VAT 650 TJ Series Assembly instructions

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 1/77
Pendulum control & isolation valve
with RS485 interface
with valve cluster functionality
This manual is valid for the valve ordering number(s):
650 . . - . . TJ - . . . . (Master / 1 sensor input)
650 . . - . . TK - . . . . (Master / 2 sensor inputs)
650 . . - . . VJ - . . . . (Master / 1 sensor input / ±15V SPS)
650 . . - . . VK - . . . . (Master / 2 sensor inputs / ±15V SPS)
650 . . - . . UJ - . . . . (Master / 1 sensor input / PFO)
650 . . - . . UK - . . . . (Master / 2 sensor inputs / PFO)
650 . . - . . WJ - . . . . (Master / 1 sensor input / ±15V SPS / PFO)
650 . . - . . WK - . . . . (Master / 2 sensor inputs / ±15V SPS / PFO)
650 . . - . . GS - . . . . (Slave)
650 . . - . . HS - . . . . (Slave / PFO)
SPS = Sensor Power Supply PFO = Power Failure Option
Master configured with firmware 650C.1E.06
Slave configured with firmware 650C.1E.06
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
patented
. .
650
..
–
....
–
..../....
A
–
......
Fabrication number
sample picture
Explanation of symbols:
Read declaration carefully before you start any other
action! Keep body parts and objects away from the valve opening!
Attention! Hot surfaces; do not touch!
Product is in conformity with EC guidelines! Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage! Wear gloves!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 2/77
Contents:
1Use of product .......................................................................................................................................................... 4
1.1 Technical data ................................................................................................................................................. 4
2Installation................................................................................................................................................................. 7
2.1 Unpacking........................................................................................................................................................ 7
2.2 Installation into the system .............................................................................................................................. 7
2.3 Tightening torque............................................................................................................................................. 9
2.3.1 Mounting with centering rings.............................................................................................................. 9
2.3.2 Mounting with O-ring in grooves........................................................................................................ 10
2.4 Admissible forces........................................................................................................................................... 10
2.5 Requirements to sensor connection.............................................................................................................. 11
2.6 Electrical connection...................................................................................................................................... 12
2.6.1 Sensor supply concepts.................................................................................................................... 12
2.6.2 Power and sensor connection (+24 VDC sensors)............................................................................ 13
2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module............................. 14
2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module.................................. 15
2.6.5 Power connection for Slave valve only.............................................................................................. 16
2.6.6 RS485 interface connection.............................................................................................................. 16
2.6.7 Service port connection..................................................................................................................... 16
2.6.8 Valve cluster connection ................................................................................................................... 17
3Operation................................................................................................................................................................ 20
3.1 Introduction.................................................................................................................................................... 20
3.1.1 Individual valve control...................................................................................................................... 21
3.1.2 Individual valve status ....................................................................................................................... 21
3.1.3 Freeze mode ..................................................................................................................................... 21
3.1.4 Position offset.................................................................................................................................... 21
3.1.5 Local operation.................................................................................................................................. 22
3.1.6 Remote operation.............................................................................................................................. 22
3.1.7 Safety mode ...................................................................................................................................... 23
3.2 Operation under increased temperature........................................................................................................ 23
3.3 Behavior during power up.............................................................................................................................. 23
3.4 Behavior in case of power failure................................................................................................................... 23
3.5 Display information ........................................................................................................................................ 24
3.6 Setup procedure ............................................................................................................................................ 26
3.6.1 Cluster address configuration............................................................................................................ 26
3.6.2 Interface configuration....................................................................................................................... 30
3.6.3 Valve and sensor configuration......................................................................................................... 31
3.6.4 ZERO................................................................................................................................................. 31
