Versum Materials GASGUARD AP10 Instruction manual
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
VersumMaterialsConfidential
Installation / Operation / Maintenance
Manual
GASGUARD® AP10
Source Systems
Manual Part Number: 123223
Edition: Rev-1
_______________________________________________________________________________________________________________
MNL000454.doc Revision 1 02/22/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C - 2
VersumMaterialsConfidential
The information and data contained herein are proprietary to Versum Materials, Inc. and
are not to be copied, reproduced, duplicated, or disclosed to others, in whole or in part,
without prior written consent of Versum Materials, Inc. The information and data
should be available only to those with a need to know. Versum Materials, Inc. makes no
representation that the information and data is appropriate for the recipient, and each
recipient needs to independently evaluate the appropriateness of the information and
data for its use.
This Installation and Operation Manual is subject to change without notification. For
current technical information please call Product Support at (866)624-7677 from
continental U.S., or write Versum Materials, Inc., 1919 Vultee Street, Allentown, PA
18103, attention: Product Support.
Printed in the U.S.A.
_______________________________________________________________________________________________________________
MNL000454.doc Revision 1 02/22/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C - 3
VersumMaterialsConfidential
WARRANTY
Versum Materials, Inc. (hereinafter referred to as "Versum Materials") warrants that:
(A) Each new Versum Materials Delivery System is free from defects in material and
workmanship under normal use and service for a period of one year from the date of
delivery by Versum Materials to the first purchaser.
(B) Each new accessory is free from defects in material and workmanship under
normal use and service for a period of one (1) year from the date of delivery by Versum
Materials to the first purchaser.
If any product requires service during the applicable warranty period, the purchaser
should communicate directly with Versum Materials to determine appropriate repair.
Repair or replacement will be carried out at Versum Materials expense subject to the
terms of this warranty. It is the responsibility of the customer to perform routine
maintenance and periodic calibration.
In no event shall Versum Materials be liable for any incidental, indirect or consequential
damages in connection with the purchase or use of any Versum Materials product. This
warranty shall not apply to, and Versum Materials shall not be responsible for, any loss
arising in connection with the purchase or use of any Versum Materials product which
has been repaired by anyone other than an authorized Versum Materials service
representative or altered in any way so as, in Versum Materials judgment, to affect its
stability or reliability, or which has been subject to misuse or negligence or accident, or
which has the unit or lot number altered, effaced or removed, or which has been used
otherwise than in accordance with the instructions furnished by Versum Materials.
This warranty is in lieu of all other warranties, express or implied, and all other
obligations or liabilities on Versum Materials part, and Versum Materials neither
assumes nor authorizes any representative or other person to assume for it any other
liability in connection with the sale of Versum Materials equipment.
VERSUM MATERIALS DISCLAIMS ALL OTHER WARRANTIES, EXPRESS
OR IMPLIED, INCLUDING ANY WARRANTY OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR APPLICATION.
Address:
Versum Materials, Inc.
1919 Vultee Street
Allentown, PA 18103, U.S.A
_______________________________________________________________________________________________________________
MNL000454.doc Revision 1 02/22/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C - 4
VersumMaterialsConfidential
Revision Control Summary
Chapter Revision File Name
Introduction
Rev-0 MNL000455.doc
Initial Release
Chapter 1 – Safety Warnings
Rev-0 MNL000456.doc
Initial Release
Chapter 2 – Dimensions and Mounting
Rev-0 MNL000457.doc
Initial Release
Chapter 3 – Tubing Connections
Rev-0 MNL000458.doc
Initial Release
Chapter 4 – Electrical Connections
Rev-0 MNL000459.doc
Initial Release
Chapter 5 – Helium leak Testing
Rev-0 MNL000460.doc
Initial Release
Chapter 6 – Source System Functional Checklist
Rev-0 MNL000461.doc
Initial Release
Chapter 7 – System Description
Rev-0 MNL000462.doc
Initial Release
Chapter 8 – Operating Procedures
Rev-0 MNL000463.doc
Initial Release
Chapter 9 – Troubleshooting
Rev-0 MNL000464.doc
Initial Release
Chapter 10 – Maintenance
_______________________________________________________________________________________________________________
MNL000454.doc Revision 1 02/22/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C - 5
VersumMaterialsConfidential
Rev-2 MNL000465.doc
Updated pneumatic fitting PMs
Updated purifier PMs
Chapter 11 – System Specific information
Rev-2 MNL000466.doc
Updated Spare parts
Appendix A
Rev-0 MNL000467.doc
Initial Release
Appendix B
Rev-0 MNL000468.doc
Initial Release
Appendix C
Rev-0 MNL000469.doc
Initial Release
Appendix B
Rev-0 MNL000470.doc
Initial Release
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Introduction
This manual covers the tasks required to install, operate and maintain the Gasguard
Source System gas cabinet, rack, and purge panel system. Because of unique
installation variables from site to site, it is not intended as a step-by-step
installation procedure, but relies on the knowledge of qualified personnel to
perform the work properly. This manual should be read thoroughly by the
supervising installation engineer before installation is begun.
