VAT 650 Series Assembly instructions

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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Pendulum control & isolation valve
with CC-Link interface
sample picture
This manual is valid for the valve ordering number(s):
650 . . - . . GL - . . . . (1 sensor input)
650 . . - . . GN - . . . . (2 sensor inputs)
650 . . - . . AL - . . . . (1 sensor input / 15V SPS)
650 . . - . . AN - . . . . (2 sensor inputs / 15V SPS)
650 . . - . . HL - . . . . (1 sensor input / PFO)
650 . . - . . HN - . . . . (2 sensor inputs / PFO)
650 . . - . . CL - . . . . (1 sensor input / 15V SPS / PFO)
650 . . - . . CN - . . . . (2 sensor inputs / 15V SPS / PFO)
SPS = Sensor Power Supply PFO = Power Failure Option
configured with firmware 650C.1E.15
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
patented
. .
650 ..–....–.. ../ ... .
A–......
Fabrication number
Explanation of symbols:
Read declaration carefully before you start any other
action!
Keep body parts and objects away from the valve
opening!
Attention!
Hot surfaces; do not touch!
Product is in conformity with EC guidelines,
if applicable!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Wear gloves!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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Imprint
Manufacturer
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website
www.vatvalve.com
Phone
[phone]
Fax
[phone]
Email
[email protected]
Publisher
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Copyright
© VAT Vakuumventile AG 2009
No part of these Instructions may be reproduced in any way (photocopies, microfilms or any
other reproduction processes) nor may it be manipulated with electronic systems, duplicated or
distributed without written permission from VAT. Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT firmware are
intended for use with VAT products. The VAT firmware contains a limited, time unlimited user
license. The VAT firmware may not be used for purposes other than those intended nor is it
permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give
copies of the VAT firmware to other people.
The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle
third parties to consider these names to be unprotected and to use them freely. This is in
accordance with the meaning of the laws and acts covering brand names and trademarks.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
3/84
Contents:
1Use of product .......................................................................................................................................................... 5
1.1 Technical data.................................................................................................................................................. 5
2Installation................................................................................................................................................................. 8
2.1 Unpacking........................................................................................................................................................ 8
2.2 Installation into the system .............................................................................................................................. 8
2.3 Tightening torque........................................................................................................................................... 10
2.3.1 Mounting with centering rings............................................................................................................ 10
2.3.2 Mounting with O-ring in grooves........................................................................................................ 11
2.4 Admissible forces........................................................................................................................................... 11
2.5 Requirements to sensor connection .............................................................................................................. 12
2.6 Electrical connection...................................................................................................................................... 13
2.6.1 Ground connection............................................................................................................................ 13
2.6.2 Sensor supply concepts .................................................................................................................... 14
2.6.3 Power and sensor connection (+24 VDC sensors)............................................................................ 15
2.6.4 Power and sensor connection ( 15 VDC sensors) without optional SPS module............................. 17
2.6.5 Power and sensor connection ( 15 VDC sensors) with optional SPS module.................................. 19
2.6.6 CC-Link interface connection ............................................................................................................ 20
2.6.7 LOGIC I/O.......................................................................................................................................... 26
2.6.8 Digital input........................................................................................................................................ 27
2.6.9 Digital output...................................................................................................................................... 27
2.6.10 Service port connection..................................................................................................................... 27
3Operation................................................................................................................................................................ 28
3.1 Introduction.................................................................................................................................................... 28
3.1.1 Local operation.................................................................................................................................. 28
3.1.2 Remote operation.............................................................................................................................. 29
3.1.3 Safety mode ...................................................................................................................................... 29
3.2 Operation under increased temperature........................................................................................................ 29
3.3 Behavior during power up.............................................................................................................................. 29
3.4 Behavior in case of power failure................................................................................................................... 30
3.5 Display information ........................................................................................................................................ 31
3.5.1 CC-Link LEDs.................................................................................................................................... 33
3.6 Setup procedure ............................................................................................................................................ 34