3.6.5 LEARN............................................................................................................................................... 32
3.7 Close valve .................................................................................................................................................... 33
3.8 Open valve..................................................................................................................................................... 33
3.9 Position control .............................................................................................................................................. 33
3.10 Pressure control............................................................................................................................................. 34
3.10.1 Operation with 2 sensors................................................................................................................... 34
3.10.2 Tuning of control performance........................................................................................................... 35
3.11 RS485 interface............................................................................................................................................. 38
3.11.1 Settings ............................................................................................................................................. 38
3.11.2 Schematics........................................................................................................................................ 38
3.11.3 Connection cable drawing................................................................................................................. 41
3.11.4 Digital inputs...................................................................................................................................... 42
3.11.5 Command syntax............................................................................................................................... 43
3.11.6 Addressed communication................................................................................................................ 43
3.11.7 Control commands ............................................................................................................................ 43
3.11.8 Inquiry commands............................................................................................................................. 45
3.11.9 Setup commands .............................................................................................................................. 51
3.11.10Error messages................................................................................................................................. 57
4Trouble shooting..................................................................................................................................................... 58

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 3/77
5Maintenance & repairs............................................................................................................................................ 60
5.1 Maintenance procedures ............................................................................................................................... 61
5.2 Option board.................................................................................................................................................. 68
5.2.1 Durability of power fail battery........................................................................................................... 68
5.2.2 Retrofit / replacement procedure....................................................................................................... 69
6Drawing................................................................................................................................................................... 72
7Spare parts............................................................................................................................................................. 73
7.1 Control unit .................................................................................................................................................... 73
7.2 Valve unit....................................................................................................................................................... 74
7.3 Accessories ................................................................................................................................................... 75
7.3.1 Centering ring with Viton o-ring......................................................................................................... 76
8Warranty................................................................................................................................................................. 77

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 4/77
1 Use of product
This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure
control applications.
Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only!
Other applications are only allowed with the written permission of VAT.
1.1 Technical data
Control and actuating unit
Power input 1) (α)+24 VDC (±10%) @ 0.5 V pk-pk
max. [connector: POWER]
[650 . . - . . G. - . . . . / 650 . . - . . T. - . . . . / 650 .
. - . . V. - . . . . ]
[650 . . - . . H. - . . . . / 650 . . - . . U. - . . . . / 650 .
. - . . W. - . . . . ]
50 W max. (operation of valve with max. load) without PFO 4)
50 W plus 10 W for PFO 4)
Sensor power supply 2) (β)
[650 . . - . . V. - . . . . / 650 . . - . . W. - . . . . ]
Input
Output
+24 VDC / 1500 mA max.
±15 VDC (±5%) / 1000 mA max.
[connector: POWER]
[connector: SENSOR]
Sensor power supply 2) (β)
[650 . . - . . T. - . . . . / 650 . . - . . U. - . . . . ]
Input
Output
+ 24 VDC resp. ± 15 VDC
same as input but:
2.0 A max. at ± 15 VDC
1.5 A max. at + 24 VDC
[connector: POWER]
[connector: SENSOR]
Calculation of complete power consumption:
Ptot = α+ β
whereas depends on sensor supply concept and sensor power consumption.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 5/77
Control and actuating unit (continuation)
Sensor input
Signal input
ADC resolution
Sampling time
0-10 VDC / Ri>100 k
0.23 mV
10 ms
[connector: SENSOR]
Digital inputs 3)
±24 VDC max. [connector: INTERFACE]
Digital outputs 3)
Input voltage
Input current
Breaking capacity
70 VDC or 70 V peak max.
0.5 ADC or 0.5 A peak max.
10 W max.
[connector: INTERFACE]
Analog outputs 3)
0-10 VDC / 1 mA max. [connector: INTERFACE]
PFO 4) battery pack
[650 . . - . . H. - . . . . / 650 . . - . . U. - . . . . / 650 .
. - . . W. - . . . . ]
Charging time
Durability
2 minutes max.
up to 10 years @ 25°C ambient;
refer to «Durability of power fail battery» for details
Compressed air supply
4 - 7 bar / 55 - 100 psi (above ATM)
Ambient temperature
0 °C to +50 °C max. (<35 °C recommended)
Pressure control accuracy
0.1% of sensor full scale
DN 100
4"
(65040 - ....)
DN 160
6"
(65044 - ....)
DN 200
8"
(65046 - ....)
