizes and operating pressure ranges are listed below.
For the manifold type, ports are used in common for the end plate.
When supplying from one side, plug the port not in use.
Single unit type
Manifold type
Port
Application
Port size
Operating pressure
range
Ejector
System
Pump System
Air pressure supply
(P) port
Compressed air supply
for operating ejector
M5、ø4、ø6
-
0.3 to 0.5[MPa]
Air pressure supply
(PV) port
Vacuum source
(Vacuum pump)
-
M5、ø4、ø6
0 to -101.3[kPa]
Pilot pressure
supply (PS) port
Compressed air supply
for pilot pressure
-
M5、ø4、ø6
0.3 to 0.5[MPa]
Pilot pressure
exhaust (PE) port
Exhaust during valve
operation
M3
Released to the
atmosphere
vacuum (V) port
Adsorption equipment
including pad
M5、ø3.2、ø4、ø6
-
Port
Application
Port size
Operating pressure
range
Ejector
System
Pump System
Air pressure supply
(P) port
Compressed air
supply for operating
ejector
ø8
-
0.3 to 0.5[MPa]
Air pressure supply
(PV) port
Vacuum source
(Vacuum pump)
-
ø8
0 to -101.3[kPa]
Pilot pressure
supply (PS) port
Compressed air
supply for pilot
pressure
-
ø8
0.3 to 0.5[MPa]
Vacuum release
pressure
Supply (PD) port
Compressed air
supply for individual
setting of release
pressure
ø4
0 to 0.5[MPa] Note 1)
Pilot pressure
exhaust (PE) port
Exhaust during valve
operation
ø4
Released to the
atmosphere
vacuum (V) port
Adsorption equipment
including pad
M5, ø3.2, ø4, ø6
-
Note 1) The pressure must be the PS port pressure or less.

Doc. No. ZQ-OM01301-A
- 15 -
3.4.2 Piping to ports
1) When piping fittings, etc. are connected to the pilot pressure exhaust (PE) port (M3) for
the single unit type, secure the part provided with the port, tighten it by hand, then
additionally tighten by approximately one fourth of a turn using an appropriate tool.
(Recommended tightening torque: 0.4 to 0.5 Nm)
2) When piping fittings, etc. are connected to the air pressure supply (P) port (M5) for the
single unit type, secure the part provided with the port, tighten it by hand, then
additionally tighten by approximately one sixth to one fourth of a turn using an
appropriate tool. (Recommended tightening torque: 1.0 to 1.5 Nm)
3.4.3 Piping with one-touch fittings
■Tube attachment
1) Cut the tube perpendicularly, being careful not to damage the external surface. When cutting
the tube, use tube cutters. If the tube is cut by any tools other than a tube cutter, the cut
surface of the tube will be slanted or flat, making it difficult to connect securely, causing the
tube to come off or air leakage after the tube is connected. Also, use a tube of ample length.
2) Grasp the tube and push it in slowly, inserting it securely all the way into the fitting.
3) After inserting the tubing, pull on it gently to confirm it is secure. Incorrect insertion may cause
air leakage or disconnection.
4) Prevent the connected tube from being rotated. The fitting may be damaged.
■ Removal of the tube
1) Press the release button evenly and firmly.
2) Pull out the tubing while keeping the release button depressed. If the release button is not
held down sufficiently, the tubing cannot be withdrawn.
3) If the removed tubing is to be reused, cut off the section of the tubing that has been gripped.
Reusing this portion of the tube can cause problems such as air leakage or difficulty in
removing the tube.
■ Other manufacturer’s tube
When using a brand of tube other than SMC, confirm that the following specifications are
satisfied with respect to the tube outside diameter tolerance.
1) Nylon tubing Within +/-0.1 mm
2) Soft nylon tubing Within +/-0.1 mm
3) Polyurethane tubing Within +0.15 mm or -0.2 mm
Do not use tubing that does not meet these outside diameter tolerances. Connection to the
fitting may fail, causing disconnection of the tube and air leakage.

