Aerotech ATS150 Series User manual

Revision: 1.03.00
ATS150 Hardware Manual

Global Technical Support
Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website
supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary,
you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts. To get help
immediately, contact a service office or your sales representative. Include your customer order number in your email or have
it available before you call.
United States (World Headquarters)
Email: [e-mail]
Phone: [phone]
Fax: [phone]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
United Kingdom China
Email: [e-mail]
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Phone: [phone]
Germany Taiwan
Email: [e-mail]
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Phone: [phone]
France
Email: [e-mail]
Phone: [phone]
This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2020, Aerotech, Inc., All rights reserved.

ATS150 Hardware Manual Table of Contents
Table of Contents
ATS150 Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 11
1.2. Accuracy and Temperature Effects 12
1.3. Basic Specifications 13
1.4. Vacuum Operation 14
Chapter 2: Mechanical Specifications and Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 17
2.4. Attaching the Payload to the Stage 19
Chapter 3: Electrical Specifications and Installation 23
3.1. Motor and Feedback Connectors 24
3.2. Motor and Feedback Wiring 30
3.3. Motor and Feedback Specifications 32
3.4. Limits, Marker, and Machine Direction 37
3.5. Motor and Feedback Phasing 38
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Troubleshooting 44
Appendix A: Warranty and Field Service 45
Appendix B: Revision History 47
Index 49
www.aerotech.com 3

Table of Contents ATS150 Hardware Manual
List of Figures
Figure 2-1: ATS150 Dimensions 16
Figure 2-2: ATS150 Mounting Holes 18
Figure 2-3: Load Orientations 20
Figure 2-4: Cantilevered Load Capabilities 20
Figure 2-5: Travel Life 21
Figure 2-6: Torque Required to Turn the BallScrew 22
Figure 3-1: Motor and Feedback Wiring [BM/BMSMotor] 30
Figure 3-2: Motor and Feedback Wiring [StepperMotor] 31
Figure 3-3: Machine Direction 37
Figure 3-4: Hall Phasing 38
Figure 3-5: Analog Encoder Phasing Reference Diagram 39
Figure 3-6: TTLEncoder Phasing Reference Diagram 39
4www.aerotech.com

ATS150 Hardware Manual Table of Contents
List of Tables
Table 1-1: ATS150 Model Numbering System 9
Table 1-2: Environmental Specifications 11
Table 1-3: ATS150 Series Specifications 13
Table 2-1: Stage to Mounting Surface Hardware 17
Table 2-2: Applied Load Coefficients 21
Table 3-1: BM/BMSMotor Wiring Connector Pinout 25
Table 3-2: BM/BMSMotor Feedback Wiring Connector Pinout 26
Table 3-3: Stepper Motor Connector Pinout 27
Table 3-4: Stepper Motor Feedback Connector Pinout 28
Table 3-5: Limits with 9-Pin D-Connector (-LI1 or -LI3) 29
Table 3-6: Limits with Flying Leads (-LI2 or -LI4 Option) 29
Table 3-7: Feedback Specifications 32
Table 3-8: Motor Specifications [BMS60] 33
Table 3-9: Motor Specifications [BM75] 34
Table 3-10: Motor Specifications [SM60] 35
Table 3-11: Encoder Option Specifications 36
www.aerotech.com 5

Table of Contents ATS150 Hardware Manual
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure
to observe these precautions could result in serious injury to those individuals performing the procedures
and/or damage to the equipment. Operators should be trained before operating this equipment.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ATS150 and component parts must be restricted while connected to a power
source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ATS150 stage must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the ATS150 stage. Lifting or transporting the ATS150 stage
improperly can result in injury or damage to the ATS150.
6. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
7. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
6www.aerotech.com

ATS150 Hardware Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ATS150 Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended; and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 RoHS3 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 4/22/2020
www.aerotech.com 7

Table of Contents ATS150 Hardware Manual
8 www.aerotech.com
This page intentionally left blank.

