VAT 655 Series Assembly instructions

Installation, Operating &
Maintenance Instructions
979645EA Edition 23.09.2019
Pendulum control & isolation valve
with DeviceNet® interface
Series 655
DN 250 mm (I.D. 10")
This manual is valid for the valve ordering number(s):
65548 - . .GQ - . . . . (2 sensor inputs / analog outputs)
65548 - . .AQ - . . . . (2 sensor inputs / analog outputs / ±15V SPS)
65548. - . .HQ - . . . . (2 sensor inputs / analog outputs / PFO)
65548. - . .CQ - . . . . (2 sensor inputs / analog outputs / ±15V SPS / PFO)
SPS = Sensor Power Supply PFO = Power Failure Option
Configured with firmware : F01.0C.28.xx
DeviceNet profile: Generic C (compatible to IC1 DeviceNet firmware version C)
Sample picture

Series
655
2/112 Edition 23.09.2019 979645EA
Imprint
Manufacturer VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website:
Phone:
Fax:
Email:
www.vatvalve.com
[phone]
[phone]
[email protected]
Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH
-
9469 Haag,
Switzerland
Copyright
©
VAT Vakuumventile AG
2019
No part of these instructions may be reproduced in any way (photocopies,
microfilms or any other reproduction processes) nor may it be manipulated with
electronic systems, duplicated or distributed without written permission from VAT.
Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT
firmware are intended for use with VAT products. The VAT firmware contains a
limited, time unlimited user license. The VAT firmware may not be used for
purposes other than those intended nor is it permitted to make copies of the VAT
firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to
other people.
The use of trade names, brand names, trademarks, etc. in these Instructions
does not entitle third parties to consider these names to be unprotected and to
use them freely. This is in accordance with the meaning of the laws and acts
covering brand names and trademarks.

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Contents
1 Description of product........................................................................6
1.1 Identification of product ...................................................................................................6
1.2 Use of product.................................................................................................................6
1.3 Used abbreviations..........................................................................................................6
1.4 Related documents..........................................................................................................6
1.5 Important information.......................................................................................................6
1.6 Technical data.................................................................................................................7
1.6.1 Control and actuating unit.................................................................................7
1.6.2 Valve unit..........................................................................................................9
2 Safety .................................................................................................11
2.1 Compulsory reading material.........................................................................................11
2.2 Danger levels ................................................................................................................11
2.3 Personnel qualifications.................................................................................................12
2.4 Safety labels..................................................................................................................12
3 Design and Function.........................................................................13
3.1 Design (symbol picture).................................................................................................13
3.2 Function.........................................................................................................................14
3.2.1 Pressure control system overview and function..............................................15
3.2.2 Principle of a pressure control system ............................................................16
4 Installation.........................................................................................17
4.1 Unpacking .....................................................................................................................17
4.2 Installation into the system............................................................................................18
4.2.1 Installation space condition.............................................................................19
4.2.2 Connection overview.......................................................................................19
4.3 Tightening torque ..........................................................................................................20
4.3.1 Mounting with centering rings .........................................................................21
4.3.2 Mounting with O-ring in grooves .....................................................................21
4.3.3 Admissible forces............................................................................................22
4.3.4 Requirements to sensor connection................................................................23
4.4 Electrical connection......................................................................................................24
4.4.1 Ground connection..........................................................................................24
4.4.2 Sensor supply concepts..................................................................................25
4.4.3 Digital in- output and analogue output connections ........................................31
4.4.4 DeviceNet® interface connection....................................................................34
4.4.5 Service port connection...................................................................................34
4.5 Initial operation..............................................................................................................35
4.6 Valve configuration........................................................................................................36
4.6.1 Homing Start Option .......................................................................................36
4.6.2 Power Failure Option ......................................................................................37
4.6.3 Digital I/O........................................................................................................37
4.7 Sensor configuration......................................................................................................38
4.7.1 Sensor configuration.......................................................................................38
4.7.2 Sensor crossover (2 sensor operation mode).................................................39
4.7.3 Zero adjust......................................................................................................40
4.8 Pressure control configuration.......................................................................................41
4.8.1 Control Algorithm ............................................................................................42
4.8.2 Choose correct control algorithm....................................................................43
4.8.3 Learn (adaptive control algorithm) ..................................................................44
4.8.4 Pressure ramp ................................................................................................47
4.8.5 Tuning of control performance........................................................................49
4.9 Interface configuration (DeviceNet®) ............................................................................59
4.10 DeviceNet

interface.....................................................................................................60

