Ulvac C15T User manual

D/N.MD15T00E, 2020SR01 ULVAC CRYOGENICS INCORPORATED
COMPRESSOR UNIT
Instruction Manual
C15T
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/S or
more fall under row 2(35) of appended table 1 of Japan’s
Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan’s
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate
procedures when
exporting or re-exporting those products.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-1
Introduction
Thank you for choosing our products. This instruction manual gives
information and precautions on handling, installation, operation, and
maintenance of the product.
This product is intended for use by qualified personnel who recognize shock
hazards and are familiar with the safety precautions required to avoid possible
injury. To ensure proper use of this product, read this instruction manual
carefully and keep this manual close at hand so that you can use for reference
during operation.
If you purchased our other products and/or optional devices with this product,
read relevant instruction manuals carefully.
1. About the personnel who are involved in handling our products
All personnel involved in handling our products should take a general safety
education and training that is officially accepted in the country where our product
is used. The personnel are also required to have specialized knowledge/skills and
qualification on the electricity, the machinery, the cargo handling, and the vacuum.
Especially, the personnel should be familiar with handling a cryopump in order to
use it safely. Since we offer a training session (which is subject to fees) as needed
for people who use cryopumps for the first time, please do not hesitate to contact
our Service Engineering Division to join the training session.
2. Warranty
2.1 Gratis warranty period and Warranty coverage
【Gratis warranty period】
Note that an installation period of less than one year after installation in your
company or your customer’s premises or a period of less than 18 months (counted
from the date of production) after shipment from our company, which is shorter, is
selected.
【Coverage】
(1) Failure diagnosis
As a general rule, diagnosis of failure should be done on site by customer.
However, ULVAC CRYOGENICS or our service network can perform this service
for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED
of the breakdown is found to be a fault of ULVAC CRYOGENICS.
(2) Damage during transportation
When damage by delivery/transportation is admitted, the product will be
repaired free of charge within the range of the guarantee expressed in the sales
contract.
(3) Breakdown repairs
There will be a charge for breakdown repairs, replacements and on-site visits
for the following seven conditions. In those cases the cost shall be your own
expense even though the product is within the warranty period.
①Breakdowns due to improper storage or handling, careless accident, software
or hardware design by the customer.
②Breakdowns due to modifications of the product without consent of the
manufacturer.
③Breakdowns due to maintenance of the product without authentic parts or
breakdowns resulting from using the product outside the specified
specifications of the product.
④Breakdowns due to contamination or corrosion caused by user’s use
conditions.
⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,
lightning, salt damage, and so on) , environmental pollution, irregular voltage,
and /or usage of undesignated power source.
⑥Breakdowns that are outside the terms of warranty.
⑦Consumables and/or replacement service.
Since the above services are limited to within Japan, diagnosis of failures, etc are
not performed abroad. If you desire the after service abroad, please contact
ULVAC CRYOGENICS and consult us for details in advance.
2.2 Exclusion of opportunity loss from warranty liability
Regardless of the gratis warranty term, compensation to opportunity losses
incurred to your company or your customers by failures of ULVAC CRYOGENICS
products and compensation for damages to products other than ULVAC
CRYOGENICS products and other services are not covered under warranty.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-3
2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems, please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump／Super trap Model ：
Cryopump／Super trap Serial No. ：
Refrigerator Model ：
Refrigerator Serial No. ：
Compressor Model ：
Compressor Serial No. ：
Temperature controller／Thermal display Model ：
Temperature controller／Thermal display Serial No. ：
Option Part Model ：
Optional Part Serial No. ：
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5．In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED
the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6．General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-5
Safety Considerations
Our products have been designed to provide extremely safe and dependable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Acaution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