3.6.1 CC-Link configuration........................................................................................................................ 35
3.6.2 LOGIC I/O configuration.................................................................................................................... 39
3.6.3 Valve and sensor configuration......................................................................................................... 40
3.6.4 ZERO................................................................................................................................................. 41
3.6.5 LEARN............................................................................................................................................... 42
3.7 Close valve .................................................................................................................................................... 43
3.8 Open valve..................................................................................................................................................... 43
3.9 Position control .............................................................................................................................................. 44
3.10 Pressure control............................................................................................................................................. 44
3.10.1 Pressure control operation with 2 sensors ........................................................................................ 45
3.10.2 Tuning of control performance........................................................................................................... 46
3.11 CC-Link interface connection setup............................................................................................................... 50
3.11.1 CC-Link Handshaking........................................................................................................................ 50
3.11.2 Location of the handshaking bits....................................................................................................... 51
3.11.3 Example of the handshaking by a PLC-program............................................................................... 52
3.12 CC-Link interface (Process data –cyclic communication)............................................................................. 53
3.12.1 OUTPUT Buffer (Master PLC)........................................................................................................... 53
3.12.2 INPUT Buffer (Master PLC)............................................................................................................... 56
3.13 Communication and timing control between Master (PLC) and Station (Valve) ............................................ 61
3.14 PRESSURE and SENSOR READING allocation........................................................................................... 62
4Trouble shooting..................................................................................................................................................... 63
4.1 Additional CC-Link warning............................................................................................................................ 65
5Maintenance & repairs............................................................................................................................................ 66
5.1 Maintenance procedures ............................................................................................................................... 67

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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5.2 Option board.................................................................................................................................................. 74
5.2.1 Durability of power fail battery ........................................................................................................... 74
5.2.2 Retrofit / replacement procedure....................................................................................................... 75
6Drawing................................................................................................................................................................... 79
7Spare parts ............................................................................................................................................................. 80
7.1 Control unit..................................................................................................................................................... 80
7.2 Valve unit....................................................................................................................................................... 81
7.3 Accessories ................................................................................................................................................... 82
7.3.1 Centering ring with Viton o-ring......................................................................................................... 83
8Warranty................................................................................................................................................................. 84

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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1 Use of product
This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure
control applications.
Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only!
Other applications are only allowed with the written permission of VAT.
1.1 Technical data
Control and actuating unit
Power input 1) (α)
+24 VDC (±10%) @ 0.5 V pk-pk max.
[connector: POWER]
[650 . . - . . A. - . . . . / 650 . . - . . G. - . . . . ]
[650 . . - . . C. - . . . . / 650 . . - . . H. - . . . . ]
50 W max. (operation of valve with max. load) without PFO 4)
50 W plus 10 W for PFO 4)
Sensor power supply 2) (β)
[650 . . - . . A. - . . . . / 650 . . - . . C. - . . . . ]
Input
Output
+24 VDC / 1500 mA max.
±15 VDC (±5%) / 1000 mA max.
[connector: POWER]
[connector: SENSOR]
Sensor power supply 2) (β)
[650 . . - . . G. - . . . . / 650 . . - . . H. - . . . . ]
Input
Output
+ 24 VDC resp. ± 15 VDC
same as input but:
2.0 A max. at ± 15 VDC
1.5 A max. at + 24 VDC
[connector: POWER]
[connector: SENSOR]
Calculation of complete power consumption:
Ptot = α + β
whereas β depends on sensor supply concept and sensor power consumption.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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Control and actuating unit (continuation)
Sensor input
Signal input
ADC resolution
Sampling time
0-10 VDC / Ri>100 kΩ
0.23 mV
10 ms
[connector: SENSOR]
Digital outputs 3)
Input voltage
Input current
70 VDC or 70 V peak max.
0.1 ADC or 0.1 A peak max.
[connector: LOGIC I/O]
PFO 4) battery pack
[650 . . - . . C. - . . . . / 650 . . - . . H. - . . . . ]
Charging time
Durability
2 minutes max.
up to 10 years @ 25°C ambient;
refer to «Durability of power fail battery» for details
Compressed air supply
4 - 7 bar / 55 - 100 psi (above ATM)
Ambient temperature
0 °C to +50 °C max. (<35 °C recommended)
Pressure control accuracy
0.1% of sensor full scale
DN 100
4"
(65040 - ....)
