Varian L6280 User manual

DRAFT 9/21/04
INSTRUCTION MANUAL
vacuum technologies
Block Valves
All Sizes
Manual No. 699912040
Revision L
September 2004

DRAFT 9/21/04
Copyright 2004
Vacuum Technologies
Block Valves: Instruction Manual for All Sizes
ConFlat Flange is a registered trademark of Varian, Inc.
Klamp-Flange and KF Clamp are registered trademarks of Varian, Inc.
Krytox is a registered trademark of DuPont Company
Loctite is a registered trademark of Loctite Corporation.
Scoth-Brite is a trademark of 3M.
Viton is a registered trademark of E. I du Pont de Nemours and Company.

Block Valves: Instruction Manual for All Sizes
DRAFT 9/21/04
iii
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-
ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-
ment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-
standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer’s expense; in addition, a charge for testing and exam-
ination may be made on Products so returned.
3/1/00

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Block Valves: Instruction Manual for All Sizes
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Contents
Preface ............................................................................................................................................. xi
Document Conventions ............................................................................................................... xi
Contacting Vacuum Technologies ................................................................................................ xi
Declaration of Conformity
Introduction and Installation ........................................................................................................ 1-1
Installation .................................................................................................................................. 1-3
Electrical Connections to Solenoid ........................................................................................ 1-4
Operation ................................................................................................................................... 1-5
Manually-Operated Valves.................................................................................................... 1-5
Pneumatically-Operated Valves ............................................................................................ 1-5
Maintenance............................................................................................................................... 1-6
Manual Valves ...................................................................................................................... 1-6
Pneumatic Valves................................................................................................................1-11
Appendix A. Technical Specifications ....................................................................................... A-1
Appendix B. Spare Parts Kits/Accessories and Replacement Parts ...................................... B-1
Request for Return Health and Safety Certification
Sales and Service Offices

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vii
Block Valves: Instruction Manual for All Sizes
DRAFT 9/21/04
List of Figures
Figure Caption Page
1-1 KF Coupling......................................................................................................................... 1-3
1-2 Solenoid Assembly............................................................................................................... 1-4
1-3 Solenoid Operation.............................................................................................................. 1-5
1-4 Small and Large Manual Block Valve – Exploded View........................................................ 1-6
1-5 Small and Large Pneumatic Block Valve – Exploded View ................................................. 1-11
1-6 Positioning the Quad Ring in the Air Cylinder....................................................................1-15
1-7 Removing the Stem from the Seal Disc............................................................................... 1-15
1-8 Position of Quad Ring In its Groove................................................................................... 1-17
1-9 Position Indicator Assembly Exploded View....................................................................... 1-19
1-10 Wiring Diagram – Position Indicator .................................................................................. 1-23

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ix
Block Valves: Instruction Manual for All Sizes
DRAFT 9/21/04
List of Tables
Table Title Page
1-1 Valve Ordering Information NW16 – NW25........................................................................1-2
1-2 Valve Ordering Information NW50 – NW80........................................................................1-2
1-3 Small Block Valves: Manual Valve Parts List ........................................................................ 1-7
1-4 Large Block Valves: Manual Valve Parts List ........................................................................ 1-7
1-5 Small Valves: Pneumatic Valve Parts List ........................................................................... 1-12
1-6 Large Block Valves: Pneumatic Valve Parts List.................................................................. 1-13
1-7 Position Indicator Parts List ................................................................................................1-20
1-8 Connector Base Wiring ...................................................................................................... 1-21
A-1 Block Valve Specifications ..................................................................................................A-1
B-1 Spare Part Kits .....................................................................................................................B-1
B-2 KF Clamp®and Centering Ring Ordering Information .........................................................B-2