DN 250
10"
(65048 - ....)
Position resolution / position control capability
9155 steps (full stroke) 11111 steps (full stroke) 12266 steps (full stroke) 12533 steps (full stroke)
Closing time throttling only
0.7 s typ. (full stroke) 0.8 s typ. (full stroke) 0.9 s typ. (full stroke) 0.9 s typ. (full stroke)
Opening time throttling only
0.7 s typ. (full stroke) 0.8 s typ. (full stroke) 0.9 s typ. (full stroke) 0.9 s typ. (full stroke)
Closing time throttling & isolation
3 s typ. (full stroke) 3 s typ. (full stroke) 3 s typ. (full stroke) 3 s typ. (full stroke)
Opening time throttling & isolation
4 s typ. (full stroke) 4 s typ. (full stroke) 4 s typ. (full stroke) 4 s typ. (full stroke)
1) Internal overcurrent protection by a PTC device.
2) Refer to chapter «Sensor supply concepts» for details.
3) Refer to chapter «Schematics» for details.
4) PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 6/77
Valve unit
Pressure range at 20°C
- Aluminum (650 . . - . A . . - . . . . ) 1 x 10E-8 mbar to 1.2 bar (abs)
- Aluminum hard anodized (650 . . - . H . . - . . . . ) 1 x 10E-6 mbar to 1.2 bar (abs)
- Aluminum nickel coated (650 . . - . I . . - . . . . )
1 x 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20°C
- Aluminum (650 . . - . A . . - . . . . ) 1 x 10E-9 mbar l/s
- Aluminum hard anodized (650 . . - . H . . - . . . . ) 1 x 10E-5 mbar l/s
- Aluminum nickel coated (650 . . - . I . . - . . . . )
1 x 10E-9 mbar l/s
Leak rate valve seat at 20°C
- Aluminum (650 . . - . A . . - . . . . ) 1 x 10E-9 mbar l/s
- Aluminum hard anodized (650 . . - . H . . - . . . . ) 1 x 10E-4 mbar l/s
- Aluminum nickel coated (650 . . - . I . . - . . . . )
1 x 10E-9 mbar l/s
Cycles until first service
- Isolation cycles (open - closed - open)
- Throttling cycles (open - max. throttle - open)
200’000 (unheated and under clean conditions)
1’000’000 (unheated and under clean conditions)
Admissible operating temperature
10°C to +150°C
Mounting position
any (valve seat on chamber side is recommended) (valve seat to face
chamber is recommended)
Wetted materials
- Body (650 . . - . A . . - . . . . ) Aluminum 3.2315 (AA6082)
- Body (650 . . - . H . . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized
- Body (650 . . - . I . . - . . . . ) Aluminum 3.2315 (AA6082) nickel coated
- Pendulum plate (650 . . - . A . . - . . . . ) Aluminum 3.2315 (AA6082)
- Pendulum plate (650 . . - . H . . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized
- Pendulum plate (650 . . - . I . . - . . . . ) Aluminum 3.2315 (AA6082) nickel coated
- Sealing ring (650 . . - . A . . - . . . . ) Aluminum 3.2315 (AA6082), 1.4306 (304L)
- Sealing ring (650 . . - . H . . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized, 1.4306 (304L)
- Sealing ring (650 . . - . I . . - . . . . ) Aluminum 3.2315 (AA6082) nickel coated, 1.4306 (304L)
- Other parts Stainless steel 1.4435 (316L), 1.4404 (316L), 1.4122, 1.4310 (301),
1.4303 (304), 1.4571, A2 (304)
- Seals Viton®(standard). Other materials available.
Seal materials are declared on dimensional drawing of specific valve ordering
number.
DN 100
4"
(65040 - ....)
DN 160
6"
(65044 - ....)
DN 200
8"
(65046 - ....)
DN 250
10"
(65048 - ....)
