
CLEAN TYPE SPECIFICATIONS MANUAL
Table of Contents
Page
1. Specifications ...........................................................................................................8
1.1 Name of Each Part ..........................................................................................8
1.2 Outer Dimensions............................................................................................9
1.3 Specifications Table.......................................................................................15
2. Transportation ........................................................................................................19
2.1 Unpacking and Transport ..............................................................................19
2.2 Mass and Outer Dimensions .........................................................................19
2.3 Cautions on Transporting the Robot..............................................................21
3. Installation ..............................................................................................................23
3.1 Installation Environment ................................................................................23
3.2 Air Suction Volume........................................................................................24
3.3 Coordinate System........................................................................................25
3.4 Installing the Robot........................................................................................27
4. Tool Interface..........................................................................................................28
4.1 Tool Air Piping ...............................................................................................28
5. Maintenance...........................................................................................................30
5.1 Items for Maintenance and Inspection...........................................................30
5.1.1 Check for Bellows..............................................................................31
5.1.2 Replacement of Bellows....................................................................31
5.1.3 Filling Grease to Ball Screw Spline Unit............................................31
5.2 Layout of Robot Components........................................................................32
5.3 Mounting and Dismounting Covers................................................................34
5.3.1 Base Cover .......................................................................................34
5.3.2 Arm 1 Covers ....................................................................................35
5.3.3 Arm 2 Cover......................................................................................37
5.4 Replacing Bellows .........................................................................................38
5.4.1 Replacement Procedures for Bellows (Lower) ..................................38
5.4.2 Replacement Procedures for Bellows (Upper) ..................................39
6. Replacement Parts for Maintenance.......................................................................41
6.1 Replacement Parts List for Maintenance.......................................................41
STE 80872-0
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