DN 160
6"
(65044 - ....)
DN 200
8"
(65046 - ....)
DN 250
10"
(65048 - ....)
Position resolution / position control capability
9155 steps
(full stroke)
11111 steps
(full stroke)
12266 steps
(full stroke)
12533 steps
(full stroke)
Closing time throttling only
0.7 s typ. (full
stroke)
0.8 s typ. (full
stroke)
0.9 s typ. (full
stroke)
0.9 s typ. (full
stroke)
Opening time throttling only
0.7 s typ. (full
stroke)
0.8 s typ. (full
stroke)
0.9 s typ. (full
stroke)
0.9 s typ. (full
stroke)
Closing time throttling & isolation
3 s typ. (full
stroke)
3 s typ. (full
stroke)
3 s typ. (full
stroke)
3 s typ. (full
stroke)
Opening time throttling & isolation
4 s typ. (full
stroke)
4 s typ. (full
stroke)
4 s typ. (full
stroke)
4 s typ. (full
stroke)
1) Internal overcurrent protection by a PTC device.
2) Refer to chapter «Sensor supply concepts» for details.
3) Refer to chapter «Schematics» for details.
4) PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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Valve unit
Pressure range at 20 C
- Aluminum (650 . . - . A . . - . . . . )
1 x 10E-8 mbar to 1.2 bar (abs)
- Aluminum hard anodized (650 . . - . H . . - . . . . )
1 x 10E-6 mbar to 1.2 bar (abs)
- Aluminum nickel coated (650 . . - . I . . - . . . . )
1 x 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20 C
- Aluminum (650 . . - . A . . - . . . . )
1 x 10E-9 mbar l/s
- Aluminum hard anodized (650 . . - . H . . - . . . . )
1 x 10E-5 mbar l/s
- Aluminum nickel coated (650 . . - . I . . - . . . . )
1 x 10E-9 mbar l/s
Leak rate valve seat at 20 C
- Aluminum (650 . . - . A . . - . . . . )
1 x 10E-9 mbar l/s
- Aluminum hard anodized (650 . . - . H . . - . . . . )
1 x 10E-4 mbar l/s
- Aluminum nickel coated (650 . . - . I . . - . . . . )
1 x 10E-9 mbar l/s
Cycles until first service
- Isolation cycles (open - closed - open)
- Throttling cycles (open - max. throttle - open)
200‟000 (unheated and under clean conditions)
1‟000‟000 (unheated and under clean conditions)
Admissible operating temperature
10°C to +150°C
Mounting position
any (valve seat on chamber side is recommended) (valve seat to face
chamber is recommended)
Wetted materials
- Body (650 . . - . A . . - . . . . )
Aluminum 3.2315 (AA6082)
- Body (650 . . - . H . . - . . . . )
Aluminum 3.2315 (AA6082) hard anodized
- Body (650 . . - . I . . - . . . . )
Aluminum 3.2315 (AA6082) nickel coated
- Pendulum plate (650 . . - . A . . - . . . . )
Aluminum 3.2315 (AA6082)
- Pendulum plate (650 . . - . H . . - . . . . )
Aluminum 3.2315 (AA6082) hard anodized
- Pendulum plate (650 . . - . I . . - . . . . )
Aluminum 3.2315 (AA6082) nickel coated
- Sealing ring (650 . . - . A . . - . . . . )
Aluminum 3.2315 (AA6082), 1.4306 (304L)
- Sealing ring (650 . . - . H . . - . . . . )
Aluminum 3.2315 (AA6082) hard anodized, 1.4306 (304L)
- Sealing ring (650 . . - . I . . - . . . . )
Aluminum 3.2315 (AA6082) nickel coated, 1.4306 (304L)
- Other parts
Stainless steel 316L (1.4404 or 1.4435), 1.4122, 1.4310 (301),
1.4303 (304), 1.4571, A2 (304)
- Seals
Viton®(standard). Other materials available.
