VAT 650 Series Assembly instructions

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 1/42
Pendulum control & isolation valve
with Integrated Controller and RS232 Interface
This manual is valid for the valve ordering number(s):
65048-JHGH-BHN3
configured with firmware 650L.1D.10
The fabrication number is indicated on each product as per the label below
(or similar):
made in Switzerland
FabricationNo.:
650
..
–
. . . .
–
. . . . / . . . .
A
–
. . . . . .
Fabrication number
Read declaration carefully before you start any other
action!
Keep body parts and objects away from the valve
opening!
Attention! Hot surfaces; do not touch!
Loaded springs and/or air cushions are potential
hazards!
Wear gloves!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 2/42
Imprint
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Manufacturer
Website
www.vatvalve.com
Phone
[phone]
Fax
[phone]
Email
[e-mail]
Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Copyright © VAT Vakuumventile AG 2009
No part of these Instructions may be reproduced in any way (photocopies, microfilms or any
other reproduction processes) nor may it be manipulated with electronic systems, duplicated or
distributed without written permission from VAT. Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT firmware are
intended for use with VAT products. The VAT firmware contains a limited, time unlimited user
license. The VAT firmware may not be used for purposes other than those intended nor is it
permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give
copies of the VAT firmware to other people.
The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle
third parties to consider these names to be unprotected and to use them freely. This is in
accordance with the meaning of the laws and acts covering brand names and trademarks.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 3/42
Contents:
1Use of product .......................................................................................................................................................... 4
1.1 Technical data.................................................................................................................................................... 4
1.1.1 Control and actuating unit........................................................................................................................ 4
1.1.2 Valve unit ................................................................................................................................................. 4
2Installation................................................................................................................................................................. 5
2.1 Unpacking.......................................................................................................................................................... 5
2.2 Installation into the system................................................................................................................................. 5
2.3 Tightening torque............................................................................................................................................... 7
2.3.1 Mounting with centering rings .................................................................................................................. 7
2.3.2 Mounting with O-ring in grooves .............................................................................................................. 7
2.4 Admissible forces............................................................................................................................................... 8
2.5 Requirements to sensor connection .................................................................................................................. 8
2.6 Electrical connection.......................................................................................................................................... 9
2.6.1 Ground connection................................................................................................................................... 9
2.6.2 Sensor supply concepts......................................................................................................................... 10
2.6.3 Power and sensor connection (+24 VDC sensors)................................................................................11
2.6.4 Power and sensor connection (±15 VDC sensors)................................................................................ 13
2.6.5 RS232 connection.................................................................................................................................. 15
2.6.6 Service port connection ......................................................................................................................... 15
3Operation................................................................................................................................................................ 15
3.1 Introduction...................................................................................................................................................... 15
3.1.1 Local operation ...................................................................................................................................... 15
3.1.2 Remote operation .................................................................................................................................. 15
3.1.3 Service indication................................................................................................................................... 16
3.2 Operation under increased temperature .......................................................................................................... 17
3.3 Behaviour at power on..................................................................................................................................... 17
3.4 Behavior in case of power failure..................................................................................................................... 17
3.5 Display information........................................................................................................................................... 17
3.5.1 Power up:............................................................................................................................................... 18
3.5.2 Operation:.............................................................................................................................................. 18
3.5.3 Fatal error: ............................................................................................................................................. 18
3.6 Setup procedure............................................................................................................................................... 19
3.7 Close Valve...................................................................................................................................................... 21
3.8 Open Valve ...................................................................................................................................................... 21
3.9 Valve Position Control...................................................................................................................................... 22
3.10 Chamber Pressure Control........................................................................................................................ 22
3.10.1Operation with 2 Sensors....................................................................................................................... 22
3.11 RS232 Interface......................................................................................................................................... 23
3.11.1Functions and Wiring............................................................................................................................. 23
3.11.2Digital Inputs.......................................................................................................................................... 24
3.12 RS232 Commands:................................................................................................................................... 24
3.12.1Control commands................................................................................................................................. 25
3.12.2Inquiry commands.................................................................................................................................. 26
3.12.3Setup command..................................................................................................................................... 27
3.12.4Sensor delay command ......................................................................................................................... 28
3.12.5Error messages...................................................................................................................................... 28
4Trouble shooting..................................................................................................................................................... 29
5Maintenance & repairs............................................................................................................................................ 31
5.1 Preventive maintenance procedures................................................................................................................ 32
6Drawing................................................................................................................................................................... 39
7Spare parts............................................................................................................................................................. 40
7.1 Control and actuating unit................................................................................................................................ 40
7.2 Accessories...................................................................................................................................................... 41
8Warranty................................................................................................................................................................. 42