F-6 ULVAC CRYOGENICS INCORPORATED
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C15R Compressor Instructions
ULVAC CRYOGENICS INCORPORATED I
Table of Contents
Safety Instructions························································································ S-1
Disposal Considerations ················································································IW-1
1. COMPRESSOR UNIT DESCRIPTION··························································1-1
1.1 General ···························································································1-1
1.2 Specifications ···················································································1-1
2. INSPECTION··························································································2-1
2.1 Shipping List·····················································································2-1
2.2 Inspect Compressor Unit·····································································2-1
2.3 Inspect Flexible Hoses········································································2-2
2.4 Inspect Cables··················································································2-2
3. INSTALLATION ·······················································································3-1
3.1 Installation························································································3-1
3.2 Connecting Cooling Water Piping··························································3-2
3.3 Cooling Water···················································································3-2
3.4 Connecting the Compressor Unit to the Cryopump····································3-5
3.5 Connecting Electrical Cables································································3-7
4. OPERATION···························································································4-1
4.1 Before Operation···············································································4-1
4.2 Normal Operation ··············································································4-1
5. DISCONNECTION AND STORAGE·····························································5-1
5.1 Disconnecting Flexible Hose ································································5-1
5-2 Storage ···························································································5-2
6. MAINTENANCE ······················································································6-1
6.1 Scheduled and Unscheduled Maintenance··············································6-1
6.2 Adsorber Replacement ·······································································6-1
6.3 Charging Helium Gas ·········································································6-5
Appendix A Trouble Shooting··········································································· A-1
Appendix B Circuit Diagram············································································· B-1
Appendix C Flexible Hose··············································································· C-1
Appendix D Flow Diagram··············································································· D-1
Service Network·························································································· CS-1

Table of Contents
II ULVAC CRYOGENICS INCORPORATED
Figures
Figure 1-1 Dimensions..................................................................................................1-3
Figure 1-2 Major Components......................................................................................1-4
Figure 1-3 Major Components (Controller)...................................................................1-5
Figure 3-1 Maintenance Space(Unit: mm)....................................................................3-1
Figure 3-2 Cooling Water Requirement........................................................................3-4
Figure 3-4 Charge Pressure and Temperature.............................................................3-5
Figure 3-3 Connecting Flexible Hose...........................................................................3-6
Figure 3-4 Static Pressure and Temperature................................................................3-7
Figure 3-5 Compressor Installation...............................................................................3-8
Figure 5-1 Disconnecting Flexible Hose.......................................................................5-2
Figure 6-1 Adsorber replacement.................................................................................6-3
Figure B-2 C15T Wiring Diagram..................................................................................B-5
Figure D-1 Flow Diagram..............................................................................................D-2
Tables
Table 1-1 Compressor Unit Standard Specifications...................................................1-1
Table 2-1 Shipping List................................................................................................2-1
Table 2-2 Optional Parts..............................................................................................2-1
Table 3-1 Recommended Cooling Water for Compressor..........................................3-3
Table 3-2 Input Power Cable Specifications ...............................................................3-8
Table A-1 Troubleshooting Procedures.......................................................................A-1
Table A-2 Operating Log..............................................................................................A-3

ULVAC CRYOGENICS INCORPORATED S-1
Compressor Unit Safety Instructions
Read this manual and follow these safety guidelines before installing, operating, or
servicing the compressor unit.
Our Cryo-U®cryopump and Super trap refrigerator systems make a refrigeration cycle by
circulating high pressure helium gas. Filling helium gas more than the defined amount
does not improve refrigeration capacityappreciably. Instead, if excessive helium gas is
filled and pressure becomes higher than the defined value, gas will release from the safety
valve and its sheet may become clogged with dirt.This may even cause a leak as well as
overloading of the compressor motor.
Never charge helium gas more than specified in Table 1-1.
When charging helium gas or performing helium line decontamination, refer to the
“Maintenance” section and follow the instruction.
The equipments (regulators, charging hoses, adopters, etc.) that can be used at the
pressure of 2.0MPaG or higher are required to perform the above work.
Do not switch between ON and OFF frequently.
The number of startup and shutdown of the compressor motor must be less than 6 times
per hour and ON or OFF condition should be maintained for at least 3 minutes. Starting up
and shutting down too frequently reduces the insulation life of compressor motor and may
result in failure. When operating multiple refrigerators, the number of startup and
shutdown of the refrigerator motors must be also 6 times or less per hour.
Do not use startup and shutdown to control the temperature of the Super Trap.
Please contact us when it is required to control the Super Trap temperature.
3. Do not switch between ON and OFF frequently
1. Do not Charge Compressor with Excessive
Helium
2. Adding helium gas and charging equipments