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4.10.1 Introduction .....................................................................................................60
4.10.2 Messaging Format...........................................................................................61
4.10.3 Objects............................................................................................................62
4.10.4 Identity Object (Class ID 1) .............................................................................63
4.10.5 Assembly Object (Class ID 4)..........................................................................63
4.10.6 Connection Object (Class ID 5).......................................................................65
4.10.7 Discrete Input Object (Class ID 8)...................................................................65
4.10.8 S-Device Supervisor Object (Class ID 48) ......................................................66
4.10.9 S-Analog Sensor Object (Class ID 49)............................................................68
4.10.10 S-Single Stage Controller Object (Class ID 51)...............................................70
4.10.11 Pressure Controller Object (Class ID 100)......................................................72
5 Operation........................................................................................... 74
5.1 Normal operation...........................................................................................................74
5.1.1 Remote operation............................................................................................74
5.1.2 Local operation................................................................................................75
5.2 Close valve....................................................................................................................76
5.3 Open valve.....................................................................................................................76
5.4 Position control..............................................................................................................76
5.5 Pressure control.............................................................................................................76
5.6 Display information........................................................................................................77
5.6.1 Power up.........................................................................................................77
5.6.2 Operation ........................................................................................................78
5.6.3 Error................................................................................................................78
5.7 Safety mode...................................................................................................................78
5.8 Operation during power up............................................................................................79
5.9 Behavior in case of power failure...................................................................................79
5.10 Operation under increased temperature........................................................................80
5.11 Behavior In case of compressed air pressure drop........................................................80
6 Trouble shooting .............................................................................. 81
6.1.1 Controller Display............................................................................................81
6.1.2 Error numbers .................................................................................................81
6.1.3 Error code .......................................................................................................81
7 Maintenance...................................................................................... 83
7.1 Maintenance intervals....................................................................................................83
7.2 Maintenance procedures...............................................................................................84
7.2.1 Replacement of isolation seals and cleaning ..................................................85
7.2.2 Replacement of actuator and actuator shaft seal............................................91
7.2.3 Replacement of Option board .......................................................................100
8 Repairs ............................................................................................ 102
9 Dismounting and Storage.............................................................. 103
9.1 Dismounting.................................................................................................................103
9.2 Storage........................................................................................................................104
10 Packaging and Transport............................................................... 105
10.1 Packaging....................................................................................................................106
10.2 Transport .....................................................................................................................106
11 Disposal........................................................................................... 107
12 Spare parts...................................................................................... 108
12.1 Drawing (symbol picture).............................................................................................108
12.1.1 Valve unit with seals and grease...................................................................109

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12.1.2 Controller ......................................................................................................110
12.1.3 Accessories...................................................................................................110
13 Appendix..........................................................................................111

DESCRIPTION OF PRODUCT Series
655
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1 Description of product
1.1 Identification of product
The fabrication number and order number are fixed on the product directly or by means of an
identification plate.
Fabrication No.:
000 . .- . . . .- . . . ./ . . . .
A - . . . . . .


Fabrication number
Order number
1.2 Use of product
This product is a throttling pendulum valve with isolation functionality. It is intended to use for
downstream pressure control applications.
Use product for clean and dry vacuum applications only. Other applications are only allowed with the
written permission of VAT.
1.3 Used abbreviations
Abbreviation Description
CPA Control Performance Analyzer
PFO Power Failure Option
SFS Sensor Full Scale
SPS Sensor Power Supply
ADC Analog-to-digital converter
1.4 Related documents
• Product Data Sheet
• Dimensional Drawing
• IOMI Heating device (if valve with heater)
1.5 Important information
This symbol points to a very important statement that requires particular attention.
Example:
Refer to chapter: «Technical data» for detailed information.