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 4/42
1 Use of product
This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure
control applications
Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only!
Other applications are only allowed with the written permission of VAT.
1.1 Technical data
1.1.1 Control and actuating unit
Power supply input + 24 V DC (±10%), 2.1A max.
Sensor power supply output + 24 V DC / 1500mA max.
Power consumption 50W (max. current; operation of valve with max. load)
•This figure includes control and motor power consumption
Sensor signal input 0 - 10 VDC / Ri > 100kΩ
Ambient temperature 0°C to +50 °C (35 °C recommended)
Control accuracy Pressure: 0.1% of sensor full scale
Conductance: 0.1% of the valve stroke
Position resolution / position control capability 12'444 steps
1.1.2 Valve unit
Pressure range at 20°C 1 x 10-6 mbar to 1.2 bar (abs)
Leak rate to outside at 20°C 1 x 10-5 mbar ls-1
Leak rate valve seat at 20°C 1 x 10-4 mbar ls-1
Cycles until first service
- isolation cycles (open - closed - open)
- throttling cycles (open - max. throttle - open)
200’000 (unheated and under clean conditions)
1’000’000 (unheated and under clean conditions)
Admissible operating temperature
- actuator ambient
- valve body
0°C to +50 °C (35 °C recommended)
10°C to +150 °C
Mounting position any (valve seat on chamber side is recommended)
Process side materials valve body, pendulum plate
sealing ring
other parts
seals
Aluminum 3.2315 (AA6082)
Aluminum 3.2315 (AA6082),
1.4306 (304L)
1.4435 (316L), 1.4404 (316L), 1.4122, 1.4310
(301), 1.4303 (304), 1.4571
all Chemraz®657
seals atmosphere side - Rotary feedthrough Viton®
- Shaft sealing ring feedthrough Viton®
Max. differential pressure on gate during isolation 1200 mbar in either direction

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 5/42
Max. differential pressure on gate during
opening and throttling 5 mbar
Min. controllable conductance (N2molecular flow) 15 ls-1
Closing time throttling only 1.3 s typ.
Opening time throttling only 1.3 s typ.
Closing time throttling & isolation 3 s typ.
Opening time throttling & isolation 4 s typ.
Dimensions Refer to dimensional drawing
2 Installation
2.1 Unpacking
As this valve is a heavy component you should lift it with adequate equipment to prevent any injury to humans.
Do not lift this product at the control and actuating unit.
DN250 (10”) valves are equipped with attachment points (tapped holes). Add eyebolts to these attachment
points for lifting. The attachment points are indicated on the dimensional drawing of the specific valve part
number (available on request).
Never lay the valve down with controller / actuator downwards as the controller / actuator may be damaged.
2.2 Installation into the system
Do not connect or disconnect sensor cable when device is under power.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 6/42
1. Install S65.0 pressure control valve [1] into the vacuum system.
Note: Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated
on the dimensional drawing.
Valve seat side should face process chamber. The valve seat side is indicated by the symbol "∇" on the valve flange.
Caution: Do not tighten the flange screws stronger than indicated under «Tightening torque».
Caution: Do not admit higher forces to the valve than indicated under «Admissable force».
2. Connect compressed air
Compressed air pressure (above ATM) must be in the range of: 4 - 7 bar / 55 - 100 psi.
Use only clean, dry or slightly oiled air.
Connect compressed air supply to actuator connection labeled ‘IN’
Connect compressed air return line to actuator connection labeled ‘OUT’
OUT: return line
IN: compressed air supply
Figure 1
3. Install sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given under
«Requirements to sensor connection».
4. Connect sensor cable [3] to sensor(s) and then to valve (connector: SENSOR).
Input for second sensor is available for 650 . . - . . . Q- . . . . only.
Refer to chapter «Electrical connection» for correct wiring.
5. Connect valve to RS232 interface [4] (Interface connector).
Refer to «RS232 connection» for correct wiring.
6. Connect power supply [5] to valve (connector: POWER).
Refer to chapter «Electrical connection» for correct wiring.
7. This valve is equipped with a heating device. Connect VAT heating device according to manual of the heating device.
8. Perform «Setup procedure» to prepare valve for operation. For further information in chapter «Setup procedure».