S-2 ULVAC CRYOGENICS INCORPORATED
Ensure to discharge helium gas and remove either side of the self-sealing couplings from
the used adsorber before disposing.
When the refrigerator system is not in operation, helium gas pressure inside the adsorber
is as high as the charge pressure of the compressor. Disposing the adsorber with helium
gas inside may cause accidents. For example, if the adsorber was thrown in a burner
reactor without discharging helium gas by mistake, the inside pressure of the adsorber
rises as the inside temperature rises and may result in explosion. If the adsorber was
pressed with helium gas remaining inside, it may also cause explosion. Refer to
“Disposal Consideration” for more information.
Use appropriate charging adaptor to remove helium gas safely.
☆We collect used adsorbers. If there is any used absorber, please contact a person in your
local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our
Service Engineering Division. We only accept CTI adsorbers and our adsorbers.
・Power supply voltage must be kept within the allowable range(refer to “Section 1 Table1-1
Compressor Unit Standard Specifications” . Applying more than the allowed voltage
may damage the equipment.
・Install a ground-fault circuit interrupter(rated current: 20A, rated tripping leakage
current:30mA 3φ, rated voltage: 200V).
・Grounding conductor (earth wire) must be connected. (D class grounding (with the
ground resistance of 100Ω)).
・Connect the refrigerator cable and remote cables (signal lines) to the compressor before
connecting the compressor to the power supply. These wiring connections must not be
done when the compressor is powered on. It could lead to a serious accident such as
electric shock and/or damage to the equipment.
・Follow recommended sizes for wires and cables.
・The distance between power line and signal line must be larger than 100mm.
4. Disposal of used adsorber
5. Electrical wiring connections

ULVAC CRYOGENICS INCORPORATED S-3
If there is a water leak, there is a danger of electric shock. Ensure there is no water leak
from the cooling water piping. If the water pressure is too high, a leak may occur in the
cooling water line inside the compressor unit. Adjust and control the cooling water supply
pressure to maintain an allowable upper limit indicated in “Section 3 Figure 3-2 Cooling
Water Requirement”
If water stain or some products accumulate in the water line inside the heat exchanger, heat
exchange effectiveness will be significantly reduced and helium gas temperature will rise,
this may shut down the compressor unit.
We employ the cooling water quality management standard of the Japan Refrigeration and
Air Conditioning Industry Association as a standard value of water quality for compressor
units. Please refer to “Section 3 Table 3-1 Recommended Cooling Water for Compressor”.
The upper limit of the compressor operating ambient temperature is 38 ºC. Do not use the
compressor in unsuitable environments such as dusty, highly humid environments and/or
places that are affected by strong electromagnetic waves. Keep electric terminals free
from dust to avoid electrical leakage and/or a short circuit.
1. Installation and maintenance of the product must be done by personnel in charge of the
equipment or servicing who are familiar with the product structure and risk associated
with the operation of the compressor.
2. Input power supply must be disconnected before opening the cover of the compressor to
avoid the risk of electrical shock.
Also, parts inside the compressor unit are still hot immediately after shutdown. Wait at
least 15 minutes to open the cover to avoid the risk of burn injury.
6. Cooling water
7. Ambient conditions of the compressor unit
8. Maintenance precautions

S-4 ULVAC CRYOGENICS INCORPORATED
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MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1
Do not disassemble, pressurize, heat up a compressor unit, or throw it into fire.
Such actions may lead to explosion of the adsorber inside the compressor unit.
For safe disposal of an adsorber, follow the procedures below.
(1) Remove high pressure helium gas inside the adsorber to reduce the internal
pressure to the level of ambient atmospheric pressure. To do so safely, use tools
appropriate to the adsorber coupling such as our charging adaptor (for cryocooler
maintenance).
(2) Remove the coupling to make it visible that the adsorber has been depressurized
before proceeding to the next step.
Disposal Considerations
Disposal of our products must be done in accordance with applicable national and local
laws and regulations.
The cryopumps or cryocoolers may contain residue of hazardous substances resulting
from actual use. Contact your safety supervisor and follow the instructions to remove
such toxic substances before disposing
We provide Safety Data Sheet (called SDS) of our products upon your request.
Please contact us if necessary.
WARNING
WARNING