Doc. No. ZQ-OM01301-A
- 16 -
3.4.4 Precautions for air tubes
1) Route tubes to prevent twisting, tension, moment loads, vibration or impact from being
applied to the tubes. Failing to route correctly can cause damage to the fittings and will
crush or burst tubing, or it may come out.
2) Piping to the product is assumed to be static piping. If the tube moves, it may wear,
elongate, or tear due to tensile forces, or disconnect from the fitting. Ensure the tube is in a
static condition at all times before use.
3) Do not lift the product by holding the tubing after piping. This may lead to damage of the
filter case or One-touch fitting.
4) Before piping is connected, it should be thoroughly flushed with air, or washed to remove
chips, cutting oil and other debris from inside the pipe. Otherwise it can cause damage or
malfunction.
5) When connecting tubing, consider factors such as changes in the tubing length due to
pressure, and leave enough slack. Failure to do so may result in fitting breakage or
detachment of the tubing.
Refer to Fittings & Tubing Precautions from 1 to 4 shown in Best Pneumatics 6 on SMC’s
website (URL) for the recommended piping conditions.
3.5 Wiring
3.5.1 Precautions for Wiring
1) Do not pull the lead wire for the solenoid valve or pressure switch forcefully or lift the
product by the lead wire. Otherwise damage to the solenoid valve or internal parts can
result, causing malfunction or causing the connector to come out.
2) Avoid repeatedly bending or stretching the lead wires, or placing a heavy load or applying
force to them. Repetitive bending stress or tensile stress can cause the sheath of the wire to
peel off. If the lead wire can move, secure it near the body of the product. The
recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or
33 times the outside diameter of the insulation material, whichever is larger. Replace the
damaged lead wire with a new one.
3) Wire correctly. Incorrect wiring can cause malfunction or breakage of the solenoid valve or
pressure switch.
4) Do not perform wiring while the power is on. The internal parts of the solenoid valve or
pressure switch may get damaged and malfunction.
5) Do not route wires and cables together with power or high voltage cables. Route the wires
of the product separately from power or high voltage cables in order to avoid noise or surge
entering the signal line from the power or high voltage line.
6) Verify the insulation of wiring. Poor insulation (interference with other circuits, poor
insulation between terminals etc.) can apply excessive voltage or current to the pressure
switch, causing damage.
7) Design the product to prevent reverse current when the circuit is open or the product is
forced to operate for operational checks. Depending on the circuit used, insulation may not
be maintained when operation is forced, allowing reverse current to flow, which can cause
malfunction and damage to the solenoid valve and pressure switch.
8) Keep wiring as short as possible to prevent interference from electromagnetic noise and
surge voltage. Do not use a cable longer than 10m. Wire the DC (-) line as close as possible
to the power supply.

Doc. No. ZQ-OM01301-A
- 17 -
４. Solenoid valve
4.1 Manual override
There are 2 types of manual override operation. Push the manual override with a
screwdriver until it reaches the end. Confirm that the product operates safely before the
operation of the manual override.
4.2 Wiring
To install the connector, hold the cover and insert the connector straight pushing the connector
lever with your finger. Ensure that the connector lever clip is properly inserted into the groove
ofthe cover. To remove the connector, hold the solenoid valve and pull out the connector
straight pushing the connector lever clip.
4.3 Internal circuit
With light/surge voltage suppressor A non-polar valve is installed in the product.
4.4 Initial state
When the valve assembly is delivered, the supply valve is on the OFF position, but it may be
on the ON position due to the vibration or impact during transportation or device installation.
Move supply valve to OFF position manually or energizing before use.
4.5 Precautions
1) The specified voltage must be used. Otherwise failure, malfunction or short life can result.
2) If a valve is energized for an extended period of time without a break, the rise in
temperature due to heating of the coil may cause a decline in solenoid valve performance,
reduce service life, or have adverse effects on peripheral equipment. The energized time in
one day should be shorter than the non-energized time.
3) A V100 series solenoid valve is installed in the product. Refer to the Operation Manual of
the V100 Series for details.
Manual override operation type
Nil: Non-locking push type
B: Slotted locking type
Cover
Groove
Pin
Lever
DC polarity display
connector
Varistor
Coil

