Veeco Dimension 3100 User manual

Document Revision History: Dimension 3100 Manual
Revision Date Section(s) Affected Ref.
DCR Approval
C 05/15/03 Fluid Cell N/A L. Burrows
B 06/01/00 All. 313 A. Varbel
A 08/25/97 Released. N/A . Leilani
Copyright © 2003 Digital Instruments Veeco etrology Group
All rights reserved.
Dimension
TM
3100 Manual
Version . 3C
00 -320-000 (standard)
00 -320-100 (cleanroom)

Rev. C Dimension 3100 Manual TOC-1
Dimension 3100 Manual
Table of Contents
List of Figures LOF-1
Chapter 1 System Overview 1-1
1.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.2 How to Reach Digital Instruments Veeco .1-2
1.3 System Overview . . . . . . . . . . . . . . . . . . .1-3
1.3.1 Dimension 3100 SPM Features . . . . . . . . 1-3
1.4 Control Station Overview . . . . . . . . . . . . .1-5
1. .1 Input and Display Devices . . . . . . . . . . . . 1-5
1. .2 Computer . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1. .3 NanoScope IIIa Controller . . . . . . . . . . . 1-7
1. . Dimension 3100 Controller . . . . . . . . . . . 1-
1.5 Dimension 3100 SP Overview . . . . . .1-10
1.5.1 Dimension 3100 Microscope Electronics Box 1-10
1.5.2 Optics and Motors Overview . . . . . . . . . 1-11
1.5.3 Stage System . . . . . . . . . . . . . . . . . . . . . 1-12
1.5. Dimension SPM Head . . . . . . . . . . . . . . 1-12
1.5.5 Cantilever Holder . . . . . . . . . . . . . . . . . 1-16
1.5.6 Video Zoom Microscope . . . . . . . . . . . . 1-1
1.6 Sample Size & Handling . . . . . . . . . . . .1-19
1.7 Facilities Specifications . . . . . . . . . . . . .1-19
1.8 Applications . . . . . . . . . . . . . . . . . . . . . .1-20
1.9 aintenance and Troubleshooting . . . . .1-20

TOC-2 Dimension 3100 Manual Rev. C
Chapter 2
Safety 2-1
2.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . .2-1
2.2 Safety Requirements . . . . . . . . . . . . . . . .2-2
2.3 Safety Precautions . . . . . . . . . . . . . . . . . .2-3
2.3.1 General Operator Safety . . . . . . . . . . . . . 2-3
2.3.2 Microscope . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.3 Sample Safeguards . . . . . . . . . . . . . . . . . . 2-9
2.4 Ergonomics . . . . . . . . . . . . . . . . . . . . . . .2-11
2.5 Non-Physical Conditions . . . . . . . . . . . .2-11
2.6 Equipment Safety Applications . . . . . . .2-11
2.6.1 Dimension 3100 SPM Facility Requirements 2-11
2.7 Power-up Sequence (Installation and Service
Only) . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
2.7.1 Pre Power-up Checklist . . . . . . . . . . . . . 2-12
2.7.2 Power-up the Dimension 3100 SPM (Service and
Installation Only) . . . . . . . . . . . . . . . . . 2-17
2.7.3 Power-up Checklist (Service and Installation
Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.8 Power-Up Sequence (Normal Usage) . .2-19
2.8.1 Prepare the System for Power-up (Normal Usage)
2-19
2.8.2 Power-up Checklist (Normal Usage) . . . 2-19
2.9 Software Power-up . . . . . . . . . . . . . . . . .2-20
2.9.1 Select Windows NT Workstation .00 . . 2-20
2.9.2 Press
CTRL
-
ALT
-
DELETE
. . . . . . . . .2-21
2.9.3 Log On . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.9. Start the NanoScope Software . . . . . . . . 2-22
2.9.5 Select Real-Time . . . . . . . . . . . . . . . . . . 2-23
2.9.6 Begin Stage Initialization . . . . . . . . . . . . 2-23
2.9.7 Software Power-up Checklist . . . . . . . . . 2-24
2.10 Hazard Labels . . . . . . . . . . . . . . . . . . . .2-25
2.10.1 Laser Warning Labels . . . . . . . . . . . . . 2-25
Chapter 3
Facilities Requirements 3-1
3.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . .3-1
3.2 Optional Configurations . . . . . . . . . . . . .3-2
3.2.1 Axiom VT-103-3K with ELCON . . . . . . . . 3-2

