SMC Networks PFA Series User manual

CAT.ES100-31 C
Digital Flow Switch
Series PFA/PFW
For Air For Water
High flow rate type added to Series PFA (3000, 6000, 12000l)
Remote Type
Integrated Type

Series PFW
Series PFW
Series PFA
Series PFA
Bright and easy to read
LED display/digital setting
Two independent flow rate settings are possible.
PFA710
750
711
721
751
703H
706H
712H
PFA510
550
511
521
551
PFA30m
PFW31m
30m
32m
31m
— —
1 to 10
5 to 50
10 to 100
20 to 200
50 to 500
150 to 3000
300 to 6000
6000 to 12000
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
P
Series variations
Digital Flow Switch for Air
Flow rate setting and detection are
possible on digital display.
Digital Flow Switch
Two types for different applications
Integrated and remote type displays
Digital Flow Switch for Water
Switch output
Output specifications Port size (Rc, NPT, G)
Analog output
Accumulated
pulse output
1/8 1/4 3/8 1/2 11/21 2
Integrated
display type
Remote type
Display unit Sensor unit
Flow rate
measurement
range l/min
PFW704
720
740
PFW504
520
540
0.5 to 4
2 to 16
5 to 40
P
P
P
P
P P
P P
Switch output
Output specification Port size (Rc, NPT, G)
3/8 1/2 3/4
Integrated
display type
Remote type
Display unit Sensor unit
50l/min
10l/min
500l/min
200l/min
100l/min
12000l/min
6000l/min
3000l/min
New
New
Size (port size)
Flow rate
Flow rate
16l/min
4l/min
40l/min
Size (port size)
For Air
Series variations
For Water
Can be switched from real-time flow rate
to accumulated flow.
Water resistant construction
equivalent to IP65
A new LCD display is used for the high flow
rate types (PFA703H/706H/712H) in order to
reduce the power consumption without
losing visibility.
Flow rate
measurement
range l/min
Features 1

Maximum Flow Rate
3000, 6000, 12000l/min types
have been newly released!
Detection principle of digital flow switch for air
A heated thermistor is installed in the passage, and the fluid absorbs heat from
the thermistor as it flows past it. The thermistor's resistance value increases as
heat is absorbed, and since the increase ratio has a uniform relationship to the
fluid velocity, it is possible to detect the fluid velocity by measuring this
resistance value. To further compensate the fluid and ambient temperatures,
there is also a built-in temperature sensor, which allows stable measurement
within the operating temperature range.
Application examples
Fluid velocity
detection element
Temperature
compensation element
Detection principle of digital flow switch for water
When a bar shaped object (vortex generator) is placed in the flow,
reciprocal vortexes are generated on the downstream side. These
vortexes are stable under certain conditions, and their frequency is
proportional to the flow velocity, resulting in the following formula.
f = k x v
f: Frequency of vortexes, v: Flow velocity, k: Proportional constant
(determined by the vortex generator's dimensions, shape, etc.) Therefore,
the flow rate can be measured by detecting this frequency.
Fluid
Vortex generator Vortex detector
Flow control of cooling water for welding gun
Flow rate measurement range
PFA703H: 150 to 3000l/min
PFA706H: 300 to 6000l/min
PFA712H: 3000 to 12000l/min
Main line flow control
Flow control for each equipment line
Machine
Machine
Machine
100l/pulse
Pulse counter
This flow switch uses
"l/min" as the flow rate
indicator unit, and the mass
flow is converted and
notated under conditions of
0°C and 101.3kPa.
The conversion conditions
can be switched to 20°C
and 101.3kPa for the high
flow rate types.
Flow control of N2gas to prevent
detection camera shimmering and
lead frame oxidation
Flow control of high frequency
electric power supply cooling water,
for wafer temperature regulation
MThe accumulated pulse output
function (100l/pulse) enables remote
detection of accumulated flow.
• Analog output (1 to 5VDC, 4 to
20mA) and switch output can
also be applied.
The addition of the high flow rate types supports
energy saving measures.
Air flow rates can be controlled from the main line
to each equipment line.
Features 2

