Veeco K465i GaN Installation guide

K465i GaN
Operations and Maintenance
P/N 1212831 Rev C
June 2012

About Veeco
Veeco Instruments provides specialized technical products and services (demonstrated on
http:\\www.Veeco.com). Veeco’s TurboDisc MOCVD Systems, located in Somerset, NJ,
develops and manufactures MOCVD devices for clients throughout the world.
Copyright Notice
Copyright ©2012, Veeco Instruments, Inc. All rights reserved. All document content is
Veeco Confidential.
Veeco Instruments, Inc.
145 Belmont Drive
Somerset, NJ 08873
Phone: [phone]
Revision History
DOC VERSION
NUMBER
REVISION DATE
PAGES AFFECTED
CHANGE
1212831 Rev A
Jan 5, 2012
Initial Release
1212831 Rev B
June 8, 2012 JAE
all
Chapters 1, 3, 4, 5, Appendix
1212831 RevC
Aug 24, 2012 JAE
all
Chapter 5 Procedures
Disclaimer
This document describes the proper, safe operation and maintenance practices of highly
complex technical equipment. Every effort has been made to include compliant instructions,
warnings and guidelines to ensure the safe and productive use of the systems described in
this document.
Veeco Technical Publications has carefully reviewed this document to ensure its reliability
and completeness. If you discover any errors or omissions, please contact:
Veeco Technical Publications
mailto:[e-mail]

K465i Operations and Maintenance P/N 1212831 Rev C
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Copyright ©2012 Veeco Instruments, Inc. Confidential
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Contents
CHAPTER 1. SAFETY SUMMARY .................................................... 1-1
General Safety Notices .......................................................................................1-1
SECTION 1.1. WARNING,CAUTION,AND NOTE USAGE ......................................................1-3
Symbol Usage ...................................................................................................1-3
General Precautions ...........................................................................................1-5
Additional Safety Precautions ..............................................................................1-6
Hazardous Materials...........................................................................................1-6
Safety Interlocks and Alarms ..............................................................................1-8
Interlock Override Safety Notice ..........................................................................1-9
Safety Switches............................................................................................... 1-10
SECTION 1.2. LOCK OUT/TAG OUT INSTRUCTIONS AND PROCEDURE .................................... 1-13
Type and Magnitude of Energy .......................................................................... 1-13
CHAPTER 2. TURBODISC K465I GAN MOCVD SYSTEM
SPECIFICATIONS......................................................................... 2-17
SECTION 2.1. GENERAL SPECIFICATIONS .................................................................... 2-17
Company Address............................................................................................2-17
System Specifications ...................................................................................... 2-17
SECTION 2.2. SEISMIC SPECIFICATIONS ..................................................................... 2-18
Design Considerations ......................................................................................2-18
Weight of the Major Sub-Assemblies ..................................................................2-20
Reference Drawings .........................................................................................2-20
SECTION 2.3. CERTIFICATIONS ................................................................................2-21
CE Certifications .............................................................................................. 2-21
EMC Certifications............................................................................................ 2-21
SEMI Certifications...........................................................................................2-21
RoHs Compliance............................................................................................. 2-21
CHAPTER 3. SYSTEM OVERVIEW .................................................. 3-1
SECTION 3.1. SYSTEM FUNCTION AND USAGE.................................................................3-3
SECTION 3.2. ELECTRICAL/CIRCUIT BREAKER ASSEMBLY (CBA) MODULE ................................3-6
SECTION 3.3. ELECTRIC RACK (ECA)/POWER SUPPLY MODULE ............................................3-7
SECTION 3.4. SOURCE DELIVERY ASSEMBLY AND FLOW MODULE ........................................ 3-10
SECTION 3.5. REACTOR HOUSING ASSEMBLY/GROWTH CHAMBER MODULE ............................3-17
SECTION 3.6. TRANSFER HOUSING ASSEMBLY/THA ....................................................... 3-25
SECTION 3.7. EXHAUST MODULE (PEA) ..................................................................... 3-30
SECTION 3.8. SYSTEM ELECTRONICS ......................................................................... 3-33
DeviceNet Network .......................................................................................... 3-33
SECTION 3.9. CONTROL SOFTWARE ...........................................................................3-36
SECTION 3.10. IN-SITU MONITORING........................................................................ 3-38
SECTION 3.11. WATER-COOLING SYSTEM ...................................................................3-39
SECTION 3.12. ALARMS AND INTERLOCKS ...................................................................3-40
SECTION 3.13. SYSTEM PROCESSES .......................................................................... 3-41

