Versum Materials GASGUARD AP10 Instruction manual

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© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
VersumMaterialsConfidential
Installation / Operation / Maintenance
Manual
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GASGUARD® AP10
Distribution Systems
Manual Part Number: 123224
Edition: Rev- 1

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MNL000438.doc Revision 1 02/22/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C - 2
VersumMaterialsConfidential
The information and data contained herein are proprietary to Versum Materials, Inc. and
are not to be copied, reproduced, duplicated, or disclosed to others, in whole or in part,
without prior written consent of Versum Materials, Inc. The information and data
should be available only to those with a need to know. Versum Materials, Inc. makes no
representation that the information and data is appropriate for the recipient, and each
recipient needs to independently evaluate the appropriateness of the information and
data for its use.
This Installation and Operation Manual is subject to change without notification. For
current technical information please call Product Support at [phone] from
continental U.S., or write Versum Materials, Inc., 1919 Vultee Street, Allentown, PA
18103, attention: Product Support.
Printed in the U.S.A.

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Page C - 3
VersumMaterialsConfidential
WARRANTY
Versum Materials, Inc. (hereinafter referred to as "Versum Materials") warrants that:
(A) Each new Versum Materials Delivery System is free from defects in material and
workmanship under normal use and service for a period of one year from the date of
delivery by Versum Materials to the first purchaser.
(B) Each new accessory is free from defects in material and workmanship under
normal use and service for a period of one (1) year from the date of delivery by Versum
Materials to the first purchaser.
If any product requires service during the applicable warranty period, the purchaser
should communicate directly with Versum Materials to determine appropriate repair.
Repair or replacement will be carried out at Versum Materials expense subject to the
terms of this warranty. It is the responsibility of the customer to perform routine
maintenance and periodic calibration.
In no event shall Versum Materials be liable for any incidental, indirect or consequential
damages in connection with the purchase or use of any Versum Materials product. This
warranty shall not apply to, and Versum Materials shall not be responsible for, any loss
arising in connection with the purchase or use of any Versum Materials product which
has been repaired by anyone other than an authorized Versum Materials service
representative or altered in any way so as, in Versum Materials judgment, to affect its
stability or reliability, or which has been subject to misuse or negligence or accident, or
which has the unit or lot number altered, effaced or removed, or which has been used
otherwise than in accordance with the instructions furnished by Versum Materials.
This warranty is in lieu of all other warranties, express or implied, and all other
obligations or liabilities on Versum Materials part, and Versum Materials neither
assumes nor authorizes any representative or other person to assume for it any other
liability in connection with the sale of Versum Materials equipment.
VERSUM MATERIALS DISCLAIMS ALL OTHER WARRANTIES, EXPRESS
OR IMPLIED, INCLUDING ANY WARRANTY OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR APPLICATION.
Address:
Versum Materials, Inc.
1919 Vultee Street
Allentown, PA 18103, U.S.A

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Confidential and Proprietary Data
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VersumMaterialsConfidential
Revision Control Summary
Chapter Revision File Name
Introduction
Rev-0 MNL000439.doc
 Initial Release
Chapter 1 – Safety Warnings
Rev-0 MNL000440.doc
 Initial Release
Chapter 2 – Dimensions and Mounting
Rev-0 MNL000441.doc
 Initial Release
Chapter 3 – Tubing Connections
Rev-0 MNL000442.doc
 Initial Release
Chapter 4 – Electrical Connections
Rev-0 MNL000443.doc
 Initial Release
Chapter 5 – Helium Leak Testing
Rev-0 MNL000444.doc
 Initial Release
Chapter 6 – Distribution System Functional Checklist
Rev-0 MNL000445.doc
 Initial Release
Chapter 7 – System Description
Rev-0 MNL000446.doc
 Initial Release
Chapter 8 – Operating Procedures
Rev-0 MNL000447.doc
 Initial Release
Chapter 9 – Troubleshooting
Rev-0 MNL000448.doc
 Initial Release

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VersumMaterialsConfidential
Chapter 10 – Maintenance
Rev-2 MNL000449.doc
 Updated pneumatic fitting replacement schedule
Updated table formats, revisions
Chapter 11 – System Specific Information
Rev-1 MNL000453.doc
 Updated AP10 spares
Appendix A
Rev-0 MNL000450.doc
 Initial Release
Appendix B
Rev-0 MNL000451.doc
 Initial Release
Appendix C
Rev-0 MNL000452.doc
 Initial Release
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Introduction
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This manual covers the tasks required to install, operate and maintain the GASGUARD®
Distribution Systems. Because of unique installation variables from site to site, it is not
intended as a step-by-step installation procedure, but
relies on the knowledge of
qualified personnel to perform the work properly. This
manual should be read
thoroughly by the supervising installation engineer before
installation is begun.

