Ulvac Band Heater User manual

D/N.MGRBHSIE,2019FY04 ULVAC CRYOGENICS INCORPORATED
Band Heater
(Silicon Rubber Heater)
Instruction Manual
Export Control Policy
We recommend that ALL customers be sure to follow all
rules and regulations such as Foreign Exchange and
Foreign Trade Law when exporting or reexporting our
products.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-1
Introduction
Thank you for choosing our products. This instruction manual gives
information and precautions on handling, installation, operation, and
maintenance of the product.
This product is intended for use by qualified personnel who recognize shock
hazards and are familiar with the safety precautions required to avoid possible
injury. To ensure proper use of this product, read this instruction manual
carefully and keep this manual close at hand so that you can use for reference
during operation.
If you purchased our other products and/or optional devices with this product,
read relevant instruction manuals carefully.
1. About the personnel who are involved in handling our products
All personnel involved in handling our products should take a general safety
education and training that is officially accepted in the country where our product
is used. The personnel are also required to have specialized knowledge/skills and
qualification on the electricity, the machinery, the cargo handling, and the vacuum.
Especially, the personnel should be familiar with handling a cryopump in order to
use it safely. Since we offer a training session (which is subject to fees) as needed
for people who use cryopumps for the first time, please do not hesitate to contact
our Service Engineering Division to join the training session.
2. Warranty
2.1 Gratis warranty period and Warranty coverage
【Gratis warranty period】
Note that an installation period of less than one year after installation in your
company or your customer’s premises or a period of less than 18 months (counted
from the date of production) after shipment from our company, which is shorter, is
selected.
【Coverage】
(1) Failure diagnosis
As a general rule, diagnosis of failure should be done on site by customer.
However, ULVAC CRYOGENICS or our service network can perform this service
for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED
of the breakdown is found to be a fault of ULVAC CRYOGENICS.
(2) Damage during transportation
When damage by delivery/transportation is admitted, the product will be
repaired free of charge within the range of the guarantee expressed in the sales
contract.
(3) Breakdown repairs
There will be a charge for breakdown repairs, replacements and on-site visits
for the following seven conditions. In those cases the cost shall be your own
expense even though the product is within the warranty period.
①Breakdowns due to improper storage or handling, careless accident, software
or hardware design by the customer.
②Breakdowns due to modifications of the product without consent of the
manufacturer.
③Breakdowns due to maintenance of the product without authentic parts or
breakdowns resulting from using the product outside the specified
specifications of the product.
④Breakdowns due to contamination or corrosion caused by user’s use
conditions.
⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,
lightning, salt damage, and so on) , environmental pollution, irregular voltage,
and /or usage of undesignated power source.
⑥Breakdowns that are outside the terms of warranty.
⑦Consumables and/or replacement service.
Since the above services are limited to within Japan, diagnosis of failures, etc are
not performed abroad. If you desire the after service abroad, please contact
ULVAC CRYOGENICS and consult us for details in advance.
2.2 Exclusion of opportunity loss from warranty liability
Regardless of the gratis warranty term, compensation to opportunity losses
incurred to your company or your customers by failures of ULVAC CRYOGENICS
products and compensation for damages to products other than ULVAC
CRYOGENICS products and other services are not covered under warranty.

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2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems, please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump／Super trap Model ：
Cryopump／Super trap Serial No. ：
Refrigerator Model ：
Refrigerator Serial No. ：
Compressor Model ：
Compressor Serial No. ：
Temperature controller／Thermal display Model ：
Temperature controller／Thermal display Serial No. ：
Option Part Model ：
Optional Part Serial No. ：
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5．In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED
the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6．General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.

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Safety Considerations
Our products have been designed to provide extremely safe and dependable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Acaution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

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MZIW002E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1
Disposal Considerations
Disposal of our products must be done in accordance with applicable national and local
laws and regulations.
We provide Safety Data Sheet (SDS) of our products upon your request.
Please contact us if necessary.
WARNING
The cryopumps or cryocoolers may contain residue of hazardous substances resulting
from actual use. Contact your safety supervisor and follow the instructions to remove
such toxic substances before disposing.