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Block Valves: Instruction Manual for All Sizes
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xi
Preface
Document Conventions
This manual uses the following standard safety protocols:
WARNING The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
CAUTION The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
NOTE The notes contain important information.
This product must only be operated and maintained by trained personnel.
Before operating or servicing equipment, read and thoroughly understand all operation/
maintenance manuals provided by Vacuum Technologies. Be aware of the hazards
associated with this equipment, know how to recognize potentially hazardous conditions,
and how to avoid them. Read carefully and strictly observe all cautions and warnings. The
consequences of unskilled, improper, or careless operation of the equipment can be serious.
In addition, consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Vacuum Technologies office.
Contacting Vacuum Technologies
In the United States, you can contact Vacuum Technologies Customer Service at
1-800-8VARIAN.
Internet users:
❑Send email to Customer Service & Technical Support at
vpl.customer[email protected]
❑Visit our web site at www.varianinc.com/vacuum
❑Order on line at www.evarian.com

Varian, Inc.
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
Frederick C. Campbell
Operations Manager
Vacuum Technologies
We
Wir
Nous
Nosotros
Wij
Noi
Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Vacuum Technologies
Lexington, Massachusetts, USA
Varian, Inc.
Aluminum GateKeeper Valves NW100, NW160, NW200, NW250,
Aluminum Butterfly Valves NW63, NW100, NW160, NW200, NW250,
Aluminum Block Valves NW16, NW25, NW40, NW50, NW63, NW80,
Stainless Steel Block Valves NW16, NW25, NW40,
Stainless Steel Tube Valves NW16, NW25, NW40
98/37/EEC, Machinery Directive
EN 60204-1. . . . . . . . . . . . . . . . . . . Electrical equipment of industrial machines; general requirements
April 2002
Declaration
of
Conformity

1-1
Block Valves: Instruction Manual for All Sizes
DRAFT 9/21/04
Section 1. Introduction and Installation
Vacuum Technologies small right-angle and in-line block valves are compact
bellows-sealed valves for use in roughing and high vacuum applications. The valve body is
made of aluminum or stainless steel, and incorporates Klamp-Flange®, CFF or tube end
fittings to provide reliable and convenient vacuum connections. The main seal and all
vacuum seals are Viton®.
The valves are available in manually-operated and pneumatically-operated versions. The
pneumatic valve is also available with a position indicator. The position indicator delivers
an electrical output signal when the valve cycles, and is user-set in either the normally-open
or normally-closed position.
The NW 16 and NW 25 valves are identical except for their port sizes; therefore, all internal
spare parts are interchangeable. The NW 40 valve, however, is a larger-bodied valve
requiring different internal components.
The NW 50, NW 63 and NW 80 are available only as stainless steel, right-angle valves.
This manual contains the necessary information to install, operate and maintain the Vacuum
Technologies block valves listed in Table 1-1 and Table 1-2 on page 1-2.
Refer to the following sections:
❑“Installation” on page 1-3
❑“Operation” on page 1-5
❑“Maintenance” on page 1-6

Block Valves: Instruction Manual for All Sizes
1-2
DRAFT 9/21/04
Table 1-1 Valve Ordering Information NW16 – NW25
Valve Material
Right-Angle,
All Models
Part No.
In-Line,
All Models
Part No.
Manually-operated Aluminum L6280 L9180
Stainless Steel L9480 L9580
Pneumatically-operated
(with or without
solenoid,
without position
indicator)
Aluminum L6281 L9181
Stainless Steel L9481 L9581
Pneumatically-operated
(with or without
solenoid,
with position indicator)
Aluminum L6282 L9182
Stainless Steel L9482 L9582
Table 1-2 Valve Ordering Information NW50 – NW80
Valve Material
Right-Angle,
All Models
Part No.
Manually-operated Aluminum L72803
Pneumatically-operated
(with or without
solenoid,
with position indicator)
Aluminum L72823