ATS150 Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ATS150 Model Numbering System
ATS150 Series Mechanical-Bearing Screw-Driving Stage
-100 100 mm travel stage with limits
-150 150 mm travel stage with limits
-200 200 mm travel stage with limits
-250 250 mm travel stage with limits
Vacuum Preparation (Optional)
-HV High vacuum preparation of stage to 10-6 torr
Direct Linear Feedback (Optional)
-E1 High-accuracy incremental linear encoder; 1 Vpp
NOTE:Linear encoder option only available on 100 mm and 150 mm travel models.
Tabletop (Required)
-TT1 Tabletop with metric dimension mounting pattern and holes.
-TT2 Tabletop with English dimension mounting pattern and holes.
Ball Screw (Required)
-BS1 2 mm/rev precision-ground ball screw
Motor (Optional)
-M1 BMS60 servomotor with 2500-line TTL encoder
-M2 BMS60 servomotor with 2500-line TTL encoder and holding brake
-M3 BMS60 servomotor with 1000-line 1 Vpp encoder
-M4 BMS60 servomotor with 1000-line 1 Vpp encoder and holding brake
-M5 BM75 servomotor with 2500-line TTL encoder
-M6 BM75 servomotor with 2500-line TTL encoder and holding brake
-M7 BM75 servomotor with 1000-line 1 Vpp encoder
-M8 BM75 servomotor with 1000-line 1 Vpp encoder and holding brake
-M9 SM60 stepper motor, SM60-CN1-VT2
-M10 SM60 stepper motor with holding brake, SM60-CN1-VT2-BK
Foldback (Optional)
-FB1 Foldback kit for 1/4" diameter shaft NEMA 23 motor
-FB2 Foldback kit with brake for 1/4" diameter shaft NEMA 23 motor
Motor Orientation (Optional)
-2 Bottom cable exit (optional orientation)
-3 Left side cable exit (standard orientation)
-4 Top cable exit (optional orientation)
-5 Right side cable exit (optional orientation)
-8 Right side foldback (standard orientation)
-12 Left side foldback (optional orientation)
www.aerotech.com Chapter 1 9

Overview ATS150 Hardware Manual
Limits (Required)
-LI1 Normally-closed limit switches; 9-pin D connector
-LI2 Normally-closed limit switches; flying leads
-LI3 Normally-open limit switches; 9-pin D connector
-LI4 Normally-open limit switches; flying leads
Coupling (Optional)
-CP1 Coupling for 1/4" diameter shaft
-CP2 Coupling for 3/8" diameter shaft
Metrology (Optional)
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots
Metrology - HALSF (Optional)
-PL5 Metrology, horizontal / vertical straightness correction
Accessories (To be Ordered as a Separate Line Item)
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns
orthogonality for short travel stages.
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to
within 10 microns orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns
orthogonality for short travel stages.
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to
within 5 microns orthogonality for short travel stages.
HDZ2 English right angle L-bracket (ATS150-100 and ATS150-150 only)
HDZ2M Metric right angle L-bracket (ATS150-100 and ATS150-150 only)
10 Chapter 1 www.aerotech.com

ATS150 Hardware Manual Overview
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C, degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your spe-
cific application.
Protection
Rating
ATS150 stages have limited protection against dust but not water. This equates to an
ingress protection rating of IP50.
Use Indoor use only
www.aerotech.com Chapter 1 11

Overview ATS150 Hardware Manual
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the ATS150. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ATS150
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the ATS150 is mounted.
Contact the factory for more details.
If the stage is not equipped with an optional linear encoder, the accuracy of the screw is a key element in the
overall positioning accuracy. A scale error can be expected if temperature of the screw differs from 20 °C (68
°F). The greater the temperature difference, the greater the error. The temperature of the screw depends on
the speed and duty cycle of the stage. The faster the movement and higher the duty cycle, the more the
stage accuracy will be affected by heat. The thermal expansion coefficient of the screw is 11.7 ppm/°C.
The temperature error, tε, can be calculated with the formula that follows:
tε = α × L × ∆t
where
α = 11.7 x 10-6 m/mm per ° C (6.67 x 10-6 in/in per °F)
L = Length of ball screw between base and table top
∆t = temperature difference between ambient and 20° C (68° F)
If the stage has an optional linear encoder, the stage travel expands at a rate of the encoder scale (8.0
ppm/°C). Travel will increase or decrease at this rate as the temperature of the encoder scale deviates from
20 °C (68 °F).
12 Chapter 1 www.aerotech.com

ATS150 Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: ATS150 Series Specifications
ATS150-
100
ATS150-
150
ATS150-
200
ATS150-
250
Travel 100 mm 150 mm 200 mm 250 mm
Maximum Travel Speed(1) 115 mm/s
Maximum Load(2)
Horizontal 45.0 kg
Vertical 25.0 kg
Side 25.0 kg
Accuracy
Ball Screw
Calibrated
(3) ±1.0 µm
Standard +2,-4 µm +2,-5 µm +2,-8 µm +2,-10 µm
LN
Calibrated
(3) ±1.0 µm ±1.0 µm NA NA
Standard ±5.0 µm ±5.0 µm NA NA
Repeatability (Bidirec-
tional)
Ball Screw
Calibrated
(3) ±0.5 µm
Standard ±1.0 µm
LN ±0.5 µm NA NA
Straightness and
Flatness
Differential HALSF 1.0 µm/25 mm
Standard 2.0 µm/25 mm
Maximum
Deviation
HALSF ±1.0 µm ±1.5 µm ±2.0 µm ±3.0 µm
Standard ±2.0 µm ±3.0 µm ±4.0 µm ±5.0 µm
Pitch and Yaw 8 arc sec 10 arc sec 12 arc sec 14 arc sec
Nominal Stage Weight Less Motor 6.2 kg 6.8 kg 6.9 kg 7.4 kg
With Motor 7.3 kg 7.9 kg 8.0 kg 8.5 kg
Construction Aluminum Body/Stage and Table;
Clear Anodize Finish
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis systems and based on ball screw and bearing life of 2500 km of travel.
3. Available with Aerotech controllers.
NOTE: Specifications are for single-axis systems ; performance of multi-axis system is payload and workpoint dependent. Consult
the Aerotech factory for multi-axis or non-standard applications.
www.aerotech.com Chapter 1 13