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Copyright ©2012 Veeco Instruments, Inc. Confidential
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CHAPTER 4. OPERATIONS ............................................................ 4-1
SECTION 4.1. K465I GANSYSTEM STARTUP .................................................................4-1
Procedures in this Section...................................................................................4-3
Reference Drawings ...........................................................................................4-3
Associated Procedures in this Section ...................................................................4-3
Daily Startup and System Readiness ....................................................................4-4
Startup Following a Maintenance Shutdown ..........................................................4-5
Startup Following a Facilities Maintenance Power Shutdown or Emergency Electrical Stop
.......................................................................................................................4-9
SECTION 4.2. VACUUM PUMP OPERATION .................................................................... 4-11
Procedures in this Section................................................................................. 4-12
Reference Drawings .........................................................................................4-12
Associated Procedures...................................................................................... 4-12
Process Pump.................................................................................................. 4-13
Pre-Operation of the Ebara Process Pump ........................................................... 4-14
Ebara Process Pump......................................................................................... 4-17
Vacuum Pump ................................................................................................. 4-19
Standard Operation.......................................................................................... 4-19
Turbo Pump ....................................................................................................4-20
SECTION 4.3. WAFER LOADING AND UNLOADING ...........................................................4-21
Procedures in this Section................................................................................. 4-21
Reference Drawings .........................................................................................4-21
Associated Procedures...................................................................................... 4-21
Tools and Materials Checklist.............................................................................4-21
Loading Substrates Onto a Wafer Carrier ............................................................ 4-22
Unloading Substrates From a Wafer Carrier......................................................... 4-23
SECTION 4.4. PALLADIUM CELL OPERATION .................................................................4-25
Procedures in this Section................................................................................. 4-25
Reference Drawings .........................................................................................4-25
Operating Precautions ...................................................................................... 4-26
Cell Installation ...............................................................................................4-27
Cell Operation .................................................................................................4-27
Normal Operation ............................................................................................4-28
Shutdown ....................................................................................................... 4-29
Power Failure Shutdown ................................................................................... 4-29
Cell Removal................................................................................................... 4-30
SECTION 4.5. TEMPERATURE CONTROLLERS .................................................................4-31
Procedures in this Section................................................................................. 4-31
Reference Drawings .........................................................................................4-31
Reference Documents ......................................................................................4-31
Configuration of Temperature Controller ............................................................. 4-32
SECTION 4.6. TEMP CONTROL COMMUNICATION ............................................................4-33
Temperature Control ........................................................................................ 4-33
Over-Temperature Control ................................................................................ 4-33
Selecting Temperature Control Modes ................................................................4-35
Temperature Settings.......................................................................................4-36
SECTION 4.7. PYROCONTROL OPERATION .................................................................... 4-38
Procedures in this Section................................................................................. 4-38
Associated Procedures:..................................................................................... 4-38

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Copyright ©2012 Veeco Instruments, Inc. Confidential
All Rights Reserved
Pyrocontrol Introduction ................................................................................... 4-39
Description of PyroControl ................................................................................4-40
Using PyroControl for Temperature Control On K465i GaN Systems .......................4-41
SECTION 4.8. ROBOT SETUP AND ADJUSTMENT .............................................................4-41
Procedures in this Section................................................................................. 4-42
Reference Drawings .........................................................................................4-42
Associated Procedures...................................................................................... 4-43
Recommended Tools and Materials ....................................................................4-43
Identifying Stations for the Transfer System .......................................................4-44
Robot Axis Identification ...................................................................................4-46
Basic Command Overview.................................................................................4-47
K-Series Tools and Robot Stations .....................................................................4-49
Setting Up Stations for the Transfer Robot .......................................................... 4-50
Troubleshooting............................................................................................... 4-52
SECTION 4.9. K465I GANSYSTEM SHUTDOWN ............................................................4-53
Procedures in this Section................................................................................. 4-53
Reference Drawings .........................................................................................4-53
Associated Procedures:..................................................................................... 4-53
End-Shift Idle Procedure................................................................................... 4-54
Maintenance Shutdown Procedure......................................................................4-55
Facilities Maintenance Shutdown Procedure......................................................... 4-60
Emergency Electrical Shutdown ......................................................................... 4-62
CHAPTER 5. MAINTENANCE AND REPAIR ..................................... 5-1
SECTION 5.1. ROUTINE MAINTENANCE .........................................................................5-2
Routine Maintenance Schedule ............................................................................5-2
SECTION 5.2. BASIC MAINTENANCE STEPS ....................................................................5-4
Maintenance Preparation ....................................................................................5-5
SECTION 5.3. K465I GANREACTOR CHAMBER MAINTENANCE .............................................5-6
Procedures in this Section...................................................................................5-6
Reference Drawings ...........................................................................................5-6
Associated Procedures........................................................................................5-6
Associated Documents........................................................................................5-7
Recommended Tools and Materials ......................................................................5-8
Preparing The Reactor for Maintenance.................................................................5-9
Hardware Maintenance Key Switch (Nexus)...........................................................5-9
Flow Flange Removal........................................................................................ 5-20
Heater Removal............................................................................................... 5-34
Reactor Chamber Cleaning................................................................................ 5-36
Heater Reinstallation........................................................................................ 5-45
Flow Flange Reinstallation................................................................................. 5-49
Reactor Chamber Reassembly/ System Restoration .............................................5-49
Preparing for Leak Checking.............................................................................. 5-50
SECTION 5.4. K465I GANFLOW FLANGE MAINTENANCE .................................................. 5-52
Procedures in this Section................................................................................. 5-52
Reference Drawings .........................................................................................5-52
Associated Procedures...................................................................................... 5-52
Associated Documents......................................................................................5-52
Recommended Tools and Materials ....................................................................5-53