Block Valves: Instruction Manual for All Sizes
DRAFT 9/21/04
1-3
1.1 Installation
All valves are installed in a vacuum system by brazing welding, Conflat®gaskets, or
Klamp-Flange®or KF couplings.
KF coupling Consists of two symmetrical flange fittings (one of which is on the
valve body), a centering ring, an O-ring and a flange clamp
(Figure 1-1).
Figure 1-1 KF Coupling
NW 50 valves Installed in a vacuum system by means of a Klamp® (Quick Clamp)
flange or ISO coupling.
ISO 63 and ISO 80
valves
Installed using an ISO coupling consisting of two symmetrical
flanges, a centering ring, and claw clamps.
To install the valve:
1. Wipe the O-ring clean and grease it very lightly with Dupont Krytox®GPL2O7 vacuum
lubricant (Part No. 695400010) before installation.
2. Assemble the KF coupling and tighten the wing nut or ratchet firmly to ensure proper
compression of the O-ring seal.
NOTE The pneumatic valve uses a 1/8 NPT inlet fitting and requires a
minimum of 80 psig air pressure to operate.
3. Install a filter and lubricator in the air inlet line (pneumatic valve only).
O-ring
Flange Fitting
Flange Clamp
Centering Ring
Flange Fitting

Block Valves: Instruction Manual for All Sizes
1-4
DRAFT 9/21/04
1.1.1 Electrical Connections to Solenoid
To supply power to the solenoid:
1. Remove the connector from the solenoid by removing the holding screw and pulling the
connector away from the solenoid.
2. Remove the terminal block from its housing by inserting a small, flat-head screwdriver
in the slot provided at the terminal base and prying the housing off (Figure 1-2).
Figure 1-2 Solenoid Assembly
3. Feed the power line through the housing grommet and connect the three leads to the
terminal contacts which are clearly labeled 1, 2, and (ground).
4. Push the terminal block back into the housing and snap it in place.
NOTE The housing can be rotated 360° in 90° increments so that the
power line exits the connector in the most convenient
direction.
5. Plug the connector back into the solenoid and tighten the holding screw.
Holding Screw
Housing Grommet
Terminal Block
Housing

Block Valves: Instruction Manual for All Sizes
DRAFT 9/21/04
1-5
1.2 Operation
This section discusses the operation of:
❑“Manually-Operated Valves”
❑“Pneumatically-Operated Valves”
1.2.2 Manually-Operated Valves
The manual valve operates by means of a hand-actuated knob.
To close the valve:
❑Turn the knob in a clockwise direction. To properly compress the main O-ring seal
and obtain a good vacuum seal, turn the knob clockwise until a slight resistance is
felt, then firmly torque the knob approximately ¼ turn.
To open the valve:
❑Turn the knob counterclockwise until the valve is fully open to ensure maximum
conductance.
1.2.3 Pneumatically-Operated Valves
Pneumatic valves are spring-closed air-opened valves.
When electric power is:
❑Supplied to the solenoid valve, air is supplied to the cylinder and the valve opens.
❑Removed, the valve closes (Figure 1-3).
Figure 1-3 Solenoid Operation
Press Center
for Manual Operation
Air Supply for
Normally Closed Operation
ToValve
Exhaust

Block Valves: Instruction Manual for All Sizes
1-6
DRAFT 9/21/04
1.3 Maintenance
This section discusses the maintenance of:
❑“Manual Valves”
❑“Pneumatic Valves” on page 1-11
1.3.4 Manual Valves
Manual valve maintenance consists of:
❑“Disassembly and Cleaning” on page 1-8
❑“Reassembly” on page 1-10
Figure 1-4 shows an exploded view of the small manual block valve and the large block
valve. The numbers of the small block valve correspond to items in Table 1-3. The numbers
of the large block valve correspond to items in 1-4.
Figure 1-4 Small and Large Manual Block Valve – Exploded View
Bellows/Stem
1
2
4
5
6
9
8
7
3
5
1
2
4
6
7
10
9
8
3
10
11
12
13
Assembly
Small Manual Large
Block Valve Block Valve

