Veeco K465i gan Installation guide

K465i GaN

Operations and Maintenance

P/N 1212831 Rev C

June 2012

About Veeco

Veeco Instruments provides specialized technical products and services (demonstrated on

http:\\www.Veeco.com). Veeco’s TurboDisc MOCVD Systems, located in Somerset, NJ,

develops and manufactures MOCVD devices for clients throughout the world.

Veeco Confidential.

Veeco Instruments, Inc.

145 Belmont Drive

Somerset, NJ 08873

Phone: (732) 560-5300

Revision History

DOC VERSION

NUMBER

REVISION DATE

PAGES AFFECTED

CHANGE

1212831 Rev A

Jan 5, 2012

Initial Release

1212831 Rev B

June 8, 2012 JAE

all

Chapters 1, 3, 4, 5, Appendix

1212831 RevC

Aug 24, 2012 JAE

all

Chapter 5 Procedures

Disclaimer

This document describes the proper, safe operation and maintenance practices of highly

complex technical equipment. Every effort has been made to include compliant instructions,

warnings and guidelines to ensure the safe and productive use of the systems described in

this document.

Veeco Technical Publications has carefully reviewed this document to ensure its reliability

and completeness. If you discover any errors or omissions, please contact:

Veeco Technical Publications

mailto:techpubsnj@veeco.com

K465i Operations and Maintenance P/N 1212831 Rev C

Page i

Contents

CHAPTER 1. SAFETY SUMMARY .................................................... 1-1

General Safety Notices .......................................................................................1-1

SECTION 1.1. WARNING,CAUTION,AND NOTE USAGE ......................................................1-3

Symbol Usage ...................................................................................................1-3

General Precautions ...........................................................................................1-5

Additional Safety Precautions ..............................................................................1-6

Hazardous Materials...........................................................................................1-6

Safety Interlocks and Alarms ..............................................................................1-8

Interlock Override Safety Notice ..........................................................................1-9

Safety Switches............................................................................................... 1-10

SECTION 1.2. LOCK OUT/TAG OUT INSTRUCTIONS AND PROCEDURE .................................... 1-13

Type and Magnitude of Energy .......................................................................... 1-13

CHAPTER 2. TURBODISC K465I GAN MOCVD SYSTEM

SPECIFICATIONS......................................................................... 2-17

SECTION 2.1. GENERAL SPECIFICATIONS .................................................................... 2-17

Company Address............................................................................................2-17

System Specifications ...................................................................................... 2-17

SECTION 2.2. SEISMIC SPECIFICATIONS ..................................................................... 2-18

Design Considerations ......................................................................................2-18

Weight of the Major Sub-Assemblies ..................................................................2-20

Reference Drawings .........................................................................................2-20

SECTION 2.3. CERTIFICATIONS ................................................................................2-21

CE Certifications .............................................................................................. 2-21

EMC Certifications............................................................................................ 2-21

SEMI Certifications...........................................................................................2-21

RoHs Compliance............................................................................................. 2-21

CHAPTER 3. SYSTEM OVERVIEW .................................................. 3-1

SECTION 3.1. SYSTEM FUNCTION AND USAGE.................................................................3-3

SECTION 3.2. ELECTRICAL/CIRCUIT BREAKER ASSEMBLY (CBA) MODULE ................................3-6

SECTION 3.3. ELECTRIC RACK (ECA)/POWER SUPPLY MODULE ............................................3-7

SECTION 3.4. SOURCE DELIVERY ASSEMBLY AND FLOW MODULE ........................................ 3-10

SECTION 3.5. REACTOR HOUSING ASSEMBLY/GROWTH CHAMBER MODULE ............................3-17

SECTION 3.6. TRANSFER HOUSING ASSEMBLY/THA ....................................................... 3-25

SECTION 3.7. EXHAUST MODULE (PEA) ..................................................................... 3-30

SECTION 3.8. SYSTEM ELECTRONICS ......................................................................... 3-33

DeviceNet Network .......................................................................................... 3-33