Rev. C Dimension 3100 Manual TOC-3
3.2.2 Axiom VT-102 . . . . . . . . . . . . . . . . . . . . . 3-3
3.2.3 Axiom IS3K-2 . . . . . . . . . . . . . . . . . . . . . . 3-4
3.3 Facilities Requirements . . . . . . . . . . . . . . 3-5
3.4 Acoustic/Vibration Isolation Systems . . . 3-6
3. .1 Axiom IS3K-2 Dimensions, Utilities, and
Clearance . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3. .2 Axiom VT-103-3K Dimensions, Utilities and
Clearance . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3. .3 Axiom VT-102 Dimensions and Utilities 3-11
3. . Computer/Controller Facility Requirements 3-12
3. .5 ELCON Console . . . . . . . . . . . . . . . . . . 3-13
3.5 Facilities Requirements Summary . . . . 3-1
3.6 Environmental Acoustic/Vibration Specifications
3-15
3.7 General Facilities Guidelines . . . . . . . . 3-16
Chapter 4
Installation 4-1
4.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . -1
4.2 Shipping and Receiving . . . . . . . . . . . . . -2
.2.1 Equipment Requirements . . . . . . . . . . . . . 4-2
4.3 Uncrating the System . . . . . . . . . . . . . . . -
.3.1 Uncrate the Dimension 3100 SPM System 4-4
4.4 Installing the Dimension 3100 System . . -5
. .1 Install the Dimension 3100 SPM Unit . . . 4-5
. .2 Install the Control Station . . . . . . . . . . . . 4-7
4.5 Connecting the Dimension 3100 System -9
.5.1 Connect the Dimension 3100 Control Station
Extensions . . . . . . . . . . . . . . . . . . . . . . . . 4-9
.5.2 Connect the Dimension 3100 Microscope
Extensions . . . . . . . . . . . . . . . . . . . . . . . 4-15
4.6 System Power-up . . . . . . . . . . . . . . . . . . -18
Chapter 5
Stage System 5-1
5.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 ounting of Samples . . . . . . . . . . . . . . . 5-2
5.2.1 Vacuum Chucks . . . . . . . . . . . . . . . . . . . . 5-2

TOC-4 Dimension 3100 Manual Rev. C
5.2.2 Magnetic Pucks . . . . . . . . . . . . . . . . . . . . 5-2
5.2.3 Axis Orientation—Motorized X-Y Stages 5-3
5.3 Stage enu Commands . . . . . . . . . . . . . .5-
5.3.1 Load New Sample . . . . . . . . . . . . . . . . . . 5-4
5.3.2 Locate Tip . . . . . . . . . . . . . . . . . . . . . . . . 5-5
5.3.3 Align Laser . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.3. Focus Surface . . . . . . . . . . . . . . . . . . . . . . 5-
5.3.5 Move To (X,Y) . . . . . . . . . . . . . . . . . . . . . 5-9
5.3.6 Set Reference . . . . . . . . . . . . . . . . . . . . . 5-12
5.3.7 Programmed Move . . . . . . . . . . . . . . . . 5-15
5.3.8 Initialize . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.3.9 SPM Parameters . . . . . . . . . . . . . . . . . . 5-22
Chapter 6 Cantilever Preparation 6-1
6.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . .6-1
6.2 Silicon Cantilever Substrates . . . . . . . . . .6-2
6.2.1 Wafer Tool Kit . . . . . . . . . . . . . . . . . . . . . 6-2
6.2.2 Cantilever Preparation . . . . . . . . . . . . . . 6-2
6.2.3 Tip Shape of Etched Silicon Probes. . . . . 6-4
6.3 Silicon Nitride Cantilever Substrates . . . .6-8
6.3.1 Tip Shape of Silicon Nitride Probes. . . . 6-11
Chapter 7 Head, Probe, & Sample
Preparation 7-1
7.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.2 System Information . . . . . . . . . . . . . . . . .7-2
7.2.1 Mouse versus Trackball. . . . . . . . . . . . . . 7-2
7.2.2 Motor Interlock . . . . . . . . . . . . . . . . . . . . 7-2
7.2.3 Laser Requirements. . . . . . . . . . . . . . . . . 7-2
7.3 Basic AF Operation. . . . . . . . . . . . . . . .7-
7.3.1 Select the Microscope Head . . . . . . . . . . 7-4
7.3.2 Select Mode of Operation . . . . . . . . . . . . 7-4
7.3.3 Prepare the Cantilever Holder . . . . . . . . 7-4
7.3. Load the Cantilever Holder. . . . . . . . . . . 7-5
7.3.5 Remove the Dimension SPM Head . . . . . 7-7
7.3.6 Install the Cantilever Holder. . . . . . . . . . 7-
7.3.7 Replace the Dimension SPM Head . . . . . 7-9
7.3.8 Connect the Dimension Head . . . . . . . . . 7-9

