Aerotech MPS75SL User manual

Revision: 1.03.00
MPS75SL/SLE
Hardware Manual

Global Technical Support
Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website
provides downloadable resources (such as up-to-date software, product manuals, and Help files), training schedules, and
PC-to-PC remote technical support. You can also complete Product Return (RMA) forms and get information about repairs
and spare or replacement parts. For immediate help, contact a service office or your sales representative. Have your
customer order number available before you call or include it in your email.
United States (World Headquarters)
Phone: [phone]
Fax: [phone]
Email: [e-mail]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
United Kingdom Japan
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Germany China
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Phone: [phone]
Email: [e-mail]
France Taiwan
Phone: [phone]
Email: [e-mail]
Phone: [phone]
Email: [e-mail]
This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2012-2018, Aerotech, Inc., All rights reserved.

MPS75SL/SLE Hardware Manual Table of Contents
Table of Contents
MPS75SL/SLE Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Accuracy and Temperature Effects 12
1.3. Basic Specifications 13
1.4. Vacuum Operation 15
Chapter 2: Installation 17
2.1. Unpacking and Handling the Stage 17
2.2. Dimensions 18
2.3. Securing the Stage to the Mounting Surface 22
2.3.1. For XYAssemblies and Special Cases 24
2.4. Attaching the Payload to the Stage 25
Chapter 3: Electrical Specifications and Installation 29
3.1. Motor and Feedback Connectors 30
3.2. Motor and Feedback Wiring 36
3.3. Motor and Feedback Specifications 38
3.4. Limits, Marker, and Machine Direction 41
3.5. Motor and Feedback Phasing 42
Chapter 4: Maintenance 43
4.1. Service and Inspection Schedule 43
4.2. Cleaning and Lubrication 44
4.2.1. Bellows Removal for Re-Lubrication 46
4.3. Bellows Installation 47
4.4. Troubleshooting 50
Appendix A: Warranty and Field Service 51
Appendix B: Revision History 53
Index 55
www.aerotech.com 3

Table of Contents MPS75SL/SLE Hardware Manual
List of Figures
Figure 2-1: MPS75SL/SLEDimensions 18
Figure 2-2: MPS75SL/SLEwith Bellows Dimensions 19
Figure 2-3: MPS75SL/SLE-025Mounting Plate Dimensions 20
Figure 2-4: MPS75SL/SLE-050Mounting Plate Dimensions 20
Figure 2-5: MPS75SL/SLE-075Mounting Plate Dimensions 20
Figure 2-6: MPS75SL/SLE-100Mounting Plate Dimensions 20
Figure 2-7: MPS75SL/SLEHDZ Angle Bracket Dimensions 21
Figure 2-8: MPS75SL/SLE Mounting Hole Locations 23
Figure 2-9: Access To All Mounting Holes 24
Figure 2-10: Load Capability of MPS75SL/SLE Series Stages 25
Figure 2-11: Stage Orientations 26
Figure 2-12: Torque Required to Turn Ball Screw in Vertical Orientation 27
Figure 3-1: Motor and Feedback Wiring (-M1 Option) 36
Figure 3-2: Motor and Feedback Wiring (-M2 Option) 37
Figure 3-3: Machine Direction 41
Figure 3-4: Analog Encoder Phasing Reference Diagram 42
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 42
Figure 4-1: Remove the Bellows Bolts 46
Figure 4-2: Slide the Stage Carriage and Bellow Compression 46
Figure 4-3: Motor Cover Screw Location 47
Figure 4-4: Bellows Support Rods 47
Figure 4-5: Secure the Bellows Support Rods 48
Figure 4-6: Attach the Bellows 48
Figure 4-7: Attach the Bellows Cover 48
Figure 4-8: Attach the Bellows Tabletop 49
4 www.aerotech.com