How to order
PFA7 10 01 27
Nil
N
Wiring specification
3m lead wire with connector
Without lead wire
10
50
11
21
51
Flow rate range
1 to 10l/min
5 to 50l/min
10 to 100l/min
20 to 200l/min
50 to 500l/min
Symbol
01
02
03
04
Port size
1/8
1/4
3/8
1/2
10


50


100

200

500

Size
Applicable model
Flow rate (l/min) Nil
27
28
67
68
Output specification
Output specification
NPN open collector 2 outputs
NPN open collector 1 output + Analog output (1 to 5V)
PNP open collector 2 outputs
PNP open collector 1 output + Analog output (1 to 5V)
Applicable model
Nil
M
Nil
N
F
Thread type
Unit specification
Rc
NPT
G
PFA710, 750
PFA711, 721, 751
PFA711, 721, 751
PFA710, 750
PFA711, 721, 751
PFA711, 721, 751
PFA710, 750
PFA711, 721
PFA751
Integrated
display type
For Air
1 to 10l/min 5 to 50l/min
Specifications
Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]
Note 2) The output functions operate only for the real-time flow rate display, and do not operate for the accumulated flow display.
Note 3) Window comparator mode —Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above).
Note 4) The flow rate unit is based on 0˚C and 101.3kPa.
PFA710 PFA750 PFA711 PFA721 PFA751
Model
Measured fluid
Detection type
Flow rate measurement range
Minimum setting unit
Operating pressure range
Withstand pressure
Pressure loss
Accumulated flow range
Operating temperature range
Linearity
Repeatability
Temperature characteristics
Output
specifications
Indicator lights
Response time
Hysteresis
Power supply voltage
Current consumption
Withstand voltage
Insulation resistance
Noise resistance
Vibration resistance
Impact resistance
Weight
Enclosure
Port size (Rc, NPT, G)
Display units
Note 1)
±1% F.S. or less
1/8, 1/4
Dry air, N₂
Heater type
10 to 100l/min
1% of maximum flow rate
l, ft³x 10-¹
0 to 0.5MPa
1.0MPa
3kPa (at 100l/min)
0 to 999999l
0 to 50°C (with no condensation)
±5% F.S. or less
±3% F.S. or less (15 to 35°C), ±5% F.S. or less (0 to 50°C)
1s or less
Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (3 digits)
12 to 24VDC (ripple ±10% or less)
1000VAC for 1 min. between external terminal block and case
50MΩ(500VDC) between external terminal block and case
1000Vp-p, Pulse width 1µs, Rise time 1ns
10 to 500Hz at the smaller of amplitude 1.5mm or acceleration 98m/s² in X, Y, Z directions, 2 hours each
490m/s² in X, Y, Z directions, 3 times each
Equivalent to IP65
NPN open collector
PNP open collector
3kPa (at 50l/min)
150mA or less
250g (without lead wire)
3/8 1/2
Real-time flow rate
Accumulated flow
l/min, CFM x 10-²
27, 67: Lights up when ON, OUT1: Green, OUT2: Red
––
27, 67: Lights up when ON, OUT1: Green, OUT2: Red
28, 68: Lights up when ON, OUT1: Green, OUT2: None
Output voltage: 1 to 5V
Load impedance: 100kΩor more
Maximum load current: 80mA, Internal voltage drop: 1V or less (with load current of 80mA)
Maximum applied voltage: 30V
Maximum load current: 80mA
Internal voltage drop: 1.5V or less (with load current of 80mA)
10kPa (at 200l/min) 30kPa (at 500l/min)
±2% F.S. or less
20 to 200l/min
l/min, CFM x 10-¹
50 to 500l/min
290g (without lead wire)
160mA or less 170mA or less
Switch
output
Analog
output
With unit switching function
Fixed SI unit Note)
Note 2)
Note 3)
Note) Fixed units:
Real-time flow rate: l/min
Accumulated flow: l
1
Digital Flow Switch
Series PFA
For Air

