Varian TriScroll 600 series User manual

DRAFT 2/10/05
vacuum technologies
TriScrollTM 600
Series
Dry Scroll
Vacuum Pump
Manual No. 699904310
Revision G
December 2004
TIP SEAL REPLACEMENT
MANUAL

DRAFT 2/10/05
Copyright 2004
Vacuum Technologies
TriScroll™600 Series
Dry Scroll Vacuum Pump
TriScroll is a trademark of Vacuum Technologies.
Loctite and PST are registered trademarks of Loctite Corporation.
Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
iii
Table of Contents
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
Safety Considerations . . . . . . . . . . . . . . . . . . . . . vi
Related TriScroll Manuals . . . . . . . . . . . . . . . . . viii
Maintenance and Tool Kits . . . . . . . . . . . . . . . . viii
Factory Service Options . . . . . . . . . . . . . . . . . . . ix
Contacting Vacuum Technologies . . . . . . . . . . . . ix
Tip Seal Replacement . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . 1
Required Equipment . . . . . . . . . . . . . . . . . . . . 1
TriScroll 600 Disassembly . . . . . . . . . . . . . . . . . . 4
Remove the Intake Fitting . . . . . . . . . . . . . . . . 4
Remove the Outboard Housing . . . . . . . . . . . . 5
Remove the Inboard Housing and Orbiting
Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 7
Disassemble the Inboard Housing and the Orbiting
Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 8
Scroll Cleaning . . . . . . . . . . . . . . . . . . . . . . . 10
TriScroll 600 Reassembly . . . . . . . . . . . . . . . . . . . 11
Put the Pump Back into Service . . . . . . . . . . . . 19

TriScroll 600 Dry Scroll Vacuum Pump
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Varian, Inc.
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
Frederick C. Campbell
Operations Manager
Vacuum Technologies
We
Wir
Nous
Nosotros
Wij
Noi
Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Vacuum Technologies
Lexington, Massachusetts, USA
Varian, Inc.
TriScroll Series Vacuum Pump
98/37/EEC, Machinery Directive
EN 1012-2:1996 Compressors and Vacuum Pumps Safety Requirements; Part 2 Vacuum Pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements
73/023/EEC, Low Voltage Directive
EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test
March 2003
Declaration
of
ConformityDeclaration
of

vi
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Preface
This manual provides the information you need to successfully perform tip seal replacement on your
Vacuum Technologies TriScrollTM Dry Vacuum Pump. Tip seal replacement is generally is
recommended when the pump base pressure has risen to an unacceptably high level for your
application. If you have questions that are not addressed in this manual, please contact the nearest
Vacuum Technologies service facility listed on the rear cover of this manual.
Safety Considerations
READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS.
The following format is used in this manual to call attention to hazards:
Maintenance personnel must be aware of all hazards associated with this equipment. They must
know how to recognize hazardous and potentially hazardous conditions, and know how to avoid
them. The consequences of work performed by unskilled or improperly trained maintenance personnel,
or careless operation of the equipment employed in the specified maintenance procedures can be
serious. Every maintenance person must read and thoroughly understand the materials discussed and
the instructions provided in this manual, as well as any additional information provided by Vacuum
Tec hnolo gie s.
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.

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TriScroll 600 Dry Scroll Vacuum Pump
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All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local,
state/province, and national agencies regarding specific requirements and regulations. Address any
safety, operation, and/or maintenance questions to the nearest Vacuum Technologies location.
WARNING Disconnect power from the
TriScroll 600 before performing any
maintenance procedure.
Allow the pump to cool before perform-
ing any maintenance procedure.
Approximate cool-down time is one to
two hours.
CAUTION Wipe all O-rings clean with a lint-free
cloth before installation to ensure that
no foreign matter is present to impair
the seal.
Do not use alcohol, methanol or other
solvents on O-rings. To do so causes
deterioration and reduces their ability to
hold a vacuum.
If applicable, apply a small amount of
Krytox®GPL 224 grease and wipe the
O-rings “shiny” dry.
NOTE Vacuum Technologies recommends
replacing all O-rings during routine
maintenance or during any mainte-
nance procedure requiring that O-rings
be removed.
WARNING The TriScroll 600 weighs 32 kg (70 lbs).
To avoid injury, use proper lifting
techniques when moving the pump.

viii
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Related TriScroll Manuals
Manuals related to the installation and operation, pump module replacement, and major maintenance
for the TriScroll 600 series pumps are listed in the following table:
Maintenance and Tool Kits
Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A
description of each kit and ordering information is provided in the following table:
Title Applicable TriScroll Model Part Number
Major Maintenance Manual All TriScroll 600 Series Models 699904300
Pump Module Replacement All TriScroll 600 Series Models 699904305
Installation and Operation Manual All TriScroll 600 Series Models 699904290
Description Contents Applicable TriScroll
Model
Part Number
Major Maintenance Tool Kit All bearings, bearing seals,
bearing lubricant, O-rings, and
tip seals required to rebuild
TriScro ll 600 S eries pum ps.
All TriScroll 600 Series
models
PTSS0600MK
Maintenance Tool Kit All fixtures and tools required
to perform any maintenance on
TriScro ll 600 S eries pum ps.
All TriScroll 600 Series
models
PTSS0600TK
Tip Seal Tool Kit All tools required to change the
tip seals on any TriScroll Series
pump.
All TriScroll Series
pumps
PTSTSTKIT
Replacement Tip Seal Set Replacement tip seals and
static O-rings for TriScroll 600
Series pumps.
All TriScroll 600 Series
models
PTSS0600TS

