Stanford Research Systems RGA100 User manual

Revision 1.8 (May, 2009)
Operating Manual and
Programming Reference
Models RGA100,
RGA200, and RGA300
Residual Gas Analyzer
1290-D Reamwood Ave.
Sunnyvale, CA 94089
408-744-9040 · 408-744-9049 fax
[email protected] · www.thinkSRS.com

SRS Residual Gas Analyzer
ii
Certification
Stanford Research Systems certifies that this product met its published specifications at the time
of shipment.
Warranty
This Stanford Research Systems product is warranted against defects in materials and
workmanship for a period of one (1) year from the date of shipment.
Service
For warranty service or repair, this product must be returned to a Stanford Research Systems
authorized service facility. Contact Stanford Research Systems or an authorized representative
before returning this product for repair. All users returning an RGA Probe back to the factory for
repair and/or service must submit a correctly completed “Declaration of Contamination of
Vacuum Equipment” form along with the instrument. The SRS personnel carrying out the repair
and service of vacuum equipment must be informed of the condition of the components before
any work is done on the parts. A copy of the form is attached to the end of this manual.
Information in this document is subject to change without notice.
Copyright © Stanford Research Systems, Inc., 1996. All rights reserved.
Stanford Research Systems, Inc.
1290-D Reamwood Avenue
Sunnyvale, California 94089

Safety and Preparation For Use
SRS Residual Gas Analyzer
iii
Printed in U.S.A.
Safety and Preparation for Use
WARNING!
Dangerous voltages, capable of causing injury or death, are present in this instrument.
Use extreme caution whenever the instrument cover is removed. Do not remove the
cover while the unit is plugged into a live outlet.
Line Cord
The RGA built-in power module option (Opt02) has a detachable, three-wire power cord
for connection to the power source and to a protective ground. The exposed metal parts
of the instrument are connected to the outlet ground to protect against electrical shock.
Always use an outlet which has a properly connected protective ground.
Service
Do not attempt to service or adjust this instrument unless another person, capable of
providing first aid or resuscitation, is present.
Do not install substitute parts or perform any unauthorized modifications to this
instrument. Contact the factory for instructions on how to return the instrument for
authorized service and adjustment.
Fan
The fans in the RGA are required to maintain proper operation. Do not block the vents in
the chassis or the unit may not operate properly.

SRS Residual Gas Analyzer
iv

Contents
SRS Residual Gas Analyzer
v
Contents
Safety and Preparation For Use ............................................................................................................... iii
Contents...................................................................................................................................................... v
Specifications .......................................................................................................................................... xiv
Command List..........................................................................................................................................xvi
Chapter 1 Getting Started 1-1
Unpacking ................................................................................................................................................1-2
Before You Open the Box...........................................................................................................1-2
Checklist.......................................................................................................................................1-2
Standard Equipment / Supplies.................................................................................................1-2
Accessories................................................................................................................................1-2
Optional Equipment ..................................................................................................................1-2
Related Equipment....................................................................................................................1-3
Installation................................................................................................................................................1-4
Introduction .................................................................................................................................1-4
Probe Installation ........................................................................................................................1-4
Hardware Requirements............................................................................................................1-5
Procedure ..................................................................................................................................1-6
Electronics Control Unit Installation .........................................................................................1-8
Hardware Requirements............................................................................................................1-8
Procedure ................................................................................................................................1-10
RGA Windows Installation........................................................................................................1-11
Minimum System Requirements (Single Head Operation) ....................................................1-11
Procedure ................................................................................................................................1-12
Turning on the RGA ..................................................................................................................1-12
Running the SRS RGA System ............................................................................................................1-13
Chapter 2 RGA General Operation 2-1
What is an RGA? .....................................................................................................................................2-2
The SRS RGA...........................................................................................................................................2-3
Basic Operating Modes of the SRS RGA ..............................................................................................2-5
The SRS RGA as a Mass spectrometer.....................................................................................2-5
The SRS RGA as a Single Gas monitor.....................................................................................2-6
The SRS RGA as a Total Pressure Gauge ................................................................................2-6
Residual Gas Analysis Basics................................................................................................................2-8
How Mass Spectra are Interpreted ............................................................................................2-8
Partial Pressure Measurement...................................................................................................2-9
Partial Pressure Sensitivity Factors ........................................................................................2-11