Rev. C Dimension 3100 Manual TOC-5
7.3.9 Align Laser . . . . . . . . . . . . . . . . . . . . . . . 7-9
7.3.10 Adjust Photodetector . . . . . . . . . . . . . . 7-14
7.3.11 Locate Tip . . . . . . . . . . . . . . . . . . . . . . 7-16
7.3.12 Load the Sample . . . . . . . . . . . . . . . . . 7-17
7.3.13 Focus Surface. . . . . . . . . . . . . . . . . . . . 7-19
7.3.1 Cantilever Tune (TappingMode only) . 7-19
7.3.15 Set Initial Scan Parameters . . . . . . . . . 7-19
7.3.16 Engage. . . . . . . . . . . . . . . . . . . . . . . . . 7-20
7.3.17 Establish Tip Clearance. . . . . . . . . . . . 7-20
7.4 Advanced AF Operation . . . . . . . . . . 7-21
7. .1 Stage Parameters. . . . . . . . . . . . . . . . . . 7-21
Chapter 8 Contact AFM -1
8.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.2 Basic Contact ode AF Operation . . . 8-2
8.2.1 Select the Microscope Head . . . . . . . . . . -2
8.2.2 Select Mode of Operation . . . . . . . . . . . . -2
8.2.3 Head, Cantilever and Sample Preparation -2
8.2. Align Laser . . . . . . . . . . . . . . . . . . . . . . . -2
8.2.5 Adjust Photodetector . . . . . . . . . . . . . . . . -3
8.2.6 Locate Tip . . . . . . . . . . . . . . . . . . . . . . . . -3
8.2.7 Focus Surface. . . . . . . . . . . . . . . . . . . . . . -3
8.2.8 Set Initial Scan Parameters . . . . . . . . . . . -3
8.2.9 Engage. . . . . . . . . . . . . . . . . . . . . . . . . . . -6
8.3 Advanced Atomic Force Operation. . . . . 8-7
8.3.1 Cantilever Selection. . . . . . . . . . . . . . . . . -7
8.4 Optimization of Scanning Parameters. . 8-10
8. .1 Data Type. . . . . . . . . . . . . . . . . . . . . . . . -10
8. .2 Gain Settings . . . . . . . . . . . . . . . . . . . . . -11
8. .3 Scan Size and Scan Rate. . . . . . . . . . . . -12
8. . Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . -12
8. .5 Lowpass Filter. . . . . . . . . . . . . . . . . . . . -13
8. .6 Highpass Filter . . . . . . . . . . . . . . . . . . . -13
8.5 Force Calibration ode . . . . . . . . . . . . 8-1
Chapter 9 Contact AFM in Fluids 9-1
9.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . 9-1
9.2 Basic Principles of Contact AF in Fluids9-2

TOC-6 Dimension 3100 Manual Rev. C
9.3 Fluid Operation Hardware . . . . . . . . . . . .9-2
9.3.1 Fluid Tip Holder . . . . . . . . . . . . . . . . . . . 9-2
9.3.2 Tip Suggestions . . . . . . . . . . . . . . . . . . . . 9-3
9.3.3 Rubber Protective Skirt . . . . . . . . . . . . . . 9-4
9.4 Sample ounting. . . . . . . . . . . . . . . . . . .9-
9. .1 General Notes on Sample Binding. . . . . . 9-4
9. .2 Larger Samples . . . . . . . . . . . . . . . . . . . . 9-5
9. .3 Smaller Samples . . . . . . . . . . . . . . . . . . . 9-5
9.5 Fluid Operation Procedure. . . . . . . . . . . .9-8
9.5.1 Load the Cantilever Substrate. . . . . . . . . 9-
9.5.2 Install the Cantilever Holder. . . . . . . . . . 9-9
9.5.3 Install the Protective Skirt. . . . . . . . . . . 9-10
9.5. Align Laser . . . . . . . . . . . . . . . . . . . . . . 9-10
9.5.5 “False” Reflections . . . . . . . . . . . . . . . . 9-10
9.5.6 Lower Tip Holder into Fluid . . . . . . . . . 9-11
9.5.7 Readjust Laser Alignment . . . . . . . . . . . 9-12
9.5.8 Adjust Detector Offsets and Setpoint. . . 9-12
9.5.9 Locate Tip . . . . . . . . . . . . . . . . . . . . . . . 9-13
9.5.10 Focus Surface. . . . . . . . . . . . . . . . . . . . 9-13
9.5.11 Check Scan Parameters. . . . . . . . . . . . 9-15
9.5.12 Engage. . . . . . . . . . . . . . . . . . . . . . . . . 9-15
9.5.13 Adjust Scan Parameters. . . . . . . . . . . . 9-15
9.5.1 Clean Fluid Cell and Protective Skirt . 9-16
Chapter 10 Tapping Mode AFM 10-1
10.1 Overview . . . . . . . . . . . . . . . . . . . . . . .10-1
10.2 Principles of Tapping ode . . . . . . . . .10-2
10.3 Basic Tapping ode AF Operation .10-
10.3.1 Select the Microscope Head . . . . . . . . 10-4
10.3.2 Select Mode of Operation . . . . . . . . . . 10-4
10.3.3 Head, Cantilever and Sample Preparation10-4
10.3. Align Laser . . . . . . . . . . . . . . . . . . . . . 10-4
10.3.5 Adjust Photodetector . . . . . . . . . . . . . . 10-5
10.3.6 Locate Tip . . . . . . . . . . . . . . . . . . . . . . 10-5
10.3.7 Focus Surface. . . . . . . . . . . . . . . . . . . . 10-5
10.3.8 Cantilever Tune . . . . . . . . . . . . . . . . . . 10-6
10.3.9 Set Initial Scan Parameters . . . . . . . . 10-10
10.3.10 Engage. . . . . . . . . . . . . . . . . . . . . . . 10-12
10.4 Withdraw the Tip . . . . . . . . . . . . . . . .10-13
10.5 Advanced Tapping ode AF Operation10-1

