Ulvac C10T User manual

D/N.MD10T00E, 2019NR09 ULVAC CRYOGENICS INCORPORATED
COMPRESSOR UNIT
Instruction Manual
C10T
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/S or
more fall under row 2(35) of appended table 1 of Japan’s
Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan’s
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate
procedures when
exporting or re-exporting those products.

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Introduction
Thank you for choosing our products. This instruction manual gives
information and precautions on handling, installation, operation, and
maintenance of the product.
This product is intended for use by qualified personnel who recognize shock
hazards and are familiar with the safety precautions required to avoid possible
injury. To ensure proper use of this product, read this instruction manual
carefully and keep this manual close at hand so that you can use for reference
during operation.
If you purchased our other products and/or optional devices with this product,
read relevant instruction manuals carefully.
1. About the personnel who are involved in handling our products
All personnel involved in handling our products should take a general safety
education and training that is officially accepted in the country where our product
is used. The personnel are also required to have specialized knowledge/skills and
qualification on the electricity, the machinery, the cargo handling, and the vacuum.
Especially, the personnel should be familiar with handling a cryopump in order to
use it safely. Since we offer a training session (which is subject to fees) as needed
for people who use cryopumps for the first time, please do not hesitate to contact
our Service Engineering Division to join the training session.
2. Warranty
2.1 Gratis warranty period and Warranty coverage
【Gratis warranty period】
Note that an installation period of less than one year after installation in your
company or your customer’s premises or a period of less than 18 months (counted
from the date of production) after shipment from our company, which is shorter, is
selected.
【Coverage】
(1) Failure diagnosis
As a general rule, diagnosis of failure should be done on site by customer.
However, ULVAC CRYOGENICS or our service network can perform this service
for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED
of the breakdown is found to be a fault of ULVAC CRYOGENICS.
(2) Damage during transportation
When damage by delivery/transportation is admitted, the product will be
repaired free of charge within the range of the guarantee expressed in the sales
contract.
(3) Breakdown repairs
There will be a charge for breakdown repairs, replacements and on-site visits
for the following seven conditions. In those cases the cost shall be your own
expense even though the product is within the warranty period.
①Breakdowns due to improper storage or handling, careless accident, software
or hardware design by the customer.
②Breakdowns due to modifications of the product without consent of the
manufacturer.
③Breakdowns due to maintenance of the product without authentic parts or
breakdowns resulting from using the product outside the specified
specifications of the product.
④Breakdowns due to contamination or corrosion caused by user’s use
conditions.
⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,
lightning, salt damage, and so on) , environmental pollution, irregular voltage,
and /or usage of undesignated power source.
⑥Breakdowns that are outside the terms of warranty.
⑦Consumables and/or replacement service.
Since the above services are limited to within Japan, diagnosis of failures, etc are
not performed abroad. If you desire the after service abroad, please contact
ULVAC CRYOGENICS and consult us for details in advance.
2.2 Exclusion of opportunity loss from warranty liability
Regardless of the gratis warranty term, compensation to opportunity losses
incurred to your company or your customers by failures of ULVAC CRYOGENICS
products and compensation for damages to products other than ULVAC
CRYOGENICS products and other services are not covered under warranty.

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2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems, please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump／Super trap Model ：
Cryopump／Super trap Serial No. ：
Refrigerator Model ：
Refrigerator Serial No. ：
Compressor Model ：
Compressor Serial No. ：
Temperature controller／Thermal display Model ：
Temperature controller／Thermal display Serial No. ：
Option Part Model ：
Optional Part Serial No. ：
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5．In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED
the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6．General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.