Contents
SRS Residual Gas Analyzer
vi
Chapter 3 RGA Quadrupole Probe 3-1
Introduction ............................................................................................................................................. 3-2
Ionizer ...................................................................................................................................................... 3-3
Description .................................................................................................................................. 3-3
Principle of operation ................................................................................................................. 3-3
Parameter Settings ..................................................................................................................... 3-4
Quadrupole mass filter........................................................................................................................... 3-7
Description .................................................................................................................................. 3-7
Principle of operation ................................................................................................................. 3-8
Mass Range, Resolution and Throughput ............................................................................... 3-9
Zero Blast Suppression............................................................................................................ 3-12
Ion Detector ........................................................................................................................................... 3-13
Description ................................................................................................................................ 3-13
Faraday Cup operation............................................................................................................. 3-14
Electron Multiplier Operation .................................................................................................. 3-14
Hardware modifications ....................................................................................................................... 3-18
Repeller and anode grid modifications .................................................................................. 3-18
Repeller removal ....................................................................................................................... 3-19
Operation without a filament ................................................................................................... 3-19
W filament replacement............................................................................................................ 3-19
RGA Cover Nipple Replacement ............................................................................................. 3-20
Chapter 4 RGA Electronics Control Unit 4-1
Introduction ............................................................................................................................................. 4-2
Front Panel .............................................................................................................................................. 4-3
Rear Panel................................................................................................................................................ 4-4
+24VDC@2.5A Connector .......................................................................................................... 4-4
RS232/DCE/28.8k Connector ..................................................................................................... 4-5
LED’s............................................................................................................................................ 4-5
Locking Knobs............................................................................................................................ 4-5
Power entry module (Option 02) ............................................................................................... 4-5
LED Functionality ....................................................................................................................... 4-6
STATUS (Green) LED’s .......................................................................................................... 4-6
ERROR (Red) LED’s .............................................................................................................. 4-7
Electrometer ............................................................................................................................................ 4-8
Detection limit vs. scan rate ...................................................................................................... 4-8
Adjusting the Zero of the Ion Detector ..................................................................................... 4-9

Contents
SRS Residual Gas Analyzer
vii
Mass Filter Power Supply.....................................................................................................................4-10
Maintenance and Service .....................................................................................................................4-11
Chapter 5 RGA Windows Software 5-1
Overview ..................................................................................................................................................5-3
Program Structure.......................................................................................................................5-3
RGA Files .....................................................................................................................................5-3
RGA files (.rga).........................................................................................................................5-3
RGA Scan log files (.ana .hst .tbl) ............................................................................................5-3
RGA ASCII Data files (.asc).....................................................................................................5-4
RGA Graph Metafiles (.wmf) ...................................................................................................5-4
System Requirements.................................................................................................................5-4
Getting Started.........................................................................................................................................5-5
Starting the RGA Software .........................................................................................................5-5
Connecting to a Head .................................................................................................................5-5
Shutting Down the RGA System................................................................................................5-5
Features and Operation ..........................................................................................................................5-7
The RGA Window ........................................................................................................................5-7
Multiple Head Operation.............................................................................................................5-7
Display Modes .............................................................................................................................5-7
Analog (Mode Menu)................................................................................................................5-7
Histogram (Mode Menu) ..........................................................................................................5-8
Table (Mode Menu) ..................................................................................................................5-8
P vs T (Mode Menu) .................................................................................................................5-9
Leak Test (Mode Menu) .........................................................................................................5-10
Annunciator (Mode Menu) .....................................................................................................5-10
Library (Mode Menu) .............................................................................................................5-11
Data Acquisition ........................................................................................................................5-11
Scan Data Logging....................................................................................................................5-11
Graph Management...................................................................................................................5-12
Head Management.....................................................................................................................5-12
Sensitivity Factors.....................................................................................................................5-13
Spectrum Analysis ....................................................................................................................5-13
Background Data.......................................................................................................................5-13
RGA Head and Scan Parameters .........................................................................................................5-14
Changing Scanning Parameters ..............................................................................................5-14
Changing Head Parameters .....................................................................................................5-14
Changing Scan Trigger Rates ..................................................................................................5-15
Display Modes .......................................................................................................................................5-16
Changing Display Modes..........................................................................................................5-16

