Yamato PDC510 User manual

YAMATO SCIENTIFIC CO., LTD.
Plasma Dry Cleaner
PDC510
Instruction Manual
Version 1
Thank you for your selecting Yamato Scientific’s
“plasma dry cleaner”.
To ensure proper handling of the machine, please read
this instruction manual and the warranty thoroughly.
After reading the manual, please keep it together with
the warranty in a safe place where it is available any
time necessary.
WARNING: Prior to using the product, carefully read all
warning instructions contained in the man-
ual and understand them fully.

Table of Contents
1. SAFETY PRECAUTION
1. SAFETY PRECAUTION1. SAFETY PRECAUTION
1. SAFETY PRECAUTIONS
SS
S ................................
................................................................
................................................................
................................................................
................................................................
................................................................
......................................
............
...... 1
11
1
Description of Warning Symbols ..............................................................................1
A List of Symbols......................................................................................................2
Warning and Caution................................................................................................3
2. PRIOR TO USE
2. PRIOR TO USE2. PRIOR TO USE
2. PRIOR TO USE ................................
................................................................
................................................................
................................................................
................................................................
................................................................
......................................................
............................................
...................... 4
44
4
Precautions for Installation.......................................................................................4
3. COMPONENTS AND FU
3. COMPONENTS AND FU3. COMPONENTS AND FU
3. COMPONENTS AND FUNCTIONS
NCTIONSNCTIONS
NCTIONS ................................
................................................................
................................................................
................................................................
......................................................
............................................
...................... 5
55
5
Main Unit..................................................................................................................5
Back of the Main Unit...............................................................................................6
4. INSTALLATION METH
4. INSTALLATION METH4. INSTALLATION METH
4. INSTALLATION METHOD
ODOD
OD ................................
................................................................
................................................................
................................................................
................................................................
................................................................
...................................
......
... 7
77
7
Required Equipment / Methods to Connect Cables and Tubes................................7
Processing Mode Changeover Method....................................................................8
Auto-Tuning adjustment procedure..........................................................................9
5. RUNNING PROCEDURE
5. RUNNING PROCEDURE5. RUNNING PROCEDURE
5. RUNNING PROCEDURE ................................
................................................................
................................................................
................................................................
................................................................
................................................................
....................................
........
.... 10
1010
10
Operation inAuto Run............................................................................................10
Running Procedure................................................................................................11
Touch Panel Operation...........................................................................................13
6. PRECAUTIONS FOR H
6. PRECAUTIONS FOR H6. PRECAUTIONS FOR H
6. PRECAUTIONS FOR HANDLING
ANDLINGANDLING
ANDLING ................................
................................................................
................................................................
................................................................
.....................................................
..........................................
..................... 19
1919
19
Warning and Caution ..................................................................................19
7. MAINTENANCE
7. MAINTENANCE7. MAINTENANCE
7. MAINTENANCE ................................
................................................................
................................................................
................................................................
................................................................
................................................................
..................................................
....................................
.................. 20
2020
20
Daily Inspection......................................................................................................20
Periodic Inspection.................................................................................................21
8. ALARMS AND CORREC
8. ALARMS AND CORREC8. ALARMS AND CORREC
8. ALARMS AND CORRECTIVE ACTIONS
TIVE ACTIONSTIVE ACTIONS
TIVE ACTIONS................................
................................................................
................................................................
................................................................
............................................
........................
............ 22
2222
22
Alarms and Corrective Actions...............................................................................22
9. AFTER
9. AFTER9. AFTER
9. AFTER SALE SERVICE AND WAR
SALE SERVICE AND WARSALE SERVICE AND WAR
SALE SERVICE AND WARRANT
RANTRANT
RANTY
YY
Y ................................
................................................................
................................................................
................................................................
.......................................
..............
....... 23
2323
23
Request for Repair.................................................................................................23
10. SPECIFICATIONS
10. SPECIFICATIONS10. SPECIFICATIONS
10. SPECIFICATIONS ................................
................................................................
................................................................
................................................................
................................................................
................................................................
.............................................
..........................
............. 24
2424
24
Specifications.........................................................................................................24
11. WIRING DIAGRAM
11. WIRING DIAGRAM11. WIRING DIAGRAM
11. WIRING DIAGRAM ................................
................................................................
................................................................
................................................................
................................................................
................................................................
...........................................
......................
........... 25
2525
25
12.GAS/PRESSURE DELI
12.GAS/PRESSURE DELI12.GAS/PRESSURE DELI
12.GAS/PRESSURE DELIVERY MODULE
VERY MODULEVERY MODULE
VERY MODULE ................................
................................................................
................................................................
................................................................
............................................
........................
............ 26
2626
26
13.
13. 13.
13. PARTS LIST
PARTS LISTPARTS LIST
PARTS LIST ................................
................................................................
................................................................
................................................................
................................................................
................................................................
.......................................................
..............................................
....................... 27
2727
27
14. DISPOSAL
14. DISPOSAL14. DISPOSAL
14. DISPOSAL ................................
................................................................
................................................................
................................................................
................................................................
................................................................
..........................................................
....................................................
.......................... 28
2828
28
Precautions for Disposal ........................................................................................28
15. LI
15. LI15. LI
15. LIST OF HAZARDOUS SUBS
ST OF HAZARDOUS SUBSST OF HAZARDOUS SUBS
ST OF HAZARDOUS SUBSTANCES
TANCESTANCES
TANCES ................................
................................................................
................................................................
................................................................
............................................
........................
............ 29
2929
29