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Copyright ©2012 Veeco Instruments, Inc. Confidential
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Flow Flange Disassembly Guide ......................................................................... 5-54
Flow Flange Reassembly ...................................................................................5-64
SECTION 5.5. K465I GANHEATER MAINTENANCE ......................................................... 5-98
Procedures in this Section................................................................................. 5-98
Reference Drawings .........................................................................................5-99
Associated Procedures...................................................................................... 5-99
Associated Documents......................................................................................5-99
Recommended Tools and Materials .................................................................. 5-100
Heater Assembly Removal .............................................................................. 5-101
Preparation for Filament Replacement .............................................................. 5-106
Installation of Replacement Heater Assembly .................................................... 5-106
Middle and Outer Filament Replacements/Installations ....................................... 5-110
Reactor Chamber Reassembly/ System Restoration ........................................... 5-115
Preparing for Leak Checking............................................................................ 5-115
SECTION 5.6. K465I GANTRANSFER HUB CHAMBER MAINTENANCE .................................. 5-117
Procedures in this Section............................................................................... 5-119
Reference Drawings ....................................................................................... 5-119
Associated Procedures.................................................................................... 5-119
Associated Documents.................................................................................... 5-119
Recommended Tools and Materials .................................................................. 5-120
Cleaning Procedure ........................................................................................ 5-122
Leak-Checking the Transfer Hub Chamber ........................................................ 5-123
Robot Maintenance ........................................................................................ 5-124
SECTION 5.7. PARTICLE FILTER MAINTENANCE ............................................................ 5-127
SECTION 5.8. PARTICLE FILTER MAINTENANCE ........................ERROR!BOOKMARK NOT DEFINED.
Equipment List .............................................................................................. 5-127
Supplies ....................................................................................................... 5-127
Fast-Flow Prevention: Safety........................................................................... 5-128
Leak Checking the Housing Assembly and Chamber ........................................... 5-146
Material Disposal and Documentation............................................................... 5-148
SECTION 5.9. BUBBLER AND BATH MAINTENANCE ........................................................ 5-150
Procedures in this Section............................................................................... 5-150
Reference Drawings ....................................................................................... 5-150
Associated Procedures.................................................................................... 5-150
Recommended Tools and Materials .................................................................. 5-151
Bubbler Replacement ..................................................................................... 5-152
Bath Initial Fill and Volume Adjustments........................................................... 5-157
Bath Composition Adjustments........................................................................ 5-158
SECTION 5.10. LEAK CHECKING ............................................................................. 5-159
Procedures in this Section............................................................................... 5-159
Reference Drawings ....................................................................................... 5-160
Recommended Tools and Materials .................................................................. 5-160
Methodology ................................................................................................. 5-161
Helpful Hints in Leak-Checking ........................................................................ 5-161
Initial Steps of Leak Checking ......................................................................... 5-163
Recommended Methodology for Leak Checking.................................................. 5-163
Plumbing Lines .............................................................................................. 5-164
VCR Fittings .................................................................................................. 5-164
Valves .......................................................................................................... 5-166

K465i Operations and Maintenance P/N 1212831 Rev C
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Copyright ©2012 Veeco Instruments, Inc. Confidential
All Rights Reserved
Mass Flow Controllers and Pressure Controllers ................................................. 5-168
Joints/Weldments/KF40/ISO 80/100 Lines ........................................................ 5-169
Lines downstream of the Process Pump ............................................................ 5-169
SECTION 5.11. GAS/HYDROGEN MONITORING ............................................................ 5-170
Procedures in this Section............................................................................... 5-170
Reference Drawings ....................................................................................... 5-170
Hydrogen Detection System............................................................................ 5-171
Scott Sentinel 6 Meter Basics .......................................................................... 5-173
Normal Operation .......................................................................................... 5-173
Calibration .................................................................................................... 5-173
SECTION 5.12. K465I GANDECOMMISSIONING INSTRUCTIONS ....................................... 5-174
Procedures in this Section............................................................................... 5-175
Reference Drawings ....................................................................................... 5-175
Associated Procedures.................................................................................... 5-175
Recommended Tools and Materials .................................................................. 5-176
Procedures in this Section............................................................................... 5-177
Reference Drawings ....................................................................................... 5-178
Associated Procedures.................................................................................... 5-178
Associated Documents.................................................................................... 5-178
Recommended Tools and Materials .................................................................. 5-179
Heater Assembly Removal .............................................................................. 5-180
Preparation for Filament Replacement .............................................................. 5-185
Installation of Replacement Heater Assembly .................................................... 5-185
Middle and Outer Filament Replacements/Installations ....................................... 5-189
Core System Decommissioning Instructions ...................................................... 5-194
Procedures in Decommissioning....................................................................... 5-194
CHAPTER 6. APPENDIX: OPTIONAL FEATURES ............................. 6-1
SECTION 6.1. GLOVEBOX .........................................................................................6-1
Glovebox Controls in Nexus Software ...................................................................6-1
Pump Down ......................................................................................................6-3
Vent Sequence ..................................................................................................6-4
Veeco/Fluens Glovebox Setup and Test ................................................................6-5