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Safety Considerations
Our products have been designed to provide extremely safe and dependable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Acaution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

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C10T Compressor Instructions
Table of Contents
Safety Instructions························································································ S-1
Disposal Considerations ················································································IW-1
1. COMPRESSOR UNIT DESCRIPTION··························································1-1
1.1 General ···························································································1-1
1.2 Specifications ···················································································1-1
2. INSPECTION··························································································2-1
2.1 Shipping List·····················································································2-1
2.2 Compressor ·····················································································2-2
2.3 Connecting Piping (Flexible Hose)·························································2-2
2.4 Cables ····························································································2-2
3. INSTALLATION ·······················································································3-1
3.1 Installation························································································3-1
3.2 Connecting Cooling Water Piping ··························································3-2
3.3 Cooling Water ···················································································3-2
3.4 Connecting the Compressor Unit to the Cryopump····································3-5
3.5 Connecting Electrical Cables································································3-7
4. OPERATION···························································································4-1
4.1 Before Operation ···············································································4-1
4.2 Normal Operation ··············································································4-1
5. Disconnection and Storage ········································································5-1
5.1 Disconnecting Flexible Hose ································································5-1
5.2 Storage ···························································································5-2
6. MAINTENANCE ······················································································6-1
6.1 Scheduled and Unscheduled Maintenance··············································6-1
6.2 Charging Helium Gas ·········································································6-1
Appendix A Trouble Shooting ··········································································· A-1
Appendix B Schematic Diagram ······································································· B-1
Appendix C Flexible Hose ··············································································· C-1
Appendix D Flow Diagram··············································································· D-1
Customer Support / Service Office ·································································· CS-1
ULVAC CRYOGENICS INCORPORATED I

Table of Contents
II ULVAC CRYOGENICS INCORPORATED
Figures
Figure 1-1 Dimensions ................................................................................................1-3
Figure 1-2 Major Components.....................................................................................1-4
Figure 3-1 Maintenance Space(Unit: mm) ...................................................................3-1
Figure 3-2 Cooling Water Requirement .......................................................................3-4
Figure 3-3 Connecting Flexible Hose ..........................................................................3-6
Figure 3-4 Static Pressure and Temperature ...............................................................3-7
Figure 3-5 Compressor Installation..............................................................................3-8
Figure 5-1 Disconnecting Flexible Hose ......................................................................5-2
Figure 6-1 Charging Helium Gas.................................................................................6-4
Figure B-1 C10T Circuit Diagram................................................................................ B-3
Figure B-2 C10T Wiring Diagram................................................................................ B-5
Figure D-1 C10T Flow Diagram .................................................................................. D-2
Tables
Table 1-1 Compressor Unit Standard Specifications ..................................................1-1
Table 2-1 Shipping List...............................................................................................2-1
Table 2-2 Optional Parts ............................................................................................2-1
Table 3-1 Recommended Cooling Water for Compressor..........................................3-3
Table 3-2 Input Power Cable Specifications...............................................................3-8
Table A-1 Troubleshooting Procedures ..................................................................... A-1
Table A-2 Operating Log ........................................................................................... A-3

ULVAC CRYOGENICS INCORPORATED S-1
Compressor Unit Safety Instructions
Read this manual and follow these safety guidelines before installing, operating, or
servicing the compressor unit.
Our Cryo-U®cryopump and Super trap refrigerator systems make a refrigeration cycle by
circulating high pressure helium gas. Filling helium gas more than the defined amount
does not improve refrigeration capacity appreciably. Instead, if excessive helium gas is
filled and pressure becomes higher than the defined value, gas will release from the safety
valve and its sheet may become clogged with dirt. This may even cause a leak as well as
overloading of the compressor motor.
Do not fill the helium gas more than the defined amount.
When charging helium gas or performing helium line decontamination, refer to the
“Maintenance” section and follow the instruction.
Use regulators, charging hoses, or adopters that can be used at the pressure of 2.0MPaG
or higher when performing the above work.
Do not start/stop the operation frequently.
The number of times that compressor motor can be started / stopped is 6 times or less per
hour and each status should be kept for at least 3 minutes. Frequent starting/stopping
shortens the insulation life of the compressor motor and may cause a failure of the product.
Do not start/ stop operation to control the temperature of Super Trap.
Please contact us when it is required to control the temperature of super trap.
３．Do not switch between ON and OFF frequently
１. Do not overfill helium gas
２．Adding helium gas and charging equipments