The GASGUARD® distribution systems have been designed and built in accordance with
the Uniform Fire Code (UFC) and the National Fire Protection
Association (NFPA).
They must be installed and operated in accordance with the
UFC, NFPA and all other
applicable industrial, federal, state and local codes.

This distribution system is to be used with an upstream hazardous process gas source (a
cabinet or rack system) that is also designed and built in accordance with
the Uniform
Fire Code (UFC) and the National Fire Protection Association
(NFPA). The source
equipment must be installed and operated in accordance with
the UFC, NFPA and all
other applicable industrial, federal, state and local codes.
The source system must have
excess flow shutdown, emergency shutdown and
over-pressure protection and the source
cylinders must contain a restrictive flow
orifice in the cylinder valve if required by code.
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GASGUARD® is a registered trademark. The GASGUARD® name is officially
registered and legally restricted to be used only by Versum Materials, Inc. The
information and data contained herein are proprietary to Versum Materials, Inc. and are
not to be copied, reproduced, duplicated or disclosed to
others, in whole or in part,
without prior written consent of Versum Materials, Inc. This restriction shall not apply
to any safety information
contained in the manual. The safety information is intended
for your use and we
encourage you to copy it so that anyone using this equipment knows
how to use it
safely.
Note: Versum Materials, Inc. recommends that the customer develop a specific
"Work
Instruction" for each gas cabinet, rack system or distribution system. The
work
instruction can be used as a step through check list procedure for trained
operators.
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A standard industrial work instruction would include the following:
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• System identification number, gas service, basic description of system, etc.
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• Current operating data (pressure, etc.), date, time, operator.
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• Tools/supplies required for maintenance (PPE required for the gas, leak
testing equipment, gaskets, etc.)
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• Step-through procedural check list to include specific customer PPE
protocol, communications and customer leak test procedures.
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Consult your local Versum Materials, Inc. technical representative if you need
assistance in
preparation of standard work instruction.
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Section1:SafetyWarnings

This section provides the safety information needed to safely operate the system. Material
Safety Data sheets for the gases and the instrument nitrogen supply. The
safety section is
to be carefully read and understood before work is performed on
the system.
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Section2:DimensionsandMounting
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This section provides an overview of methods to mount the system as well as envelope
dimensions for typical systems.
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Section3:TubingConnections
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This section provides information for on site mechanical hook up requirements.
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Section4:ElectricalConnections
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This section provides information for on site electrical hook up requirements.
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Section5:HeliumLeakTest
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This section provides an overview on site helium leak test requirements.
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Section6:DistributionSystemFunctionalChecklist
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This section contains a checklist to assure the system was installed properly.
Section 7: System Description
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This section provides an overview of the system.
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Section8:OperatingProcedures
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This section contains the procedures to prepare the system for operation and to operate it.
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Section9:Troubleshooting
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This section provides guidelines for solving operating system alarm problems. It is a
general guide; reference to manufacturers' literature will be required in some
cases.
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Section10:Maintenance
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This section provides a guide to routine maintenance operations.
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Section11:SystemSpecificInformation
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This section provides system specific information such as system specifications,
drawings, recommended spare parts and the program logic chart.
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AppendixA
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This Appendix Section contains the Versum Materials, Inc. EES document QAF030
“UHP
Tubing and Fitting Specification”.
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AppendixB
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This Appendix contains the Versum Materials, Inc. Material Safety Data Sheet(MSDS)
for
N2 gas.
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AppendixC
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This Appendix contains the Pressure Equipment Directive (PED) Assessment certificate
for Gasguard Equipment.

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The table below provides a quick reference as to the applicability of the manual's
sections.
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Manual Section Supervisory Maintenance Operations
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1. Safety Warnings
• • •
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2: Dimensions and Mounting
• • •
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3: Tubing Connections
• • •
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4: Electrical Connections
• • •
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5: Helium Leak Test
• • •
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6: Distribution System Functional
Checklist
• • •
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7: System Description
• • •
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8: Operating Procedures
• • •
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9: Troubleshooting
• •
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10: Maintenance
• •
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11: System Specific Information • • •

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
The information and data contained herein are proprietary to Versum Materials, Inc.
and are not to be copied, reproduced, duplicated or disclosed to others, in whole or in
part, without prior written consent of Versum Materials, Inc. This restriction shall not
apply to any safety information contained in the manual. The safety information is
intended for your use and we encourage you to copy it so that anyone using this
equipment knows how to use it safely.