Max. differential pressure on plate during isolation 1200 mbar in
either direction 1200 mbar in either direction 1200 mbar in either direction 1200 mbar in either direction
Max. differential pressure on plate
during opening and throttling
30 mbar 10 mbar 5 mbar 5 mbar
Min. controllable conductance
(N2molecular flow)
3 l/s 5 l/s 10 l/s 15 l/s
Dimensions Refer to dimensional drawing of specific valve ordering number
(available on request)

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 7/77
2 Installation
2.1 Unpacking
As this valve is a heavy component you should lift it with adequate equipment to prevent any injury to
humans.
Valves DN200 (8”) and larger are equipped with attachment points (tapped holes). Add eyebolts to
these attachment points for lifting. The attachment points are indicated on the dimensional drawing of
the specific valve part number (available on request).
Never lay the valve down with control and actuating unit downwards as it may be damaged.
2.2 Installation into the system
Fingers and objects must be kept out of the valve opening and away from moving parts.
The valve plate may start to move just after power is supplied.
Do not connect or disconnect sensor cable when device is under power.
1. Install valves [1] into the vacuum system. Valve seat side should face process chamber. The valve seat side is
indicated by the symbol "∇" on the valve flange.
Caution: Do not tighten the flange screws stronger than indicated under «Tightening torque».
Caution: Do not admit higher forces to the valve than indicated under «Admissible forces».
Note: Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated
on the dimensional drawing.
Master
Slave
[6] Link cable
[6] Link to next Slave

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 8/77
2. Connect compressed air supply to connection labeled ‘IN’ located at actuator.
Connect compressed air return line connection labeled ‘OUT’ located at actuator.
Caution: Compressed air pressure must be in the range of: 4 - 7 bar / 55 - 100 psi (above ATM).
Note: Use only clean, dry or slightly oiled air. IN / OUT connections are 1/8“ ISO/NPT internal threads.
3. Install pressure sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given
under
«Requirements to sensor connection».
4. Connect sensor cable [3] to sensor(s) and then to Master valve (connector: SENSOR).
Refer to chapter «Electrical connection» for correct wiring.
5. Connect Master valve to RS485 [4] (connector: INTERFACE). Refer to «RS485 schematics» for correct wiring.
6. Enable terminating resistor in link adapter of first and last valve in the system. Refer to «Valve cluster connection» for
details.
7. Connect link cable [6] between Slave valve(s) and Master valve (link adapter). Refer to «Valve cluster connection» for
correct wiring.
8. Connect power supply [5] to each valve (connector: POWER). Refer to chapter «Electrical connection» for correct
wiring.
Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the
valve enters the safety mode and is not operative. Refer also to «Safety mode».
9. These valves have a double sealed rotary feedthrough with intermediate pumping port for the actuator shaft. This port
(1/8“ ISO/NPT) may optionally be connected to the vacuum line.
10. These valves may optionally be equipped with a heating device. Connect VAT heating device according to manual of
respective heating device.
11. Perform «Setup procedure» to prepare valve cluster for operation.
Note: Without performing the setup procedure the valve cluster will not be able to do pressure control.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 9/77
2.3 Tightening torque
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following
table. Higher tightening torques deforms the valve body and may lead to malfunction of the valve.
2.3.1 Mounting with centering rings
ISO-F ISO-F
Valve size max. tightening torque
(Nm) max. tightening torque (lbs . ft)
DN100 / 4“
(65040 - . . . . - . . . . ) 8-10 6-8
DN160 / 6“
(65044 - . . . . - . . . . ) 13-15 9-11
DN200 / 8“
(65046 - . . . . - . . . . ) 13-15 9-11
DN250 / 10“
(65048 - . . . . - . . . . ) 17-20 13-15
hole depth (mm) hole depth (inch)
DN100 / 4“
(65040 - . . . . - . . . . ) 12 0.47
DN160 / 6“
(65044 - . . . . - . . . . ) 14 0.55
DN200 / 8“
(65046 - . . . . - . . . . ) 15 0.59
DN250 / 10“
(65048 - . . . . - . . . . ) 16 0.63
Caution: Make sure that screws are not too long otherwise the valve body may be damaged.
Note: Use slightly lubricated screws.