K465i Operations and Maintenance P/N 1212831 Rev C
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Copyright ©2012 Veeco Instruments, Inc. Confidential
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Figures
Figure 2-1. K465i GaN Cabinet.................................................................................... 2-18
Figure 3-1. K465i GaN MOCVD.....................................................................................3-1
Figure 3-2. K465i GaN System Controls Architecture ...........................................................3-2
Figure 3-3. K465i GaN System Assembly...................................................................3-3
Figure 3-4. THA Top View Illustration (Optional GloveBox on Right) .......................................3-25
Figure 3-5. DeviceNet Main Window ............................................................................. 3-33
Figure 3-6. DeviceNet Diagnostics Window.....................................................................3-34
Figure 3-7. Nexus Window......................................................................................... 3-36
Figure 3-8. Common DRT Configuration......................................................................... 3-38
Figure 3-9. Alarm Interface Sample/Nexus...................................................................... 3-40
Figure 3-10. Generic System Process Diagram ................................................................3-42
Figure 4-1. Front View Assembly ..............................................................................4-2
Figure 4-2. Generic System Diagram ........................................................................4-8
Figure 4-3. Ebara Pump, Front View ....................................................................... 4-15
Figure 4-4. Ebara ESA25 Pump, Side View............................................................... 4-15
Figure 4-5. LCD Controller..................................................................................... 4-16
Figure 4-6. Standard (not customized) Eurotherm Displays: Actual/left and through
ITools/right..................................................................................................... 4-32
Figure 4-7. Temperature Control Architecture ..................................................................4-33
Figure 4-8. Temperature Control Mode Selection Screen ...........................................4-36
Figure 4-9. Sample Control Mode Switch Routine ..................................................... 4-37
Figure 4-10. Pyrometer Locations on Wafer Carrier................................................... 4-40
Figure 4-11. Robot Transfer System Stations (Glovebox Configuration)....................... 4-44
Figure 4-12. Stop Robot Button ...................................................................................4-45
Figure 4-13. Robot Station Labels...........................................................................4-46
Figure 4-14. Top View Z Axis Elevator Motor Locations.............................................. 4-46
Figure 4-15. Generic EPO-IDLE Shutdown Diagram .......................................................... 4-55
Figure 4-16. Generic System Diagram...........................................................................4-56
Figure 4-17. EMO Button...........................................................................................4-62
Figure 5-1. Process Module 1 Window > Chamber Maintenance....................................5-9
Figure 5-2. Chamber Maintenance Window ..............................................................5-10
Figure 5-3. Toggle Switches on Power Supplies .........................................................5-10
Figure 5-4. Power Supply Breakers (Locked Out)....................................................... 5-11
Figure 5-5. Mandatory Instructions......................................................................... 5-11
Figure 5-6. Manual Valves for Bubblers H2, NH3, and SiH4........................................ 5-12
Figure 5-7. Continue>>Prepare Chamber for Maintenance ........................................ 5-13
Figure 5-8. Backfill Chamber.................................................................................. 5-13
Figure 5-9. Onscreen Directions, Chamber Maintenance Window ................................ 5-14
Figure 5-10. Close Manual Valves - MV53 and MV54 ................................................. 5-14
Figure 5-11. Manual Ball Valves - MV104 and MV105................................................ 5-15
Figure 5-12. Manual Ball Valve - MV106 ..................................................................5-16
Figure 5-13. Continue >> Backfill Chamber ............................................................. 5-16
Figure 5-14. (Backfill Process is Complete) The Reactor is at Atmosphere....................5-17
Figure 5-15. Valves MV104 and MV105 in Closed Position..........................................5-18
Figure 5-16. Valve MV106 in Closed Position............................................................ 5-19
Figure 5-17. Power to the Adixen Pump Turned Off. ..................................................5-20

K465i Operations and Maintenance P/N 1212831 Rev C
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Figure 5-18. Pyrometer, DRT and Real Temp Cables .................................................. 5-21
Figure 5-19. Disconnecting of Alkyl Heater Wires from PDU. ....................................... 5-22
Figure 5-20. T/C on DeviceNet Module .....................................................................5-23
Figure 5-21. Power for Lytron Heat Exchangers.........................................................5-24
Figure 5-22. Flow Flange Cooling Lines .................................................................... 5-25
Figure 5-23. Viewport and Reactor Band Cooling Lines...............................................5-26
Figure 5-24. CDA Lines for the Shutter .................................................................... 5-27
Figure 5-25. Molex connector for the Shutter Sensor. ................................................ 5-28
Figure 5-26. Flow Fange Assembly Gas Lines ........................................................... 5-29
Figure 5-27. Clamp Removal...................................................................................5-30
Figure 5-28. Lift Attached to the Flow Flange Assembly..............................................5-31
Figure 5-29. Manual Isolation Valves and Connections ..............................................5-32
Figure 5-30. InSitu Monitor Over Flow Flange ...........................................................5-33
Figure 5-31. Heater Baseplate Assembly Bottom View ..............................................5-34
Figure 5-32. Heater Baseplate Assembly .................................................................5-35
Figure 5-33. Heater Filaments................................................................................. 5-36
Figure 5-34. A: Vacuuming the chamber B: HEPA Filtered Toxic Materials, ESD-Grounded
Fireproof Vaccum Cleaner .................................................................................5-38
Figure 5-35. Removal of Exhaust Ring Following Removal of Ring Mounting Screws ......5-39
Figure 5-36. Liner for Heater Assembly (After Removal from Reactor)......................... 5-40
Figure 5-37. Wiping of Front Viewport..................................................................... 5-41
Figure 5-38. Wiping of the Pass-Thru Area .............................................................. 5-42
Figure 5-39. Vacuuming of the Shutter ................................................................... 5-43
Figure 5-40. Wiping of Flow Flange Bottom.............................................................. 5-44
Figure 5-41. Vacuuming of the Exhaust Ring ........................................................... 5-45
Figure 5-42. Heater Baseplate Assembly .................................................................5-47
Figure 5-43. Heater Baseplate Assembly Bottom View ..............................................5-48
Figure 5-44. Generic System Diagram .................................................................... 5-50
Figure 5-45. Flow Flange Tubing and Water Connections............................................5-55
Figure 5-46. Exhaust Line Flow Diagram ................................................................. 5-56
Figure 5-47. Chamber Maintenance - Vacuum Chamber for Leak Check ...................... 5-57
Figure 5-48. Chamber Maintenance - Vacuum Chamber for Leak Check (First View) ..... 5-57
Figure 5-49. Chamber Maintenance - Vacuum Chamber for Leak Check (Second View,
Scrolling)........................................................................................................ 5-58
Figure 5-50. Opening of Manual Valves - MV53 and MV54. ........................................ 5-58
Figure 5-51. Opening of MV106..............................................................................5-59
Figure 5-52. Manual Ball Valves - MV104 and MV105................................................ 5-59
Figure 5-53. Continue Vacuum Chamber for Leak Check ...........................................5-60
Figure 5-54. Log Information Visible After Clicking on Continue.................................. 5-60
Figure 5-55. Chamber Ready for Leak Checking ....................................................... 5-61
Figure 5-56. Closing of Manual Valves MV53 and MV54. ............................................ 5-61
Figure 5-57. Bottom of Flow Flange.........................................................................5-62
Figure 5-58. Viewport Cover .................................................................................. 5-64
Figure 5-59. Viewport Cover Mounting Holes............................................................ 5-65
Figure 5-60. Cleaning of O-Ring Grooves on Flow Flange........................................... 5-65
Figure 5-61. Preparing O-Rings .............................................................................. 5-66
Figure 5-62. Fomblin on O-Rings............................................................................ 5-66
Figure 5-63. Application of O-Rings ........................................................................5-67
Figure 5-64. Viewport Adapter Cleaning ..................................................................5-67

