Varian TriScroll 300 Series Operating and safety instructions

DRAFT 12/21/04
vacuum technologies
TriScrollTM 300
Series
Dry Scroll
Vacuum Pump
Manual No. 699904280
Revision H
December 2004
TIP SEAL REPLACEMENT
MANUAL
[phone]
idealvac.com
idealvac.com

DRAFT 12/21/04
Copyright 2004
Vacuum Technologies
TriScroll™300 Series
Dry Scroll Vacuum Pump
TriScroll is a trademark of Vacuum Technologies.
Loctite and PST are registered trademarks of Loctite Corporation.
Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 12/20/04
iii
Table of Contents
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
Safety Considerations . . . . . . . . . . . . . . . . . . . . . vi
Related TriScroll Manuals . . . . . . . . . . . . . . . . . viii
Maintenance and Tool Kits . . . . . . . . . . . . . . . . viii
Factory Service Options . . . . . . . . . . . . . . . . . . . ix
Contacting Vacuum Technologies . . . . . . . . . . . . ix
Tip Seal Replacement . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . 1
Required Equipment . . . . . . . . . . . . . . . . . . . . . . 1
Tip Seal Replacement Kit . . . . . . . . . . . . . . . . 2
Tip Seal Tool Kit . . . . . . . . . . . . . . . . . . . . . . . 3
TriScroll 300 Disassembly . . . . . . . . . . . . . . . . . . 4
Remove the Outboard Housing . . . . . . . . . . . . 4
Remove the Inboard Housing and the Orbiting
Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 6
Disassemble the Inboard Housing and the Orbiting
Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 7
Scroll Cleaning . . . . . . . . . . . . . . . . . . . . . . . 10
TriScroll 300 Reassembly . . . . . . . . . . . . . . . . . 11
Putting the Pump Back into Service . . . . . . . . . . 18

TriScroll 300 Dry Scroll Vacuum Pump
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Varian, Inc.
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
Frederick C. Campbell
Operations Manager
Vacuum Technologies
We
Wir
Nous
Nosotros
Wij
Noi Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Vacuum Technologies
Lexington, Massachusetts, USA
Varian, Inc.
98/37/EEC, Machinery Directive
EN 1012-2:1996 Compressors and Vacuum Pumps Safety Requirements; Part 2 Vacuum Pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements
73/023/EEC, Low Voltage Directive
EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test
TriScroll Series Vacuum Pump
Declaration
of
Conformity
March 2003

vi
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 12/20/04
Preface
This manual provides the information you need to successfully perform tip seal replacement on your
Vacuum Technologies TriScrollTM Dry Vacuum Pump. Tip seal replacement is generally is
recommended when the pump base pressure has risen to an unacceptably high level for your
application. If you have questions that are not addressed in this manual, please contact the nearest
Vacuum Technologies service facility listed on the rear cover of this manual.
Safety Considerations
READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS.
The following format is used in this manual to call attention to hazards:
Maintenance personnel must be aware of all hazards associated with this equipment. They must
know how to recognize hazardous and potentially hazardous conditions, and know how to avoid
them. The consequences of work performed by unskilled or improperly trained maintenance personnel,
or careless operation of the equipment employed in the specified maintenance procedures can be
serious. Every maintenance person must read and thoroughly understand the materials discussed and
the instructions provided in this manual, as well as any additional information provided by Vacuum
Technologies.
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.

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TriScroll 300 Dry Scroll Vacuum Pump
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All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local,
state/province, and national agencies regarding specific requirements and regulations. Address any
safety, operation, and/or maintenance questions to the nearest Vacuum Technologies location.
WARNING Disconnect power from the
TriScroll 300 before performing any
maintenance procedure.
Allow the pump to cool before perform-
ing any maintenance procedure.
Approximate cool-down time is one to
two hours.
CAUTION Wipe all O-rings clean with a lint-free
cloth before installation to ensure that
no foreign matter is present to impair
the seal.
Do not use alcohol, methanol or other
solvents on O-rings. To do so causes
deterioration and reduces their ability to
hold a vacuum.
If applicable, apply a small amount of
Krytox®GPL 224 grease and wipe the
O-rings “shiny” dry.
NOTE Vacuum Technologies recommends
replacing all O-rings during routine
maintenance or during any mainte-
nance procedure requiring that O-rings
be removed.
WARNING The TriScroll 300 weighs 26.4 kg
(58 lbs). To avoid injury, use proper lift-
ing techniques when moving the pump.

viii
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 12/20/04
Related TriScroll Manuals
Manuals related to the installation and operation, pump module replacement, and major maintenance
for the TriScroll 300 series pumps are listed in the following table:
Maintenance and Tool Kits
Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A
description of each kit and ordering information is provided in the following table:
Title Applicable TriScroll Model Part Number
Major Maintenance Manual All TriScroll 300 Series Models 699904260
Pump Module Replacement All TriScroll 300 Series Models 699904285
Installation and Operation Manual All TriScroll 300 Series Models 699904265
Description Contents Applicable TriScroll Model Part Number
Major Maintenance Tool Kit All bearings, bearing
seals, bearing lubricant,
O-rings, and tip seals
required to rebuild
TriScroll 300 Series
pumps.
All TriScroll 300 Series models PTSS0300MK
Maintenance Tool Kit All fixtures and tools
required to perform any
maintenance on
TriScroll 300 Series
pumps.
All TriScroll 300 Series models PTSS0300TK
Tip Seal Tool Kit All tools required to
change the tip seals on
any TriScroll Series
pump
All TriScroll Series models PTSTSTKIT
Replacement Tip Seal Set Replacement tip seals
and static O-ring for
TriScroll 300 Series
pumps.
All TriScroll 300 Series models PTSS0300TS