IW-2 ULVAC CRYOGENICS INCORPORATED
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Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 1-1
1. COMPRESSOR UNIT DESCRIPTION
1.1 General...................................................................................................1-1
1.2 Specifications..........................................................................................1-1
1.1 General
The compressor unit supplies and circulates helium continuously in the cryopump system
for operation of the refrigerator unit (coldhead).
The C15T compressor unit consists of: 1) compressor motor, 2) cooling system, 3) oil
separation system and 4) adsorber.
See Table 1-1 for the standard compressor specifications.
1.2 Specifications
Table 1-1 Compressor Unit Standard Specifications
◆Model : C15T
Power
Source
Voltage x Phase x Frequency 190 - 220VAC x 3Φx 50Hz
200 - 230VAC x 3Φx 60Hz
Power (in normal operation) (*1) 3.3kW / 4.1kW(50Hz/60Hz)
Cooling Type Water cooled
Cooling Water Requirement
(See Fig.3-2)
Temperature : 5 - 32°C
Flow Rate : 2 - 6L/min
Pressure Drop : 0.04 - 0.17MPa
Ambient Temperature 10 - 38°C
Compressor Winding Resistance 1.63Ω,
Adsorber Replacement Cycle 30,000 hours
Current (normal operation) 13A(200V, 60Hz)
Weight 100kg
Cooling Water Inlet/Outlet Rc3/8 female
Helium Gas SUPPLY/RETURN
Connector 1/2B self-sealing coupling
(*1) The power consumption shows the figure when flexible hose of 3m is used and
helium charge pressure is 1.60MPaG. The power consumption is higher by 10%
for 5 minutes from the startup.

Compressor Unit Description
1-2 ULVAC CRYOGENICS INCORPORATED
◆Helium Gas Pressure: (Room temperature : 20°C)
Charge Pressure(*1) 1.60±0.04 MPaG
Operating Pressure (*2)
SUPPLY side 1.7 – 1.9 MPaG
(*1) The charge pressure may slightly vary depending on the length of flexible hose.
Refer to Chapter 3.4 and adjust the pressure based on the flexible hose length.
(*2) The figure shows the pressure at normal cooling down operation. The pressure may
slightly differ than the table above immediately after the startup. The pressure is
1.7MPaG for 30 seconds from the startup as bypass operation takes place inside the
compressor unit.
◆Applicable Model of Cryopump
CRYO-U10H, U10HL, U10PU, U10PU-S, U10HSP
CRYO-U12H, U12HSP, U12HL (*3)
(*3) For 12-inch models of cryopump, the C15T compressor unit can be used only when the
load is light.
◆Connector Specifications
CONNECTOR MANUFACTURER TYPE
INPUT POWER
NANABOSHI
NCS-304-P
COLD HEAD POWER
CABLE
NANABOSHI NJC-204-PM
METAL CONNECTOR
(For external signal, remote
response)
JAE SRCN6A25-16P

Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 1-3
◆Dimensions
【FRONT】【SIDE】
【REAR】
Figure 1-1 Dimensions
ＰＲＥＳＳＵＲ Ｅ
ＳＵＰＰＬＹ
Model
START
STOP
E.T.M.
C15T
SERIA L No.
No.
MADE IN JAPAN
MODEL
COMPRESSOR UNIT
フレキホースの長さによりヘリウム充てん 圧力が異なります。(以下を目安とします)
ヘリウム圧力の調整はこのパネルを外して
ヘリウム充てん圧力：１．６０ＭＰａ（ｇ ａｇｅ）ａｔ２０℃
ヘリウム充てん口より行なって下さい。
長さ：３ｍ(標準)-----１．６０ＭＰａ（ｇａｇｅ）
長さ：１０ｍ -------１．５３ＭＰａ（ｇａｇｅ）
長さ：１５ｍ -------１．５０ＭＰａ（ｇａｇｅ）
長さ：２０ｍ -------１．４７ＭＰａ（ｇａｇｅ）
アドソーバー（吸着器)の交換記録
積算時間
（ＥＴＭ） 年月日
交換 交換者
時間 ・ ・
・ ・
・ ・
・ ・
・ ・
アルバック・クライオ㈱Tel[phone]
お問合わせは下記へ
時間毎に交換し、下記に記録し
て下さい。
積算計（ＥＴＭ）で、最高３０，００ ０
(64) 601
665
339 580
圧縮機ユニットを輸送するときの注意事項
ＷＡＴＥＲ ＩＮ
ＷＡＴＥＲ ＯＵＴ
ＲＥＳＰＯＮＳＥ
ＲＥＭＯＴＥ
ＩＮＰＵＴ ＰＯＷＥＲ
ＬＯＣＡＬ
ＲＥＭＯＴＥ
ラグを取り付けて下さい。(取扱説明参照）
セルフシールカップリングには、全てキャップ又はプ
全ての接続が終了後、コンプレッサーユニット
の充てん圧力に合わせてください。
ＲＥＴＵＲＮ ＧＡＳ ＳＵＰＰＬＹ ＧＡＳ
２６℃～３２℃ ５Ｌ／ｍｉｎ
１６℃～２５℃ ４Ｌ／ｍｉｎ
５℃～１５℃ ３Ｌ／ｍｉｎ
３３℃以上 使用不可
水温 冷却水流量
ＣＯＬＤ ＨＥＡＤ ＰＯＷＥＲ
57
9676
55
CAUTION
電気配線作業時はINPUT POWER-
コネクターをはずして下さい。
コネクター高電圧
注意
Disconnect the INPUT POWER
before performing
CONNECTOR HIGH VOLTAGE
any troubleshooting procedures.
150
340