SECTION 3.9. CONTROL SOFTWARE ...........................................................................3-36

SECTION 3.10. IN-SITU MONITORING........................................................................ 3-38

SECTION 3.11. WATER-COOLING SYSTEM ...................................................................3-39

SECTION 3.12. ALARMS AND INTERLOCKS ...................................................................3-40

SECTION 3.13. SYSTEM PROCESSES .......................................................................... 3-41

K465i Operations and Maintenance P/N 1212831 Rev C

Page ii

CHAPTER 4. OPERATIONS ............................................................ 4-1

SECTION 4.1. K465I GANSYSTEM STARTUP .................................................................4-1

Procedures in this Section...................................................................................4-3

Reference Drawings ...........................................................................................4-3

Associated Procedures in this Section ...................................................................4-3

Daily Startup and System Readiness ....................................................................4-4

Startup Following a Maintenance Shutdown ..........................................................4-5

Startup Following a Facilities Maintenance Power Shutdown or Emergency Electrical Stop

.......................................................................................................................4-9

SECTION 4.2. VACUUM PUMP OPERATION .................................................................... 4-11

Procedures in this Section................................................................................. 4-12

Reference Drawings .........................................................................................4-12

Associated Procedures...................................................................................... 4-12

Process Pump.................................................................................................. 4-13

Pre-Operation of the Ebara Process Pump ........................................................... 4-14

Ebara Process Pump......................................................................................... 4-17

Vacuum Pump ................................................................................................. 4-19

Standard Operation.......................................................................................... 4-19

Turbo Pump ....................................................................................................4-20

SECTION 4.3. WAFER LOADING AND UNLOADING ...........................................................4-21

Procedures in this Section................................................................................. 4-21

Reference Drawings .........................................................................................4-21

Associated Procedures...................................................................................... 4-21

Tools and Materials Checklist.............................................................................4-21

Loading Substrates Onto a Wafer Carrier ............................................................ 4-22

Unloading Substrates From a Wafer Carrier......................................................... 4-23

SECTION 4.4. PALLADIUM CELL OPERATION .................................................................4-25

Procedures in this Section................................................................................. 4-25

Reference Drawings .........................................................................................4-25

Operating Precautions ...................................................................................... 4-26

Cell Installation ...............................................................................................4-27

Cell Operation .................................................................................................4-27

Normal Operation ............................................................................................4-28

Shutdown ....................................................................................................... 4-29

Power Failure Shutdown ................................................................................... 4-29

Cell Removal................................................................................................... 4-30

SECTION 4.5. TEMPERATURE CONTROLLERS .................................................................4-31

Procedures in this Section................................................................................. 4-31

Reference Drawings .........................................................................................4-31

Reference Documents ......................................................................................4-31

Configuration of Temperature Controller ............................................................. 4-32

SECTION 4.6. TEMP CONTROL COMMUNICATION ............................................................4-33

Temperature Control ........................................................................................ 4-33

Over-Temperature Control ................................................................................ 4-33

Selecting Temperature Control Modes ................................................................4-35

Temperature Settings.......................................................................................4-36

SECTION 4.7. PYROCONTROL OPERATION .................................................................... 4-38

Procedures in this Section................................................................................. 4-38

Associated Procedures:..................................................................................... 4-38

K465i Operations and Maintenance P/N 1212831 Rev C

Page iii

Pyrocontrol Introduction ................................................................................... 4-39

Description of PyroControl ................................................................................4-40

Using PyroControl for Temperature Control On K465i GaN Systems .......................4-41

SECTION 4.8. ROBOT SETUP AND ADJUSTMENT .............................................................4-41

Procedures in this Section................................................................................. 4-42

Reference Drawings .........................................................................................4-42

Associated Procedures...................................................................................... 4-43

Recommended Tools and Materials ....................................................................4-43

Identifying Stations for the Transfer System .......................................................4-44

Robot Axis Identification ...................................................................................4-46

Basic Command Overview.................................................................................4-47

K-Series Tools and Robot Stations .....................................................................4-49

Setting Up Stations for the Transfer Robot .......................................................... 4-50

Troubleshooting............................................................................................... 4-52