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1.6 Technical data
1.6.1 Control and actuating unit
Description
Power input
1)
+24 VDC (±10%) @ 0.5 V pk-pk max.
connector: POWER
[655 . . - . .
A
. - . . . . / 655 . . - . .
H
. - . . . . ]
[655 . . - . . C. - . . . . / 655 . . - . . H. - . . . . ]
70 W max.(operation of valve with max. load) without PFO
3)
with optional SPS + 40 W
with optional PFO + 10 W
3)
Sensor power supply
2)
[655 . . - . . A. - . . . . / 655 . . - . . C. - . . . . ]
input
output
+24 VDC / 1500 mA max.
±15 VDC (±5%) / 1200 mA max.
connector: POWER
connector: SENSOR
Sensor power supply
2)
[655 . . - . . G. - . . . . / 655 . . - . . H. - . . . . ]
input
output
+24 VDC resp. ± 15 VDC
same as input but:
2.0 A max. at ± 15 VDC
1.5 A max. at + 24 VDC
connector: POWER
connector: SENSOR
Actuator type Stepper motor with servo control
Ingress Protection IP30
Sensor input
Signal input voltage
ADC resolution
Sampling time
-10 … +10 V / Ri = 100 kΩ
0.1 mV
2 ms
connector: SENSOR
Digital inputs (power connector) input 1
input 2
voltage control
contact control
interlock open (adjustable with CPA)
interlock close (adjustable with CPA)
12 … 24V / 4 … 8 mA
24V / 8 mA
connector: POWER
Digital outputs (power connector) output 1
output 2
load
valve closed (adjustable with CPA)
valve opened (adjustable with CPA)
max. 70 V / 0.1 A
connector: POWER
Digital inputs
3)
voltage control
contact control
5 … 24V / 2 … 10 mA
3.3V / 2 mA
connector: INTERFACE
Digital outputs
3)
Input voltage
Input current
max. 70 V
max. 0.1 A
connector: INTERFACE
Analog outputs
3)
0-10 VDC / 1 mA max. connector: INTERFACE

DESCRIPTION OF PRODUCT Series
655
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PFO
4)
battery pack
[655 . . - . . C. - . . . . / 655 . . - . . H. - . . . . ]
charging time
durability
2 minutes max.
up to 10 years @ 25°C ambient;
refer to «Durability of power fail battery» for details
Compressed air supply 4 - 7 bar / 55 - 100 psi (above ATM)
Ambient temperature
0 °C to +50 °C max. (<35 °C recommended)
Pressure control accuracy
5 mV or 0.1% of setpoint, whichever is greater
Position resolution / position control capability
58000 steps
(full stroke)
Closing time throttling only (full stroke)
0.9 s typ. 0.5 s typ.
Opening time throttling only (full stroke)
0.9 s typ. 0.5 s typ.
Closing time throttling & isolation (full stroke) 3 s typ.
Opening time throttling & isolation (full stroke) 4 s typ.
1)
Internal overcurrent protection by a PTC device.
2)
Refer to chapter «Sensor supply concepts» for details. Complete power consumption of the valve depends on
sensor supply concept and sensor power consumption
3)
Refer to chapter «Schematics» for details.
4)
PFO = Power Failure Option. Refer to chapter «Behavior in case of power failure» for details