MPS75SL/SLE Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: MPS75SL Series Mechanical Specifications 13
Table 1-4: MPS75SLE Series Mechanical Specifications 14
Table 2-1: Stage to Mounting Surface Hardware 22
Table 3-1: 25-Pin D Motor and Feedback Connector Pinouts (-M1 / Motor only for SLE) 31
Table 3-2: 25-Pin D Motor Mating Connector (-M1) 31
Table 3-3: 25-Pin D Motor and Feedback Connector Pinouts (-M1 with -HV Option / SL Only) 32
Table 3-4: 25-Pin D Motor and Feedback Connector Pinouts (-M2 / Motor only for SLE) 33
Table 3-5: 25-Pin D Motor Mating Connector (-M2) 33
Table 3-6: 25-Pin D Motor and Feedback Connector Pinouts (-M2 with -HV Option / SL Only) 34
Table 3-7: 15-Pin D Feedback Connector Pinouts (MPS75SLE) 35
Table 3-8: 15-Pin D Feedback Mating Connector 35
Table 3-9: Feedback Specifications 38
Table 3-10: DC Motor Specifications 39
Table 3-11: Stepper Motor Specifications 39
Table 3-12: Encoder Specifications (MPS75SL) 40
Table 3-13: Encoder Specifications (MPS75SLE) 40
Table 4-1: Troubleshooting 50
www.aerotech.com 5

Table of Contents MPS75SL/SLE Hardware Manual
6 www.aerotech.com
This page intentionally left blank.

MPS75SL/SLE Hardware Manual Electrical Safety
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
This manual tells you how to carefully and correctly use and operate the MPS75SL/SLE. Read all parts of
this manual before you install or operate the MPS75SL/SLE or before you do maintenance to your system.
To prevent injury to you and damage to the equipment, obey the precautions in this manual. The precautions
that follow apply when you see a Danger or Warning symbol in this manual. If you do not obey these
precautions, injury to you or damage to the equipment can occur. If you do not understand the information in
this manual, contact Aerotech Global Technical SupportThis product has been designed for light industrial
manufacturing or laboratory environments. The protection provided by the equipment could be impaired if the
product is used in a manner not specified by the manufacturer.
W A R N I N G : This product uses electrical supplies and signals. To minimize possible
electrical damage to the stage or injury to the operator, obey the electrical precautions that
follow.
1. Access to the MPS75SL/SLE and component parts must be restricted while connected to
a power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
6. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
7. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
8. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
9. The MPS75SL/SLE stage must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
10. Use care when moving the MPS75SL/SLE stage. Lifting or transporting the MPS75SL/SLE
stage improperly can result in injury or damage to the MPS75SL/SLE.
11. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
12. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
13. The motor case temperature may exceed 75°C.
14. Operators must be trained before operating this equipment.
15. All service and maintenance must be performed by qualified personnel.
www.aerotech.com 7

Electrical Safety MPS75SL/SLE Hardware Manual
8 www.aerotech.com
This page intentionally left blank.

MPS75SL/SLE Hardware Manual Declaration of Conformity
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
MPS75SL/SLE Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, i.e., as a whole, including the equipment referred to in this
Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 1/2/2019
www.aerotech.com 9

Declaration of Conformity MPS75SL/SLE Hardware Manual
10 www.aerotech.com
This page intentionally left blank.

MPS75SL/SLE Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: Model Numbers and Ordering Options
MPS75SL and MPS75SLE Miniature Mechanical-Bearing Screw-Driven Linear Stage
Direct Linear Feedback (-SLEOnly; Required)
-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.05 µm digital TTLoutput
Travel (Required)
-025 25 mm travel stage
-050 50 mm travel stage
-075 75 mm travel stage
-100 100 mm travel stage
Vacuum Preparation (-SLOnly; Optional)
-HV High-vacuum preparation to 10-6 torr
Motor (Required)
-M1 DC servomotor
-M2 Stepper motor
Bellows (Optional)
-BL Bellows waycover (not available with -HV option)
Mounting Plate (Optional)
-MP Optical mounting plate
Metrology (Required)
-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated with performance plots
Accessories (To be Ordered as a Separate Line Item)
HDZ-MPS75SL Right-angle bracket
HDZ-MPS75SL-HV Right-angle bracket, high vacuum preparation to 10-6 torr
www.aerotech.com Chapter 1 11