K465i Operations and Maintenance P/N 1212831 Rev C
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Figure 5-65. Flow Flange Positioning and Glands ...................................................... 5-68
Figure 5-66. Viewport Securing.............................................................................. 5-68
Figure 5-67. Forklift Preparation.............................................................................5-69
Figure 5-68. Retaining Rings and Forklift................................................................. 5-69
Figure 5-69. Leak Check Fitting.............................................................................. 5-70
Figure 5-70. Leak Checking of Viewport ..................................................................5-70
Figure 5-71. Releasing of Pins, Inverting of Flow Flange ............................................5-71
Figure 5-72. Placement of Manifolds .......................................................................5-72
Figure 5-73. Manifolds Placement........................................................................... 5-73
Figure 5-74. Tin Foil Preparation ............................................................................ 5-74
Figure 5-75. Wiping Surface Clean..........................................................................5-74
Figure 5-76. Scraping of Metal Surface ................................................................... 5-75
Figure 5-77. Installation of Guide Screws as per ViewPort Cutout ...............................5-76
Figure 5-78. Screen, Showing Viewport Cutout (Black Ovals Indicate Part Number
Locations)....................................................................................................... 5-77
Figure 5-79. Springs Protruding Upward.................................................................. 5-78
Figure 5-80. Bridges and Holes Aligned ...................................................................5-78
Figure 5-81. Screw Application Pattern....................................................................5-80
Figure 5-82. Applying Pressure Close to Center ........................................................ 5-81
Figure 5-83. Retainer and Spring Contact................................................................ 5-82
Figure 5-84. Gasket Crease ................................................................................... 5-83
Figure 5-85. Leveling and Support of Gasket During Lowering ...................................5-84
Figure 5-86. Cold Plate Lifting Loops.......................................................................5-85
Figure 5-87. Lowering of Cold Plate onto Flow Flange................................................ 5-86
Figure 5-88. CFI Weldment into Cold Plate .............................................................. 5-87
Figure 5-89. Fastening CFI Weldment .....................................................................5-87
Figure 5-90. Lowering Flow Flange Assembly onto Shutter ........................................5-88
Figure 5-91. Flow Flange Assembly Lowered onto the Shutter .................................... 5-89
Figure 5-92. Shutter Tube Spacer........................................................................... 5-90
Figure 5-93. Wiping O-Ring Surfaces/Aligning Shutter Tubes with FF Holes ................. 5-90
Figure 5-94. Cleaning and Assembling Lower Bellows Flange ..................................... 5-91
Figure 5-95. Aligning/Securing the Shutter Base ......................................................5-92
Figure 5-96. Setting O-Ring and O-Ring Shield ........................................................5-92
Figure 5-97. Air Cylinder Assembly.........................................................................5-93
Figure 5-98. O-ring and O-ring Cap Assembly .......................................................... 5-93
Figure 5-99. O-Ring and O-Ring Caps ..................................................................... 5-94
Figure 5-100. O-Ring Press Shutter Lift and Tightening ............................................. 5-95
Figure 5-101. Washer and Block Assembly ..............................................................5-96
Figure 5-102. Air Hoses Installed into Quick-Connect Ports........................................5-97
Figure 5-103. Flow Flange Assembly Placed Aside, Prepared for RCA Assembly ............5-97
Figure 5-104. Heater Assembly............................................................................. 5-102
Figure 5-105. Heater Baseplate Assembly Bottom View........................................... 5-103
Figure 5-106. Heater Baseplate Assembly ............................................................. 5-104
Figure 5-107. Outer Filament (shown in red) Supported on Support Pins Over Spacer . 5-105
Figure 5-108. Middle Filament Electrode-to-Filament Screw Connections ................... 5-106
Figure 5-109. Heater Baseplate Assembly ............................................................. 5-107
Figure 5-110. Heater Baseplate Assembly Bottom View........................................... 5-108
Figure 5-111. Installations of Insulation Blocks. ..................................................... 5-109
Figure 5-112. Coated (A) and Uncoated (B) Filament Sides ...................................... 5-110