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 7/42
2.3 Tightening torque
Note:
The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment,
and lubrication.
The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min. 1d), and
the friction coefficient of the screw-flange connection (µtotal = (µscrew thread-helicoil + µunder screw head)/2) is bigger than 0.12. Lower
friction coefficients may damage the valve, as the resulting preload force gets too high. Therefore for other friction
coefficients the torque needs to be adapted. Please review design guidelines for Helicoil-Screw connections and make
sure that screws in use are capable to withstand applied torques, are appropriate for the application and are not too long.
Too long screws may damage the valve, the immersion depth should not exceed (hole depth – 1 mm).
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following
tables.
2.3.1 Mounting with centering rings
ISO-F ISO-F
Valve size max. tightening torque
(Nm) max. tightening torque (lbs . ft)
DN250 / 10” 17 – 20 13 – 15
hole depth (mm) hole depth (inch)
DN250 / 10” 16 0.63
Refer to «Spare parts and accessories » for centering ring ordering numbers.
2.3.2 Mounting with O-ring in grooves
ISO-F JIS ASA-LP
ISO-F JIS ASA-LP
Valve size max. tightening torque
(Nm) max. tightening torque (lbs . ft)
DN250 / 10” 35-40 65-70 80-90 26-30 48-52 59-67
hole depth (mm) hole depth (inch)
DN250 / 10” 16 16 16 0.63 0.63 0.63

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 8/42
2.4 Admissible forces
Forces from evacuating the system and from the weight of other components can lead to deformation of the valve body
and to malfunction of the valve. The stress has to be relieved by suitable means. The following forces are admissible:
Axial tensile or
compressive force «FA» Bending moment «M»
Valve size N lb. Nm lbf.
DN250 / 10” 2500 550 100 75
For a combination of both forces (FAand M) the values are invalid.
Verify that the depth of the mounting screws is min. 1 x thread diameter.
Please contact VAT for more information.
FA
M
Figure 1
2.5 Requirements to sensor connection
To achieve fast and accurate pressure control a fast
sensor response is required.
Sensor response time: < 50ms
The sensor is normally connected to the chamber by a
pipe. To maintain that the response time is not badly
affected by the connection it needs to meet the following
requirements:
Diameter of connection pipe: > = 10 mm
Length of connection pipe: < = 300 mm
These guidelines must include all valves and limiting
orifices that may also be present.
Make also sure that there is no obstruction in front of
sensor connection port inside the chamber.
The sensor should also be mounted free of mechanical
shock and vibration.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 9/42
2.6 Electrical connection
2.6.1 Ground connection
Recommendation for ground strap between controller and system (chassis)
Material L (Length max.) B1 (min.) B2 (min.) d1 (∅) d2 (∅)
copper tinned 200 mm 25 mm 25 mm 4.5 mm customized
Note: Connection plates of ground strap must be total plane for a good electrical contact!
Note: The connection point at chassis (PE) must be blank metal (not coated).
It is also possible to connect the ground strap at system chamber if it is well connected to PE.
Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap)
d1
B1
System
Chassis (PE)
(Protective Earth)
B2
d2
L
Ground strap PE