1
1. SAFETY PRECAUTIONS
Description of Warning Symbols
Warning Symbols
Various warning symbols are contained in the manual and attached
to the product to ensure safe use. Accidents which may result
from mishandling are classified as follows.
Understand them fully before reading the body.
WARNING
Indicates matters that may cause possible death or
serious injury (Note 1).
CAUTION
Indicates matters that may cause possible minor injury
(Note 2) and damage to property (Note 3).
Note 1: Serious injury refers to injuries, electric shock, fracture, poisoning, etc.
which will entail after effects and those which will require hospitalization or
long-time treatment to be cured.
Note 2: Minor injury refers to injuries, electric shock, etc. which will not require
hospitalization or long-time treatment to be cured.
Note 3: Damage to property refers to damages to property such as facilities,
equipment and buildings.
Meaning of Symbols
This symbol indicates matters that concern “warning” (including caution).
Specific contents of warning are provided near this symbol.
This symbol indicates prohibited matters.
Specific contents of prohibition are provided near this symbol.
This symbol indicates matters that must be performed.
Specific contents of instruction are provided near this symbol.

2
1. SAFETY PRECAUTIONS
A List of Symbols
WARNING
General High Voltage High Temp. Drive Unit Explosion
CAUTION
General Electric Shock Burn
PROHIBITED
General No Disassembly No Contact
COMPULSORY
General Connect Ground
Wire Install Horizontally Unplug Power Periodic Inspection

3
1. SAFETY PRECAUTIONS
Warning and Caution
Warning
1. Never use the machine in atmosphere containing ignitable and explosive
gases.
Never use the machine in atmosphere containing ignitable and explosive gases. The ma-
chine is not of explosion-proof construction. Turning on and off the switches and operating
the machine will produce sparks, which may become a cause of a fire or explosion. (See
13. List of Hazardous Substances on page 26.)
2. Never use explosive and flammable substances.
Never use explosive and flammable substances and substances containing such substanc-
es. The machine is not equipped with safety features against such substances. They are
a cause of explosion and fire.
3. Never use the machine in abnormal conditions.
If you notice smoke, offensive odor or other problems, immediately turn off the circuit breaker
of the machine and also turn off the power of the distribution panel on the building side.
They are a cause of a fire and electric shock.
4. Never disassemble or modify the machine.
The machine must not be disassembled or modified by the user. Unauthorized disas-
sembly and modification are a cause of failure, fire, electric shock and other accidents.
5. Handling of the power cords.
Do not use bundled power cords. Such a way of use may cause the cords to overheat to
cause a fire.
Do not machine power cords or bend, twist or pull them by undue force. Hazard of a fire
and electric shock.
Do not damage power cords by for example placing them under a desk or chair or clamping
them by devices. Hazard of a fire and electric shock.
Do not bring power cords near heating devices such as a heater. The coating of the cords
will be burnt to cause a fire or electric shock.
If a power cord is damaged (core wires exposed or broken), immediately turn off the power
of the machine and also turn off the source power supply. Then request the dealer for re-
placement of the cord. If such damaged cords are used, a fire or electric shock may result.
6. Be sure to use the specified reaction gas.
Be sure to use the specified processing gas (argon gas, oxygen optional). If other gas is
used, the actual flow rate becomes different from the indicated flow rate. Also other prob-
lems such as damage to products and insufficient cleaning may happen.

4
2. PRIOR TO USE
Precautions for Installation
Warning
1. Be sure to connect the ground wire.
・ To prevent electric shock accidents due to fault current, be sure to connect the ground
wire to the ground terminal on the building side. This machine falls in the category of
Class D Ground Work.
・ Never connect the ground wire to a gas pipe, water pipe, ground wire of a telephone or
lightning conductor. Hazard of a fire and electric shock.
2. Select a suitable installation site.
Do not install the machine in the following places:
・An unstable place.
・A place where flammable or corrosive gas is produced.
・A place where ambient temperature rises above 35℃.
・A place where temperature changes largely.
・A place filled with dust or a humid place.
・A place under direct sunlight.
・A place that is subjected to vibrations.
3. Install the machine on a level foundation.
Install the machine on a level foundation. If the machine is not in contact with the floor
uniformly, vibration and noise may be produced. Also unexpected troubles or failures may
occur.
4. Use a suitable distribution panel.
Use a distribution panel that is suitable for the electric rating of the machine.
Electric rating: 3-phase, 220 VAC, 20A, 50/60 Hz
If the capacity is insufficient or the machine is used on a line to which other equipment is
connected, the machine may not function properly or the circuit breaker in the distribution
panel may operate.