Rev. C Dimension 3100 Manual TOC-7
10.5.1 Resonating Techniques . . . . . . . . . . . 10-14
10.5.2 Cantilever Oscillation . . . . . . . . . . . . 10-14
10.5.3 Decreasing the Cantilever Drive Frequency10-
16
10.5. Optimization of Scanning Parameters 10-17
10.5.5 Data Type. . . . . . . . . . . . . . . . . . . . . . 10-17
10.5.6 Gain Settings . . . . . . . . . . . . . . . . . . . 10-1
10.5.7 Scan Size, Scan Rate, and Setpoint . . 10-1
10.6 Troubleshooting . . . . . . . . . . . . . . . . 10-20
10.6.1 Frequency Response Plot. . . . . . . . . . 10-20
10.6.2 Engaging the Sample. . . . . . . . . . . . . 10-20
Chapter 11 TappingMode AFM in Fluids 11-1
11.1 Overview. . . . . . . . . . . . . . . . . . . . . . . 11-1
11.2 Principles of Tapping ode in Fluids. 11-2
11.2.1 Acknowledgments . . . . . . . . . . . . . . . . 11-2
11.3 Precautions . . . . . . . . . . . . . . . . . . . . . 11-3
11.3.1 Spillage Precautions . . . . . . . . . . . . . . 11-3
11.4 Basic Tapping ode AF in Fluids Operation
11-5
11. .1 Select the Microscope Head . . . . . . . . 11-5
11. .2 Select Mode of Operation . . . . . . . . . . 11-5
11. .3 Head, Cantilever and Sample Preparation11-5
11. . Align Laser . . . . . . . . . . . . . . . . . . . . . 11-5
11. .5 Adjust Photodetector . . . . . . . . . . . . . . 11-6
11. .6 Locate Tip . . . . . . . . . . . . . . . . . . . . . . 11-6
11. .7 Focus Surface. . . . . . . . . . . . . . . . . . . . 11-6
11. .8 Cantilever Tune . . . . . . . . . . . . . . . . . . 11-7
11. .9 Set Initial Scan Parameters . . . . . . . . 11-11
11. .10 Engage. . . . . . . . . . . . . . . . . . . . . . . 11-13
11. .11 Clean the Fluid Cantilever Holder . 11-13
11. .12 Select a Tip and Mount into the Tip Holder11-
13
11. .13 Attach Protective Skirt. . . . . . . . . . . 11-14
11. .1 Plug Fluid Cell in Dimension Head 11-14
11. .15 Locate the Tip . . . . . . . . . . . . . . . . . 11-14
11. .16 Prepare the Sample for Imaging . . . 11-15
11. .17 Remount the Dimension Head. . . . . 11-15
11. .18 Verify that the Microscope is Dry . . 11-17
11. .19 Switch to Tapping Mode . . . . . . . . . 11-17
11. .20 Set Initial Scan Parameters . . . . . . . 11-17