The Gasguard cabinets have been designed and built in accordance with the
International Fire Code (IFC) and the National Fire Protection Association
(NFPA). They must be installed and operated in accordance with the IFC, NFPA
and all other applicable industrial, federal, state and local codes if installed in the
United States.
Gasguard® is a registered trademark. The Gasguard name is officially registered
and legally restricted to be used only by Versum Materials, Inc. The
information
and data contained herein are proprietary to Versum Materials, Inc. and are not to
be copied, reproduced, duplicated or disclosed to
others, in whole or in part,
without prior written consent of Versum Materials, Inc. This restriction shall not
apply to any safety information
contained in the manual. The safety information is
intended for your use and we
encourage you to copy it so that anyone using this
equipment knows how to use it
safely.
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Note: Versum Materials, Inc. recommends that the customer develop a specific
"Work
Instruction" for each gas cabinet, rack system or distribution system. The
work
instruction can be used as a step through check list procedure for trained
operators.
A standard industrial work instruction would include the following:
•
System identification number, gas service, basic description of system, etc.
•
Current operating data (pressure, cylinder weight, etc.), date, time, operator.
•
Tools/supplies required for cylinder change (PPE required for the gas, leak
testing equipment, torque wrench, gaskets, etc.)
•
Step-through procedural check list to include specific customer PPE
protocol, communications, customer leak test procedures, cylinder handling
and storage procedures.
Consult your local Versum Materials, Inc. technical representative if you need
assistance in
preparation of standard work instruction.
Section 1: Safety
This section provides the safety information needed to safely operate the system.
Material Safety Data sheets for the cylinder gases and the instrument nitrogen
supply. The safety section is to be carefully read and understood before work is
performed on the system.
Section 2: Dimensions and Mounting
This section provides an overview of methods to mount the system as well as
envelope dimensions for typical systems.
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Section 3: Tubing Connections
This section provides information for on site mechanical hook up requirements.
Section 4: Electrical Connections
This section provides information for on site electrical hook up requirements.
Section 5: Helium Leak Test
This section provides an overview on site helium leak test requirements.
Section 6: Source System Functional Checklist
This section contains a checklist to assure the system was installed properly.
Section 7: System Description
This section provides an overview of the system.
Section 8: Operating Procedures
This section contains the procedures to prepare the system for operation and to
operate it.
Section 9: Troubleshooting
This section provides guidelines for solving operating system alarm problems. It is
a general guide; reference to manufacturers' literature will be required in some
cases.
Section 10: Maintenance
This section provides a guide to routine maintenance operations.
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Section 11: System Specific Information
This section provides system specific information such as system specifications
and recommended spare parts.
Appendix A
The Appendix contains the SEMC QAF030 “UHP Tubing and Fitting
Specification” and cylinder connection torque requirements.
Appendix B
This Appendix contains the Versum Materials, Inc. Nitrogen (N2) Material
Safety Data
Sheet (MSDS).
Appendix C
This Appendix contains the certificate of assessment to the Pressure Equipment
Directive (PED) for Gasguard™ equipment. (Applicable only within the European
community)
Appendix D
This Appendix contains the Supplemental Information for GASGUARD®
Acetylene Source Systems
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
The table below provides a quick reference as to the applicability of the manual's
sections.
Manual Section Supervisory Maintenance Operations
1.
Safety
• • •
2: Dimensions and Mounting
• • •
3: Tubing Connections
• • •
4: Electrical Connections
• • •
5: Helium Leak Test
• • •
6: Source System Functional
Checklist
• • •
7: System Description
• • •
8: Operating Procedures
• • •
9: Troubleshooting
• •
10: Maintenance
• •
11: System Specific
Information
• • •
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Appendix A
• • •
Appendix B
• • •
Appendix C
• • •
Appendix D
• • •
The information and data contained herein are proprietary to Versum Materials, Inc. and
are not to be copied, reproduced, duplicated or disclosed to
others, in whole or in part,
without prior written consent of Versum Materials, Inc. This restriction shall not apply
to any safety information
contained in the manual. The safety information is intended
for your use and we
encourage you to copy it so that anyone using this equipment knows
how to use it
safely.
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 1
Section 1: Safety Warnings
Please read the following safety warnings carefully before installing the
equipment.