Contents
SRS Residual Gas Analyzer
viii
Running in Split Display Mode ................................................................................................ 5-16
Manual Scaling of Graphs........................................................................................................5-16
Using Scan Data as Background............................................................................................. 5-17
General Utilities..................................................................................................................................... 5-18
Using the Data Cursors ............................................................................................................ 5-18
Cursor command..................................................................................................................... 5-18
Cursor Properties command ................................................................................................... 5-18
Scheduled Saving of Data........................................................................................................5-18
Logging Scans ........................................................................................................................ 5-18
Viewing Scans ........................................................................................................................ 5-18
Browsing Through the Gas Library ........................................................................................ 5-19
Analyzing the Mass Spectrum ................................................................................................. 5-20
Spectrum Analysis description ............................................................................................... 5-20
Analysis Procedure ................................................................................................................. 5-20
Averaging Scan Spectrum ....................................................................................................... 5-20
Pressure Reduction .................................................................................................................. 5-21
Y-Axis Unit Change................................................................................................................... 5-21
Head Calibration and Security.............................................................................................................. 5-22
Tuning the RGA Sensitivity......................................................................................................5-22
Adjusting the CEM Gain ........................................................................................................... 5-22
Peak Tuning the RGA Head ..................................................................................................... 5-23
Securing the RGA Head ...........................................................................................................5-24
RGA On-line Help .................................................................................................................................. 5-25
Context Sensitive Help............................................................................................................. 5-25
Help Search ............................................................................................................................... 5-25
Help Index.................................................................................................................................. 5-25
Commonly Asked Questions ................................................................................................... 5-25
Sample Scans............................................................................................................................ 5-25
Chapter 6 Programming the RGA Head 6-1
Introduction ............................................................................................................................................. 6-4
The RGA COM Utility .............................................................................................................................. 6-4
Intoduction .................................................................................................................................. 6-4
Communicating with a Head...................................................................................................... 6-4
RS232 Interface ....................................................................................................................................... 6-6
LED Indicators......................................................................................................................................... 6-6
Command Syntax.................................................................................................................................... 6-7
Examples of command formats ................................................................................................ 6-7
Programming tips...................................................................................................................... 6-8

Contents
SRS Residual Gas Analyzer
ix
Communication Errors............................................................................................................................6-9
Command errors........................................................................................................................6-9
Parameter errors ........................................................................................................................6-9
Jumper Protection violation ......................................................................................................6-9
Troubleshooting the RGA communications.......................................................................................6-11
Programming the RGA Head................................................................................................................6-12
Initializing the RGA Head..........................................................................................................6-12
Programming the Ionizer ..........................................................................................................6-13
Programming the Detector .......................................................................................................6-14
Setting up Analog Scans ..........................................................................................................6-16
Setting up Histogram Scans ....................................................................................................6-18
Single Mass Measurements .....................................................................................................6-20
Total Pressure Measurements .................................................................................................6-22
Storing information in the RGA Head......................................................................................6-23
Programming the Quadrupole Mass Filter .............................................................................6-24
Error Checking the RGA ...........................................................................................................6-25
RGA Command Set ...............................................................................................................................6-29
Initialization Commands ...........................................................................................................6-30
ID?....................................................................................................................................6-30
IN0, IN1, IN2 ...................................................................................................................6-30
Ionizer Control Commands ......................................................................................................6-32
DGparam, param: 0 - 20,*...............................................................................................6-32
EEparam, param: 25 - 105, *, ?.......................................................................................6-33
FLparam, param: 0.00 - 3.50, *, ? ...................................................................................6-34
IEparam, param: 0,1, *, ? ................................................................................................6-36
VFparam, param: 0 - 150, *, ?.........................................................................................6-36
Detection Control Commands..................................................................................................6-38
CA ....................................................................................................................................6-38
CL.....................................................................................................................................6-39
HVparam, param: 0 - 2490, *, ?......................................................................................6-40
MO?..................................................................................................................................6-42
NFparam, param: 0 - 7, *, ?.............................................................................................6-42
Scan and Measurement Commands........................................................................................6-44
AP?...................................................................................................................................6-44
HP?...................................................................................................................................6-44
HSparam, param:0 - 255,* ..............................................................................................6-45
MFparam, param: 1 - M_MAX, *, ? ...............................................................................6-47
MIparam, param: 1 - M_MAX, *, ? ................................................................................6-48
MRparam, param:0 - M_MAX .......................................................................................6-48
SAparam, param: 10 - 25, *, ?.........................................................................................6-50
SC[param], param: 0 - 255, *..........................................................................................6-51
TP?, TP0, TP1 ..................................................................................................................6-53
Parameter Storage Commands................................................................................................6-55