Refer to «Spare parts and accessories» for centering rings ordering numbers.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 10/77
2.3.2 Mounting with O-ring in grooves
ISO-F JIS ASA-LP
ISO-F JIS ASA-LP
Valve size max. tightening torque
(Nm) max. tightening torque (lbs . ft)
DN100 / 4“
(65040 - . . . . - . . . . ) 20-23 35-40 35-40 15-17 26-30 26-30
DN160 / 6“
(65044 - . . . . - . . . . ) 35-40 35-40 35-40 26-30 26-30 26-30
DN200 / 8“
(65046 - . . . . - . . . . ) 35-40 35-40 80-90 26-30 26-30 59-67
DN250 / 10“
(65048 - . . . . - . . . . ) 35-41 65-70 80-90 26-30 48-52 59-67
hole depth (mm) hole depth (inch)
DN100 / 4“
(65040 - . . . . - . . . . ) 12 12 12 0.47 0.47 0.47
DN160 / 6“
(65044 - . . . . - . . . . ) 14 14 14 0.55 0.55 0.55
DN200 / 8“
(65046 - . . . . - . . . . ) 15 15 15 0.59 0.59 0.59
DN250 / 10“
(65048 - . . . . - . . . . ) 16 16 16 0.63 0.63 0.63
Caution: Make sure that screws are not too long otherwise the valve body may be damaged.
Note: These torques are valid if depth of the mounting screws is min. 1 x thread diameter. Make sure that screws in use
are capable to withstand applied torques. Lubricate screws slightly.
2.4 Admissible forces
Forces from evacuating the system, from the weight of other components, and from baking can lead to deformation and
malfunctioning of the valve. Stress has to be relieved by suitable means, e.g. bellows sections.
Axial tensile or
compressive force «FA»
Bending moment «M»
Valve size N lb. Nm lbf.
DN100 / 4“
(65040 - . . . . - . . . . ) 1000 220 40 30
DN160 / 6“
(65044 - . . . . - . . . . ) 2000 440 80 60
DN200 / 8“
(65046 - . . . . - . . . . ) 2000 440 80 60
DN250 / 10“
(65048 - . . . . - . . . . ) 2500 550 100 75
For a combination of both forces (FAand M) the values are invalid.
Verify that the depth of the mounting screws is min. 1 x thread diameter.
Please contact VAT for more information.
F
A
M

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 11/77
2.5 Requirements to sensor connection
To achieve fast and accurate pressure control a fast
sensor response is required.
Sensor response time: < 50ms
The sensor is normally connected to the chamber by a
pipe. To maintain that the response time is not degraded
by this connection it needs to meet the following
requirements:
Inner diameter of connection pipe: > = 10 mm
Length of connection pipe: < = 300 mm
These conductance guidelines must include all valves
and limiting orifices that may also be present.
Make also sure that there is no obstruction in front of
sensor connection port inside the chamber.
The sensor should also be mounted free of mechanical
shock and vibration.
Dynamic stray magnetic fields may introduce noise to
sensor output and should be avoided or shielded.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 12/77
2.6 Electrical connection
2.6.1 Sensor supply concepts
This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve
version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC
from the 24 VDC.
Concepts:
•External + 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC
sensors. Refer to chapter «2.6.2 Power and sensor connection (+24 VDC sensors)» for schematic and correct
wiring.
•External ±15 VDC supplied to POWER connector is feed through to SENSOR connector to supply ±15 VDC
sensors. Refer to chapter «2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module»
for schematic and correct wiring.
•External + 24 VDC supplied to POWER connector is converted into ±15 VDC by the valve internal SPS and
supplied to SENSOR connector to supply ±15 VDC sensors. Refer to chapter «2.6.4 Power and sensor
connection (±15 VDC sensors) with optional SPS module» for schematic and correct wiring.
