Aerotech ATS100 Series User manual

Revision: 1.03.00
ATS100 Hardware Manual

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101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
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Copyright © 1996-2020, Aerotech, Inc., All rights reserved.

ATS100 Hardware Manual Table of Contents
Table of Contents
ATS100 Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 11
1.2. Accuracy and Temperature Effects 11
1.3. Basic Specifications 12
1.4. Vacuum Operation 13
Chapter 2: Mechanical Specifications and Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 18
2.4. Attaching the Payload to the Stage 20
Chapter 3: Electrical Specifications and Installation 25
3.1. Motor and Feedback Connectors 26
3.2. Motor and Feedback Wiring 32
3.3. Motor and Feedback Specifications 34
3.4. Limits, Marker, and Machine Direction 38
3.5. Motor and Feedback Phasing 39
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Troubleshooting 44
Appendix A: Warranty and Field Service 45
Appendix B: Revision History 47
Index 49
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Table of Contents ATS100 Hardware Manual
List of Figures
Figure 2-1: ATS100 Dimensions 16
Figure 2-2: ATS100 Mounting Plate Dimensions 17
Figure 2-3: ATS100 Mounting Holes 19
Figure 2-4: Load Orientations 21
Figure 2-5: Cantilevered Load Capabilities 21
Figure 2-6: Travel Life 22
Figure 2-7: Torque Required to Turn the BallScrew 23
Figure 3-1: Motor and Feedback Wiring [BM/BMSMotor] 32
Figure 3-2: Motor and Feedback Wiring [StepperMotor] 33
Figure 3-3: Machine Direction 38
Figure 3-4: Hall Phasing 39
Figure 3-5: Analog Encoder Phasing Reference Diagram 40
Figure 3-6: TTLEncoder Phasing Reference Diagram 40
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ATS100 Hardware Manual Table of Contents
List of Tables
Table 1-1: ATS100 Model Numbering System 9
Table 1-2: Environmental Specifications 11
Table 1-3: ATS100 Series Specifications 12
Table 2-1: Stage to Mounting Surface Hardware 18
Table 2-2: Applied Load Coefficients 22
Table 3-1: BM/BMSMotor Wiring Connector Pinout 27
Table 3-2: BM/BMSMotor Feedback Wiring Connector Pinout 28
Table 3-3: Stepper Motor Connector Pinout 29
Table 3-4: Stepper Motor Feedback Connector Pinout 30
Table 3-5: Limits with 9-Pin D-Connector (-LI1 or -LI3) 31
Table 3-6: Limits with Flying Leads (-LI2 or -LI4 Option) 31
Table 3-7: Feedback Specifications 34
Table 3-8: Motor Specifications [BMS60] 35
Table 3-9: Motor Specifications [BM75] 36
Table 3-10: Motor Specifications [SM60] 37
Table 3-11: Encoder Option Specifications 37
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Table of Contents ATS100 Hardware Manual
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure
to observe these precautions could result in serious injury to those individuals performing the procedures
and/or damage to the equipment. Operators should be trained before operating this equipment.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ATS100 and component parts must be restricted while connected to a power
source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ATS100 stage must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the ATS100 stage. Lifting or transporting the ATS100 stage
improperly can result in injury or damage to the ATS100.
6. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
7. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
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ATS100 Hardware Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ATS100 Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended; and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 RoHS3 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 2/25/2020
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Table of Contents ATS100 Hardware Manual
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ATS100 Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ATS100 Model Numbering System
ATS100 Series Mechanical-Bearing Screw-Driving Stage
-050 50 mm travel stage with limits
-100 100 mm travel stage with limits
-150 150 mm travel stage with limits
-200 200 mm travel stage with limits
Vacuum Preparation (Optional)
-HV High vacuum preparation of stage to 10-6 torr
Tabletop (Required)
-TT1 Tabletop with metric dimension mounting pattern and holes.
-TT2 Tabletop with English dimension mounting pattern and holes.
Motor (Optional)
-M1 BMS60 servomotor with 2500-line digital RS422 line-driver encoder
-M2 BMS60 servomotor with 2500-line digital RS422 line-driver encoder and holding
brake
-M3 BMS60 servomotor with 1000-line 1 Vpp sinewave encoder
-M4 BMS60 servomotor with 1000-line 1 Vpp sinewave encoder and holding brake