TOC-8 Dimension 3100 Manual Rev. C
11. .21 Cantilever Tune . . . . . . . . . . . . . . . . 11-1
11. .22 Adjust the Drive amplitude . . . . . . . 11-19
11. .23 Re-center the Photodiode . . . . . . . . 11-19
11. .2 Engage. . . . . . . . . . . . . . . . . . . . . . . 11-19
11. .25 Adjust the Setpoint. . . . . . . . . . . . . . 11-19
11. .26 Optimize Other Scan Parameters . . 11-20
11.5 Troubleshooting . . . . . . . . . . . . . . . . .11-21
11.5.1 Cantilever Tune Plot Looks Bad . . . . 11-21
11.5.2 Laser Sum Signal Absent or Weak. . . 11-21
11.5.3 Poor Image Quality . . . . . . . . . . . . . . 11-21
11.5. Unable to Locate Particulate Samples11-22
Chapter 12 Lateral Force Mode 12-1
12.1 Overview . . . . . . . . . . . . . . . . . . . . . . .12-1
12.2 Basic LF Operation. . . . . . . . . . . . . .12-2
12.2.1 Select the Microscope Head . . . . . . . . 12-2
12.2.2 Select Mode of Operation . . . . . . . . . . 12-2
12.2.3 Head, Cantilever, and Sample Preparation12-2
12.2. Align Laser . . . . . . . . . . . . . . . . . . . . . 12-2
12.2.5 Adjust Photodetector . . . . . . . . . . . . . . 12-3
12.2.6 Locate Tip . . . . . . . . . . . . . . . . . . . . . . 12-3
12.2.7 Focus Surface. . . . . . . . . . . . . . . . . . . . 12-3
12.2.8 Set Initial Scan Parameters . . . . . . . . . 12-4
12.2.9 Engage. . . . . . . . . . . . . . . . . . . . . . . . . 12-7
12.3 Advanced LF Operation . . . . . . . . . .12-8
12.3.1 Optimal Setup for Frictional Measurements12-
12.3.2 Identification of Friction . . . . . . . . . . . 12-9
12.3.3 Identification of Forces Other Than Friction12-
12
12.3. Example of Frictional Data. . . . . . . . 12-14
Chapter 13 Force Imaging 13-1
13.1 Overview . . . . . . . . . . . . . . . . . . . . . . .13-1
13.2 Force Plots–An Analogy . . . . . . . . . . .13-2
13.3 Force Calibration . . . . . . . . . . . . . . . . .13-5
13.3.1 Example Force Plot . . . . . . . . . . . . . . . 13-6
13.4 Force Calibration Control Panels . . . .13-10
13. .1 Main Controls (Ramp Controls) . . . . 13-11

Rev. C Dimension 3100 Manual TOC-9
13. .2 Main Controls (Display) . . . . . . . . . . 13-12
13. .3 Channel 1, 2, 3 Panels. . . . . . . . . . . . 13-12
13. . Feedback Controls. . . . . . . . . . . . . . . 13-13
13. .5 Scan Mode . . . . . . . . . . . . . . . . . . . . . 13-15
13. .6 Menu Bar Commands . . . . . . . . . . . . 13-17
13.5 Force Calibration (Contact ode AF )13-19
13.5.1 Obtaining a Good Force Curve . . . . . 13-19
13.5.2 Helpful Suggestions. . . . . . . . . . . . . . 13-22
13.5.3 Advanced Techniques. . . . . . . . . . . . . 13-25
13.6 Force Calibration (Tapping ode) . . 13-30
13.6.1 Force Plots. . . . . . . . . . . . . . . . . . . . . 13-30
13.6.2 Obtaining a Force Plot (Tapping Mode)13-33
13.6.3 High Contact Force . . . . . . . . . . . . . . 13-35
13.6. Plotting Phase Versus Frequency in Tapping
Mode . . . . . . . . . . . . . . . . . . . . . . . . . . 13-36
13.7 Force odulation . . . . . . . . . . . . . . . 13-37
13.7.1 Introduction . . . . . . . . . . . . . . . . . . . . 13-37
13.7.2 Selecting a Force Modulation Tip . . . 13-3
13.7.3 Operating Principle. . . . . . . . . . . . . . 13-39
13.7. Force Modulation Procedure. . . . . . . 13-40
13.7.5 Notes About Artifacts . . . . . . . . . . . . 13-49
13.8 Force odulation with ‘Negative Lift ode’13-
52
13.8.1 Find Resonance of the Bimorph . . . . 13-52
13.8.2 Set Interleave Controls . . . . . . . . . . . 13-53
13.8.3 Obtain a Tapping Mode Image . . . . . 13-53
13.8. Obtain a Negative LiftMode Force Modulation
Image . . . . . . . . . . . . . . . . . . . . . . . . . 13-54
13.9 Force Volume . . . . . . . . . . . . . . . . . . 13-56
Chapter 14 Interleave Scanning 14-1
14.1 Overview. . . . . . . . . . . . . . . . . . . . . . . 1 -1
14.2 Interleave Scanning. . . . . . . . . . . . . . . 1 -2
14.3 Basic Interleave Scanning Operation . 1 -2
1 .3.1 Select the Microscope Head . . . . . . . . 14-2
1 .3.2 Select Mode of Operation . . . . . . . . . . 14-2
1 .3.3 Head, Cantilever and Sample Preparation14-3
1 .3. Align Laser . . . . . . . . . . . . . . . . . . . . . 14-3
1 .3.5 Adjust Photodetector . . . . . . . . . . . . . . 14-3