SECTION 4.9. K465I GANSYSTEM SHUTDOWN ............................................................4-53

Procedures in this Section................................................................................. 4-53

Reference Drawings .........................................................................................4-53

Associated Procedures:..................................................................................... 4-53

End-Shift Idle Procedure................................................................................... 4-54

Maintenance Shutdown Procedure......................................................................4-55

Facilities Maintenance Shutdown Procedure......................................................... 4-60

Emergency Electrical Shutdown ......................................................................... 4-62

CHAPTER 5. MAINTENANCE AND REPAIR ..................................... 5-1

SECTION 5.1. ROUTINE MAINTENANCE .........................................................................5-2

Routine Maintenance Schedule ............................................................................5-2

SECTION 5.2. BASIC MAINTENANCE STEPS ....................................................................5-4

Maintenance Preparation ....................................................................................5-5

SECTION 5.3. K465I GANREACTOR CHAMBER MAINTENANCE .............................................5-6

Procedures in this Section...................................................................................5-6

Reference Drawings ...........................................................................................5-6

Associated Procedures........................................................................................5-6

Associated Documents........................................................................................5-7

Recommended Tools and Materials ......................................................................5-8

Preparing The Reactor for Maintenance.................................................................5-9

Hardware Maintenance Key Switch (Nexus)...........................................................5-9

Flow Flange Removal........................................................................................ 5-20

Heater Removal............................................................................................... 5-34

Reactor Chamber Cleaning................................................................................ 5-36

Heater Reinstallation........................................................................................ 5-45

Flow Flange Reinstallation................................................................................. 5-49

Reactor Chamber Reassembly/ System Restoration .............................................5-49

Preparing for Leak Checking.............................................................................. 5-50

SECTION 5.4. K465I GANFLOW FLANGE MAINTENANCE .................................................. 5-52

Procedures in this Section................................................................................. 5-52

Reference Drawings .........................................................................................5-52

Associated Procedures...................................................................................... 5-52

Associated Documents......................................................................................5-52

Recommended Tools and Materials ....................................................................5-53

K465i Operations and Maintenance P/N 1212831 Rev C

Page iv

Flow Flange Disassembly Guide ......................................................................... 5-54

Flow Flange Reassembly ...................................................................................5-64

SECTION 5.5. K465I GANHEATER MAINTENANCE ......................................................... 5-98

Procedures in this Section................................................................................. 5-98

Reference Drawings .........................................................................................5-99

Associated Procedures...................................................................................... 5-99

Associated Documents......................................................................................5-99

Recommended Tools and Materials .................................................................. 5-100

Heater Assembly Removal .............................................................................. 5-101

Preparation for Filament Replacement .............................................................. 5-106

Installation of Replacement Heater Assembly .................................................... 5-106

Middle and Outer Filament Replacements/Installations ....................................... 5-110

Reactor Chamber Reassembly/ System Restoration ........................................... 5-115

Preparing for Leak Checking............................................................................ 5-115

SECTION 5.6. K465I GANTRANSFER HUB CHAMBER MAINTENANCE .................................. 5-117

Procedures in this Section............................................................................... 5-119

Reference Drawings ....................................................................................... 5-119

Associated Procedures.................................................................................... 5-119

Associated Documents.................................................................................... 5-119

Recommended Tools and Materials .................................................................. 5-120

Cleaning Procedure ........................................................................................ 5-122

Leak-Checking the Transfer Hub Chamber ........................................................ 5-123

Robot Maintenance ........................................................................................ 5-124

SECTION 5.7. PARTICLE FILTER MAINTENANCE ............................................................ 5-127

SECTION 5.8. PARTICLE FILTER MAINTENANCE ........................ERROR!BOOKMARK NOT DEFINED.