Block Valves: Instruction Manual for All Sizes
DRAFT 9/21/04
1-7
Table 1-3 Small Block Valves: Manual Valve Parts List
Description
Vacuum Technologies Part No. or Equivalent
Item NW16 or NW25 NW40
1 Knob L5967301 (aluminum) L5698301 (aluminum)
L8819001 (plastic) L8818001 (plastic)
2 Set Screw #10-32 x 5/8 Ig #10-32 x 1/2 Ig
3 Screw, Allen head cap #10-32 x 5/8 Ig #10-32 x ¾ Ig
4 Top Plate L5491001 L5686001
5 Valve Stem L5490001 L9684001
6 Bellows Nut 85073001 85073001
7 Bellows and Seal Disc L8739301 L8738301
8 O-ring, Viton Parker No.2-213 Parker No.2-223
9 O-ring Viton Parker No.2-031 Parker No 2-039
10 Valve Body – –
Table 1-4 Large Block Valves: Manual Valve Parts List
Description
Vacuum Technologies Part No. or Equivalent
Item NW50 ISO63 ISO80
1 Knob L8819001 (plastic) L8818001 (plastic) L8818001 (plastic)
2 Set Screw #10-32 x 1/2 lg #10-32 x 1/2 lg #10-32 x 1/2 lg
3 Screw Socket, Head Cap #10-32 x 3/4 lg #10-32 x 3/4 lg #10-32 x 3/4 lg
4 Top Plate L6606001 L6606001 L7283001
5 Bellow/Valve Stem
Assembly
Ref Ref Ref
6 Valve Stem L6608001 L6608001 L6606001
7 Bellows Nut L6609001 L6609001 L6609001
8 Bellows L6603001 L6603001 L6603001
9 O-ring, Bellows, Viton 66892014 66892014 66892014
10 Seal Disc L6602001 L6985001 L9972001
11 O-ring, Seal Disc, Viton 660892227 660892231 660892234
12 O-ring, Bonnet, Viton 66892043 660892043 660892043

Block Valves: Instruction Manual for All Sizes
1-8
DRAFT 9/21/04
1.3.4.1 Disassembly and Cleaning
Refer to Figure 1-4 on page 1-6 for this procedure.
NOTE In this procedure, the components (shown in Figure 1-4,
identified in Table 1-3 and Table 1-4) are enclosed in
parentheses using the following convention:
❑A single number refers to both the small and large valve.
❑In a set of numbers separated by a semi-colon:
❑The first item number identifies an item in the
small block valve.
❑The second item number identifies an item in the
large block valve.
To disassemble and clean the valve:
1. Loosen the set screw (2) with a 3/32 Allen wrench and pull the knob (1) off the valve
stem (5; 6).
2. Remove the four Allen head cap screws (3) and pull the top plate (4) and bellows/valve
stem assembly (7, 8, 9, and 10; 5) from the valve body as one unit. If only the main seal
O-ring (8) is to be replaced, do so at this time and then reassemble the valve
(“Reassembly” on page 1-10).
3. Holding the valve stem (5; 6) of the bellows/valve stem assembly ((8, 9, and 10; 5)
between the fingers of one hand, unscrew the top plate (4) with the other hand and
remove the plate from the valve stem (5; 6).
The bellows/valve stem assembly (7, 8, 9, and 10; 5) is treated as a single unit; its
separate components, however, are listed on the parts list.
4. Remove the O-ring (8; 11) from the seal disc and the O-ring (9; 12) from the valve body
(10; 13). Use plastic tweezers or a similar non-destructive instrument to remove the
O-rings so as not to mar O-ring groove surfaces.
13 Valve Body L6600001 L9970401 L9971401
Valve Body,
Nickel-plated
L6600003 L9970003 L9971003
Table 1-4 Large Block Valves: Manual Valve Parts List (Continued)
Description
Vacuum Technologies Part No. or Equivalent
Item NW50 ISO63 ISO80