Series 655 DESCRIPTION OF PRODUCT
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Valve unit
Description
Pressure range at 20°C
- Aluminum (655 . . - . A . . - . . . . ) 1 × 10E-8 mbar to 1.2 bar (abs)
- Aluminum hard anodized (655 . . - . H . . - . . . . ) 1 × 10E-6 mbar to 1.2 bar (abs)
- Aluminum nickel coated (655 . . - .
I
. . - . . . . ) 1 × 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20°C
- Aluminum (655 . . - . A . . - . . . . ) 1 × 10E-9 mbar l/s
- Aluminum hard anodized (655 . . - . H . . - . . . . ) 1 × 10E-5 mbar l/s
- Aluminum nickel coated (655 . . - .
I
. . - . . . . ) 1 × 10E-9 mbar l/s
Leak rate valve seat at 20°C
- Aluminum (655 . . - . A . . - . . . . ) 1 x 10E-9 mbar l/s
- Aluminum hard anodized (655 . . - . H . . - . . . . ) 1 x 10E-4 mbar l/s
- Aluminum nickel coated (655 . . - . I . . - . . . . ) 1 x 10E-9 mbar l/s
Cycles until first service
- Isolation cycles (open - closed - open)
- Throttling cycles
(open - max. throttle - open)
200’000 (unheated and under clean conditions)
1’000’000 (unheated and under clean conditions)
Admissible operating temperature +10°C to +120°C
Mounting position horizontally only
Wetted materials
- Body (655 . . - . A . . - . . . . ) Aluminum 3.3211 (AA6061)
- Body (655 . . - . H . . - . . . . ) Aluminum 3.3211 (AA6061) hard anodized
- Body (655 . . - . I . . - . . . . ) Aluminum 3.3211 (AA6061) nickel coated
- Pendulum plate (655 . . - . A . . - . . . . ) Aluminum 3.3211 (AA6061)
- Pendulum plate (655 . . - . H . . - . . . . ) Aluminum 3.3211 (AA6061) hard anodized
- Pendulum plate (655 . . - . I . . - . . . . ) Aluminum 3.3211 (AA6061) nickel coated
- Sealing ring (655 . . - . A . . - . . . . ) Aluminum 3.3211 (AA6061), 1.4306 (304L)
- Sealing ring (655 . . - . H . . - . . . . ) Aluminum 3.3211 (AA6061) hard anodized, 1.4306 (304L)
- Sealing ring (655 . . - . I . . - . . . . ) Aluminum 3.3211 (AA6061) nickel coated, 1.4306 (304L)
- Other parts Stainless steel 316L (1.4404 or 1.4435), 1.4122, 1.4310
(301),
1.4303 (304), 1.4571, A2 (304)
- Seals Viton
®
(standard). Other materials available.
Seal materials are declared on dimensional drawing of
specific valve ordering number.

DESCRIPTION OF PRODUCT Series
655
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Description
DN 250
10"
(65548 - ....)
Max. differential pressure on plate during isolation
1200 mbar in either direction
Max. differential pressure on plate
during opening and throttling 5 mbar
Min. controllable conductance
(N
2
molecular flow) Typ. 2 l/s
Dimensions Refer to dimensional drawing of specific valve ordering number
(available on request)

Series 655 SAFETY
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2 Safety
2.1 Compulsory reading material
Read this chapter prior to performing any work with or on the product. It contains important information
that is significant for your own personal safety. This chapter must have been read and understood by
all persons who perform any kind of work with or on the product during any stage of its serviceable
life.
NOTICE
Lack of knowledge
Failing to read this manual may result in property damage.
Firstly, read manual.
These Installation, Operating & Maintenance Instructions are an integral part of a
comprehensive documentation belonging to a complete technical system. They must
be stored together with the other documentation and accessible for anybody who is
authorized to work with the system at any time.
2.2 Danger levels
DANGER
High risk
Indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
WARNING
Medium risk
Indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
CAUTION
Low risk
Indicates a hazardous situation which, if not avoided, may result in minor or moderate
injury.
NOTICE
Command
Indicates a hazardous situation which, if not avoided, may result in property damage.

SAFETY Series
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2.3 Personnel qualifications
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
2.4 Safety labels
Label Part No. Location on valve
T-9001-156 On protective foil covering of
valve opening

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3 Design and Function
3.1 Design (symbol picture)

DESIGN AND FUNCTION Series
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3.2 Function
The valve ‘gate’ (1) acts, due to its pendulum motion, as a throttling element and varies the
conductance of the valve opening. The integrated controller IC2 calculates the required gate position
to achieve the set point pressure. Actuation is performed by 2 stepper motors, one for pendulum and
the second for stroke. An encoder monitors the position. This principle ensures fast and accurate
process pressure control.
•Position A = minimal conductance
•Position B = leak tight closing, the ‘gate’ (1) with ‘Gate seal’ (2) moves downwards to valve ‘body’
(3).
1 Gate
2
Gate
seal
3 Valve body
A
B
1 2 3

