Aerotech ALAR Series User manual

Revision 1.10.00
ALAR Large Aperture Rotary Stage
HARDWAREMANUAL

GLOBALTECHNICALSUPPORT
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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2007-2021, Aerotech, Inc., All rights reserved.

Table of Contents
ALAR Large Aperture Rotary Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Accuracy and Temperature Effects 12
1.3. Basic Specifications 13
1.4. Vacuum Operation 18
Chapter 2: Mechanical Specifications and Installation 19
2.1. Unpacking and Handling the Stage 19
2.2. Dimensions 21
2.3. Securing the Stage to the Mounting Surface 33
2.4. Attaching the Payload to the Stage 35
2.5. Travel Adjustment 36
2.5.1. Mechanical Hard Stop Limits 36
2.5.2. Electrical Limits 37
Chapter 3: Electrical Specifications and Installation 39
3.1. Motor and Feedback Connectors 40
3.2. Motor and Feedback Wiring 44
3.3. Motor and Feedback Specifications 46
3.4. Limits, Marker, and Machine Direction 53
3.5. Motor and Feedback Phasing 54
Chapter 4: Maintenance 57
4.1. Service and Inspection Schedule 57
4.2. Cleaning 57
4.3. Troubleshooting 58
Appendix A: Warranty and Field Service 59
Appendix B: Revision History 61
Index 63
ALAR Hardware Manual Table of Contents
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List of Figures
Figure 2-1: ALARwith Lifting Bolts 20
Figure 2-2: ALAR100SP Dimensions 21
Figure 2-3: ALAR100LP Dimensions 22
Figure 2-4: ALAR150SP Dimensions 23
Figure 2-5: ALAR150LP Dimensions 24
Figure 2-6: ALAR200SP Dimensions 25
Figure 2-7: ALAR200LP Dimensions 26
Figure 2-8: ALAR250SP Dimensions 27
Figure 2-9: ALAR250LP Dimensions 28
Figure 2-10: ALAR250XP Dimensions 29
Figure 2-11: ALAR325SP Dimensions 30
Figure 2-12: ALAR325LP Dimensions 31
Figure 2-13: ALAR325XP Dimensions 32
Figure 2-14: ALAR Stage Mounting Holes 34
Figure 2-15: ALAR Limit Flag Adjustment 38
Figure 3-1: Electrical Connections 40
Figure 3-2: Motor and Feedback Wiring (-E1 to -E6 Encoder Options) 44
Figure 3-3: Motor and Feedback Wiring (-E7 Encoder Option) 45
Figure 3-4: Machine Direction 53
Figure 3-5: Hall Phasing 54
Figure 3-6: Analog Encoder Phasing Reference Diagram 55
Figure 3-7: Encoder Phasing Reference Diagram (Standard) 55
List of Figures ALAR Hardware Manual
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List of Tables
Table 1-1: Ordering Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: ALAR-SP Series Specifications (ALAR100SP, ALAR150SP, andALAR200SP) 13
Table 1-4: ALAR-SP Series Specifications (ALAR250SP andALAR325SP) 14
Table 1-5: ALAR-LP Series Specifications (ALAR100LP, ALAR150LP, andALAR200LP) 15
Table 1-6: ALAR-LP Series Specifications (ALAR250LP andALAR325LP) 16
Table 1-7: ALAR-XP Series Specifications (ALAR250XP andALAR325XP) 17
Table 2-1: Stage to Mounting Surface Hardware 33
Table 3-1: 4-Pin Motor ConnectorPinout 41
Table 3-2: Mating Connector Part Numbers for the Motor Connector 41
Table 3-3: 25-Pin Feedback Connector Pinout for the -E1 to -E6 Encoder Options 42
Table 3-4: Mating Connector Part Numbers for the Feedback Connector 42
Table 3-5: 25-Pin Feedback Connector Pinout for the -E7Encoder Option 43
Table 3-6: Mating Connector Part Numbers for the Feedback Connector 43
Table 3-7: Feedback Electrical Specifications 46
Table 3-8: ALAR-SP Encoder Specifications 47
Table 3-9: ALAR-LP Encoder Specifications 47
Table 3-10: ALAR-XP Encoder Specifications 47
Table 3-11: ALAR-SP Maximum Speed Per Encoder Option 48
Table 3-12: Maximum Speed Per Encoder Option (ALAR-LP) 48
Table 3-13: Maximum Speed Per Encoder Option (ALAR-XP) 48
Table 3-14: ALAR-SP Motor Specifications (ALAR100SP, ALAR150SP, and ALAR200SP) 49
Table 3-15: ALAR-SP Motor Specifications (ALAR250SP and ALAR325SP) 50
Table 3-16: ALAR-LP Motor Specifications 51
Table 3-17: ALAR-XP Motor Specifications 52
ALAR Hardware Manual List of Tables
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List of Tables ALAR Hardware Manual
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
DANGER: To decrease the risk of electrical shock, injury, death, and damage to the
equipment, obey the precautions that follow.