Equipment List .............................................................................................. 5-127

Supplies ....................................................................................................... 5-127

Fast-Flow Prevention: Safety........................................................................... 5-128

Leak Checking the Housing Assembly and Chamber ........................................... 5-146

Material Disposal and Documentation............................................................... 5-148

SECTION 5.9. BUBBLER AND BATH MAINTENANCE ........................................................ 5-150

Procedures in this Section............................................................................... 5-150

Reference Drawings ....................................................................................... 5-150

Associated Procedures.................................................................................... 5-150

Recommended Tools and Materials .................................................................. 5-151

Bubbler Replacement ..................................................................................... 5-152

Bath Initial Fill and Volume Adjustments........................................................... 5-157

Bath Composition Adjustments........................................................................ 5-158

SECTION 5.10. LEAK CHECKING ............................................................................. 5-159

Procedures in this Section............................................................................... 5-159

Reference Drawings ....................................................................................... 5-160

Recommended Tools and Materials .................................................................. 5-160

Methodology ................................................................................................. 5-161

Helpful Hints in Leak-Checking ........................................................................ 5-161

Initial Steps of Leak Checking ......................................................................... 5-163

Recommended Methodology for Leak Checking.................................................. 5-163

Plumbing Lines .............................................................................................. 5-164

VCR Fittings .................................................................................................. 5-164

Valves .......................................................................................................... 5-166

K465i Operations and Maintenance P/N 1212831 Rev C

Page v

Mass Flow Controllers and Pressure Controllers ................................................. 5-168

Joints/Weldments/KF40/ISO 80/100 Lines ........................................................ 5-169

Lines downstream of the Process Pump ............................................................ 5-169

SECTION 5.11. GAS/HYDROGEN MONITORING ............................................................ 5-170

Procedures in this Section............................................................................... 5-170

Reference Drawings ....................................................................................... 5-170

Hydrogen Detection System............................................................................ 5-171

Scott Sentinel 6 Meter Basics .......................................................................... 5-173

Normal Operation .......................................................................................... 5-173

Calibration .................................................................................................... 5-173

SECTION 5.12. K465I GANDECOMMISSIONING INSTRUCTIONS ....................................... 5-174

Procedures in this Section............................................................................... 5-175

Reference Drawings ....................................................................................... 5-175

Associated Procedures.................................................................................... 5-175

Recommended Tools and Materials .................................................................. 5-176

Procedures in this Section............................................................................... 5-177

Reference Drawings ....................................................................................... 5-178

Associated Procedures.................................................................................... 5-178

Associated Documents.................................................................................... 5-178

Recommended Tools and Materials .................................................................. 5-179

Heater Assembly Removal .............................................................................. 5-180

Preparation for Filament Replacement .............................................................. 5-185

Installation of Replacement Heater Assembly .................................................... 5-185

Middle and Outer Filament Replacements/Installations ....................................... 5-189

Core System Decommissioning Instructions ...................................................... 5-194

Procedures in Decommissioning....................................................................... 5-194

CHAPTER 6. APPENDIX: OPTIONAL FEATURES ............................. 6-1

SECTION 6.1. GLOVEBOX .........................................................................................6-1

Glovebox Controls in Nexus Software ...................................................................6-1

Pump Down ......................................................................................................6-3

Vent Sequence ..................................................................................................6-4

Veeco/Fluens Glovebox Setup and Test ................................................................6-5

K465i Operations and Maintenance P/N 1212831 Rev C

Page vi

Figures

Figure 2-1. K465i GaN Cabinet.................................................................................... 2-18

Figure 3-1. K465i GaN MOCVD.....................................................................................3-1

Figure 3-2. K465i GaN System Controls Architecture ...........................................................3-2

Figure 3-3. K465i GaN System Assembly...................................................................3-3

Figure 3-4. THA Top View Illustration (Optional GloveBox on Right) .......................................3-25

Figure 3-5. DeviceNet Main Window ............................................................................. 3-33

Figure 3-6. DeviceNet Diagnostics Window.....................................................................3-34

Figure 3-7. Nexus Window......................................................................................... 3-36

Figure 3-8. Common DRT Configuration......................................................................... 3-38

Figure 3-9. Alarm Interface Sample/Nexus...................................................................... 3-40

Figure 3-10. Generic System Process Diagram ................................................................3-42

Figure 4-1. Front View Assembly ..............................................................................4-2

Figure 4-2. Generic System Diagram ........................................................................4-8