Contents
SRS Residual Gas Analyzer
x
MGparam, param: 0.0000 - 2000.0000,?........................................................................ 6-55
MVparam, param: 0 - 2490,?.......................................................................................... 6-55
SPparam, param:0.0000 - 10.0000, ?.............................................................................. 6-56
STparam, param:0.0000 - 100.0000, ?............................................................................ 6-56
Mass Filter Control Commands............................................................................................... 6-58
MLparam, param: 0.0000 - M_MAX ............................................................................. 6-58
Error Reporting Commands..................................................................................................... 6-59
EC? .................................................................................................................................. 6-59
ED? .................................................................................................................................. 6-59
EF?................................................................................................................................... 6-60
EM?.................................................................................................................................. 6-60
EP?................................................................................................................................... 6-61
EQ? .................................................................................................................................. 6-61
ER? .................................................................................................................................. 6-62
Tuning Commands ................................................................................................................... 6-63
CE? .................................................................................................................................. 6-63
DIparam, param: 0 - 255, *, ? ......................................................................................... 6-63
DSparam, param: -0.8500 - +0.8500, *, ?....................................................................... 6-64
RIparam, param: -86.0000 - +86.0000, *, ?, none .......................................................... 6-65
RSparam, param: 600.0000 - 1600.0000, *, ?, none....................................................... 6-67
Error Byte Definitions........................................................................................................................... 6-69
Chapter 7 RGA Tuning 7-1
Introduction ............................................................................................................................................. 7-2
Tuning Options ....................................................................................................................................... 7-3
Peak Tuning Procedure.......................................................................................................................... 7-4
Introduction ................................................................................................................................. 7-4
General Procedure...................................................................................................................... 7-5
Peak Position Tuning Algorithms ............................................................................................. 7-6
Peak Width Tuning Algorithms: ................................................................................................ 7-8
Temperature effects on the mass scale calibration: ............................................................... 7-9
Sensitivity Tuning Procedure .............................................................................................................. 7-11
Electron Multiplier Tuning Procedure................................................................................................. 7-14
Chapter 8 RGA Maintenance 8-1
Warnings!................................................................................................................................................. 8-3
Probe Bakeout......................................................................................................................................... 8-5
Procedure .................................................................................................................................... 8-6
Ionizer Degas........................................................................................................................................... 8-7
Ionizer Replacement ............................................................................................................................... 8-8
Equipment ................................................................................................................................... 8-8