Doc. No. ZQ-OM01301-A
- 18 -
５. Vacuum pressure switch
5.1 Internal Circuit and Wiring Examples
5.2.1 Vacuum pressure switch
*The FUNC terminal is connected when using the copy function.
*Refer to the Operation Manual for details on setting the ZSE10 (for ZSE10 series).
5.2.2 Pressure switch for vacuum with energy saving function
*FUNC terminal is for energy saving operation of the supply valve.
*Refer to the Operation Manual for details on setting the ZSE10 (for ZQ-ZSV series).
5.2 Handling / adjustment Precautions
1) The specified voltage must be used. Otherwise failure, malfunction or short life can result.
2) Connect a load before turning the power supply on. If the power supply is turned on with no
load connected to the pressure switch, over current may occur, causing the product to break
instantly.
3) Do not short circuit the load. An error is displayed when the load of the pressure switch is
short circuited, but over current may flow, causing damage to the pressure switch.
4) Do not press the setting buttons with a sharp pointed object. This may damage the setting
buttons.
5) If using the product to detect very small pressures, warm up the product for 10 to 15 minutes
first. There will be a drift on the display of approximately 1% for 10 minutes after the power
supply is turned on.
6) Perform settings suitable for the operating conditions. Incorrect setting can cause operation
failure. For settings, refer to the Operation Manual of the pressure switch.
7) Do not touch the LED during operation. The display can vary due to static electricity.
8) If a commercially available switching power supply is used, be sure to ground the frame
ground (FG) terminal.
NPN (1 output)
PNP (1 output)
圧力スイッチ (NPN 仕様)
M
a
i
n
c
i
r
c
u
i
t
回
路
Supply
valve
Releas
e valve
-
-
-
+
+
+
OUT1
OUT2
FUNC*
B
r
o
w
n
B
l
a
c
k
Gr
ay
*
B
l
u
e
W
h
i
t
e
Connector cord assembly
(ZQ1-LW6-N-A)
Load
24 VDC
圧力スイッチ (PNP 仕様)
M
a
i
n
c
i
r
c
u
i
t
Supply valve
+
-
+
OUT1
OUT2
FUNC*
Brown
Black
24 VDC
Gray *
Blue
+
-
White
Release valve
-
Connector cord assembly
(ZQ1-LW6-P-A)
PNP (2 output)
M
ai
n
ci
rc
ui
t
回
路
茶DC (+)
Black OUT1
白OUT2
FUNC
青DC (-)
Loa
d
Loa
d
DC12
to
24V
Max.80ｍ
Residual voltage:
2V or less
NPN (2 output)
M
ai
n
ci
rc
ui
t
回
路
茶DC (+)
Black OUT1
白OUT2
FUNC
青DC (-)
Loa
d
Loa
d
DC12
to
24V
Max.80ｍ
Residual voltage:
2V or less
Brown DC(＋)
Black OUT1
White OUT2
Blue DC(－)
Main circuit
Lord
Lord
Lord
Lord
Main circuit
Main circuit
Main circuit
Lord
Lord
Supply valve
Release valve
Pressure switch (NPN specifications)
Pressure switch (PNP specifications)
Brown DC(＋)
Black OUT1
White OUT2
Blue DC(－)
Connector cord assembly
Connector cord assembly
Brown
Black
Gray *
White
Blue

Doc. No. ZQ-OM01301-A
- 19 -
６. Vacuum release flow adjusting needle
6.1 Vacuum release flow adjusting method
Vacuum release air is output by turning the release valve ON. The flow rate of vacuum release
air can be adjusted by altering the vacuum release flow adjustment needle.
Loosen the lock nut and adjust the vacuum release flow adjusting needle located at the end of
the lock nut using a flat blade screwdriver, etc. Rotating the vacuum release flow adjusting
needle clockwise decreases the vacuum release flow while counterclockwise rotation
increases it.
Tighten the lock nut after finishing the adjustment of the vacuum release flow adjusting needle
to fix the adjusted position.
6.2 Precaution
1) Leakage cannot be completely eliminated when the needle is fully closed. A certain amount
of leakage is allowed for in the product specifications. Tightening the needle to achieve zero
leakage may result in equipment damage.
2) The vacuum release flow adjusting needle has a retaining mechanism, so it will not turn
further when it reaches the rotation stop position. The needle may break if it is rotated more
than 12 revolutions.
3) When tightening the lock nut, tighten it by approximately 15 to 30 degrees. Pay attention
not to cause breakage due to over tightening.