Overview MPS75SL/SLE Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C, degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your spe-
cific application.
Protection
Rating
The MPS75SL/SLE is not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
The accuracy specification of MPS75SL/SLE series stages is measured 25 mm above the table with the
stage in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
The accuracy of the screw is a key element in the overall positioning accuracy of the stage. A scale error can
be expected if temperature of the screw differs from 20° C (68° F). The greater the temperature difference,
the greater the error. The temperature of the screw depends on the speed and duty cycle of the stage. The
faster the movement and higher the duty cycle, the more the stage accuracy will be affected by heat. The
thermal expansion coefficient of the screw is 11.7 ppm/°C.
12 Chapter 1 www.aerotech.com

MPS75SL/SLE Hardware Manual Overview
1.3. Basic Specifications
Table 1-3: MPS75SL Series Mechanical Specifications
Mechanical Specifications(1) -025 -050 -075 -100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy(2)
Uncalibrated ±2.5 µm ±3.0 µm ±3.5 µm ±4.0 µm
Uncalibrated
with Bellows ±3.5 µm ±4.0 µm ±4.5 µm ±5.0 µm
Calibrated(3) ±1.0 µm ±1.0 µm ±1.5 µm ±1.5 µm
Resolution (Minimum Incremental
Motion) 0.1 µm 0.1 µm 0.1 µm 0.1 µm
Bidirectional Repeatability(3) ±0.75 µm ±0.75 µm ±0.75 µm ±0.75 µm
Bidirectional Repeatability (with
Bellows) ±1.2 µm ±1.2 µm ±1.2 µm ±1.2 µm
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed
(1.0 mm/rev Ball
Screw)
DCMotor
(-M1) 50 mm/s 50 mm/s 50 mm/s 35 mm/s
Stepper Motor
(-M2) 30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity(4)
Horizontal 15 kg 15 kg 15 kg 15 kg
Side 15 kg 15 kg 15 kg 15 kg
Vertical 4 kg 4 kg 4 kg 4 kg
Stage Mass 1.7 kg 1.8 kg 1.9 kg 2.0 kg
Material Anodized Aluminum Body
1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
2. Excessive duty cycle may impact stage accuracy.
3. With Aerotech controllers.
4. Payload specifications are for a single-axis system.
www.aerotech.com Chapter 1 13

Overview MPS75SL/SLE Hardware Manual
Table 1-4: MPS75SLE Series Mechanical Specifications
Mechanical Specifications(1) -025 -050 -075 -100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy
Uncalibrated ±1.75 µm ±2.25 µm ±2.75 µm ±3.25 µm
Uncalibrated
with Bellows ±2.75 µm ±3.25 µm ±3.75 µm ±4.25 µm
Calibrated(2) ±0.75 µm ±0.75 µm ±1.0 µm ±1.0 µm
Resolution (Minimum Incremental
Motion)(3) 0.025 µm 0.025 µm 0.025 µm 0.025 µm
Bidirectional Repeatability(3) ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm
Bidirectional Repeatability (with
Bellows) ±0.2 µm ±0.2 µm ±0.2 µm ±0.2 µm
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed
(1.0 mm/rev Ball
Screw)
DCMotor
(-M1) 50 mm/s 50 mm/s 50 mm/s 35 mm/s
Stepper Motor
(-M2) 30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity(4)
Horizontal 15 kg 15 kg 15 kg 15 kg
Side 15 kg 15 kg 15 kg 15 kg
Vertical 4 kg 4 kg 4 kg 4 kg
Stage Mass 2.3 kg 2.4 kg 2.5 kg 2.6 kg
Material Anodized Aluminum Body
1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
2. With Aerotech controllers.
3. Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both
the rotary and linear encoders.
4. Payload specifications are for a single-axis system.
14 Chapter 1 www.aerotech.com