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Figure 5-113. Installations of Insulation Blocks and Filaments. ................................. 5-111
Figure 5-114. Clamps and Screws for the Outer Filament Installed. .......................... 5-113
Figure 5-115. Heater Assembly. ........................................................................... 5-114
Figure 5-116. Generic System Diagram................................................................. 5-115
Figure 5-117. WHA Illustration.............................................................................. 5-117
Figure 5-118. Transfer Hub Chamber..................................................................... 5-118
Figure 5-119. Upper THA (with LFA) ...................................................................... 5-120
Figure 5-120. Transfer Hub Component Illustration (with Glovebox) .......................... 5-121
Figure 5-121. Alignment of the Robot .................................................................... 5-124
Figure 5-122. Adjustment of the Fork .................................................................... 5-125
Figure 5-123. Cable Pulley Adjustment .................................................................. 5-126
Figure 1-149. Exhaust Line Diagram ..................................................................... 5-129
Figure 1-150. Quick Disconnection Locations ......................................................... 5-131
Figure 1-151. Particle Filter Cart Feet in Locked Position ......................................... 5-132
Figure 1-152. Body Strap for Particle Filter (Green Highlight)................................... 5-133
Figure 1-153. Particle Filter Neck Collar (Green Highlight) ....................................... 5-134
Figure 1-154. Oxidation Valve.............................................................................. 5-135
Figure 1-155. A: Canister with Cap; B: Canister Stages/Baffle Bottom; C: Filter/Insert; D:
Stage 1 Disassembly...................................................................................... 5-135
Figure 1-156. Outlet ISO160 Reducer/Housing Outlet ............................................. 5-136
Figure 1-157. Housing Cap (see Arrow)................................................................. 5-136
Figure 1-158. Particle Filter (Housing Cap Removed) .............................................. 5-137
Figure 1-159. Removed Filter............................................................................... 5-137
Figure 1-160. Lower (1st) Stage .......................................................................... 5-138
Figure 1-161. Particle Filter Assembly on Cart........................................................ 5-140
Figure 1-162. Filter and Insert ............................................................................. 5-140
Figure 1-163. Gen 3 Filter Assembly with Baffle Plate / Bottom View ........................ 5-141
Figure 1-164. Gen 3 Filter Assembly Sections ........................................................ 5-142
Figure 1-165. Filter and Insert, into Outer Housing................................................. 5-143
Figure 1-166. O-ring and Second Stage ............................................................... 5-144
Figure 1-167. Third Filter Stage Installed ............................................................. 5-145
Figure 1-168. Leak-Check of Housing Assembly/Chamber ....................................... 5-148
Figure 5-142. Generic Bubbler Maintenance Diagram............................................... 5-155
Figure 5-143. Bubbler Network and Bath................................................................ 5-156
Figure 5-144. VCR Fitting .................................................................................... 5-165
Figure 5-145. H2Detector Display ........................................................................ 5-171
Figure 5-146. Scott Instruments Sentinel 6 Front View ............................................ 5-172
Figure 5-147. Heater Assembly............................................................................. 5-181
Figure 5-148. Heater Baseplate Assembly Bottom View........................................... 5-182
Figure 5-149. Heater Baseplate Assembly ............................................................. 5-183
Figure 5-150. Outer Filament (shown in red) Supported on Support Pins Over Spacer . 5-184
Figure 5-151. Middle Filament Electrode-to-Filament Screw Connections ................... 5-185
Figure 5-152. Heater Baseplate Assembly ............................................................. 5-186
Figure 5-153. Heater Baseplate Assembly Bottom View........................................... 5-187
Figure 5-154. Installations of Insulation Blocks. ..................................................... 5-188
Figure 5-155. Coated (A) and Uncoated (B) Filament Sides ...................................... 5-189
Figure 5-156. Installations of Insulation Blocks and filaments. .................................. 5-190
Figure 5-157. Clamps and Screws for the Outer Filament Installed. .......................... 5-192
Figure 5-158. Heater Assembly. ........................................................................... 5-193

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Figure 5-159. Bubbler Assembly Detail .................................................................. 5-195
Figure 5-160. Bubbler Jumper .............................................................................. 5-196
Figure 5-161. THA Interior and Robot Arms............................................................ 5-197
Figure 5-162. Flushing the Water Lines with Compressed Air ................................... 5-198
Figure 5-163. Capped Water Lines......................................................................... 5-199
Figure 5-164. Water Lines Connected to Monitors/Regulators ................................... 5-200
Figure 5-165. Castor Mounting.............................................................................. 5-203
Figure 5-166. LFA/GB ......................................................................................... 5-205
Figure A-1. Glove Box Window (with Extension Icon).......................................................6-1