Compressor Unit Description
1-4 ULVAC CRYOGENICS INCORPORATED
【FRONT】
【REAR】
ＰＲＥＳＳＵＲＥ
ＳＵ ＰＰ Ｌ Ｙ
Model
START
STOP
E.T.M.
C15T
SER IAL No .
No.
MADE IN JAPAN
MODEL
COMPRES SOR UNI T
フレキホースの長さによりヘリウム充 てん圧力が異なります。(以下を目安とします )
ヘリウム圧力の調整はこのパネルを外し て
ヘリウム充てん圧力：１．６０ＭＰａ （ｇａｇｅ）ａｔ２０℃
ヘリウム充てん口より行なって下さい。
長さ：３ｍ(標準) - - - - -１．６０ＭＰａ（ｇａｇｅ）
長さ：１０ｍ - - - - - - -１．５３ ＭＰａ（ｇａｇｅ）
長さ：１５ｍ - - - - - - -１．５０ ＭＰａ（ｇａｇｅ）
長さ：２０ｍ - - - - - - -１．４７Ｍ Ｐａ（ｇａｇｅ）
アドソーバー（吸着器)の交換記録
積算時間
（ＥＴＭ） 年月日
交換 交換者
時間 ・ ・
・ ・
・ ・
・ ・
・ ・
アル バック ・ クラ イオ ㈱Tel[phone]
お問 合わせ は 下記 へ
時間毎に交換し、下記に記録し
て下さい 。
積算計（ＥＴＭ）で、最高３０，０００
積算計
運転スタートスイッチ
運転ストップスイッチ
高圧ヘリウムガス圧力計充てん弁（口）
ヘリウムガス充てん弁と
充てん口は、前面パネル
の裏側にあります。
コントロールパネル
圧縮機ユニット を輸送する ときの注意事項
ＷＡＴＥＲ ＩＮ
ＷＡＴ ＥＲ Ｏ ＵＴ
ＲＥＳＰＯＮＳＥ
ＲＥ ＭＯ ＴＥ
ＩＮＰＵＴ ＰＯＷＥＲ
ＬＯＣＡＬ
ＲＥＭＯＴＥ
ラグを取り付けて下 さい。(取扱説明 参照）
セルフシールカップ リングには 、全てキャップ又 はプ
全ての接続が終 了後、コン プレッサーユニッ ト
の充てん圧力に 合わせてく ださい。
ＲＥＴＵＲＮ ＧＡＳ ＳＵ ＰＰ ＬＹ Ｇ Ａ Ｓ
２６℃～３２℃ ５ Ｌ／ｍｉｎ
１６℃～２５℃ ４ Ｌ／ｍｉｎ
５℃～１５℃ ３Ｌ／ ｍｉｎ
３３℃以上 使用不可
水温 冷却水流量
ＣＯ ＬＤ ＨＥＡＤ ＰＯＷＥＲ
CAUTION
電気 配線作 業時 は INPUT POWER-
コネクタ ーを は ずし て下さ い 。
コネ クター 高電 圧
注意
Disconn ect th e INPU T POWER
before performing
CONNECTOR HIGH VOLTAGE
any troubleshooting procedures .
外部信号、リモートコネクタ
電源コネクタ
コントロールパネル
高圧ヘリウムガス継手
(SUPPLY)
低圧ヘリウムガス継手
(RETURN)
冷却水出口(Rc3/8)
冷却水入口(Rc3/8)
リモート/ローカル切換スイッチ
冷凍機コネクタ
コントローラ
Charging valve and
fitting are on the back
of the front panel.
Control Panel
Elapsed Time Meter
Helium Charge Valve
Operation Start
Cooling Water Inlet (Rc3/8)
Cooling Water Outlet (Rc3/8)
Operation St
op
Heliu
m Supply Pressure Gauge
Remote/Local switch
External signal,
Remote connector
Power Connector
Control Panel
Coldhead Connector
Controll
er
Helium Supply Coupling
He
lium Return Coupling
Figure 1-2 Major Components