Series 655 DESIGN AND FUNCTION
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3.2.1 Pressure control system overview and function
Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.
Example: Downstream control
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 HV Pump
S
eff
Q / p
S
eff
effective pump speed (ls
-1
)
Q Gas flow (mbar)
p Pressure (mbar)
or units used in USA
S
eff
= 12.7 • Q / p
S
eff
effective pump speed (ls
-1
)
Q Gas flow (sccm)
p Pressure (mTorr)
M
3
4
5
7
8
2
1
9
Q
pV
Seff
6

DESIGN AND FUNCTION Series
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3.2.1.1 Way of operation
The controller compares the actual pressure in the process chamber given by the pressure sensor
with the preset pressure. The controller uses the difference between actual and set pressure to
calculate the correct position of the control valve. The controller drives the control valve into the
correct position and the actual pressure again equals the set pressure.
This control operation is performed continuously. Pressure changes in the process chamber due to
leaks, desorption, and gas flow, reaction products, variations in pumping speed etc. are always
corrected at once.
3.2.1.2 Pressure control
In a vacuum system which is pumped and into which gas is admitted at the same time, the pressure
can be controlled in two ways:
1. Downstream control (standard):
The pressure is controlled by changing the conductance of a control valve between pump and
process chamber. This changes the effective pumping speed at the process chamber. Pressure
and gas flow can be independently controlled over a wide range.
2. Upstream control:
The pressure is controlled by changing the gas flow into the process chamber, while the pumping
speed remains constant.
3.2.1.3 Adaptive controller (standard)
A controller adapting itself to changes in pressure, gas flow and pumping speed without any manual
adjustments. This allows for a completely automatic operation of the system.
3.2.2 Principle of a pressure control system
1. Host computer sends
pressure set point
2. Controller reads actual
pressure from sensor
3. Optimizing module sends
new PID parameters
4. Actuator sets new valve
position
Host computer
(Example)
1.
4.
3.
2.

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4 Installation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
4.1 Unpacking
NOTICE
Physical overstraining at actuator
Inappropriate handling with the valve may cause in damage of actuator.
Do not place the valve on the actuator.
CAUTION
Valve is a heavy component
Physical overstraining.
Use a crane to lift valves DN 200 (8”) and larger.
•
Make sure that the supplied products are in accordance with your order.
• Inspect the quality of the supplied products visually. If it does not meet your
requirements, please contact VAT immediately.
• Store the original packaging material. It may be useful if products must be returned
to VAT.
1. Open the transport case and remove inside packing material as far as necessary.
2. Attach lifting device for valves DN 200 (8”) and larger. For attachment refer to dimensional drawing of
valve.
3. Lift the valve carefully and place it on a clean place.
Do not remove protective foils from valve opening

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4.2 Installation into the system
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of the valve opening and away from moving parts.
Do not connect the controller to power before the valve is installed complete into the
system.
NOTICE
Sealing surfaces
Sealing surfaces of valve and vacuum system could be damage in case of incorrect
handling.
Only qualified personal are allowed to install the valve into the vacuum system.
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Gate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Mount valve to a clean system only.

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4.2.1 Installation space condition
Install the valve with space for dismantling and air circulation as shown in figure below.
4.2.2 Connection overview
System:
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable(s)
6 Actuator
7 Controller (IC2)
8 Cable to remote control unit
9 Cable to power supply
10 Pump
M
3
4
5
79
2
1
10
68

INSTALLATION Series
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Controller:
4.3 Tightening torque
The torque values below are dependent on many factors, such as materials involved,
surface quality, surface treatment, and lubrication.
The torques below are valid if immersion depth of the mounting screws is at least
once the thread diameter (min. 1d), and the friction coefficient of the screw-flange
connection (µ
total
= (µ
screw thread-helicoil
+ µ
under screw head
)/2) is bigger than 0.12. Lower
friction coefficients may damage the valve, as the resulting preload force gets too
high. Therefore for other friction coefficients the torque needs to be adapted. Please
review design guidelines for Helicoil-Screw connections and make sure that screws in
use are capable to withstand applied torques, are appropriate for the application and
are not too long. Too long screws may damage the valve, the immersion depth should
not exceed (hole depth – 1 mm).
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the
maximum torque levels in the following tables.