Seal materials are declared on dimensional drawing of specific valve ordering
number.
DN 100
4"
(65040 - ....)
DN 160
6"
(65044 - ....)
DN 200
8"
(65046 - ....)
DN 250
10"
(65048 - ....)
Max. differential pressure on plate during isolation
1200 mbar in
either direction
1200 mbar in
either direction
1200 mbar in
either direction
1200 mbar in
either direction
Max. differential pressure on plate
during opening and throttling
30 mbar
10 mbar
5 mbar
5 mbar
Min. controllable conductance
(N2molecular flow)
3 l/s
5 l/s
10 l/s
15 l/s
Dimensions
Refer to dimensional drawing of specific valve ordering number
(available on request)

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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2 Installation
2.1 Unpacking
As this valve is a heavy component you should lift it with adequate equipment to prevent any injury to
humans.
Valves DN200 (8”) and larger are equipped with attachment points (tapped holes). Add eyebolts to
these attachment points for lifting. The attachment points are indicated on the dimensional drawing of
the specific valve part number (available on request).
Never lay the valve down with control and actuating unit downwards as it may be damaged.
2.2 Installation into the system
Fingers and objects must be kept out of the valve opening and away from moving parts.
The valve plate starts to move just after power is supplied.
Do not connect or disconnect sensor cable when device is under power.
Do not disconnect air supply when device is under power.
Compressed air pressure must be in the range of: 4 - 7 bar / 55 - 100 psi (above ATM).
Use only clean, dry or slightly oiled air.
Connection overview: Connectors at controller panel:

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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1. Install valve [1] into the vacuum system. Valve seat side should face process chamber. The valve seat side is
indicated by the symbol " " on the valve flange.
Caution: Do not tighten the flange screws stronger than indicated under «Tightening torque».
Caution: Do not admit higher forces to the valve than indicated under «Admissible forces».
Note: Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated
on the dimensional drawing.
2. Connect compressed air supply to connection labeled „IN‟ located at actuator, see Figure 1 below.
Connect compressed air return line connection labeled „OUT‟ located at actuator, see Figure 1 below.
Caution: Compressed air pressure must be in the range of: 4 - 7 bar / 55 - 100 psi (above ATM).
Note: Use only clean, dry or slightly oiled air. IN / OUT connections are 1/8“ ISO/NPT internal threads.
3. Install the ground connection cable at controller. Refer to «Electrical connection»
4. Install pressure sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given
under
«Requirements to sensor connection».
5. Connect sensor cable [3] to sensor(s) and then to valve (connector: SENSOR).
Refer to chapter «Electrical connection» for correct wiring.
Note: Input for second sensor is available on 650 . . - . . . N- . . . . version only.
6. Connect valve to remote control unit [4] (connector: CC-LINK V2 and LOGIC I/O). Refer to «CC-Link schematics» for
correct wiring.
7. Connect power supply [5] to valve (connector: POWER). Refer to chapter «Electrical connection» for correct wiring.
Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the
valve enters the safety mode and is not operative. Refer also to «Safety mode».
8. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft.
This port (1/8“ ISO/NPT) could be connected to the vacuum line, see Figure 2 below.
9. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of
respective heating device.
10. Perform «Setup procedure» to prepare valve for operation.
Note: Without performing the setup procedure the valve will not be able to do pressure control.