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Ensure to discharge helium gas and remove either side of the self-sealing couplings from
the used adsorber before disposing of it.
When the refrigerator system is not in operation, the helium gas pressure inside the
adsorber is as high as the fill pressure of the compressor. Disposing the adsorber with
helium gas inside may cause accidents. For example, if the adsorber was thrown in a
burner reactor without discharging helium gas by mistake, the inside pressure of the
adsorber would rise as the inside temperature rises and it may explode. If the adsorber
was pressed with helium gas still inside, it may also cause an explosion. Refer to
“Disposal Consideration”for more information.
Use appropriate charging adaptor to remove helium gas safely.
☆We collect used adsorbers. If there is any used absorber, please contact a person in your
local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our
Service Engineering Division. We only accept CTI adsorbers and our adsorbers.
・Power supply voltage must be kept within the allowable range(refer to “Section 1 Table1-1
Compressor Unit Standard Specifications”. Applying more than the allowed voltage
may damage the equipment.
・Install a ground-fault circuit interrupter(rated current: 10A, rated tripping leakage
current:30mA 3φ, rated voltage: 200V).
・Grounding conductor (earth wire) must be connected (D class grounding (with the
ground resistance of 100Ω)).
・Connect the refrigerator cable and remote cables (signal lines) to the compressor before
connecting the compressor to the power supply. These wiring connections must not be
done when the compressor is powered on. It could lead to a serious accident such as
electric shock and/or damage to the equipment.
・Follow recommended sizes for wires and cables.
・Power lines and signal lines must be wired at least 10cm separate from one another.
5. 福福
6. 絈絈
7. 福福
8. 絈絈
４．Disposal of used adsorber
1. 福福
2. 絈絈
3. 福福
4. 絈絈
５．Electrical wiring connections

ULVAC CRYOGENICS INCORPORATED S-3
If there is a water leak, there is a danger of electric shock. Ensure there is no water leak
from the cooling water piping. If the water pressure is too high, a leak may occur in the
cooling water line inside the compressor unit. Adjust and control the cooling water supply
pressure not to exceed the allowable upper limit (lower than 0.7MpG).
If water stain or some products accumulate in the water line inside the heat exchanger, heat
exchange effectiveness will be significantly reduced and helium gas temperature will rise,
this may shut down the compressor unit.
We employ the cooling water quality management standard of the Japan Refrigeration and
Air Conditioning Industry Association as a standard value of water quality for compressor
units. Please refer to “Section 3 Table 3-1 Recommended Cooling Water for Compressor”.
The upper limit of the compressor operating ambient temperature is 38℃. Do not use the
compressor in unsuitable environments such as dusty, highly humid environments and/or
places that are affected by strong electromagnetic waves. Keep electric terminals free
from dust to avoid electrical leakage and/or a short circuit.
1. Installation and maintenance of the product must be done by personnel in charge of the
equipment or servicing who are familiar with the product structure and risk associated
with the operation of the compressor.
2. Input power supply must be shut off before opening the cover of the compressor to avoid
the risk of electrical shock.
Also, parts of inside the compressor unit are still hot just after the compressor has been
stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns.
６．Cooling water
７．Compressor unit usage environment
9. 福福
10.絈絈
11.福福
12.絈絈
８．Maintenance precautions

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MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1
Do not disassemble, pressurize, heat up a compressor unit, or throw it into fire.
Such actions may lead to explosion of the adsorber inside the compressor unit.
For safe disposal of an adsorber, follow the procedures below.
(1) Remove high pressure helium gas inside the adsorber to reduce the internal
pressure to the level of ambient atmospheric pressure. To do so safely, use tools
appropriate to the adsorber coupling such as our charging adaptor (for cryocooler
maintenance).
(2) Remove the coupling to make it visible that the adsorber has been depressurized
before proceeding to the next step.
Disposal Considerations
Disposal of our products must be done in accordance with applicable national and local
laws and regulations.
The cryopumps or cryocoolers may contain residue of hazardous substances resulting
from actual use. Contact your safety supervisor and follow the instructions to remove
such toxic substances before disposing
We provide Safety Data Sheet (called SDS) of our products upon your request.
Please contact us if necessary.
WARNING
WARNING