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Band Heater (Silicon Rubber Heater) Instruction Manual
ULVAC CRYOGENICS INCORPORATED Ⅰ
TABLE OF CONTENTS
1. Features.......................................................................................................................... 1
2. Specifications ................................................................................................................. 1
3. Temperature Characteristic.......................................................................................... 2
4. Operating Life................................................................................................................ 2
5. Connector Specifications ............................................................................................... 2
6. Installation..................................................................................................................... 3
7. Operation........................................................................................................................ 3
8. Troubleshooting.............................................................................................................. 5
FIGURES & TABLES
Figure 1 Standard drawing .................................................................................... 1
Figure 2 Standard temperature property ............................................................. 2
Figure 3 Soldering positions of the pin connector ................................................ 2
Table 1 Electricity specifications.......................................................................... 1
Table 2 The pin connector list .............................................................................. 3
Table 3 Fault diagnosis......................................................................................... 5

Band Heater（for CRYO-U®22P-1）Instruction Manual
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Band Heater (Silicon Rubber Heater) Instruction Manual
ULVAC CRYOGENICS INCORPORATED 1
1. Features
・When this product is used in the heating period of the cryopump and the super trap, the
moisture that builds up from the dew condensation prevention and heating period are
effectively evaporated, shortening the roughing time. Compared to the natural heating
period, it is possible to shorten the regeneration time by about 1/3 to 1/2 the time.
・The temperature regulation of this products temperature utilizes a self-recovery
bimetallic thermostat. Also, as a safeguard, a thermal fuse is used.
・A customized version is also available with silicon sponge insulation (5mm or 10mm).
・It is possible to design together with the form of the case.
2. Specifications
Table 1 Electricity specifications
Specifications
Rated Voltage
AC200V ±10%×1φ
Heat Capacity
100W
～
1500W
(Different depending on model and specs of cryopump
and super trap)
Thermostat Operating
Temperature
(Standard Specification)
80℃±5℃OFF, 70℃±5℃ON
Temperature Fuse Operating
Temperature
(Standard specification)
184℃※１
I Insulation Resistance
DC500V, 100MΩ or more
Dielectric Voltage
AC1500V, 1 minute
※1Cases of 152℃, 167℃, 192℃for customize.
<Components>
①Heater body
②Temperature fuse
③Thermostat
④Springs
⑤Warning label
⑥Soldering type tag
⑦Power source connector (male)
⑧Power source connector (female)(attachment)
Figure 1 Standard drawing
ｘｘｘ
ｘｘｘ
警 告
1234
56
7
8
Or
Connector type:NJC Connector type:NCS

Band Heater (Silicon Rubber Heater) Instruction Manual
2ULVAC CRYOGENICS INCORPORATED
3. Temperature Characteristic
Figure 2 Standard temperature property
The surface temperature of the heater becomes approximately 80℃in the vicinity of the
thermostat at operation. Please take means to display warning labels and prevent burns by
preparing heat insulant as necessary.
4. Operating Life
・The operating life points to electrical deterioration (wire break, conductivity defect,
insulation defect). Generally, the operating life is considered over when there is junction
failure in the switching operation unit (bimetal) of the thermostat.
・This is a high reliability product with a nominal 100 thousand switches possible.
However, the operating life will differ depending on environment and frequency of use.
5. Connector Specifications (Nanaboshi Electric Mfg.co.,Ltd products)
・The standard specification for metal outlets is 3 pins
(2 pins are customized specifications).
・There are two types of configuration for the form: NJC, NCS.
Refer to table 2 for more details
Figure 3 Soldering positions of the pin connector
Thermostat On 70
Heater Surface Temperature(
℃
)
Temperature fuse activation
184
Dotted line region:
thermostat failure
Room temperature
１２２３
１
２Ｐｉｎｓ ３Ｐｉｎｓ
Ｈｅａｔｅｒ Ｈｅａｔｅｒ
WARING
Thermostat Off 80
20
Time (min)

Band Heater (Silicon Rubber Heater) Instruction Manual
ULVAC CRYOGENICS INCORPORATED 3
Table 2 The pin connector list
6. Installation
1) Cover the pump or trap case surface with the heater.
2) Pinch the spring with pincers, place on hook on opposite side and deliberately twist
it around hook.
3) Solder the electric cable (customer prepared) to the provided power side connector.
Be sure to secure the soldered portion with the contraction tube.
For the electric cable, use shop bought standard cable (specification cable).
Also, be certain to affix with the clamp portion of the power source connector so that
the power source cable does not move.
・The soldering type tag (SCN or SAC) in the vicinity of the power connector shows the use
of Pb-free solder on the soldered portion. Do not use together with lead solder.
・This heater is made by covering the heating element (nichrome wire) with a silicon rubber
sheet. Do not cut or perform hole drilling.
7. Operation
（１） After shutting off the operation of the cryopump and super trap, switch on the
heater.
（２） Shut off heater electricity when the temperature of the inner kit (panel, baffle,
shield, etc.) of the cryopump or the super trap reaches the predefined
temperature.
As a rough indication, keep the temperature at 273K (０℃) when the volume of
water is little, and 300K (30℃) when the volume of water is large.
Especially, when the water volume is large it is recommended that the electricity
remain on until the roughing complete.
Terminal type
Power source
(Heater side model number)
Power source
( Power side model Number)
(attachment)
3pins
NCS-253-Ad
NCS-253-P
3pins
NCS-303-Ad
NCS-303-P
2pins
NJC-242-AdM
NJC-242-PF
2pins
NJC-243-AdM
NJC-243-PF
CATION