TOC-10 Dimension 3100 Manual Rev. C
1 .3.6 Locate Tip . . . . . . . . . . . . . . . . . . . . . . 14-3
1 .3.7 Focus Surface. . . . . . . . . . . . . . . . . . . . 14-4
1 .3.8 Set Initial Scan Parameters . . . . . . . . . 14-4
1 .3.9 Engage. . . . . . . . . . . . . . . . . . . . . . . . . 14-6
1 .3.10 Lift Mode . . . . . . . . . . . . . . . . . . . . . 14-7
14.4 Interleave Scanning/Lift ode Operation1 -8
1 . .1 Basic Lift Mode Operation . . . . . . . . . 14-
14.5 Advanced Lift ode Operation . . . . .1 -10
1 .5.1 Lift scan height . . . . . . . . . . . . . . . . . 14-10
1 .5.2 Tip Shape . . . . . . . . . . . . . . . . . . . . . . 14-10
1 .5.3 Scan Line Direction. . . . . . . . . . . . . . 14-10
14.6 Lift ode with Tapping ode . . . . . .1 -11
1 .6.1 Main Drive Amplitude and Frequency selection
14-11
1 .6.2 Setpoint Selection . . . . . . . . . . . . . . . 14-11
1 .6.3 Interleave Drive Amplitude and Frequency
Selection . . . . . . . . . . . . . . . . . . . . . . . 14-11
Chapter 15 Magnetic Force Microscopy 15-1
15.1 Overview . . . . . . . . . . . . . . . . . . . . . . .15-1
15.2 agnetic Force icroscopy. . . . . . . . .15-2
15.2.1 Force Gradient Detection . . . . . . . . . . 15-2
15.2.2 Amplitude Detection Techniques . . . . . 15-3
15.3 Basic F Operation . . . . . . . . . . . . .15-
15.3.1 MFM Using LiftMode . . . . . . . . . . . . . 15-4
15.3.2 Magnetic Force Microscopy Procedure15-5
15.4 Advanced F Operation. . . . . . . . .15-13
15. .1 Lift Scan Height and Magnetic Imaging
Resolution . . . . . . . . . . . . . . . . . . . . . . 15-13
15. .2 Linear Lift . . . . . . . . . . . . . . . . . . . . . 15-14
15. .3 Fine Tuning Interleave Controls . . . . 15-14
15. . Drive Amplitude. . . . . . . . . . . . . . . . . 15-15
15.5 Installation of Extender Electronics odule15-
18
15.6 Troubleshooting . . . . . . . . . . . . . . . . .15-22
15.6.1 MFM Image Verification . . . . . . . . . . 15-22
15.6.2 Saturation in Amplitude Detection . . 15-22
15.6.3 Optical Interference. . . . . . . . . . . . . . 15-22