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 10/42
2.6.2 Sensor supply concepts
This valve offers 2 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and that is
used.
Concepts:
•External + 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC
sensors. Refer to chapter «Power and sensor connection (+24 VDC sensors)» for schematic and correct wiring.
oand External + 24 VDC supplied direct to supply 24 VDC sensors.
•External ±15 VDC supplied to POWER connector is feed through to SENSOR connector to supply ±15 VDC
sensors. Refer to chapter «Power and sensor connection (±15 VDC sensors)» for schematic and correct wiring.
oand External ±15 VDC supplied direct to supply ±15 VDC.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 11/42
2.6.3 Power and sensor connection (+24 VDC sensors)
2.6.3.1 Sensor power wiring via controller
Note:
•Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
•Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
•Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 12/42
2.6.3.2 Sensor power wiring external
Note:
•Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
•Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
•Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 13/42
2.6.4 Power and sensor connection (±15 VDC sensors)
2.6.4.1 Sensor power wiring via controller
Note:
•Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
•Connect the ±15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
•Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.
Fuse 1A
Fuse 1A

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 14/42
2.6.4.2 Sensor power wiring external
Note:
•Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
•Connect the ±15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
•Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Low range sensor may be connected
to sensor 1 or sensor 2 input.
Do configuration accordingly.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 15/42
2.6.5 RS232 connection
Refer to «Functions and Wiring» for wiring information.
2.6.6 Service port connection
The service port allows to connect the valve to a RS232 port of a computer. A special cable and the service software from
VAT is required for operation. Refer to «Spare parts and accessories» for ordering numbers.
3 Operation
Operation is allowed after completion of the installation procedure only.
3.1 Introduction
This product allows downstream pressure control for a vacuum chamber. Normally it will be used in pressure control
mode. It is also possible to operate it in position control mode. In both cases local or remote operation is possible.
3.1.1 Local operation
For purposes as system setup, system testing and
maintenance the valve can be operated via the service port
by means of a computer. This requires a service software
from VAT.
Refer to «Spare parts and accessories » for ordering
number.
Screenshot of the service software
3.1.2 Remote operation
This product is equipped with a RS232 interface to allow for remote operation. See section «RS232 Interface» for details.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 16/42
3.1.3 Service indication
This product is able to indicate that the valve unit needs to be cleaned.
A service request is indicated when the control unit detects that motor steps are apparently not effective. This may happen
when the valve unit is heavy contaminated. These ‚lost‘ steps are recognized an will be repeated to allow for further
operation in the short term. But in the medium term the valve unit requires cleaning.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 17/42
3.2 Operation under increased temperature
See «Technical data»
3.3 Behaviour at power on
Valve position Behaviour
closed Valve will stay in closed position, with the 1st command the valve will be
synchronized before the command is executed (max. 2 sec)
open or in throttle position valve will synchronize without any command and finally close
3.4 Behavior in case of power failure
Valve position Behaviour
closed no change
open or in throttle position no change
3.5 Display information
There is a 4 digit display located on the panel. It displays configuration, status and position information.
For details see below.
1 2 3 4 Display

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 18/42
3.5.1 Power up:
Digit 1 Digit 2 Digit 3 Digit 4 Description
1 D 0 2
At first all dots are illuminated
then configuration is displayed:
•Firmware version
(1st information for about 3s)
S 2
= RS232Interface
0
= w/o ±15 VDC Sensor
Power Supply
1
= with ±15 VDC
Sensor Power Supply
1
= 1 sensor version
2
= 2 sensor version
•Controller configuration
(2nd information for about 3s)
‘S’ in the first digit indicates that
power up synchronization is
running.
3.5.2 Operation:
Digit 1 Digit 2 Digit 3 Digit 4 Description
L AUTOLEARNING running
C Valve closed
O Valve open
V POSITION CONTROL mode
active
P PRESSURE CONTROL mode
active
H HOLD (position frozen) activated
Z
Valve position:
Service request (service flag):
0 . . . 100
SR
(%, 0 = Close / 100 = Open)
(Valve requires cleaning)
ZERO ADJUST running
T
Plasma mode active
Note: RxD / TxD activity of RS232 communication is displayed by 2 blinking indicators in Digit 2.
3.5.3 Fatal error:
Digit 1 Digit 2 Digit 3 Digit 4 Description
E Error code, see section «4. Troubleshooting » for details Fatal error occurred