Contents
SRS Residual Gas Analyzer
xi
Procedure.....................................................................................................................................8-8
Filament Replacement ..........................................................................................................................8-11
Handling and care of the filament............................................................................................8-11
Equipment..................................................................................................................................8-11
Procedure...................................................................................................................................8-11
CDEM Handling and Care .....................................................................................................................8-14
Handling and mounting ............................................................................................................8-14
Operating pressure ...................................................................................................................8-14
Operating temperature..............................................................................................................8-14
Bakeout temperature ................................................................................................................8-14
Operating voltage......................................................................................................................8-14
Initial pump-down......................................................................................................................8-14
Contamination ...........................................................................................................................8-15
Storage .......................................................................................................................................8-15
CDEM Pre-conditioning ........................................................................................................................8-16
CDEM Refreshment...............................................................................................................................8-17
Materials.....................................................................................................................................8-17
Procedure...................................................................................................................................8-17
CDEM Replacement ..............................................................................................................................8-18
Equipment..................................................................................................................................8-18
Procedure...................................................................................................................................8-18
Quadrupole filter cleaning....................................................................................................................8-21
Equipment..................................................................................................................................8-21
Procedure...................................................................................................................................8-22
SRS Probe Refurbishing Service .........................................................................................................8-25
Chapter 9 RGA Troubleshooting 9-1
Warnings ..................................................................................................................................................9-2
Internal Error Detection in the SRS RGA ..............................................................................................9-3
Basic Troubleshooting ...........................................................................................................................9-5
Built-in Hardware Checks.....................................................................................................................9-10
24V DC Power Supply ...............................................................................................................9-10
Electrometer...............................................................................................................................9-10
Quadrupole Mass Filter RF P/S................................................................................................9-11
Filament’s Background Protection mode ...............................................................................9-12

Contents
SRS Residual Gas Analyzer
xii
Chapter 10 RGA Circuit Description 10-1
Overview of the RGA ............................................................................................................................ 10-3
Circuit Description................................................................................................................................ 10-4
General Description.................................................................................................................. 10-4
Circuit Boards ........................................................................................................................... 10-5
Description of Schematics................................................................................................................... 10-6
Schematic name: QMSE_T1 .................................................................................................... 10-6
Microprocessor....................................................................................................................... 10-6
Digital I/O Ports...................................................................................................................... 10-6
The LED port.......................................................................................................................... 10-7
The MPX port......................................................................................................................... 10-7
The MISC port........................................................................................................................ 10-7
Clocks ..................................................................................................................................... 10-7
RS232 Interface ...................................................................................................................... 10-8
Schematic name: QMSE_T2 .................................................................................................... 10-8
I/V calibration......................................................................................................................... 10-8
A/D Conversion...................................................................................................................... 10-8
Power-up Conditioning........................................................................................................... 10-9
Schematic name: QMSE_T3) ................................................................................................... 10-9
DC Control Voltages .............................................................................................................. 10-9
RF Amplitude Detection....................................................................................................... 10-10
RF Amplitude Control.......................................................................................................... 10-10
Foldback Current Limiting ................................................................................................... 10-10
Schematic name: QMSE_B1. ................................................................................................. 10-11
Mass filter RF Supply........................................................................................................... 10-11
DC Potentials........................................................................................................................ 10-12
Schematic name: QMSE_B2. ................................................................................................. 10-12
Filament Heater Supply........................................................................................................ 10-12
Bias Regulators..................................................................................................................... 10-13
Schematic name: QMSE_B3 .................................................................................................. 10-14
Power Supplies ..................................................................................................................... 10-14
Schematic name: QMSE_V1 .................................................................................................. 10-14
Signal Conditioning.............................................................................................................. 10-14
Schematic name: QMSE_V2 .................................................................................................. 10-16
Electron Multiplier High Voltage Power Supply................................................................. 10-16
Chapter 11 RGA Probe Assembly
RGA Probe Assembly Schematic ......................................................................................................... 11-3
Feedthru Flange Connectors Schematic............................................................................................. 11-4
O100MAX Maximum Insertion Nipple Drawing................................................................................... 11-5
Appendix A Vacuum Diagnosis with SRS RGA’s

Contents
SRS Residual Gas Analyzer
xiii
Appendix B Using SRS RGA’s to Sample High Pressure Gasses
Appendix C Do I Need a PPM100 Partial Pressure Monitor for My SRS RGA?
Appendix D SRS RGA LabVIEW Development Kit
Glossary of Terms
Vacuum References
RGA Parts List and Schematics
Declaration of Contamination of Vacuum Equipment Form