How to Order
PFA3
Remote Type
Display Unit 00A
A
B
Mounting Panel mount
DIN rail, wall mount
0
1
Flow rate range
10, 50l/min
100, 200, 500l/min
Nil
0
1
2
3
Output specification
Output specification
NPN open collector 2 outputs
PNP open collector 2 outputs
NPN open collector 1 output + Analog output (1 to 5V)
PNP open collector 1 output + Analog output (1 to 5V)
Applicable model
PFA30, 31
PFA31
Specifications
l/min, CFM x 10-²
Model
Flow rate measurement
range
Minimum setting unit
Accumulated flow range
Operating temperature range
Linearity
Repeatability
Response time
Hysteresis
Power supply voltage
Current consumption
Enclosure
Weight
Temperature
characteristics
Output
Specifications
Display
units
PFA301PFA300
Note 1) The flow rate measurement range can change depending on the setting.
Note 2) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]
Note 3) The system accuracy when combined with sensor unit.
Note 4) The output functions operate only for the real-time flow rate display, and do not operate for the accumulated flow display.
Note 5) Window comparator mode –– Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above).
Note 6) The flow rate unit is based on 0°C and 101.3kPa.
1% of maximum flow rate
l, ft³x 10-¹
0 to 999999l
0 to 50°C (with no condensation)
±5% F.S. or less
l/min, CFM x 10-¹
10 to 100l/min, 20 to 200l/min
50 to 500l/min
1 to 10, 5 to 50l/min
Lights up when On, OUT1: Green, OUT2: Red
––
Lights up when ON, OUT1: Green, OUT2: None
60mA or less
Equivalent to IP40
45g
1s or less
Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (3 digits) Note 4)
12 to 24VDC (ripple ±10% or less)
Indicator lights
50mA or less
PFA310 PFA311 PFA312 PFA313
±1% F.S. or less (15 to 35°C)
±2% F.S. or less (0 to 50°C)
Lights up when ON, OUT1: Green, OUT2: Red
±1% F.S. or less
±1% F.S. or less Note 3)
Switch
output
Analog
output
NPN open collector
PNP open collector
Maximum load current: 80mA
Maximum applied voltage: 30V
Internal voltage drop: 1V or less (with load current of 80mA)
Maximum load current: 80mA
Internal voltage drop: 1.5V or less (with load current of 80mA)
Output voltage: 1 to 5V
Load impedance: 100kΩor more
Nil
MWith unit switching function
Unit specification
∗ PFA302 and 303 combinations are not available.
Fixed SI unit Note)
Note) Fixed units:
Real-time flow rate: l/min
Accumulated flow: l
Note 1)
Note 2)
Real-time flow rate
Accumulated flow
Note 3)
Note 4)
2
Series PFA

For Air
Digital Flow Switch Series PFA
How to Order
PFA5
Remote Type
Sensor Unit
Specifications
10
10
50
11
21
51
Flow rate range
1 to 10l/min
5 to 50l/min
10 to 100l/min
20 to 200l/min
50 to 500l/min Nil
N
F
Thread type
Rc
NPT
G
Nil
N
Wiring specification
3m lead wire with connector
Without lead wire
01
Symbol
01
02
03
04
Port size
1/8
1/4
3/8
1/2
10


50


100

200

500

Size Applicable model
Flow rate (l/min)
PFA510, 550
PFA511, 521
PFA551
1/8, 1/4 3/8 1/2
200g (without lead wire)
Model
Measured fluid
Detection type
Flow rate measurement range
Operating pressure range
Withstand pressure
Pressure loss
Operating temperature range
Linearity Note 1)
Repeatability
Power supply voltage
Current consumption
Weight
Enclosure
Port size (Rc, NPT, G)
PFA510 PFA550
1 to 10l/min 5 to 50l/min
Note 1) The system accuracy will be adjusted to ±5% F.S. or less when combined with PFA3.
Note 2) The system accuracy will be adjusted to ±1% F.S. or less when combined with PFA30.
Note 3) The flow rate unit is based on 0°C and 101.3kPa.
Dry air, N2
Heater type
10 to 100l/min
0 to 0.5MPa
1.0MPa
3kPa (at 100 l /min)
0 to 50°C (with no condensation)
Temperature
characteristics
3kPa (at 50l/min)
100mA or less
20 to 200l/min 50 to 500l/min
10kPa (at 200l/min) 30kPa (at 500l/min)
±20% F.S. or less
±1% F.S. or less
±25% F.S. or less
±1% F.S. or less Note 2)
±2% F.S. or less (15 to 35°C)
±3% F.S. or less (0 to 50°C)
Equivalent to IP65
240g (without lead wire) 110mA or less
PFA511 PFA521 PFA551
12 to 24VDC (ripple ±10% or less)
3