lElectrical installation must be done by qualified personnel.
lBefore you do maintenance to the equipment, disconnect the electrical power.
lBefore you connect wires to this product, disconnect the electrical power.
lDo not connect or disconnect electrical components, wires, and cables while this
product is connected to a power source.
lRestrict access to the stage when it is connected to a power source.
lMake sure that all components are grounded correctly and that they obey the local
electrical safety requirements.
lSupply each operator with the necessary protection from live electrical circuits.
lInstall the necessary precautions to supply safety and protection to the operator.
lIt is the responsibilty of the system integrator or qualified installer to determine and
meet all safety and compliance requirements when they integrate the ALAR into a
completed system.
IMPORTANT: The protective ground connection of the ALAR provides motor frame
ground protection only. Additional ground and safety precautions are required for
applications that require access to the ALAR while it is energized.
ALAR Hardware Manual Safety Procedures and Warnings
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WARNING: To prevent damage to the equipment and decrease the risk of electrical
shock and injury, obey the precautions that follow.
lOnly trained operators should operate this equipment.
lUse this product only in environments and operating conditions that are approved in
this manual.
lMake sure that the product is securely mounted before you operate it.
lAll service and maintenance must be done by approved personnel.
WARNING: Securely mount and position all system cables.
IMPORTANT: Carefully lift, move, and transport this product.
Safety Procedures and Warnings ALAR Hardware Manual
8 www.aerotech.com

EU Declaration of Incorporation
Manufacturer:
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ALAR Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 Directive, Restricted Substances
(RoHS3)
Authorized Representative:
/ Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 7/2/2021
ALAR Hardware Manual EU Declaration of Incorporation
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Chapter 1: Overview
Table 1-1: Ordering Options
ALAR Series Mechanical-Bearing Direct-Drive Rotary Stage
ALAR 100SP/LP 100 mm clear aperture
ALAR 150SP/LP 150 mm clear aperture
ALAR 200SP/LP 200 mm clear aperture
ALAR 250SP/LP/XP 250 mm clear aperture
ALAR 325SP/LP/XP 325 mm clear aperture
NOTE:LP stages are best for vertical axis applications. SP/XP stages are good for both horizontal and vertical applications.
Motor (Required, SP and XP only)
-M1 Standard motor
-M2 High power motor
NOTE:-M1 and -M2 motor options only apply to the 250 mm and 325 mm aperture SP and XPstages.