ix
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Factory Service Options
Vacuum Technologies offers factory-rebuild service or advance exchange of complete TriScroll Pumps
or TriScroll Pump Modules. Contact your nearest Vacuum Technologies sales office for price and
availability information. Select your preferred service option from the table below.
Contacting Vacuum Technologies
In the United States, you can contact Vacuum Technologies Customer Service at 1-800-8VARIAN.
See the back cover of this manual for a listing of our sales and service offices.
Internet users:
❑Send email to Customer Service & Technical Support at [e-mail]
❑Visit our web site at www.varianinc.com/vacuum
❑Order on line at www.evarian.com
Factory Service Options Part Number
Advance Exchange TriScroll 600 Single Phase EXPPTS06001
Advance Exchange TriScroll 600 Three Phase EXPPTS06003
Advance Exchange TriScroll 610 Single Phase EXPPTS06101
Advance Exchange TriScroll 610 Three Phase EXPPTS06103
Advance Exchange TriScroll 600 Pump Module Only EXPTS0600SC
Advance Exchange TriScroll 610 Pump Module Only EXPTS0610SC
Service/Rebuild TriScroll 600 Pump (Single or Three Phase) PTS0600KMA
Service/Rebuild TriScroll 610 Pump (Single or Three Phase) PTS0610KMA
Service/Rebuild TriScroll 600 Pump Module Only PTS0600SCRP
Service/Rebuild TriScroll 610 Pump Module Only PTS0610SCRP

TriScroll 600 Dry Scroll Vacuum Pump
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TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
1
Tip Seal Replacement
General Information
Vacuum Technologies TriScroll 600 series pumps will provide years of trouble-free service if
maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal
replacement is recommended when the pump base pressure rises to an unacceptably high level for
your application. Replace bearings, rotary seals and O-rings if the pump bearings exhibit humming or
grinding noises. Main bearing life may be shortened if your application requires the pumping of high
quantities of water vapor. Use bearing purge to keep this water from impacting bearing life.
Required Equipment
❑Tip Seal Replacement Kit: PTSS0600TS (“Tip Seal Replacement Kit” on page 2)
❑Tip Seal Tool Kit: PTSTSTKIT (“Tip Seal Tool Kit” on page 3; customer can supply metric Allen
wrench set and chisel).
❑Vacuum Measuring Gauge: Capable of measuring pressures of 5 to 20 mTorr with an accuracy
of ± 1 mTorr. A capacitance manometer or Pirani gauge is recommended.

2
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Tip Seal Replacement Kit
2-273
2-127
Ti
p
S
ea
l
K
rytox
GPL
224
Grease

3
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Tip Seal Tool Kit
Chisel
Metric Hex Key
Set

4
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
TriScroll 600 Disassembly
Remove the Intake Fitting
1. Remove the two M5x16 screws from the
intake assembly.
2. Remove the intake assembly from the top of
the pump.
3. Remove and discard the O-ring from the
groove on the underside of the intake fitting.

5
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Remove the Outboard Housing
1. Remove the three M5x16 screws that attach
the cowling to the module.
2. Remove the cowling.
3. Remove the six M6x55 screws that attach
the outboard housing to inboard housing.
4. Remove the outboard housing.
TriScroll 600 Disassembly (Continued)

6
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
5. Remove and discard the O-ring.
6. Remove and discard the tip seals from the
outboard housing.
TriScroll 600 Disassembly (Continued)

7
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Remove the Inboard Housing and
Orbiting Plate Assembly
1. Remove the four M5x15 screws that attach
the inboard housing to the frame.
2. Remove the inboard housing from the
frame.
Locate the rubber spider that mounts
between the motor shaft coupling and the
inboard housing assembly.
CAUTION The inboard housing assembly
weighs 22 lbs.
TriScroll 600 Disassembly (Continued)

8
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
Disassemble the Inboard Housing and
the Orbiting Plate Assembly
1. Remove the M8x12 screw and washer that
attaches the counterweight to the inboard
housing.
2. Lift the counterweight off of the inboard
housing.
The counterweight is keyed to the
crankshaft. Locate the key after removal of
the counterweight from the inboard housing
TriScroll 600 Disassembly (Continued)
Counterweight
Key

9
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
3. Remove the inboard housing from the
crankshaft and orbiting plate.
4. Remove and discard the tip seals from the
inboard housing.
TriScroll 600 Disassembly (Continued)

10
TriScroll 600 Dry Scroll Vacuum Pump
DRAFT 2/10/05
5. Remove and discard the tip seals from both
sides of the orbiting plate.
TriScroll 600 Disassembly (Continued)