xiv Specifications
SRS Residual Gas Analyzer
Specifications
Operational
Mass Range:
RGA100 1 to 100 amu
RGA200 1 to 200 amu
RGA300 1 to 300 amu
Mass filter type Quadrupole
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”)
Detector type Faraday cup (FC) - standard
Electron multiplier (CDEM) - optional
Resolution
(per AVS standard 2.3).
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass
range.
Sensitivity (A/Torr)* 2.10-4 (FC)
<200 (CDEM). User adjustable throughout high voltage range.
Minimum detectable
partial pressure
(MDPP)*
5.10-11 Torr (FC).
5.10-14 Torr (CDEM).
Operating pressure
range
10-4 Torr to UHV (FC)
10-6 Torr to UHV (CDEM)
Max. bakeout
temperature (without
ECU)
300°C
Operating Temperature 70°C (max.)
Recommended bakeout
temperature
200°C (O100HJR Heater Jacket recommended)
Total press.
measurement
Available with FC measurements only
* Measured with N2@ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV
ion energy and 1 mA electron emission current.
Ionizer
Design Open ion source, cylindrical symmetry.
Operation Electron impact ionization.
Material Stainless steel, type 304.

Specifications xv
SRS Residual Gas Analyzer
Filament Thoriated Iridium (dual) with firmware protection. Field
replaceable.
Degas 1 to 10 W Degas ramp-up.
Electron energy 25 to 105 V, programmable.
Ion energy 8 or 12 V, programmable.
Focus voltage 0 to 150 V, programmable.
Electron emission
current
0 to 3.5 mA, programmable.
General
Probe dimension 8.75" from flange face to top of ionizer
Probe insertion 2.0"
Probe mounting flange 2.75" CF
Minimum port I.D. 1.375"
ECU dimensions 9.1" x 4.1"x 3.1". Easily separated from the probe for bakeout.
LED indicators Power (ON/OFF), Filament (ON/OFF), Degas (ON/OFF), Elec.
mult. (ON/OFF), RS-232 (Busy signal), Error, Leak, and Burnt
Filament.
Computer interface RS-232C, 28,800 Baud with high level command set and fully
enabled RTS/CTS handshaking.
Software Windows OS based application.
Power Requirement 24 VDC @ 2.5 Amps. Male DB9 connector.
Optional 110/120/220/240 VAC (50/60 Hz) built-in power
module.
Weight 6 lbs.
Warranty One year parts and labor on materials and workmanship.

xvi Command List
SRS Residual Gas Analyzer
Command List
Initialization
Name Description Parameters Echo
ID Identification Query ? ID String
IN Initialization 0,1,2 STATUS Byte
Ionizer Control
Name Description Parameters Echo
DG Degas Ionizer 0-20, * STATUS Byte
EE Electron Energy 25-105, *, ? STATUS Byte or query
response
FL Electron Emission Current 0-3.50, *, ? STATUS Byte or query
response
IE Ion Energy 0, 1, *, ? STATUS Byte or query
response
VF Focus Plate Voltage 0-150, *, ? STATUS Byte or query
response
Detection Control
Name Description Parameters Echo
CA Calibrate All none STATUS Byte
CL Calibrate Electrometer none STATUS Byte
HV CDEM’s High Voltage 0-2490, *,? STATUS Byte or query
response
MO Multiplier Option ? CDEM option
NF Noise Floor 0-7,? Query response
Scan and Measurement Control
Name Description Parameters Echo
AP Analog Scan Points ? Query response
HP Histogram Scan Points ? Query Response
HS Histogram Scan Trigger 0-255, *, none Ion Currents
MF Final Mass 1-M_MAX, *, ? Query response
MI Initial Mass 1-M_MAX, *, ? Query response
MR Single mass measurement 0, M_MAX Ion Current
SA Steps per amu 10-25,*,? Query response
SC Analog Scan Trigger 0-255,*, none Ion Currents
TP Total Pressure measurement 0, 1, ? Ion Current
Parameter Storage
Name Description Parameters Echo
MG CDEM gain storage 0.0000-2000.0000,? Query Response
MV CDEM Bias Voltage storage 0-2490, ? Query Response
SP Partial Pressure Sensitivity 0.0000-10.0000,? Query response
ST Total Pressure Sensitivity 0.0000-100.0000, ? Query response