ix
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 12/20/04
Factory Service Options
Vacuum Technologies offers factory-rebuild service or advance exchange of complete TriScroll Pumps
or TriScroll Pump Modules. Contact your nearest Vacuum Technologies sales office for price and
availability information. Select your preferred service option from the table below.
Contacting Vacuum Technologies
In the United States, you can contact Vacuum Technologies Customer Service at 1-800-8VARIAN.
See the back cover of this manual for a listing of our sales and service offices.
Internet users:
❑Send email to Customer Service & Technical Support at vpl.customer[email protected]om
❑Visit our web site at www.varianinc.com/vacuum
❑Order on line at www.evarian.com
Factory Service Options Part Number
Advance Exchange TriScroll 300 Single Phase EXPPTS03001
Advance Exchange TriScroll 300 Three Phase EXPPTS03003
Advance Exchange TriScroll 310 Single Phase EXPPTS03101
Advance Exchange TriScroll 310 Three Phase EXPPTS03103
Advance Exchange TriScroll 300 Pump Module Only EXPTS0300SC
Advance Exchange TriScroll 310 Pump Module Only EXPTS0310SC
Service/Rebuild TriScroll 300 Pump (Single or Three Phase) PTS0300KMA
Service/Rebuild TriScroll 310 Pump (Single or Three Phase) PTS0310KMA
Service/Rebuild TriScroll 300 Pump Module Only PTS0300SCRP
Service/Rebuild TriScroll 310 Pump Module Only PTS0310SCRP

TriScroll 300 Dry Scroll Vacuum Pump
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DRAFT 12/20/04

1
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Tip Seal Replacement
General Information
Vacuum Technologies TriScroll 300 series pumps will provide years of trouble-free service if
maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal
replacement is recommended when the pump base pressure rises to an unacceptably high level for
your application. Replace bearings, rotary seals and O-rings if the pump bearings exhibit humming or
grinding noises. Main bearing life may be shortened if your application requires the pumping of high
quantities of water vapor. Use bearing purge to keep this water from impacting bearing life.
Required Equipment
❑Tip Seal Replacement Kit: PTSS0300TS (“Tip Seal Replacement Kit” on page 2)
❑Tip Seal Tool Kit: PTSS0300TS (“Tip Seal Tool Kit” on page 3; customer can supply metric Allen
wrench set and chisel)
❑Vacuum Measuring Gauge: Capable of measuring pressures of 5 to 20 mTorr with an accuracy
of ± 1 mTorr. A capacitance manometer or Pirani gauge is recommended.

2
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Tip Seal Replacement Kit
2-269
Ti
p
S
ea
l
K
rytox
GPL
224
Grease

3
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Tip Seal Tool Kit
Chisel Metric Hex Key
Set

4
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
TriScroll 300 Disassembly
Remove the Outboard Housing
1. Remove the three M5x16 screws that attach
the cowling to the module.
2. Remove the cowling.
3. Remove the six M6x45 screws that attach
the outboard housing to inboard housing.
4. Remove the outboard housing.

5
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
5. Remove and discard the O-ring.
6. Remove and discard the tip seals from the
outboard housing.
TriScroll 300 Disassembly (continued)

6
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Remove the Inboard Housing and the
Orbiting Plate Assembly
1. Remove the four M5x15 screws that attach
the inboard housing to the frame.
2. Remove the inboard housing from the
frame.
Use care to locate the rubber spider that
mounts between the motor shaft coupling
and the inboard housing assembly.
CAUTION The inboard housing assembly
weighs 15.5 lbs.
TriScroll 300 Disassembly (continued)

7
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Disassemble the Inboard Housing and
the Orbiting Plate Assembly
1. Remove the M8x12 screw and washer that
attaches the counterweight to the inboard
housing.
2. Lift the counterweight off of the inboard
housing.
The counterweight is keyed to the
crankshaft. Locate the key after removal of
the counterweight from the inboard
housing.
TriScroll 300 Disassembly (continued)
Counterweight
Key

8
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
3. Remove the inboard housing from the
crankshaft and orbiting plate.
4. Remove and discard the tip seals from the
inboard housing.
TriScroll 300 Disassembly (continued)

9
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
5. Remove and discard the tip seals from both
sides of the orbiting plate.
TriScroll 300 Disassembly (continued)

10
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Scroll Cleaning
1. Carefully scrape with a chisel to loosen the
tip seal dust from the:
❑Orbiting plate
❑Inboard housing
❑Outboard housing
If seal debris is attached to the sides of the
scroll walls, use a razor blade or Exacto
knife to scrape this debris off.
2. Use dry compressed air to remove the tip
seal debris from the scroll parts.
3. Wipe the scroll parts with isopropyl alcohol
and a clean lint free cloth to remove any
remaining tip seal debris.
TriScroll 300 Disassembly (continued)
CAUTION Do not scratch or gouge any
surface.
CAUTION Do not blow compressed air
or debris into exposed
bearings.