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Copyright ©2012 Veeco Instruments, Inc. Confidential
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About This Document
This documentation set includes the operating and maintenance manual for a Veeco
TurboDisc K465i GaN MOCVD System (referred to as K465i within the text of this
document). Within this manual are operating instructions to start-up and shut-down the
system under various conditions, loading and unloading of wafers from the wafer carrier and
transport of the wafer carrier into and out of the growth chamber. In addition, instructions
are also provided for routine and corrective maintenance, calibrations and alignments and
leak checking of system equipment.
A List of Reference Drawings is also provided herein that identifies specific engineering
drawings associated with the system. Some of these drawings are referenced in various
operating and maintenance procedures, and are used to assist in the performance of those
procedures. Other engineering drawings are provided for general reference purposes.
The CD associated with this document includes the InSitu Monitoring device operation
manuals and Nexus Operating System documents.
The information in this document is organized as follows:
Chapter 1. SAFETY SUMMARY
The Safety Summary is a comprehensive guide to the safety notices, warnings, precautions
and instructions required to operate and maintain this system safely. Safety-related notices
throughout this document are framed in red outline with red highlighting.
Chapter 2. SPECIFICATIONS
Specifications for this system are furnished in this section, including general specifications,
facility requirements, gas, water, electrical systems and seismic specifications.
Chapter 3. SYSTEM OVERVIEW
The System Overview provides a description of the functions and use of the K465 GaN and
its subsystems:
Reactor Assembly
Gas Delivery System
Exhaust System
Transfer and Vacuum Systems
System Electronics
Control Software
In-Situ Monitoring
Water Cooling System
Alarms and Interlocks
Chapter 4. OPERATIONS
The Operations chapter of this document describes:
Proper system and subsystem set-ups
Modes of operation following Maintenance Shutdown, Bakeout
Process Runs
Wafer operations, System Controls
Development and use of Growth Recipes
Flow Calculation
Temperature Control

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Shutdown Procedures and
Decommissioning Processes
Chapter 5. MAINTENANCE AND REPAIR
The Maintenance and Repair chapter of this document provides guidelines for:
Maintenance Safety
Routine Maintenance
Reactor Chamber Maintenance
General Cleaning
Maintenance of Flow Flange, Heater Assembly, Particle Filter, Bubbler/Bath
Leak-Checking
APPENDIX A: GLOSSARY
Document Presentation
The Table of Contents and List of Reference Drawings provide listings of the procedures and
engineering drawings available for use. The entries contained on these two lists are hyper-
linked to specified documents. To use the lists, select the listed desired subject (procedure,
component document or drawing). This will automatically activate a view of the document
on your selected page or drawing.
Each individual section begins with a list of any Safety Precautions and Hazard Management
messages applicable to that section. The safety list is followed by a list of the individual
procedures provided in that section. These individual procedures are hyper-linked to a
specific location within the document, and are highlighted in red.
Notes and graphics appear within some procedures. The procedures, notes and safety
guidelines in this document appear as in the samples below:
Procedure Sample:
1. Sample text.
2. Sample text.
Note: Note sample text.
Safety Precautions and Hazard Management
Safety information sample text.

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CHAPTER 1. SAFETY SUMMARY
This section contains important safety information regarding the operation and maintenance
of the K465i GaN system. Topics covered include general safety, warning, caution and note
usage, symbol usage, general precautions, hazardous materials, safety interlocks and
alarms, safety switches, and lockout/tagout instructions. These general safety notices
supplement the specific warnings and cautions appearing at the start of each section.
Before undertaking any maintenance or operational procedure, technicians should review all
appropriate documentation to ensure they understand the task to be performed, as well as
all hazards and safety issues.
Safety Precautions and Hazard Management
System is to be operated only by trained, qualified technicians.
End user must provide personal protective equipment (PPE) when changing
bubblers and cleaning out the reactor. The personal protective equipment
must be approved as per the PPE Directive. Reference the Operations and
Maintenance Manual for the required PPE.
Dismantling, assembling, and installation should only be performed by
qualified technicians. Reference the Operation and Maintenance Manual for
associated procedures.
For safe lifting, transporting and handling, reference the documents PRS-
141 and MI-0000293, provided with the tool packing list.
Use a step ladder when repairing or cleaning components out of reach.
GENERAL SAFETY NOTICES
The following general safety notices supplement the specific warnings and cautions
appearing elsewhere in this manual. There are required precautions that must be
understood and applied during operation and maintenance of the equipment covered herein.
Qualifications
Due to the complexity of the equipment and the hazardous materials used in the
manufacturing process, only those personnel trained and qualified should perform any
operation or maintenance tasks on Veeco K465i GaN Systems. Maintenance personnel
should be trained to perform all maintenance procedures, including the use of personal
safety equipment such as Self Contained Breathing Apparatus (SCBA), respirators, and
chemical and fire resistant clothing.
Do Not Repair Or Adjust While Alone
Under no circumstances should repair or adjustment of equipment be attempted while
alone. The immediate presence of another person capable of rendering aid is required.
Before making adjustments on electronic equipment, be sure to protect the body against
grounding. If possible, adjustments on electrical equipment should be made with one hand,
with other hand free and clear of the equipment. Even when power has been removed from

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equipment circuits, dangerous voltage potentials may still exist due to retention of charge
by capacitors. Circuits must be grounded, and all capacitors discharged prior to attempting
repairs.
Test Equipment
Make certain test equipment is in good condition. If a test meter must be held, ground the
case of the meter before starting measurement, and do not touch live equipment or
personnel working on live equipment while holding a test meter. Some types of measuring
devices should not be grounded; such devices should not be held when taking mea-
surements.
Sensors and Dry Contacts
Sensors in the ventilation areas of this system provide notification of potentially dangerous
atmospheric changes, leaks and gases.
Moving Equipment
Personnel should remain clear of moving equipment. If equipment requires adjustment
while in motion, a safety watch should be posted. The safety watch should have full view of
operations being performed, and should have immediate access to controls for stopping
equipment motion.
First Aid
An injury, no matter how slight, should never go unattended. Always obtain immediate first
aid or medical attention.
Resuscitation
Personnel working with, or near, high voltage should be familiar with approved methods of
resuscitation. If someone is injured or stops breathing, initiate resuscitation immediately. A
delay could cost a victim’s life.