Rev. C Dimension 3100 Manual TOC-11
Chapter 16 Electric Techniques 16-1
16.1 Overview. . . . . . . . . . . . . . . . . . . . . . . 16-1
16.2 Electric Techniques Overview. . . . . . . 16-2
16.2.1 Electric Force Microscopy Overview. . 16-3
16.2.2 Surface Potential Imaging Overview. . 16-4
16.3 Electric Force icroscopy . . . . . . . . . 16-5
16.3.1 Electric Force Microscopy Theory. . . . 16-5
16.3.2 Electric Force Microscopy Preparation16-7
16.3.3 Electric Force Microscopy Procedures16-21
16.4 Surface Potential Detection. . . . . . . . 16-28
16. .1 Surface Potential Detection Theory. . 16-2
16. .2 Surface Potential Detection Preparation16-30
16. .3 Surface Potential Imaging Procedure 16-35
16. . Open Loop Operation . . . . . . . . . . . . 16-39
16.5 Troubleshooting . . . . . . . . . . . . . . . . 16- 1
Chapter 17 Calibration 17-1
17.1 Overview. . . . . . . . . . . . . . . . . . . . . . . 17-1
17.2 SP Calibration Overview . . . . . . . . 17-2
17.2.1 Theory Behind Calibration . . . . . . . . . 17-3
17.3 Sensitivity and Scanner Calibration . . 17-6
17.3.1 Scanner Properties . . . . . . . . . . . . . . . 17-6
17.4 Calibration References . . . . . . . . . . . . 17-9
17.5 Small Scan Size Calibration . . . . . . . 17-10
17.6 Full X-Y Calibration Routine . . . . . . 17-10
17.6.1 Linearity Correction . . . . . . . . . . . . . 17-10
17.6.2 X-Y Calibration using Capture Calibration17-21
17.6.3 Off-line / Utility / Autocalibration. . . 17-25
17.7 Fine-tuning for X-Y Calibration . . . . 17-28
17.7.1 Prepare System for Fine-tuning. . . . . 17-2
17.7.2 Measure Horizontally at 0V Scan Size17-2
17.7.3 Measure Vertically at 0V Scan Size 17-30
17.7. Measure Horizontally at 150 V Scan Size17-31
17.7.5 Measure Vertically at 150 V Scan Size17-33
17.7.6 Change Scan angle and Repeat Calibration
Routines . . . . . . . . . . . . . . . . . . . . . . . 17-34

TOC-12 Dimension 3100 Manual Rev. C
17.8 Calibrating Z . . . . . . . . . . . . . . . . . . .17-35
17.8.1 Engage. . . . . . . . . . . . . . . . . . . . . . . . 17-35
17.8.2 Capture and Correct an Image . . . . . 17-36
17.8.3 Measure Vertical Features. . . . . . . . . 17-3
17.8. Correct Z Sensitivity . . . . . . . . . . . . . 17-40
17.8.5 Recheck Z-axis Measuring Accuracy. 17-41
17.8.6 Calculate Retracted and Extended Offset
Deratings . . . . . . . . . . . . . . . . . . . . . . 17-41
Chapter 18 Maintenance and
Troubleshooting 1 -1
18.1 Overview . . . . . . . . . . . . . . . . . . . . . . .18-1
18.2 aintenance . . . . . . . . . . . . . . . . . . . . .18-2
18.2.1 Returning Components for Repair. . . . 1 -2
18.2.2 Cleaning the Cantilever Holder . . . . . 1 -2
18.2.3 Cleaning the Cantilever Holder Contacts1 -2
18.2. Clean the Sample Holder and X-Y Stage Surfaces
1 -2
18.2.5 Changing the Illuminator Light Bulb . 1 -3
18.3 Troubleshooting . . . . . . . . . . . . . . . . . .18-5
18.3.1 Software Main Menu Items . . . . . . . . . 1 -5
18.3.2 Contact Mode AFM. . . . . . . . . . . . . . . 1 -
18.3.3 Problems with Contact Mode AFM. . 1 -10
18.3. Tapping Mode AFM. . . . . . . . . . . . . . 1 -15
18.3.5 Problems with Tapping Mode AFM. . 1 -19
18.3.6 Initialize. . . . . . . . . . . . . . . . . . . . . . . 1 -22
Index IX-1

Rev. C Dimension 3100 Manual 1-1
Chapter 1 System Overview
1.1 Overview
The Dimension 3100 Scanning Probe icroscope (SP ) produces high-
resolution, three-dimensional images by scanning a sharp tip over the sample
surface. The tip is part of a flexible cantilever mounted on one end of a
cylindrical piezoelectric tube mounted near the top of the microscope. Voltages
applied to the X and Y electrodes on the piezoelectric tube deflect the tube
horizontally to produce a precise raster scan over the sample surface. A voltage
applied to the Z electrode on the piezo tube controls the vertical height of the
tip. A stepper motor coupled to a lead screw translates a slide with the sample
attached. A separate motor drive controls the height of the microscope and tip
relative to the sample surface.
This manual details facility requirements, installation requirements and
procedures, maintenance requirements and procedures, and applications used
with the Dimension 3100 Scanning Probe icroscope. This chapter discusses
the following:
•How to Reach Digital Instruments Veeco: Section 1.2
•System Overview: Section 1.3
•Control Station Overview: Section 1.4
•Dimension 3100 SPM Overview: Section 1.5
•Sample Size & Handling: Section 1.6
•Facilities Specifications: Section 1.7
•Applications: Section 1.8
•Maintenance and Troubleshooting: Section 1.9