1.1 Introduction
This section is meant to communicate to the user any hazards involved with the
equipment.
The following paragraphs will define the hazard warnings used and describe the
icons found in various sections of the manual and on the equipment. The hazard
warning labels used in the manual will correlate with those used on the equipment.
1.1.1 LevelorIntensityofHazard
Indicatesanimmediatehazard,whichifnot
avoided,willresultindeathorseriousinjury.
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 2
Indicates a potentially hazardous
situation, which if not avoided, could
result in death or serious injury.
Indicates a potentially hazardous
situation, which if not avoided, may
result in a minor or moderate injury. It
may also be use to alert against unsafe
practices.
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 3
1.1.2 HazardTypes(Symbols)
This symbol is a safety alert symbol.
This symbol represents asphyxiant, toxic or corrosive
gases. Gases used with the Gasguard can cause personal
injury or death.
This symbol can represent one or more of the following
conditions:
Explosive gases! Gases used with the Gasguard can cause
an explosion when combined with air.
The formation for explosive gas mixtures of flammable
gas and air when exposed to an ignition source.
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 4
Pyrophoric gases which will ignite spontaneously without
the presence of an ignition source when exposed to air.
Energy release which may result from pneumatic or
hydraulic pressure rapidly escaping from a portion of the
equipment.
This symbol represents flammable gases. Gases used
with the Gasguard can cause flammable atmospheres.
This symbol represents PPE (Personal Protective
Equipment). Proper PPE shall be worn when working
with this system.
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 5
This symbol represents electrical shock hazard.
This symbol warns of potential strain or injury when
lifting cylinders.
This symbol warns of a pinch hazard. This hazard exists
on cabinet doors equipped with automatic closers.
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 6
This symbol warns of the possibility of the source system
tipping over if it is not installed properly. Personal injury
could result.
This symbol indicates the need for head protection.
This symbol cautions against the improper anchoring of
cabinets.
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 7
1.2 ImportantSafetyWarnings
Failure to read, understand and follow the
safety information found in this section
could result in personal injury and death.
The operator must read and understand
this safety section before operating the
system. All operating and maintenance
personnel must receive training and
instruction by Versum Materials, Inc.
All cylinder storage areas must be
continually monitored with an air quality
monitor to prevent the danger of a
hazardous atmosphere.
Before using the system, review your
company's requirements for use of toxic,
corrosive, flammable, pyrophoric,
oxidizers and inert gas cylinders and
electrically powered equipment. You must
be thoroughly trained in your company's
safety procedures and safety equipment
(self-contained breathing apparatus,
emergency shutdown systems, plant alarm
locations, etc.)
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 8
Do not use this device in any manner other
than specified in this manual.
Do not make any changes to the
independently. INJURY or DEATH
may result from unauthorized
modifications. All modifications to
equipment MUST be approved in
writing by an Versum Materials, Inc.'
Representative.
1.3 InertGasHazards
High concentrations of nitrogen,
helium, or other inert gases can cause
an oxygen deficient atmosphere in a
confined area which can cause
DEATH. All personnel must read and
understand the material safety data
sheet(s) (MSDS) for the specific
gas(es) being used.
Oxygen concentrations of 19.5% or less can greatly increase the hazard of
asphyxiation to personnel. Before working in an area where nitrogen, helium or
other inert gases could be present, check the area with an oxygen monitor to be
sure the oxygen concentration is between 19.5% and 23%. While working in the
area, the oxygen concentration needs to be monitored with a continuous oxygen
monitor. Always provide adequate ventilation in the work area to decrease the
risk
of an oxygen deficient atmosphere.
Chapter - 1
MNL000456.doc Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page - 9
Personnel in an oxygen deficient atmosphere will not realize they are being
asphyxiated. Breathing of pure inert gases will cause immediate unconsciousness.
Symptoms of asphyxia include:
•
Rapid breathing
•
Nausea
•
Vomiting
•
Inability to move
•
Convulsive movements
•
Collapse
•
Abnormal pulse
•
Rapid fatigue
•
Faulty judgment
•
Insensitivity to pain
•
Abnormal emotions
Remove any personnel in an oxygen deficient atmosphere to fresh air. Get
medical attention immediately. Positive pressure breathing apparatus must be
worn by any rescuers entering a suspected oxygen deficient atmosphere.
Nitrogen gas may accumulate in low or confined areas. All requirements of
OSHA 1910.146 (Confined Space Guidelines) must be met when inert gases may
be present in confined spaces. Self contained breathing apparatus is required
(cartridge or filter type gas masks cannot be used). See the information on
personal protective equipment in this section for details.
Other manuals for GASGUARD AP10
1
Table of contents
Other Versum Materials Industrial Equipment manuals