Fig. 1
Fig. 2
intermediate
pumping port
IN
OUT

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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2.3 Tightening torque
Note:
The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment,
and lubrication.
The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min. 1d), and
the friction coefficient of the screw-flange connection ( total = ( screw thread-helicoil + under screw head)/2) is bigger than 0.12. Lower
friction coefficients may damage the valve, as the resulting preload force gets too high. Therefore for other friction
coefficients the torque needs to be adapted. Please review design guidelines for Helicoil-Screw connections and make
sure that screws in use are capable to withstand applied torques, are appropriate for the application and are not too long.
Too long screws may damage the valve, the immersion depth should not exceed (hole depth –1 mm).
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following
tables.
2.3.1 Mounting with centering rings
Valve size
ISO-F
ISO-F
max. tightening torque
(Nm)
max. tightening torque
(lbs . ft)
DN100 / 4“
(65040 - . . . . - . . . . )
8-10
6-8
DN160 / 6“
(65044 - . . . . - . . . . )
13-15
9-11
DN200 / 8“
(65046 - . . . . - . . . . )
13-15
9-11
DN250 / 10“
(65048 - . . . . - . . . . )
17-20
13-15
hole depth (mm)
hole depth (inch)
DN100 / 4“
(65040 - . . . . - . . . . )
12
0.47
DN160 / 6“
(65044 - . . . . - . . . . )
14
0.55
DN200 / 8“
(65046 - . . . . - . . . . )
15
0.59
DN250 / 10“
(65048 - . . . . - . . . . )
16
0.63
Refer to «Spare parts and accessories» for centering rings ordering numbers.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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2.3.2 Mounting with O-ring in grooves
Valve size
ISO-F
JIS
ASA-LP
ISO-F
JIS
ASA-LP
max. tightening torque
(Nm)
max. tightening torque
(lbs . ft)
DN100 / 4“
(65040 - . . . . - . . . . )
20-23
35-40
35-40
15-17
26-30
26-30
DN160 / 6“
(65044 - . . . . - . . . . )
35-40
35-40
35-40
26-30
26-30
26-30
DN200 / 8“
(65046 - . . . . - . . . . )
35-40
35-40
80-90
26-30
26-30
59-67
DN250 / 10“
(65048 - . . . . - . . . . )
35-41
65-70
80-90
26-30
48-52
59-67
hole depth (mm)
hole depth (inch)
DN100 / 4“
(65040 - . . . . - . . . . )
12
12
12
0.47
0.47
0.47
DN160 / 6“
(65044 - . . . . - . . . . )
14
14
14
0.55
0.55
0.55
DN200 / 8“
(65046 - . . . . - . . . . )
15
15
14
0.59
0.59
0.59
DN250 / 10“
(65048 - . . . . - . . . . )
16
16
16
0.63
0.63
0.63
2.4 Admissible forces
Forces from evacuating the system, from the weight of other components, and from baking can lead to deformation and
malfunctioning of the valve. Stress has to be relieved by suitable means, e.g. bellows sections.
Valve size
Axial tensile or
compressive force «FA»
Bending moment «M»
F
A
M
N
lb.
Nm
lbf.
DN100 / 4“
(65040 - . . . . - . . . . )
1000
220
40
30
DN160 / 6“
(65044 - . . . . - . . . . )
2000
440
80
60
DN200 / 8“
(65046 - . . . . - . . . . )
2000
440
80
60
DN250 / 10“
(65048 - . . . . - . . . . )
2500
550
100
75
For a combination of both forces (FAand M) the values are invalid.
Verify that the depth of the mounting screws is min. 1 x thread diameter.
Please contact VAT for more information.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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2.5 Requirements to sensor connection
To achieve fast and accurate pressure control a fast
sensor response is required.