Travel (Required)
- Continuous travel
-TR010 Limited travel, ±5 degrees
-TR020 Limited travel, ±10 degrees
-TR030 Limited travel, ±15 degrees
-TR060 Limited travel, ±30 degrees
-TR090 Limited travel, ±45 degrees
-TR120 Limited travel, ±60 degrees
-TR180 Limited travel, ±90 degrees
-TR240 Limited travel, ±120 degrees
-TR300 Limited travel, ±150 degrees
-TR340 Limited travel, ±170 degrees
Feedback (Required)
-E1 Incremental encoder, 1 Vpp sine [SP/LP/XP]
-E2 Incremental encoder, x4 interpolation [SP/LP]
-E3 Incremental encoder, x20 interpolation [SP/LP]
-E4 Incremental encoder, x40 interpolation [SP/LP]
-E5 Incremental encoder, x100 interpolation [SP/LP]
-E6 Incremental encoder, x200 interpolation [SP/LP/XP]
-E7 Absolute encoder [SP/LP/XP]
ALAR Hardware Manual Chapter 1: Overview
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1.1. Environmental Specifications
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should
be packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical
vibration can affect system performance. Contact Aerotech for information
regarding your specific application.
Protection
Rating
The ALAR stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature
changes could cause a decrease in performance or permanent damage to the ALAR. At a minimum,
the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ALAR
specifications are repeatable over an extended period of time. The severity of temperature effects
on all specifications depends on many different environmental conditions, including how the ALAR is
mounted. Contact the factory for more details.
1.1. Environmental Specifications ALAR Hardware Manual
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1.3. Basic Specifications
Table 1-3: ALAR-SP Series Specifications (ALAR100SP, ALAR150SP, andALAR200SP)
ALAR100SP ALAR150SP ALAR200SP
Aperture 100 mm 150 mm 200 mm
Motor Brushless Slotless
Continuous Current 2.7 Apk 6.2 Apk 5.3 Apk
1.9 Arms 4.4 Arms 3.75 Arms
Peak Current, Stall 10.8 Apk 24.8 Apk 34.8 Apk
7.6 Arms 17.5 Arms 24.6 Arms
Bus Voltage Up to 340 VDC
Unlimited Travel Yes
Maximum Limited Travel ±170°
Maximum Velocity @ 160 V
Bus(1) 300 rpm 250 rpm 90 rpm
Maximum Acceleration 1364 rad/s21330 rad/s2361 rad/s2
Resolution (Minimum
Incremental Motion)(2)
0.1 µrad
(0.02 arc-sec)
0.08 µrad
(0.016 arc-sec)
0.06 µrad
(0.012 arc-sec)
Incremental Encoder Line
Count 31,488 lines/rev 40,000 lines/rev 55,040 lines/rev
Maximum Torque 23.9 N·m 42.9 N·m 126.8 N·m
Continuous Torque 6.0 N·m 10.7 N·m 19.3 N·m
Stage Mass 16.3 kg 18.6 kg 40.4 kg
Stage Mass with Limits 17 kg 19.6 kg 43.1 kg
Shaft Inertia 0.022 kg·m20.040 kg·m20.320 kg·m2
Shaft Inertia with Limits 0.026 kg·m20.051 kg·m20.359 kg·m2
Axial Load 1550 N (348 lb) 1950 N (438 lb) 4675 N (1051 lb)
RadialLoad 1350 N (303 lb) 1925 N (433 lb) 4775 N (1073 lb)
Moment Load 250 N·m 450 N·m 1600 N·m
Repeatability ±2.4 µrad (±0.5 arc sec)
Accuracy(3) ±9.7 µrad (±2 arc sec)
Tilt-Error Motion 9.7 µrad (2.0 arc sec)