Sensor Unit Construction
Parts list
No.
1
2
3
4
5
Description
Attachment
Seal
Mesh
Body
Sensor
Parts list
Material
ADC
NBR
Stainless steel
PBT
PBT
Material
ADC
NBR
PBT
Stainless steel
PBT
PBT
PFA710/750
PFA510/550
PFA711/721/751
PFA511/521/551
Flow direction
Flow direction
No.
1
2
3
4
5
6
Description
Attachment
Seal
Spacer
Mesh
Body
Sensor
Operating Unit Descriptions
Output (OUT1) Indicator/Green
Output (OUT2) Indicator/Red
LED Display
UP Button ( Button)
SET Button (Button)
DOWN Button (Button)
DOWN
U P
OUT2OUT1
SET
RESET Buttons
Error Correction
Take the following corrective actions when errors occur.
LED display Connector size
M12
Number of pins
Manufacturer
C. CORRENS & CO., LTD.
OMRON Corporation
Yamatake-Honeywell Co., Ltd.
Hirose Electric Company
DDK Ltd.
Applicable series
VA-4D
XS2
PA5-4I
HR24
CM01-8DP4S
4
Problem
A current of more than
80mA is flowing to OUT1.
A current of more than
80mA is flowing to OUT2.
The setting data has
changed due to some
influence.
The flow rate is over the
flow rate measurement
range. (For air only)
Corrective action
Check the load and wiring
for OUT1.
Check the load and wiring
for OUT2.
Perform the RESET
operation, and set all
data again.
Reduce the flow rate until it
is within the flow rate
measurement range, using
an adjustment valve, etc.
Connectors
Pressing the UP and DOWN buttons
simultaneously activates the RESET
function.
This clears the unit when an
abnormality occurs and clears the
accumulated flow display to "0".
Lights up when OUT1 is ON.
It also blinks when an overcurrent
error occurs on OUT1.
Displays the real-time flow rate,
accumulated flow, and setting
value. The mark blinks when the
accumulated flow is being
measured.
Use when decreasing a setting
value.
Use when changing a setting value
or any of the modes.
Use when increasing a setting
value.
Lights up when OUT2 is ON.
It also blinks when an overcurrent
error occurs on OUT2.
Since the connectors (female contacts) shown below can be used,
please refer to the respective manufacturers.
Note) C. CORRENS & CO., LTD. is the general agent in Japan for Hirschmann.
Series PFA
4

Performs setting of display units.Note 1)
Switches with the button and button.
(Refer to Table 1 .)
Flow Rate Setting
Setting procedure
Performs setting of the
flow rate automatically.
Initial setting
YES
NO
YES
NO
"P"
"n"
OUT1 Output
mode
≥
≥
P-1P-2
P-2
n-1n-2
n-1 n-2
HH
HH
H (fixed hysteresis) = 3 digits
H (fixed hysteresis) = 3 digits
∗OUT2 is the same.
OFF
ON
High flow rate →
High flow rate →
High flow rate →
High flow rate →
OFF
ON
OFF
ON
OFF
ON
•Hysteresis mode
•Hysteresis mode
Display Real-time flow rate
l/min
CFM x 10-²
Accumulated flow
l
ft³x 10-¹
Output type
Initial setting
Manual flow
rate setting
Manual flow
rate setting
Key lock
mode
Normal
operation
P-1
Performs setting of the display mode.
Switches with the button.
: Real-time flow rate display
: Accumulated flow display
1. Initial Setting Mode 2. Selection of the Display Mode 3. Selection of Display Units
Performs setting of the OUT2 output mode.
Switches the OUT2 output mode with the
button.
: Non-inverted output
: Inverted output
4. Selection of OUT1 Output Mode 5. Selection of OUT2 Output Mode
Setting is completed
when the SET button
is pressed.
For air
CFM = ft³/min
Display Real-time flow rate
l/min
GPM
Accumulated flow
l
gal (US)
For water
GPM = gal (US)/min
Unit number
OUT1 OUT2 OUT1 OUT2 OUT1 OUT2
OUT1 OUT2 OUT1 OUT2
Press the SET button.
SET
Press the SET button.
SET
SET SET
Press the SET button.
Note) Operation is the same for the integrated display type and the remote type (display unit).
Table 1 Table 2
Performs setting of the OUT1 output mode.
Switches the OUT1 output mode with the
button.
: Non-inverted output
: Inverted output
(Refer to Table 2 .)
Note 1)
For -M (fixed SI unit)
Does not perform mode
switching even if the
button is pressed during
operation.
Initial setting: Sets the
display mode (real-time
flow rate/accumulated
flow), unit mode, and out-
put mode (non-inverted/
inverted). Auto preset
Can perform fine adjust-
ment of data which is
automatically set with
the auto preset.
Press the SET button for 1 second or more.
Since the display will change from to
or , release the SET button after
it has changed.
•Window comparator
mode
•Window comparator
mode
Displays the flow rate
and performs switch
operation.
Note 1) For the type with unit switching function
[The type without the unit switching function will have a
fixed SI unit (l/min or l).]
Performs setting of the
flow rate which
performs switch output.
5
For Air
Digital Flow Switch Series PFA