Sensor response time: < 50ms
The sensor is normally connected to the chamber by a
pipe. To maintain that the response time is not degraded
by this connection it needs to meet the following
requirements:
Inner diameter of connection pipe: > = 10 mm
Length of connection pipe: < = 300 mm
These conductance guidelines must include all valves
and limiting orifices that may also be present.
Make also sure that there is no obstruction in front of
sensor connection port inside the chamber.
The sensor should also be mounted free of mechanical
shock and vibration.
Dynamic stray magnetic fields may introduce noise to
sensor output and should be avoided or shielded.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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2.6 Electrical connection
2.6.1 Ground connection
Recommendation for ground strap between controller and system (chassis)
Material
L (Length max.)
B1 (min.)
B2 (min.)
d1 ( )
d2 ( )
copper tinned
200 mm
25 mm
25 mm
4.5 mm
customized
Note: Connection plates of ground strap must be total plane for a good electrical contact!
Note: The connection point at chassis (PE) must be blank metal (not coated).
It is also possible to connect the ground strap at system chamber if it is well connected to PE.
Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap)
d1
System
Chassis (PE)
(Protective Earth)
B1
B2
d2
L
Ground strap
PE

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
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2.6.2 Sensor supply concepts
This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve
version that is used. This valve is available with an optional sensor power supply module (SPS) that converts 15 VDC
from the 24 VDC.
Concepts:
External + 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC
sensors. Refer to chapter «2.6.3 Power and sensor connection (+24 VDC sensors)» for schematic and correct
wiring.
External 15 VDC supplied to POWER connector is feed through to SENSOR connector to supply 15 VDC
sensors. Refer to chapter «2.6.4 Power and sensor connection ( 15 VDC sensors) without optional SPS module»
for schematic and correct wiring.
External + 24 VDC supplied to POWER connector is converted into 15 VDC by the valve internal SPS and
supplied to SENSOR connector to supply 15 VDC sensors. Refer to chapter «2.6.5 Power and sensor
connection ( 15 VDC sensors) with optional SPS module» for schematic and correct wiring.
Valve versions:
650 . . - . . G. - . . . . / 650 . . - . . H. - . . . . SPS module not included
650 . . - . . A. - . . . . / 650 . . - . . C. - . . . . SPS module included
Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
15/84
2.6.3 Power and sensor connection (+24 VDC sensors)
[650 . . - . . G. - . . . . / 650 . . - . . H. - . . . . versions recommended]
2.6.3.1 Sensor power wiring via controller
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above.
Do not connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor interlock
to prevent valve from moving.
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
16/84
2.6.3.2 Sensor power wiring external
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor interlock
to prevent valve from moving.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
17/84
2.6.4 Power and sensor connection ( 15 VDC sensors) without optional SPS module
[650 . . - . . G. - . . . . / 650 . . - . . H. - . . . . versions only]
2.6.4.1 Sensor power wiring via controller
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above.
Do not connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor interlock to
prevent valve from moving.
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.
Fuse 1A
Fuse 1A

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
18/84
2.6.4.2 Sensor power wiring external
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor interlock
to prevent valve from moving.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
19/84
2.6.5 Power and sensor connection ( 15 VDC sensors) with optional SPS module
[650 . . - . . A. - . . . . / 650 . . - . . C. - . . . . versions only]
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above.
Do not connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor interlock
to prevent valve from moving.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
280271EF
2012-10-02
20/84
2.6.6 CC-Link interface connection
2.6.6.1 CC-Link cable installation (example)
PE = Protective Earth
= Connector housing
PE
PE
= Internal connection between «SLD and FG»
Note: The valve can be defined as «first station», «…stations…» between first and last, or «last station».
If the valve at first or last station, «TR» must be installed between 1 (DA) and 2 (DB).
Note: The station type for VAT valves are: Version 2 Remote Device Station.
TR = Terminal resister (Must be compatible to used CC-Link cable version!)
first station
…stations …
last station
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5