Overview ATS150 Hardware Manual
1.4. Vacuum Operation
If you order the -HV option, Aerotech specially prepares the ATS150 for operation in high vacuum
environments (up to 10-6 torr). This preparation involves special precautions during cleaning, assembly, and
packaging to ensure optimal performance in vacuum applications.
To make sure that the ATS150 will continue to perform well in the vacuum environment, use the guidelines
that follow (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
lDo not remove the ATS150 from its sealed bag until it is ready to use.
lAlways handle the ATS150 in a clean environment and use powder-free polyethylene gloves to prevent
any contaminants from adhering to the surface of the ATS150.
lDuring installation, use cleaned, vented, stainless steel fasteners when securing the ATS150.
lReduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of this,
consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation in
normal atmospheric environment. Reduce motor usage accordingly.
lFor vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
lBaking vacuum components significantly reduces outgassing at initial pump-down to vacuum pressure
and evaporates water vapor that impregnates porous surfaces on the aluminum and Teflon cables.
Aerotech recommends that customers bake out vacuum systems when first installing them in the
vacuum chamber. Contact Aerotech for bakeout temperatures and times for your application.
14 Chapter 1 www.aerotech.com

ATS150 Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : ATS150 installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ATS150. Unsecured moving
parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ATS150. Use care when
moving the ATS150.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ATS150from its protective shipping container. Gently set the ATS150 on a smooth,
flat, and clean surface.
Before operating the ATS150, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-free air to
remove any dust or debris that has collected during shipping.
Each ATS150 has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
www.aerotech.com Chapter 2 15

Mechanical Specifications and Installation ATS150 Hardware Manual
2.2. Dimensions
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Figure 2-1: ATS150 Dimensions
16 Chapter 2 www.aerotech.com

ATS150 Hardware Manual Mechanical Specifications and Installation
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : Make sure that all moving parts are secure before moving the ATS150.
Unsecured moving parts may shift and cause bodily injury.
W A R N I N G : The ATS150 must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the ATS150 stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 8 µm.
N O T E : The ATS150 is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ATS150. Shimming should be avoided if possible. If shimming is required, it should
be minimized to retain maximum rigidity of the system.
ATS150 series stages have a fixed mounting pattern. To secure the stage to a mounting surface, manually
move the stage table so that the access holes on the stage table are aligned with any two of the mounting
holes on the under side of the stage (refer to Figure 2-2). Install the appropriately sized mounting screws
through the access holes and secure the stage to the mounting surface. Repeat this process for each set of
mounting holes.
N O T E : The stage table may offer a considerable amount of resistance when it is moved manually. This
is especially true if the stage is fitted with a motor assembly.
W A R N I N G : Do not attempt to manually move the ATS150 if it is connected to a power
source.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in Table 2-1 are typical values and may not be accurate for your
mounting surface. Refer to Section 2.2. for specific model mounting locations and dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw Torque
M6x1.0 or 1/4" - 20 SHCS 7.0 N·m [62 in·lb]
www.aerotech.com Chapter 2 17

Mechanical Specifications and Installation ATS150 Hardware Manual
Figure 2-2: ATS150 Mounting Holes
18 Chapter 2 www.aerotech.com

ATS150 Hardware Manual Mechanical Specifications and Installation
2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Chapter 3and the documentation delivered with the stage.
N O T E : If your ATS150 was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the ATS150 is started up
without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : For valid system performance, the mounting interface should be flat within 12 µm.
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure).
If cantilevered loads are applied, refer to Figure 2-3 to find the loading condition. Refer to Figure 2-4 to find
the maximum allowable load.
www.aerotech.com Chapter 2 19

Mechanical Specifications and Installation ATS150 Hardware Manual
Figure 2-3: Load Orientations
Figure 2-4: Cantilevered Load Capabilities
20 Chapter 2 www.aerotech.com