Valve versions:
•650 . . - . . T. - . . . . / 650 . . - . . U. - . . . . SPS module not included
•650 . . - . . V. - . . . . / 650 . . - . . W. - . . . . SPS module included
•650 . . - . . . S- . . . . slave valve, no sensor connection
Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 13/77
2.6.2 Power and sensor connection (+24 VDC sensors)
[650 . . - . . T. - . . . . / 650 . . - . . U. - . . . . versions recommended]
Note:
•Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
•Connect the ±24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above.
Do not connect other pins, that may damage power supply or controller!
•Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be
bridged for operation!
An optional switch would allow
for motor interlock to prevent
valve from moving.
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 14/77
2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module
[650 . . - . . T. - . . . . / 650 . . - . . U. - . . . . versions only
Note:
•Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
•Connect the ±15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above.
Do not connect other pins, that may damage power supply or controller!
•Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be bridged for
operation!
An optional switch would allow for motor
interlock to prevent valve from moving.
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 15/77
2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module
[650 . . - . . V. - . . . . / 650 . . - . . W. - . . . . versions only]
Note:
•Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
•Connect the ±15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above.
Do not connect other pins, that may damage power supply or controller!
•Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be
bridged for operation!
An optional switch would allow
for motor interlock to prevent
valve from moving.
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 16/77
2.6.5 Power connection for Slave valve only
[650 . . - . . . S- . . . . or valves configured as slave]
Note: Do not connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
2.6.6 RS485 interface connection
Refer to «Schematics» for wiring information.
2.6.7 Service port connection
The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer.
This requires a service cable and a software from VAT. You can either use our freeware 'Control View', which can be
downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.
The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and
not for permanent control.
Refer also to «Local Operation» for details and to «Spare parts / Accessories» for ordering numbers of service cable and
software.
Connector: Use only screws with 4-40UNC thread for fastening the service port connector!
Pins 4 and 8 must be
bridged for operation!
An optional switch would allow
for motor interlock to prevent
valve from moving.

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 17/77
2.6.8 Valve cluster connection
The valve cluster uses a two wire bus for the inter communication between the Master and the Slave valves. The valves
are connected in a daisy chain and the bus must be terminated on both sides by a 120resistor that can be set in the
link adapter of the valve (refer to chapter «2.6.8.1 Link adapter»).
120terminator category 5 link cable 120terminator
valve cluster daisy chain

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 18/77
2.6.8.1 Link adapter
Link adapter
2x RJ45 jack (female)
1x Service port
Inside view with terminating resistor
Factory default setting
Terminating resistor OFF

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 19/77
Setting for first and last valve in the
chain
Terminating resistor ON
2.6.8.2 Link cable
RJ45 pinning: active pins 4 and 5
Pin Description
1 not used
2 not used
3 not used
4 Data
5 Data
6 not used
7 not used
8 not used
VAT recommends a cable with the following specification:
•Standard patch cable
•Category 5 or higher
•Double ended with shielded RJ45 connector
•Straight through connection 1:1

Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email [e-mail] www.vatvalve.com 271149EA
2007-06-12 20/77
3 Operation
Operation is allowed after completion of the installation procedure only.
3.1 Introduction
The valve cluster solution is designed to operate multiple valves (exhaust lines) installed on a single process chamber in
parallel. The system consists of one Master valve and a number of Slave valves. A valve cluster can have up to 255
valves. Each valve in the Cluster has a unique cluster address (see chapter «Cluster address configuration (setup step
2)» for details). A digital field bus system is used for the inter communication between the Master and the Slave valves.
The Master valve is taking care of the pressure control, while the Slave valves are following the Master valves plate
position. It can be operated in pressure control mode or in position control mode. In both cases local or remote operation
is possible.
Therefore the host system mainly communicates with the Master valve. The Master valve then takes care of controlling the
Slave valves. All status information about the condition of each individual valve in the Cluster can be requested from the
Master valve.
For basic operation of the valve cluster the known standard command set is used. In addition there are special commands
available for getting status information of each valve connected to the Cluster. Further it is possible to control individual
Slave valves independently. For example, it is possible to close a single valve, while the valve cluster is still operational.
There is also a parameter (Position offset) for fine tuning single exhaust lines.
120terminator category 5 cables 120terminator
valve cluster daisy chain