1. Square-wave digital encoder options will limit maximum speed below the listed value.
2. Resolution assumes -E1 encoder with 2000X controller multiplication.
3. Certified with each stage. Requires the use of an Aerotech controller.
ALAR Hardware Manual 1.3. Basic Specifications
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Table 1-4: ALAR-SP Series Specifications (ALAR250SP andALAR325SP)
ALAR250SP-M1 ALAR250SP-M2 ALAR325SP-M1 ALAR325SP-M2
Aperture 250 mm 325 mm
Motor Brushless Slotless
Continuous Current 5.3 Apk 7.95 Apk 5.1 Apk 7.65 Apk
3.75 Arms 5.62 Arms 3.63 Arms 5.41 Arms
Peak Current, Stall 34.8 Apk 52.2 Apk 31.2 Apk 46.8 Apk
24.6 Arms 36.9 Arms 22.1 Arms 33.1 Arms
Bus Voltage Up to 340 VDC
Unlimited Travel Yes
Maximum Limited
Travel ±170°
Maximum Velocity(1) 140 rpm 150 rpm
Maximum
Acceleration 287 rad/s2185 rad/s2
Resolution
(Minimum
Incremental
Motion)(2)
0.05 µrad (0.01 arc-sec) 0.04 µrad
(0.009 arc-sec)
Incremental Encoder
Line Count 64,800 lines/rev 76,800 lines/rev
Maximum Torque 137.8 N·m 206.7 N·m 213.8 N·m 320.8 N·m
Continuous Torque 21.0 N·m 31.5 N·m 35.0 N·m 52.4 N·m
Stage Mass 51.3 kg 61.2 kg
Stage Mass with
Limits 54.5 kg 64.9 kg
Shaft Inertia 0.500 kg·m21.01 kg·m2
Shaft Inertia with
Limits 0.573 kg·m21.2 kg·m2
Axial Load 4950 N (1113 lb) 5825 N (1310 lb)
RadialLoad 5200 N (1169 lb) 6650 N (1495 lb)
Moment Load 1825 N·m 2650 N·m
Repeatability ±2.4 µrad (±0.5 arc sec)
Accuracy(3) ±9.7 µrad (±2 arc sec)
Tilt-Error Motion 9.7 µrad (2.0 arc sec)
1. Square-wave digital encoder options will limit maximum speed below the listed value.
2. Resolution assumes -E1 encoder with 2000X controller multiplication.
3. Certified with each stage. Requires the use of an Aerotech controller.
1.3. Basic Specifications ALAR Hardware Manual
14 www.aerotech.com

Table 1-5: ALAR-LP Series Specifications (ALAR100LP, ALAR150LP, andALAR200LP)
ALAR100LP ALAR150LP ALAR200LP
Aperture 100 mm 150 mm 200 mm
Motor Brushless Slotless
Continuous Current 5.76 Apk 5.41 Apk 5.3 Apk
4.1 Arms 4.1 Arms 3.75 Arms
Peak Current, Stall 33.5 Apk 31.4 Apk 34.8 Apk
23.7 Arms 22.2 Arms 24.6 Arms
Bus Voltage Up to 340 VDC
Unlimited Travel Yes
Maximum Limited Travel ±170°
Maximum Velocity @ 160 V
Bus(1) 50 rpm 45 rpm 90 rpm
Maximum Acceleration 1009 rad/s2829 rad/s2570 rad/s2
Resolution (Minimum
Incremental Motion)(2)
0.1 µrad
(0.02 arc-sec)
0.09 µrad
(0.018 arc-sec)
0.07 µrad
(0.015 arc-sec)
Incremental Encoder Line
Count 31,488 lines/rev 36,000 lines/rev 47,200 lines/rev
Maximum Torque 17.5 N·m 22.9 N·m 126.8 N·m
Continuous Torque 3.0 N·m 4.0 N·m 19.3 N·m
Stage Mass 8.3 kg 9.8 kg 28.2 kg
Stage Mass with Limits 8.9 kg 10.8 kg 30.1 kg
Shaft Inertia 0.022 kg·m20.031 kg·m20.190 kg·m2
Shaft Inertia with Limits 0.026 kg·m20.042 kg·m20.229 kg·m2
Axial Load 1175 N (264 lb) 1325 N (298 lb) 4350 N (978 lb)
RadialLoad 950 N (214 lb) 1275 N (287 lb) 4125 N (927 lb)
Moment Load(3) 150 N·m 225 N·m 1075 N·m
Repeatability ±2.4 µrad (±0.5 arc sec)
Accuracy(4) ±9.7 µrad (±2 arc sec)
Tilt-Error Motion 19.4 µrad (4.0 arc sec)