Flow rate setting mode (manual)
Flow rate setting mode (auto preset)
Flow Rate Setting
The display shows .
Press the SET button. Display changes to input of OUT1 setting value (1).
The setting value and (or ) are
displayed alternately.
Button: Increases the setting value
Button: Decreases the setting value
Press the SET
button.
Display changes to input of OUT2 setting value (1).
The setting value and (or ) are
displayed alternately.
Button: Increases the setting value
Button: Decreases the setting value
Display changes to input of OUT2 setting value (2).
The setting value and (or ) are
displayed alternately.
Button: Increases the setting value
Button: Decreases the setting value
Display changes to input of OUT1 setting value (2).
The setting value and (or ) are
displayed alternately.
Button: Increases the setting value
Button: Decreases the setting value
SET
Press the button to switch
the display to .
OUT1 OUT2 OUT1 OUT2 OUT1 OUT2
OUT1 OUT2 OUT1 OUT2 OUT1 OUT2
OUT1 OUT2 OUT1 OUT2 OUT1 OUT2
OUT1 OUT2 OUT1 OUT2 OUT1 OUT2
Press the SET
button.
SET
Press the SET
button.
SET
Setting is completed
when the SET button
is pressed.
SET
Press the SET
button.
SET
Setting is completed
when the SET button
is pressed.
SET
Press the SET
button.
SET
OFF point
ON point = C.C1
OFF point = C-3 digits, C1-3 digits,
(1 digit is the minimum setting unit.)
1. Setting Value Input
Mode (Manual) 2. Setting in the
Manual Mode 3. OUT1 Setting Value (1) Input
Press the SET button.
(Refer to Table 2 for the relationship
of each value to the switch output.)
4. OUT1 Setting
Value (2) Input 5. OUT2 Setting Value (1) Input 6. OUT2 Setting
Value (2) Input
1. Setting Value
Input Mode 2. Setting in the Auto
Preset Mode 3. Auto Preset
Preparations
In this condition, preparations are performed on
equipment for the OUT1 setting, and flow is
started.
In case the OUT1 setting is not
required, press the button and the
button simultaneously while in this
condition.
Press the SET button, and then
release it when is displayed.
6. OUT2 Auto Preset
5. Auto Preset
Preparations
4. OUT1 Auto Preset
When the SET button is pressed at this point,
the flow rate values are read automatically,
and the optimum setting value is input.
and the input value are displayed
alternately.
Hysteresis
(3 digits)
ON point
(C.C1)
Preparations are performed on
equipment for the OUT2 setting, and
flow is started.
In case the OUT2 setting is not
required, press the button and the
button simultaneously while in this
condition.
When the SET button is pressed at
this point, the flow rate values are
read automatically, and the optimum
setting value is input.
and the input value are
displayed alternately.
Series PFA
6