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 19/42
3.6 Setup procedure
To enable this valve for pressure control all setup steps must be performed.
In case only position control is required it’s sufficient to perform steps 1 to 4 and potentially step 7.
Setup step Description
1 POWER UP
Turn on external 24VDC power supply (and external sensor power supply if required).
Note: See 3.3 Behaviour at power on. Display shows configuration of product until
synchronization cycle is done, otherwise refer to chapter «Display information». After
synchronization the valve is ready for operation.
2 RS232
CONFIGURATION
Select baudrate, parity, data length and number of stop bits of RS232 protocol in local
operation via service port using the service software. Refer to «Spare parts and
accessories» for ordering details.
3 DEVICE
CONFIGURATION
Make the following configurations in local operation via service port or via RS232
command.
1. Select RS232 communication value range for pressure and position. Refer to
«RS232 setup commands» for details.
2. Select function of CLOSE VALVE and OPEN VALVE digital inputs. These may be
configured as ‘not inverted‘, ‘inverted‘ or ‘disabled‘. Refer to «RS232 setup
commands» for details.
3. Disable or enable ZERO ADJUST function. Refer to «RS232 setup commands»
for details.
4. Two sensor operation
a) Select 1 or 2 sensor operation.
b) Select sensor full scale ratio between sensor 1 and 2.
Refer also to «Operation with 2 sensors» and «RS232 setup commands» for
details.
4 ZERO ADJUST
Perform ZERO ADJUST to compensate for sensor offset by local operation via service
port or via RS232 command on Interface port.
1. OPEN VALVE and evacuate process chamber to high vacuum.
2. Wait until base pressure is reached and sensor(s) do not shift anymore.
3. Initiate ZERO ADJUST.
Refer to «RS232 setup commands» for details of function.

Installation, Operating & Maintenance Instructions
Series 650, DN 250 (I.D. 10"), RS232
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected]om www.vatvalve.com 284654EA
2010-04-17 20/42
Setup step Description
Perform AUTOLEARNING by local operation via service port or via RS232 command
on Interface port.
1. Valve must be open and process chamber at high vacuum.
2. Set specific gas flow according to requirements below. Autolearn does not need to
be performed with the process gas. Instead N2or Ar may be used.
3. Then initiate AUTOLEARNING. Refer to «RS232 setup commands» for details of
function.
Note: Autolearning may take several minutes. Do not interrupt the routine as a single
full run is required to ensure fast and accurate pressure control over the full
position range. The PID controller covers 5% to 5000% of the gas flow which was
used for autolearning.
Do not use a different gasflow for autolearning than determined
below. Otherwise pressure control performance may be insufficient.
Gasflow for autolearning (optimized):
This calculation method should be applied if the full pressure / flow regime is known.
So the most suitable autolearning gas flow for a specific range can be determined.
This may reduce the required time of autolearning and ensures best pressure control
responses.
•For that purpose the conductance that is required to control this hypothetical working
point (highest pressure / lowest flow) must be calculated with the following
formula.
Q
min
LR=
96
•
p
max
LR required lower conductance [l/s]
Qmin min. gasflow while control [sccm]
Pmax max. pressure to control [Torr]
•Compare this value with the minimal conductance of the valve (refer to «Technical
data»). If required conductance is higher you gain from running autolearning with
an optimized gasflow calculated with the following formula.
QL= 80 •pSFS •LR
QLgasflow for autolearning [sccm]
Pmax max. pressure to control [Torr]
LR required lower conductance [l/s]
•Set pressure limit for autolearning to Pmax (max. pressure to control). Refer to
«RS232 setup commands» for details.
Gasflow for autolearning (full range):
This calculation method should be applied if the full pressure / flow regime is not
known. In this case an autolearning gas flow is determined that enables pressure
control over the full position range of the valve.
5 AUTOLEARNING
QL= 40 •pSFS •Lmin
QL: gasflow for autolearning [sccm]
pSFS sensor full scale pressure [Torr]
Lmin min. controllable conductance of valve [l/s]
(refer to «Technical data»)