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Compressor Unit Instruction Manual
1. COMPRESSOR UNIT DESCRIPTION
1.1 General ................................................................................................... 1-1
1.2 Specifications.......................................................................................... 1-1
1.1 General
The compressor unit circulates helium continuously in the cryopump system by
compressing helium returned from the refrigerator unit (cold head) and supplying
high-pressure helium to the refrigerator unit.
This compressor unit consists of: 1) a compressor, 2) a cooling system, 3) an oil
separation system and 4) an adsorber.
See Table 1-1 for the compressor specifications.
1.2 Specifications
Table 1-1 Compressor Unit Standard Specifications
◆Model : C10T
Power
Source
Volts×Phase×Hz AC190 ～220V ×3Φ×50Hz
AC190 ～230V ×3Φ×60Hz
Power (in normal operation) (*1) 1.5kW / 1.7kW(50Hz/60Hz)
Nominal Operating Current (*1) 5A / 6A(50Hz/60Hz)
Cooling Type Water cooled
Cooling Water Requirement
(See Fig.3-2)
Temperature : 5 ～32°C
FlowRate : 1 ～5L/min
Pressure Drop : 0.01 ～0.072MPa
Ambient Temperature 10 ～38°C
Compressor Winding Resistance 3.04Ω,
Adsorber Periodic Replacement Not necessary
Weight 69kg
Cooling Water Inlet/Outlet Rc3/8 female
Helium Gas SUPPLY/RETURN
Connector 1/2B self-sealing coupling
(*1) The power consumption or current are higher by around 10% at start up.
The power consumption and current in the above table are standard values when
flexible hoses of 3 meters long are used. The maximum allowable length is 20m,
and the power consumption and current will be larger by 6% with a 20m hose.
ULVACCRYOGENICSINCORPORATED 1-1

Compressor Unit Description
1-2 ULVAC CRYOGENICS INCORPORATED
◆Helium Gas Pressure: (Room temperature : 20°C)
Charge Pressure(*2) 1.73±0.04 MPaG
Operating Pressure(SUPPLY) (*3) 1.8～2.0 MPaG
(*2) The charge pressure in the above table is the value when flexible hoses with 20m at
largest. If the hose is larger than 20m, the charge pressure will be different. Contact us
for the detail.
When you use a flexible hose with length of 10m to 20m, chose the hose dedicated
to C10. If a standard hose of the same length is used, helium charge pressure will
be lower than required, inviting the need for charging helium gas.
CAUTION
(*3) Operating pressure is expected when a flexible hose of 3m are used. The operating
pressure will be larger by 10% with a hose of 20m.
◆Applicable Model of Cryopump and Refrigerator unit
Cryopump U8HT
Refrigerator R10RT / RM10T
◆Connector Specifications (Cable Side)
CONNECTOR MANUFACTURER TYPE
INPUT POWER NANABOSHI NCS-304-P
COLD HEAD POWER NANABOSHI NJC-204-PM
REMOTE/RESPONSE JAE SRCN6A25-16P
※The Cold Head Power Cable is dedicated to three-phase motor refrigerator unit.

Compressor Unit Instruction Manual
◆Dimensions
【FRONT】【SIDE】
【REAR】
Figure 1-1 Dimensions
332
521
543
573
148 76.2 108.3
399
111
104
57.2
ULVACCRYOGENICSINCORPORATED 1-3

Compressor Unit Description
1-4 ULVAC CRYOGENICS INCORPORATED
【FRONT】
【REAR】
【CONTROLLER (REAR)】
＊For the operation of a controller switch, remove the control panel on
the rear of the compressor unit.
Figure 1-2 Major Components
Control Panel Elapsed Time Meter
Helium Supply Pressure Gauge
ON/OFF Switch
Helium Charge Valve
(Fitting)
Front Panel
REMOTE/RESPONSE Connector
Cold Head Connector
REMOTE/LOCAL Switch
Power Connector
Helium Gas Supply Connector
Helium Gas Return Connector
Cooling Water Inlet (Rc3/8)
Cooling Water Outlet (Rc3/8)
Circuit Protector
Fuse
CP1 CP2
FUSE(1A)
Charging valve and
fitting are on the other
side of the front panel.