System Overview
1-2 Dimension 3100 Manual Rev. C
1.2 How to Reach Digital Instruments Veeco
You may obtain technical support via telephone, fax, e-mail, or mail. Your
company may have also negotiated a priority service agreement which grants
access to the Priority Service ailbox. When contacting Digital Instruments
Veeco, have the NanoScope controller serial number available. The serial number
is located on the back of the NanoScope controller. Place your telephone next to the
microscope before calling technical support to ensure comfortable access to your
system.
Consult Digital Instruments Veeco technical support staff before sending any parts
for replacement or repair. All returned parts must have return authorization
numbers.
ailing Address: Technical Support Department
Digital Instruments Veeco
112 Robin Hill Road
Santa Barbara, CA 93117
Telephone: [phone] Fax: [phone]
[phone]
E-mail: [email protected]
[email protected]
If you have a Priority Service Agreement, contact Digital Instruments Veeco at:
24hrs Priority
Service ailbox: [phone] Fax: [phone]
For assistance in other than technical support, please contact the appropriate
department.
Domestic sales, product information, price quotes:
Richard Puestow [phone] ext. 313
International sales, product information, price quotes:
Chris Carnaghi [phone] ext. 290
or Contact your local representative.
Pricing, delivery, order information:
ark Lien [phone] ext. 270
Information is also available at the Digital Instruments Veeco web site:
http://www.di.com

System Overview
Rev. C Dimension 3100 Manual 1-3
1.3 System Overview
There are three typical configurations of the Dimension 3100 Scanning Probe
icroscope (See Chapter 3 for detailed information).
• Axiom VT-103-3K with ELCON
• Axiom VT-102
• Axiom IS3K-2
The configurations provide options for acoustic and mechanical vibration
isolation, as well as various options for positioning control station components.
The features outlined below apply to all configurations.
1.3.1 Dimension 3100 SP Features
Enhanced Motorized Positioning Stage
• Inspectable Area 120mm x 100mm
• Resolution: 2µm
• Unidirectional Repeatability: 3µm typical, 10µm
maximum
• Bidirectional Repeatability: 4µm for x-axis, 6µm for y-axis
typical for point to point motion
Integrated Dimension 3100 Controller
The Dimension 3100 controller integrates the illuminator, power supply,
and air and vacuum pumps.
Optical Microscope
The optical microscope now includes a computer-controlled illuminator
for easier optical focusing and zooming.

System Overview
1-4 Dimension 3100 Manual Rev. C
Dimension 3100 SPM Features continued...
Video Image Capture Capability
Video image capture capability allows the user to easily incorporate
video images into reports and publications.
Computer System
The Dimension 3100 ships with a high quality tower-style Pentium PCI
computer system.

System Overview
Rev. C Dimension 3100 Manual 1-5
1. Control Station Overview
The Dimension 3100 SP control station consists of four components: input
and display devices (keyboard, trackball, monitors), computer, NanoScope
controller and Dimension 3100 controller.
1.4.1 Input and Display Devices
Input and display devices include two monitors, a keyboard, mouse, and
trackball (See Figure 1.4a). These devices convey information signals to the
computer to operate the software and SP . Depending on the configuration
of the system, the input and display devices are located atop the control
station table (Axiom VT-103-3) or contained within an enclosure (Axiom
IS3K-3).
CAUTION: The monitors contain a hazardous voltage of 120V.
Figure 1. a Dimension 3100 Input and Display Equipment
3919

System Overview
1-6 Dimension 3100 Manual Rev. C
Control Station Overview continued...
1.4.2 Computer
The computer is the main control unit of the Dimension 3100 SP system; it
supports a 100 B Zip® disc drive, CD-RO drive and 1.44 B floppy disc
drive (See Figure 1.4b). The computer receives data from the input devices,
and controls external hardware via the standard ports and the input/output (I/
O) bus. The computer isolates the user from direct interaction with the
hardware.
Figure 1. b Computer (rear view)
1
5
2
3
serial number
4
KB
MS
6
7
8
9
USB COM1 VIDEO UDIO
G ME/MIDI
LPTI
COM2
3904

System Overview
Rev. C Dimension 3100 Manual 1-7
Control Station Overview continued...
1.4.3 NanoScope IIIa Controller
The NanoScope IIIa controller controls the microscope head and scanning.
The NanoScope IIIa controller is controlled via a 25-pin D cable connection
between it and the computer (See Figure 1.4c).
Figure 1. c NanoScope IIIa Controller (front view)
3902
NanoScope® IIIa
Scanning Probe Microscope Controller
MICROSCOPE
POWER
1