Command List xvii
SRS Residual Gas Analyzer
Mass filter control
Name Description Parameters Echo
ML Mass Lock 0.0000-M_MAX none
Tuning
Name Description Parameters Echo
CE Calibration Enable Query ? Query response
DI DI parameter
(Peak Width Tuning)
0-255, *, ? Query response
DS DS parameter
(Peak Width Tuning)
-2.5500-2.5500, *, ? Query response
RI RF_Driver @0 amu
(Peak Position Tuning)
-86.0000-86.0000, *,
?,none
Query response
RS RF_Driver @ 128 amu
(Peak Position Tuning)
600.0000-1600.0000, *,
?,none
Query response
Error Reporting
Name Description Parameters Echo
ER STATUS Byte Query ? Query response
EP PS_ERR Byte Query ? Query response
ED DET_ERR Byte Query ? Query response
EQ QMF_ERR Byte Query ? Query response
EM CEM_ERR Byte Query ? Query response
EF FIL_ERR Byte Query ? Query response
EC RS232_ERR Byte Query ? Query response
Note: M_MAX= 100 for RGA100, 200 for RGA200 and 300 for RGA300.

xviii Command List
SRS Residual Gas Analyzer

!"#"!
! "#"!#$%&'()*!+)%!,-)*./$0!
!"#$%&'()(
$%&&'()!*&+,&%-!
!"#$%&"'()*+%,*$&+#-*$%)"*%(+.&*$$%./%01('&2#134%&"*&2#13%'1,%#1$)'55#13%)"*%676%789%.1%'%
:'&00;%$<$)*;=%
>5*'$*%+*',%'1,%/.55.?%'55%#1$)'55')#.1%#1$)+0&)#.1$%).%#1$0+*%)"')%)"*%.()#;0;%(*+/.+;'1&*%./%)"*%
#1$)+0;*1)%#$%1.)%&.;(+.;#$*,%,0+#13%)"*%#1$)'55')#.1%(+.&*$$=%
.(!/0'1!20+3&%,!
!4(3+56'()777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777 "#8!
9%:;,%!<;=!>3%(!&0%!9;? 7777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777 "#8!
20%56@'1& 77777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777 "#8!
*%#+,#',(-./0$1&+%(2(*/$$30&45555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555 )67
899&44:'0&4 5555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555 )67(
;$%0:+#3(-./0$1&+%555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555 )67(
<&3#%&,(-./0$1&+%55555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555555 )6=(
!.(1&+@@+&';( 77777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777777 "#A!
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1-2 Unpacking
SRS Residual Gas Analyzer
Unpacking
Before You Open the Box
1. To reduce the chance of contamination, do not remove the probe from its plastic
shipping container until moments before it is ready to be installed in the vacuum
system.
2. Avoid contaminating the RGA gauge. Follow good high vacuum practice. Set aside a
clean, dust free, work area next to the vacuum port before installation begins.
3. Please read and follow all installation instructions in this chapter to insure that the
optimum performance of the instrument is not compromised during the installation
process.
4. Do not power up the instrument until it is instructed in the installation procedure.
5. Take a moment at this time to read the CDEM Handling and Care section of the
RGA Maintenance chapter if your unit includes the electron multiplier option
(Option 01).
6. Do not operate the RGA if the pressure in the chamber is greater than 10-4 Torr.
Consult Appendix B for information on Pressure Reduction Systems.
7. Read the General Operation chapter of this manual for an overview of the instrument
and its functions.
8. Inspect all components of the SRS RGA System upon unpacking. Report any
damage to Stanford Research Systems immediately. Compare the contents of the
shipping container with the Checklist below and report any discrepancies.
Checklist
Standard Equipment / Supplies
1. One RGA Probe (in sealed plastic container.)
2. One Electronics Control Unit box.
3. Compact Disk with RGA Windows software.
4. DB9-DB9 RS232 cable (25’ length).
5. Operating Manual and Programming Reference.
Accessories
1. Female DB-9 cable connector, with two wires for 24V power supply connection (not
provided with Option 02).
Optional Equipment
1. Option 01 Electron multiplier, with HVPS. Preinstalled at the factory.