MPS75SL/SLE Hardware Manual Overview
1.4. Vacuum Operation
MPS75SL/SLE stages ordered with the -HV option (high vacuum preparation) are designed for operation in
high vacuum environments. Special preparations include:
lStage parts are lubricated with vacuum-compatible lubricants.
lMaterials, fasteners, and coatings with vacuum outgas performance are ensured to be compatible with
the specified level of vacuum.
lFor high vacuum stages, situations that may allow gases to become temporarily trapped during pump
down are removed.
lPrior to assembly, stage parts are thoroughly cleaned in a clean environment.
lStages are packaged in a special polyethylene bag.
Vacuum Guidelines
To ensure that the MPS75SL/SLE will continue to perform well in the vacuum environment, follow the
guidelines listed below (in addition to standard handling, installation, and lubrication guidelines outlined in
this manual).
1. Do not remove the MPS75SL/SLE from its sealed bag until it is ready for use.
2. Always handle the MPS75SL/SLE in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the MPS75SL/SLE.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the MPS75SL/SLE.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
6. Baking vacuum components at 60 °C for 24 to 48 hours significantly reduces outgassing at initial pump-
down to vacuum pressure and evaporates water vapor that impregnates porous surfaces on the
aluminum and Teflon cables. Aerotech recommends that customers bake out vacuum systems when
first installing them in the vacuum chamber.
www.aerotech.com Chapter 1 15

Overview MPS75SL/SLE Hardware Manual
16 Chapter 1 www.aerotech.com
This page intentionally left blank.

MPS75SL/SLE Hardware Manual Mechanical Specifications and Installation
Chapter 2: Installation
W A R N I N G : MPS75SL/SLE installation must be in accordance to instructions provided by
this manual and any accompanying documentation. Failure to follow these instructions could
result in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the MPS75SL/SLE from the protective shipping container. Before operating the
MPS75SL/SLE, it is important to let the MPS75SL/SLE stabilize at room temperature for at least 12 hours.
Allowing the MPS75SL/SLE to stabilize to room temperature will ensure that all of the alignments, preloads,
and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry,
oil-less air to remove any dust or debris that has collected during shipping. Set the MPS75SL/SLE on a
smooth, flat, and clean surface.
Each MPS75SL/SLE has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference. If any damage has occurred during shipping, report it immediately.
W A R N I N G : Make sure that all moving parts are secure before moving the MPS75SL/SLE.
Unsecured moving parts may shift and cause bodily injury.
W A R N I N G : Improper handling could adversely affect the performance of the MPS75SL/SLE.
Use care when moving the MPS75SL/SLE.
W A R N I N G : An unsecured MPS75SL/SLE could be dragged off of a mounting surface by its
unsupported cable.
W A R N I N G : Do not use the drive screw or motor as lifting points.
www.aerotech.com Chapter 2 17

Mechanical Specifications and Installation MPS75SL/SLE Hardware Manual
2.2. Dimensions
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current
product information at www.aerotech.com.
Figure 2-1: MPS75SL/SLEDimensions
18 Chapter 2 www.aerotech.com

MPS75SL/SLE Hardware Manual Mechanical Specifications and Installation
Figure 2-2: MPS75SL/SLEwith Bellows Dimensions
www.aerotech.com Chapter 2 19

Mechanical Specifications and Installation MPS75SL/SLE Hardware Manual
Figure 2-3: MPS75SL/SLE-025Mounting Plate Dimensions
Figure 2-4: MPS75SL/SLE-050Mounting Plate Dimensions
Figure 2-5: MPS75SL/SLE-075Mounting Plate Dimensions
Figure 2-6: MPS75SL/SLE-100Mounting Plate Dimensions
20 Chapter 2 www.aerotech.com