
ULVAC CRYOGENICS INCORPORATED III
Table of Contents
Safety Instructions····························································································1
Disposal Considerations····················································································2
1. Unpacking and Inspection·············································································3
2. Transportation····························································································3
3. Compressor Description···············································································4
3.1 Specifications ··························································································· 4
3.2 Overview ································································································· 5
3.3 Instructions for the Electrical System ···························································11
4. Installation······························································································· 17
4.1 Conditions for Installation···········································································17
4.2 Installation ······························································································18
5. Operation ································································································ 22
5.1 Start Operation ························································································22
5.2 Stop Operation·························································································23
5.3 Checking Normal Operation ·······································································23
6. Maintenance···························································································· 24
6.1 Scheduled Maintenance ············································································24
6.2 On-Site Repair·························································································26
7. Troubleshooting························································································ 28
8. Accessories and Parts ··············································································· 31
8.1 Standard Accessories·················································································31
8.2 Optional Parts··························································································31
9. Electrical Diagram····················································································· 32
10. Warranty ································································································· 33