Figure 4-3. Ebara Pump, Front View ....................................................................... 4-15

Figure 4-4. Ebara ESA25 Pump, Side View............................................................... 4-15

Figure 4-5. LCD Controller..................................................................................... 4-16

Figure 4-6. Standard (not customized) Eurotherm Displays: Actual/left and through

ITools/right..................................................................................................... 4-32

Figure 4-7. Temperature Control Architecture ..................................................................4-33

Figure 4-8. Temperature Control Mode Selection Screen ...........................................4-36

Figure 4-9. Sample Control Mode Switch Routine ..................................................... 4-37

Figure 4-10. Pyrometer Locations on Wafer Carrier................................................... 4-40

Figure 4-11. Robot Transfer System Stations (Glovebox Configuration)....................... 4-44

Figure 4-12. Stop Robot Button ...................................................................................4-45

Figure 4-13. Robot Station Labels...........................................................................4-46

Figure 4-14. Top View Z Axis Elevator Motor Locations.............................................. 4-46

Figure 4-15. Generic EPO-IDLE Shutdown Diagram .......................................................... 4-55

Figure 4-16. Generic System Diagram...........................................................................4-56

Figure 4-17. EMO Button...........................................................................................4-62

Figure 5-1. Process Module 1 Window > Chamber Maintenance....................................5-9

Figure 5-2. Chamber Maintenance Window ..............................................................5-10

Figure 5-3. Toggle Switches on Power Supplies .........................................................5-10

Figure 5-4. Power Supply Breakers (Locked Out)....................................................... 5-11

Figure 5-5. Mandatory Instructions......................................................................... 5-11

Figure 5-6. Manual Valves for Bubblers H2, NH3, and SiH4........................................ 5-12

Figure 5-7. Continue>>Prepare Chamber for Maintenance ........................................ 5-13

Figure 5-8. Backfill Chamber.................................................................................. 5-13

Figure 5-9. Onscreen Directions, Chamber Maintenance Window ................................ 5-14

Figure 5-10. Close Manual Valves - MV53 and MV54 ................................................. 5-14

Figure 5-11. Manual Ball Valves - MV104 and MV105................................................ 5-15

Figure 5-12. Manual Ball Valve - MV106 ..................................................................5-16

Figure 5-13. Continue >> Backfill Chamber ............................................................. 5-16

Figure 5-14. (Backfill Process is Complete) The Reactor is at Atmosphere....................5-17

Figure 5-15. Valves MV104 and MV105 in Closed Position..........................................5-18

Figure 5-16. Valve MV106 in Closed Position............................................................ 5-19

Figure 5-17. Power to the Adixen Pump Turned Off. ..................................................5-20

K465i Operations and Maintenance P/N 1212831 Rev C

Page vii

Figure 5-18. Pyrometer, DRT and Real Temp Cables .................................................. 5-21

Figure 5-19. Disconnecting of Alkyl Heater Wires from PDU. ....................................... 5-22

Figure 5-20. T/C on DeviceNet Module .....................................................................5-23

Figure 5-21. Power for Lytron Heat Exchangers.........................................................5-24

Figure 5-22. Flow Flange Cooling Lines .................................................................... 5-25

Figure 5-23. Viewport and Reactor Band Cooling Lines...............................................5-26

Figure 5-24. CDA Lines for the Shutter .................................................................... 5-27

Figure 5-25. Molex connector for the Shutter Sensor. ................................................ 5-28

Figure 5-26. Flow Fange Assembly Gas Lines ........................................................... 5-29

Figure 5-27. Clamp Removal...................................................................................5-30

Figure 5-28. Lift Attached to the Flow Flange Assembly..............................................5-31

Figure 5-29. Manual Isolation Valves and Connections ..............................................5-32

Figure 5-30. InSitu Monitor Over Flow Flange ...........................................................5-33

Figure 5-31. Heater Baseplate Assembly Bottom View ..............................................5-34

Figure 5-32. Heater Baseplate Assembly .................................................................5-35

Figure 5-33. Heater Filaments................................................................................. 5-36