5
3. COMPONENTS AND FUNCTIONS
Main Unit
Front of the
machine
①
Door ：Amanual door to be opened toward the front.
②
Grip ：Used to open and close the door.
③
Check window ：Used to check the plasma conditions.
④
Touch panel ：Used to operate various keys and show various information.
⑤
Operation power switch ：When this button is pressed, electricity is applied to the touch
panel and other parts of the machine to set the machine ready
to run.
⑥
Emergency stop switch
button
：Press this button when an emergency situation occurs. When
this button is pressed, the RF power, vacuum pump and opera-
tion panel power are turned off. To reset the button, turn it in
the arrow direction.
⑤
⑤⑤
⑤ ⑥
⑥⑥
⑥
①
①①
① ②
②②
② ③
③③
③
④
④④
④

6
3. COMPONENTS AND FUNCTIONS
Back of the Main Unit
Back of the main unit
⑦
Earth leakage breaker
：When this breaker is turned on, electricity is applied to the ma-
chine. If leakage exceeding 30 mA or overcurrent exceeding 16
A flows, it cuts off the current to protect the machine.
⑧
Circuit protector ：If overcurrent exceeding 5 Aflows in the 100 V line, this protector
cuts off the current to protect the machine.
⑨
Connector for power cord ：Connect this to the distribution panel on the building side. (A 3-m
cord is attached for connection.)
⑩
Connector for vacuum
pump ：Connect the cable from the vacuum pump.
⑪
Ground terminal ：Use this to ground the machine by a line other than the attached
power cord or to ground measuring instruments.
⑫
Vacuum nozzle
：Connect the vacuum pump with the attached flexible tube.
⑬
Nitrogen (N
2
) gas nozzle ：Connect piping from the N
2
gas cylinder. Adjust the pressure to
the range of 0.2 MPa to 0.3 MPa.
⑭
Argon (Ar) gas nozzle ：Connect piping from theAr gas cylinder. Adjust the pressure to
the range of 0.15 MPa to 0.25 MPa.
⑮
Oxygen (O2) gas nozzle
：Connect piping from the O2 gas cylinder. Adjust the pressure to
the range of 0.15 MPa to 0.25 MPa.
⑯
Cooling fan ：Cools the inside of the enclosure. Provide a space of more than
10 cm around the enclosure so that the airflow will not be dis-
turbed.
⑦-1
Test
button
：Use this during peri-
odic inspections to
check if the earth
leakage breaker is
functioning properly.
⑦-2
Leakage
indicator
：When leakage occurs,
this button pops out.
⑦
⑦⑦
⑦
-
--
-
1
11
1
⑦
⑦⑦
⑦
-
--
-
2
22
2
⑦
⑦⑦
⑦ ⑧
⑧⑧
⑧ ⑨
⑨⑨
⑨ ⑩
⑩⑩
⑩ ⑪
⑪⑪
⑪
⑫
⑫⑫
⑫
⑬
⑬⑬
⑬
⑭
⑭⑭
⑭
⑮
⑮⑮
⑮
⑯
⑯⑯
⑯

7
4. INSTALLATION METHOD
Required Equipment / Methods to Connect Cables and Tubes
1）Gas piping
Gas piping up to the machine must be provided by the user. Connect piping to the gas supply ports
on the back of the machine and supply gases at the specified pressures. Use the included 1/4-inch
flare-less joints to connect the machine and the piping and tighten them as described below.
(1) Gas supply nozzle locations and supply pressures
(2) Flare-less joint tightening procedure
① Pass a nut, back ferrule and front ferrule to the pipe.
② Insert the pipe to the joint to the specified depth.
Apply the end face of the pipe here
③ Tighten the nut strongly with fingers.
Exercise care so that the pipe will not be bent to become resistance.
④ Using a wrench, tighten the nut one turn and a quarter from the finger-tightened point.
The left side figure shows the correctly tightened pipe.
2）Electricity connection and supply
The wiring from the building side distribution panel to the machine must be laid by the user. The
machine requires an electric capacity of 3-phase, 220 VAC, 16 A or more. Connect the red, white
and black cables to the R, S and T phases respectively. The green cable is for grounding.
Connect it to the terminal of Class D Ground Work.
3）Vacuum pump
Install the vacuum pump by the following procedure:
① Referring to the attached vacuum pump instruction manual, fill oil to the vacuum pump.
② Place the vacuum pump on a horizontal floor or sturdy table.
③ Connect the vacuum pump cable to the connector of the machine.
④ Install the oil mist filter on the vacuum pump using a clamp.
⑤ Cap the suction port of the vacuum pump and turn on the switch on the operation panel mo-
mentarily. When the cap is sucked, the pump is running in the correct direction. If the cap is
blown out, it is running in a reverse direction.
⑥ If the pump runs in a reverse direction, exchange two out of three power cables connected to
the distribution panel.
⑦ Connect the nozzle and the vacuum pump with the included flexible tube and NW25 clamp.
Nitrogen gas (N2) Supply pressure ＝0.2 to 0.3 MPa
Argon gas（Ar）Supply pressure ＝0.15 to 0.25 MPa
Oxygen gas (O2) Supply pressure ＝0.15 to 0.25 MPa
Nut