1. Square-wave digital encoder options will limit maximum speed below the listed value.
2. Resolution assumes -E1 encoder with 2000X controller multiplication.
3. The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load.
4. Certified with each stage. Requires the use of an Aerotech controller.
ALAR Hardware Manual 1.3. Basic Specifications
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Table 1-6: ALAR-LP Series Specifications (ALAR250LP andALAR325LP)
ALAR250LP ALAR325LP
Aperture 250 mm 325 mm
Motor Brushless Slotless
Continuous Current 5.3 Apk 5.1 Apk
3.75 Arms 3.63 Arms
Peak Current, Stall 34.8 Apk 31.2 Apk
24.6 Arms 22.1 Arms
Bus Voltage Up to 340 VDC
Unlimited Travel Yes
Maximum Limited Travel ±170°
Maximum Velocity(1) 90 rpm 120 rpm
Maximum Acceleration 407 rad/s2339 rad/s2
Resolution (Minimum
Incremental Motion)(2) 0.05 µrad (0.01 arc-sec) 0.04 µrad (0.009 arc-sec)
Incremental Encoder Line
Count 55,040 lines/rev 64,800 lines/rev
Maximum Torque 147.9 N·m 213.8 N·m
Continuous Torque 22.5 N·m 35.0 N·m
Stage Mass 35.0 kg 44.5 kg
Stage Mass with Limits 37.4 kg 49.9 kg
Shaft Inertia 0.310 kg·m20.55 kg·m2
Shaft Inertia with Limits 0.383 kg·m20.675 kg·m2
Axial Load 4950 N (1113 lb) 5825 N (1310 lb)
RadialLoad 5050 N (1135 lb) 6450 N (1450 lb)
Moment Load(3) 1475 N·m 2200 N·m
Repeatability ±2.4 µrad (±0.5 arc sec)
Accuracy(4) ±9.7 µrad (±2 arc sec)
Tilt-Error Motion 19.4 µrad (4.0 arc sec)
1. Square-wave digital encoder options will limit maximum speed below the listed value.
2. Resolution assumes -E1 encoder with 2000X controller multiplication.
3. The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load.
4. Certified with each stage. Requires the use of an Aerotech controller.
1.3. Basic Specifications ALAR Hardware Manual
16 www.aerotech.com

Table 1-7: ALAR-XP Series Specifications (ALAR250XP andALAR325XP)
ALAR250XP-M1 ALAR250XP-M2 ALAR325XP-M1 ALAR325XP-M2
Travel Continuous (Limited Travel options up to 340° max)
Aperture 250 mm 325 mm
Motor Brushless Slotless
Continuous Current 11.2 Apk 14.9 Apk 11.3 Apk 15.1 Apk
7.9 Arms 10.6 Arms 8.0 Arms 10.7 Arms
Peak Current,Stall 95.7 Apk 127.6 Apk 87.8 Apk 117.1 Apk
67.7 Arms 90.2 Arms 62.1 Arms 82.8 Arms
Bus Voltage up to 340 VDC
Resolution
(Minimum
Incremental Motion)
(1)
0.05 µrad (0.01 arc sec) 0.04 µrad (0.009 arc sec)
Incremental Encoder
Line Count 64,800 lines/rev 76,800 lines/rev
Accuracy(2) ±9.7 µrad (±2 arc sec)
Bidirectional
Repeatability ±2.4 µrad (±0.5 arc sec)
Tilt-Error Motion 9.7 µrad (2.0 arc sec)
Maximum Speed(3) 180 rpm 100 rpm
Maximum
Acceleration 500 rad/s2700 rad/s2400 rad/s2550 rad/s2
Maximum Torque 548.6 N·m 731.5 N·m 833.0 N·m 1110.7 N·m
Continuous Torque 64.2 N·m 85.6 N·m 107.4 N·m 143.1 N·m
Axial Load 4950 N 5825 N
Radial Load 5200 N 6650 N
Moment Load 1825 N·m 2650 N·m
Shaft Inertia 0.89 kg·m21.71 kg·m2
Shaft Inertia with
Limits 0.96 kg·m21.82 kg·m2
Stage Mass 100 kg 104 kg 125 kg 130 kg
Stage Mass with
Limits 104 kg 108 kg 129 kg 134 kg
1. Resolution assumes -E1 encoder with 2000X controller multiplication.
2. Certified with each stage. Requires the use of an Aerotech controller.
3. Maximum speed assumes a bus voltage of 320 VDC.
ALAR Hardware Manual 1.3. Basic Specifications
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1.4. Vacuum Operation
Contact the factory for information regarding operation in a vacuum environment.