Figure 5-34. A: Vacuuming the chamber B: HEPA Filtered Toxic Materials, ESD-Grounded

Fireproof Vaccum Cleaner .................................................................................5-38

Figure 5-35. Removal of Exhaust Ring Following Removal of Ring Mounting Screws ......5-39

Figure 5-36. Liner for Heater Assembly (After Removal from Reactor)......................... 5-40

Figure 5-37. Wiping of Front Viewport..................................................................... 5-41

Figure 5-38. Wiping of the Pass-Thru Area .............................................................. 5-42

Figure 5-39. Vacuuming of the Shutter ................................................................... 5-43

Figure 5-40. Wiping of Flow Flange Bottom.............................................................. 5-44

Figure 5-41. Vacuuming of the Exhaust Ring ........................................................... 5-45

Figure 5-42. Heater Baseplate Assembly .................................................................5-47

Figure 5-43. Heater Baseplate Assembly Bottom View ..............................................5-48

Figure 5-44. Generic System Diagram .................................................................... 5-50

Figure 5-45. Flow Flange Tubing and Water Connections............................................5-55

Figure 5-46. Exhaust Line Flow Diagram ................................................................. 5-56

Figure 5-47. Chamber Maintenance - Vacuum Chamber for Leak Check ...................... 5-57

Figure 5-48. Chamber Maintenance - Vacuum Chamber for Leak Check (First View) ..... 5-57

Figure 5-49. Chamber Maintenance - Vacuum Chamber for Leak Check (Second View,

Scrolling)........................................................................................................ 5-58

Figure 5-50. Opening of Manual Valves - MV53 and MV54. ........................................ 5-58

Figure 5-51. Opening of MV106..............................................................................5-59

Figure 5-52. Manual Ball Valves - MV104 and MV105................................................ 5-59

Figure 5-53. Continue Vacuum Chamber for Leak Check ...........................................5-60

Figure 5-54. Log Information Visible After Clicking on Continue.................................. 5-60

Figure 5-55. Chamber Ready for Leak Checking ....................................................... 5-61

Figure 5-56. Closing of Manual Valves MV53 and MV54. ............................................ 5-61

Figure 5-57. Bottom of Flow Flange.........................................................................5-62

Figure 5-58. Viewport Cover .................................................................................. 5-64

Figure 5-59. Viewport Cover Mounting Holes............................................................ 5-65

Figure 5-60. Cleaning of O-Ring Grooves on Flow Flange........................................... 5-65

Figure 5-61. Preparing O-Rings .............................................................................. 5-66

Figure 5-62. Fomblin on O-Rings............................................................................ 5-66

Figure 5-63. Application of O-Rings ........................................................................5-67

Figure 5-64. Viewport Adapter Cleaning ..................................................................5-67

K465i Operations and Maintenance P/N 1212831 Rev C

Page viii

Figure 5-65. Flow Flange Positioning and Glands ...................................................... 5-68

Figure 5-66. Viewport Securing.............................................................................. 5-68

Figure 5-67. Forklift Preparation.............................................................................5-69

Figure 5-68. Retaining Rings and Forklift................................................................. 5-69

Figure 5-69. Leak Check Fitting.............................................................................. 5-70

Figure 5-70. Leak Checking of Viewport ..................................................................5-70

Figure 5-71. Releasing of Pins, Inverting of Flow Flange ............................................5-71

Figure 5-72. Placement of Manifolds .......................................................................5-72

Figure 5-73. Manifolds Placement........................................................................... 5-73

Figure 5-74. Tin Foil Preparation ............................................................................ 5-74

Figure 5-75. Wiping Surface Clean..........................................................................5-74

Figure 5-76. Scraping of Metal Surface ................................................................... 5-75

Figure 5-77. Installation of Guide Screws as per ViewPort Cutout ...............................5-76

Figure 5-78. Screen, Showing Viewport Cutout (Black Ovals Indicate Part Number

Locations)....................................................................................................... 5-77

Figure 5-79. Springs Protruding Upward.................................................................. 5-78

Figure 5-80. Bridges and Holes Aligned ...................................................................5-78

