Aerotech MPS75SV User manual

Revision: 1.00.00
MPS75SV Hardware Manual

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MPS75SV Hardware Manual Table of Contents
Table of Contents
MPS75SV Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Basic Specifications 13
1.3. Vacuum Operation 14
Chapter 2: Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 18
2.4. Attaching the Payload to the Stage 19
Chapter 3: Electrical Specifications and Installation 21
3.1. Motor and Feedback Connectors 22
3.2. Motor and Feedback Wiring 27
3.3. Motor and Feedback Specifications 29
3.4. Limits and Machine Direction 31
3.5. Motor and Feedback Phasing 32
Chapter 4: Maintenance 33
4.1. Service and Inspection Schedule 33
4.2. Cleaning and Lubrication 34
4.3. Troubleshooting 36
Appendix A: Warranty and Field Service 37
Appendix B: Revision History 39
Index 41
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Table of Contents MPS75SV Hardware Manual
List of Figures
Figure 2-1: MPS75SVDimensions 16
Figure 2-2: MPS75SVMounting Plate Dimensions 17
Figure 2-3: Mounting Hole Locations 18
Figure 2-4: Load Capability of MPS75SV Series Stages 19
Figure 2-5: Stage Orientations 20
Figure 3-1: Motor and Feedback Wiring (-M1 Option) 27
Figure 3-2: Motor and Feedback Wiring (-M2 Option) 28
Figure 3-3: Machine Direction 31
Figure 3-4: Analog Encoder Phasing Reference Diagram 32
Figure 3-5: Encoder Phasing Reference Diagram 32
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MPS75SV Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: MPS75SV Series Mechanical Specifications 13
Table 3-1: 25-Pin D Motor and Feedback Connector Pinouts (-M1) 23
Table 3-2: 25-Pin D Motor Mating Connector (-M1) 23
Table 3-3: 25-Pin D Motor and Feedback Connector Pinouts (-M1 with -HV Option) 24
Table 3-4: 25-Pin D Motor and Feedback Connector Pinouts (-M2) 25
Table 3-5: 25-Pin D Motor Mating Connector (-M2) 25
Table 3-6: 25-Pin D Motor and Feedback Connector Pinouts (-M2 with -HV Option) 26
Table 3-7: Feedback Specifications 29
Table 3-8: DC Motor Specifications 30
Table 3-9: Stepper Motor Specifications 30
Table 3-10: Encoder Specifications 30
Table 4-1: Troubleshooting 36
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