There are two vacuum preparation options:
lLow Vacuum (for use in atmospheric pressures to 10-3 Torr)
lHigh Vacuum (preparation for environments from 10-3 to 10-6 Torr).
Special preparations include:
lParts are lubricated with vacuum-compatible lubricants.
lMaterials, fasteners, and coatings with vacuum outgas performance are ensured to be compatible
with the specified level of vacuum.
lFor high vacuum systems, situations that may allow gases to become temporarily trapped during
pump down are removed.
lPrior to assembly, stage parts are thoroughly cleaned in a clean environment.
lThe stage is packaged in a special polyethylene bag.
Vacuum Guidelines
To ensure that the stage will continue to perform well in the vacuum environment, use the
guidelines that follow (in addition to standard handling, installation, and lubrication guidelines
outlined in this manual).
1. Do not remove the stage from its sealed bag until it is ready to use.
2. Always handle the stage in a clean environment and use powder-free polyethylene gloves to pre-
vent any contaminants from adhering to the surface of the stage.
3. During installation, use cleaned, vented, stainless steel fasteners to secure the stage.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the vis-
cous vacuum-compatible lubricants, could result in excessive motor operating temperatures.
Because of this, consider all continuous torque ratings to be 40 to 60% lower than the value spe-
cified for operation in normal atmospheric environment. Reduce motor usage accordingly.
5. We recommend that you use a small quantity of Braycote® 602EF grease or a compatible sub-
stitute of equal quality lubricant in vacuum applications.
6. Bake vacuum components at 60 °C for 24 to 48 hours to significantly reduce outgassing at initial
pump-down to vacuum pressure and evaporate water vapor that impregnates porous surfaces
on the aluminum and Teflon cables. Aerotech recommends that customers bake out vacuum sys-
tems when first installing them in the vacuum chamber. Contact Aerotech to discuss your applic-
ation and the recommended bakeout procedure.
1.4. Vacuum Operation ALAR Hardware Manual
18 www.aerotech.com

Chapter 2: Mechanical Specifications and Installation
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
2.1. Unpacking and Handling the Stage
WARNING: Unassisted lifting could cause injury.
lUse lifting aids and proper lifting techniques when moving or placing.
lUse mechanical lift only for the ALAR200, 250, and 325 .
lDo not use cables as lifting points.
WARNING: It is the customer's responsibility to safely and carefully lift and move the
ALAR.
lMake sure that all moving parts are secure before moving the ALAR. Unsecured
moving parts can shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ALAR. Use care
when moving the ALAR.
IMPORTANT: If damage has occurred during shipping, report it immediately.
Lifting Instructions
Do not manually lift or move a stage that exceeds 18 kg [40 lbs]. Refer to Section 1.3. for stage mass
specifications. Smaller stages can be lifted at the base, by their sides.
Lift larger stages (200, 250, or 325 models) by the factory installed eye bolts. Refer to Figure 2-1.
Carefully remove the ALARfrom its protective shipping container. Gently set the ALAR on a smooth,
flat, and clean surface.
Before you operate the ALAR, let it stabilize at room temperature for at least 12 hours. This helps
ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at
Aerotech. Use compressed nitrogen or clean, dry, oil-free air to remove any dust or debris that has
collected during shipping.
Each ALAR has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label
and record the information for later reference.
ALAR Hardware Manual Chapter 2: Mechanical Specifications and Installation
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Figure 2-1: ALARwith Lifting Bolts
2.1. Unpacking and Handling the Stage ALAR Hardware Manual
20 www.aerotech.com