Figure 5-81. Screw Application Pattern....................................................................5-80

Figure 5-82. Applying Pressure Close to Center ........................................................ 5-81

Figure 5-83. Retainer and Spring Contact................................................................ 5-82

Figure 5-84. Gasket Crease ................................................................................... 5-83

Figure 5-85. Leveling and Support of Gasket During Lowering ...................................5-84

Figure 5-86. Cold Plate Lifting Loops.......................................................................5-85

Figure 5-87. Lowering of Cold Plate onto Flow Flange................................................ 5-86

Figure 5-88. CFI Weldment into Cold Plate .............................................................. 5-87

Figure 5-89. Fastening CFI Weldment .....................................................................5-87

Figure 5-90. Lowering Flow Flange Assembly onto Shutter ........................................5-88

Figure 5-91. Flow Flange Assembly Lowered onto the Shutter .................................... 5-89

Figure 5-92. Shutter Tube Spacer........................................................................... 5-90

Figure 5-93. Wiping O-Ring Surfaces/Aligning Shutter Tubes with FF Holes ................. 5-90

Figure 5-94. Cleaning and Assembling Lower Bellows Flange ..................................... 5-91

Figure 5-95. Aligning/Securing the Shutter Base ......................................................5-92

Figure 5-96. Setting O-Ring and O-Ring Shield ........................................................5-92

Figure 5-97. Air Cylinder Assembly.........................................................................5-93

Figure 5-98. O-ring and O-ring Cap Assembly .......................................................... 5-93

Figure 5-99. O-Ring and O-Ring Caps ..................................................................... 5-94

Figure 5-100. O-Ring Press Shutter Lift and Tightening ............................................. 5-95

Figure 5-101. Washer and Block Assembly ..............................................................5-96

Figure 5-102. Air Hoses Installed into Quick-Connect Ports........................................5-97

Figure 5-103. Flow Flange Assembly Placed Aside, Prepared for RCA Assembly ............5-97

Figure 5-104. Heater Assembly............................................................................. 5-102

Figure 5-105. Heater Baseplate Assembly Bottom View........................................... 5-103

Figure 5-106. Heater Baseplate Assembly ............................................................. 5-104

Figure 5-107. Outer Filament (shown in red) Supported on Support Pins Over Spacer . 5-105

Figure 5-108. Middle Filament Electrode-to-Filament Screw Connections ................... 5-106

Figure 5-109. Heater Baseplate Assembly ............................................................. 5-107

Figure 5-110. Heater Baseplate Assembly Bottom View........................................... 5-108

Figure 5-111. Installations of Insulation Blocks. ..................................................... 5-109

Figure 5-112. Coated (A) and Uncoated (B) Filament Sides ...................................... 5-110

Table of contents

Other Veeco Industrial Equipment manuals

Veeco

Veeco Mark II User manual

Veeco

Veeco Dimension 3100 User manual

Popular Industrial Equipment manuals by other brands

ABB

ABB +Q957 user manual

G.B.C

G.B.C BASIC EDGE 50 instruction manual

Tronair

Tronair Batpak 11-6602-1000 Operation & service manual

Pilz

Pilz PNOZ mi2p Operation manual

Clemco

Clemco Zero BNP 6012 manual

Erskine Attachments

Erskine Attachments V-Plow Operator's manual

ABB

ABB HT610965 Operation manual

Morra

Morra MH 540 user manual

Eaton

Eaton S090ST manual

GRIGGIO

GRIGGIO G 240 P4 instructions

Nexen

Nexen AIR CHAMP HT45 user manual

WTE

WTE V5 installation manual

ABB

ABB HT845232 Operation manual

SMC Networks

SMC Networks CJP Series Operation manual

JohnDow Industries

JohnDow Industries JDI-AFT58 Operator's manual

IMB

IMB MB9016A instruction manual

Clarke

Clarke CUMB1 Assembly & operating instructions

amiad

amiad Arkal Spin Klin 2 user guide

Veeco K465i GaN Installation guide

Popular Industrial Equipment manuals by other brands