Band Heater (Silicon Rubber Heater) Instruction Manual
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・
Maximum allowable temperature of our refrigerator unit is 70
℃
. If it exceeds 70
℃
, inside of the
refrigerator may be damaged by the heat and a refrigerator replacement may be needed. If you
use a heater to warm up a pump or trap, make sure to check and control the heater temperature
so that the temperature of the cold stages of the refrigerator does not exceed 70℃.
・The temperature of the inner kit may continue to rise from residual heat even after the electricity to
the heater is shut off.
・Electricity is shut off when the thermostat is switched to OFF. Electricity will not return until the
surface temperature is below the parameter, however it is not a wire break, so take precaution
when controlling.
・Compared to temperature increase conducted by injecting inert gas in atmospheric pressure, in the
event that temperature is increased in a vacuum, it may take extra time as the heating is done
solely by the radiation of the heater.
・Although the heater surface is treated with drip-proof insulation varnish, there is the possibility that
moisture will enter the heater interior in the event of the heater surface freezing because of latent
heat by liquefied gas generated in the case interior at time of temperature increase, or when it is
used in conditions of excessive condensation. This can deteriorate the performance of the
insulation.
・This product contains siloxane bond（－Si－O－Si－）, at times causing low molecular siloxane gas
to emerge. Although thermal treated (age treated) beforehand, a particular odor may be noticed
when first used. Regardless, there is no defect in the product.
・Always use a separate circuit breaker exclusively for heaters when used with another device.
CAUTION

Band Heater (Silicon Rubber Heater) Instruction Manual
ULVAC CRYOGENICS INCORPORATED 5
8. Troubleshooting
Table 3 shows fault diagnosis and corrective actions of the band heater.
If you need any assistance, please contact us.
Table 3Fault diagnosis
Fault
Possible Cause
Corrective Action
Circuit breaker cuts off
power
・Wire break
・Electric leakage
・Short
①
Condensed water
penetrates the thermal
fuse
or it is frozen
including the
pump case
as pumped gases liquefy.
②Electric leakage.
③The broken
wire is
protruding from inside
of the heater and
touching the pump case.
①
It is drip proof (varnish
treatment)
type however if it
condenses too much, it should
not be used. If it freezes, more
frequent regeneration or
reconsideration of heater
specification is needed.
②
Insulation failure and
dangerous. Do not use. Heater
unit replacement is required.
③
Dangerous. There is a risk of
electric shock hazard. Heater
unit replacement is required.
Temperature does not
increase, or it increases
very slowly.
①
Disconnection of the
wire.
②
Wire break of heater wire
heater.
･Breakdown of thermostat
･Breakdown of temperature
fuse
①
Disassemble the connector to
check if there is any damage
at the soldering part.
If there is, please contact us or
service network nearby.
When soldering, be careful to
check the types of soldering
and use the same type.
②
Exchanging heaters to a new
one is necessary as adjustments
are not possible. Exchanging
heaters to a new one is necessary
as adjustments are not possible.

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Service Network
MZCS001E,2021DR10 ULVAC CRYOGENICS INCORPORATED CS-1
SERVICE NETWORK
For technical support, servicing or additional contact information,
visit us at www.ulvac-cryo.com.
ULVAC CRYOGENICS INC. www.ulvac-cryo.com
1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan
<Sales> Tel: [phone]
<Service Engineering Division> Tel: [phone]
Fax: [phone]
ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr
107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si,
Gyeonggi-Do, Korea, 17812
Tel: [phone]
Fax: [phone]
ULVAC CRYOGENICS (NINGBO) INC. www.ulvac-cryo.com
No.888 Tonghui Road, Jiangbei District, Ningbo, China, 315020
Tel: [phone]
Fax: [phone]

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