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Section 1: Safety Warnings
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Please read the following safety warnings carefully before installing the
equipment.
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1.1 Introduction
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This section is meant to communicate to the user any hazards involved with the
equipment.
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The following paragraphs will define the hazard warnings used and describe the
icons found in various sections of the manual and on the equipment. The hazard
warning labels used in the manual will correlate with those used on the equipment.
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1.1.1 LevelorIntensityofHazard
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Indicatesanimmediatehazard,whichif
notavoided,willresultindeathor
seriousinjury.
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Indicates a potentially hazardous
situation, which if not avoided, could
result in death or serious injury.
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Indicates a potentially hazardous
situation, which if not avoided, may
result in a minor or moderate injury.
It may also be use to alert against
unsafe practices.
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1.1.2 HazardTypes(Symbols)
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This symbol is a safety alert symbol.
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This symbol represents asphyxiant, toxic or corrosive
gases. Gases used with the Gasguard can cause personal
injury or death.
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This symbol can represent one or more of the following
conditions:
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Explosive gases! Gases used with the Gasguard can cause
an explosion when combined with air.
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The formation for explosive gas mixtures of flammable
gas and air when exposed to an ignition source.
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Pyrophoric gases which will ignite spontaneously without
the presence of an ignition source when exposed to air.
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Energy release which may result from pneumatic or
hydraulic pressure rapidly escaping from a portion of the
equipment.
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This symbol represents flammable gases. Gases used
with the Gasguard can cause flammable atmospheres.
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This symbol represents PPE (Personal Protective
Equipment). Proper PPE shall be worn when working
with this system.

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This symbol represents electrical shock hazard.

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This symbol warns of potential strain or injury when
lifting cylinders.
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This symbol warns of a pinch hazard. This hazard exists
on cabinet doors equipped with automatic closers.
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
This symbol warns of the possibility of the source system
tipping over if it is not installed properly. Personal injury
could result.
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This symbol indicates the need for head protection.
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This symbol cautions against the improper anchoring of
cabinets.

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
1.2 ImportantSafetyWarnings

Failure to read, understand and follow the
safety information found in this section
could result in personal injury and death.


The operator must read and understand
this safety section before operating the
system. All operating and maintenance
personnel must receive training and
instruction by Versum Materials, Inc.

All cylinder storage areas must be
continually monitored with an air quality
monitor to prevent the danger of a
hazardous atmosphere.



Before using the system, review your
company's requirements for use of toxic,
corrosive, flammable, pyrophoric,
oxidizers and inert gas cylinders and
electrically powered equipment. You must
be thoroughly trained in your company's
safety procedures and safety equipment
(self-contained breathing apparatus,
emergency shutdown systems, plant alarm
locations, etc.)

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

Do not use this device in any manner
other than specified in this manual.

Do not make any changes to the
equipment independently. INJURY
or DEATH may result from
unauthorized modifications. All
modifications to equipment MUST be
approved in writing by a Versum
Materials, Inc.' Representative.



1.3 InertGasHazards

High concentrations of nitrogen,
helium, or other inert gases can cause
an oxygen deficient atmosphere in a
confined area which can cause
DEATH. All personnel must read and
understand the material safety data
sheet(s) (MSDS) for the specific
gas(es) being used.

Oxygen concentrations of 19.5% or less can greatly increase the hazard of
asphyxiation to personnel. Before working in an area where nitrogen, helium or
other inert gases could be present, check the area with an oxygen monitor to be
sure the oxygen concentration is between 19.5% and 23%. While working in the
area, the oxygen concentration needs to be monitored with a continuous oxygen

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monitor. Always provide adequate ventilation in the work area to decrease the
risk
of an oxygen deficient atmosphere.

Personnel in an oxygen deficient atmosphere will not realize they are being
asphyxiated. Breathing of pure inert gases will cause immediate unconsciousness.
Symptoms of asphyxia include:

• Rapid breathing

• Nausea

• Vomiting

• Inability to move

• Convulsive movements

• Collapse

• Abnormal pulse

• Rapid fatigue

• Faulty judgment

• Insensitivity to pain

• Abnormal emotions

Remove any personnel in an oxygen deficient atmosphere to fresh air. Get
medical attention immediately. Positive pressure breathing apparatus must be
worn by any rescuers entering a suspected oxygen deficient atmosphere.

Nitrogen gas may accumulate in low or confined areas. All requirements of
OSHA 1910.146 (Confined Space Guidelines) must be met when inert gases may

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be present in confined spaces. Self contained breathing apparatus is required
(cartridge or filter type gas masks cannot be used). See the information on
personal protective equipment in this section for details.

When entering a confined area or area which may contain high inert gas
concentrations, a "Buddy System" must be used. One person should remain
outside the suspect area, but within view of the other person. This method ensures
that the other person can respond in the event of an emergency.



1.4 PressurizedFluids/Gases

Pressurizedgasandwatersprinklerlinescan
injurepersonnelanddamageequipment.
Nevertightenorloosenafittingwhenitis
underpressure.




The house nitrogen supply lines can contain pressures of 100+ psig (6.9+ barg).
The water sprinkler lines contain pressures of 30 psig (2.1 barg). Exercise care
when working around these lines. Ensure that pressure has been vented before
breaking any connection. Tag out and lock out the line before doing any work.
Follow Typical Minimal Lockout or Tagout System Procedures described by
Occupational Safety and Health Admin., Labor Para. 1910.147.