
CLEAN TYPE SPECIFICATIONS MANUAL
Table of Contents
Page
1. Specifications ...........................................................................................................8
1.1 Name of Each Part ..........................................................................................8
1.2 Outer Dimensions............................................................................................9
1.3 Specifications Table.......................................................................................11
2. Transportation ........................................................................................................13
2.1 Unpacking and Transport ..............................................................................13
2.2 Mass and Outer Dimensions .........................................................................14
2.3 Cautions on Transporting the Robot..............................................................15
3. Installation ..............................................................................................................17
3.1 Installation Environment ................................................................................17
3.2 Air Suction Volume........................................................................................18
3.3 Coordinate System........................................................................................19
3.4 Installing the Robot........................................................................................20
4. Tool Interface..........................................................................................................21
4.1 Tool Air Piping ...............................................................................................21
5. Maintenance...........................................................................................................23
5.1 Items for Maintenance and Inspection...........................................................23
5.1.1 Check for Bellows..............................................................................24
5.1.2 Replacement of Bellows....................................................................24
5.1.3 Filling Grease to Ball Screw Spline Unit............................................24
5.2 Layout of Robot Components........................................................................25
5.3 Mounting and Dismounting Covers................................................................26
5.3.1 Base Cover .......................................................................................26
5.3.2 Arm 2 Cover......................................................................................27
5.4 Replacing Bellows .........................................................................................28
5.4.1 Replacement Procedures for Bellows (Lower) ..................................28
5.4.2 Replacement Procedures for Bellows (Upper) ..................................29
6. Replacement Parts for Maintenance.......................................................................31
6.1 Replacement Parts List for Maintenance.......................................................31
STE 85337-0
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