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Section 1.1. Warning, Caution, and Note Usage
Warnings and cautions appearing throughout this manual are of paramount importance to
personnel and equipment safety. Prior to attempting to operate, maintain, troubleshoot, or
repair any part of the K465i GaN system or related equipment, all warnings and cautions
should be thoroughly reviewed and understood. The following paragraphs define warnings,
cautions, and notes as they are used in this manual.
Identifies an operating or maintenance procedure,
practice, condition, or statement that, if not strictly
followed, could result in serious injury or death to
personnel, or long-term health hazards to personnel.
Identifies an operating or maintenance procedure,
practice, condition or statement that, if not strictly
followed, could result in equipment damage or
destruction.
Note:
Highlights a certain operating or maintenance condition or
statement which is essential, but not of a known
hazardous nature as indicated by warning or caution.
SYMBOL USAGE
The following symbols are used on reactor systems to identify areas of the system where
caution needs to be used.

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GENERAL PRECAUTIONS
The following general precautions are to be observed at all times:
Verify that protective guards and shutdown devices are properly installed and
maintained around moving parts of machinery and high voltage sources.
Do not wear loose clothing while working around moving parts of machinery.
Verify that special precautionary measures are employed to prevent applying power
to the system/equipment at any time maintenance work is in progress.
Do not make any unauthorized alterations to equipment components.
Before working on electrical systems/equipment, check the equipment with a
voltmeter to ensure that the system is not energized.
Consider all circuits live and dangerous at all times, until they are known to be dead.
When working near electricity, do not use metal rules, flashlights, metallic pencils, or
any other object that have exposed conducting metal.
De-energize all equipment before connecting or disconnecting meters or test leads.
When connecting a meter to terminals for measurements, use a range higher than
that of expected voltage.
Verify that the area is well ventilated when using etching solvents. Avoid prolonged
breathing of solvent fumes, and solvent-contact with skin or eyes.
An Electrostatic Discharge (ESD) wristband should always be worn by technicians
when they are performing maintenance on equipment containing static-sensitive
integrated circuitry.
Veeco recommends, as a two-person task, removal of the plastic cover of the main
electrical cabinet.
Assume, until verified otherwise, that the reactor is too hot to be opened. Do not
open the reactor until it has cooled down.
Identify and locate the EMOs and Interlock switches throughout the system. EMOs
are located throughout the periphery of the system.

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ADDITIONAL SAFETY PRECAUTIONS
System is to be operated by trained, qualified technicians.
In addition to the general safety notices and precautions appearing in this Safety
Summary, personnel responsible for the K465i GaN system shall become thoroughly
familiar with, and review the following safety precautions.
Fire detection and suppression agent systems are provided in the FAB by the end
user and are not part of the K465i GaN system.
The end user is responsible for connecting K465i GaN system to facility exhaust,
scrubber and ventilation systems prior to operating the system.
All cabinet doors are to remain locked. Only qualified maintenance technicians should
have access.
Use a step ladder when repairing or cleaning components out of reach.
Affix a warning for the reactor’s hazardous hot surface temperature as well as that of
the THA (THA for the wafer carrier if the carrier can be >50oC). You must provide a
safe means for transferring a hot carrier to and from the THA. You must wait for the
carrier to cool down.
High temperatures exist within the system cabinet while the system is operating.
While the system is operating, do not touch any of the following components:
Exterior reactor walls
Any exhaust lines between the reactor and the scrubber system
Palladium Cell
Any gas line wrapped with heater tape.
High voltage power is supplied to the System breaker panel. Do not perform any
maintenance tasks within the breaker panel without first isolating the external power
source to the system.
There may be more than one source of power supplying the system. Disconnect all
sources of supply power prior to servicing. This includes any optional Uninterruptible
Power Supply (UPS) installed on the system.
If a UPS is included with the system, refer to specific system electrical reference
drawings regarding location and wiring schematics.
Ensure that identification labels and the applicable hazard labels are provided for all
exterior supplied materials.
Repeatedly post all nameplate information (all but serial numbers) throughout the
modules.
Ensure that noise level from the operation of this system does not exceed 70 dB.
Ensure that electrical bond lubrication has been applied to all Growth Chamber
electrode connections.
HAZARDOUS MATERIALS
Within K465i GaN operations there are potentially hazardous materials that may be
generated during the operations process, or encountered as part of normal operations and
maintenance. When using any chemicals, consult the material safety data sheet (MSDS) for
appropriate instructions regarding handling, storage and disposal.
The batteries used in the APC uninterruptible power supply (UPS) contain Lithium. Dispose
of replaced cells or old units in accordance with local regulations for disposal of Lithium.
Fluorescent lights bulbs used on the K465i GaN system may contain mercury. Dispose of
used and old lightbulbs in accordance with local regulations.