-M5 BM75 servomotor with 2500-line digital RS422 line-driver encoder
-M6 BM75 servomotor with 2500-line digital RS422 line-driver encoder and holding
brake
-M7 BM75 servomotor with 1000-line 1 Vpp sinewave encoder
-M8 BM75 servomotor with 1000-line 1 Vpp sinewave encoder and holding brake
-M9 SM60 stepper motor, SM60-CN1-VT2
-M10 SM60 stepper motor with holding brake, SM60-CN1-VT2-BK
Foldback (Optional)
-FB1 Foldback kit for 1/4" diameter shaft NEMA 23 motor
-FB2 Foldback kit with brake for 1/4" diameter shaft NEMA 23 motor
Motor Orientation (Optional)
-2 Bottom cable exit (optional orientation)
-3 Left side cable exit (standard orientation)
-4 Top cable exit (optional orientation)
-5 Right side cable exit (optional orientation)
-8 Right side foldback (requires "FB" option, standard orientation)
-12 Left side foldback (requires "FB" option, optional orientation)
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Overview ATS100 Hardware Manual
Limits (Required)
-LI1 Normally closed end of travel limit switches; 9-pin D connector
-LI2 Normally closed end of travel limit switches; flying leads
-LI3 Normally open end of travel limit switches; 9-pin D connector
-LI4 Normally open end of travel limit switches; flying leads
Coupling (Optional)
-CP1 Coupling for 1/4" diameter shaft
-CP2 Coupling for 3/8" diameter shaft
Mounting Plate (Optional)
-MP1 Mounting plate, metric
-MP2 Mounting plate, English
Metrology (Optional)
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots
Metrology - HALSF (Optional)
-PL5 Metrology, horizontal / vertical straightness correction
Accessories (To be Ordered as a Separate Line Item)
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonal; alignment to within 7 microns
orthogonality for short travel stages.
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonal; alignment to
within 10 microns orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonal; alignment to within 3 microns orthogonality
for short travel stages.
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonal; alignment to
within 5 microns orthogonality for short travel stages.
HDZ1 English right angle L-bracket (ATS100-050 and ATS100-100 only)
HDZ1L English right angle L-bracket (ATS100-150 and ATS100-200 only)
HDZ1M Metric right angle L-bracket (ATS100-050 and ATS100-100 only)
HDZ1LM Metric right angle L-bracket (ATS100-150 and ATS100-200 only)
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ATS100 Hardware Manual Overview
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating:
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C, degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your spe-
cific application.
Protection
Rating
ATS100 stages have limited protection against dust, but not water. This equates to an
ingress protection rating of IP50.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the ATS100. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ATS100
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the ATS100 is mounted.
Contact the factory for more details.
The accuracy of the screw is a key element in the overall positioning of the stage. A scale error can be
expected if temperature of the screw differs from 20 °C (68 °F). The greater the temperature difference, the
greater the error. The temperature of the screw depends on the speed and duty cycle of the stage. The faster
the movement and higher the duty cycle, the more the stage accuracy will be affected by heat. The thermal
expansion coefficient of the screw is 11.7 ppm/°C.
The temperature error, tε, can be calculated with the formula that follows:
tε = α × L × ∆t
where
α = 11.7 x 10-6 m/mm per ° C (6.67 x 10-6 in/in per °F)
L = Length of ball screw between base and table top
∆t = temperature difference between ambient and 20° C (68° F)
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Overview ATS100 Hardware Manual
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: ATS100 Series Specifications
ATS100-
050
ATS100-
100
ATS100-
150
ATS100-
200
Travel 50 mm 100 mm 150 mm 200 mm
Maximum Travel Speed(1) 100 mm/s
Maximum Load(2)
Horizontal 25.0 kg
Vertical 10.0 kg
Side 10.0 kg
Accuracy Calibrated(3) ±0.5 µm ±0.5 µm ±0.75 µm ±1.0 µm
Standard ±2.0 µm ±3.0 µm ±5.0 µm ±6.0 µm
Repeatability
(Bidirectional)
Calibrated(3) ±0.3 µm
Standard ±0.7 µm
Straightness and
Flatness
Differential HALSF 1.0 µm/25 mm
Standard 2.0 µm/25 mm
Maximum
Deviation
HALSF ±0.5 µm ±1.0 µm ±1.5 µm ±1.75 µm
Standard ±1.0 µm ±2.0 µm ±2.0 µm ±3.0 µm
Pitch and Yaw 5 arc sec 8 arc sec 10 arc sec 12 arc sec
Nominal Stage Weight
Less Motor 1.6 kg
(3.5 lb)
1.8 kg
(4.0 lb)
1.9 kg
(4.2 lb)
2.1 kg
(4.6 lb)
With Motor 2.7 kg
(6.0 lb)
2.9 kg
(6.4 lb)
3.0 kg
(6.6 lb)
3.2 kg
(7.1 lb)
Construction Aluminum Body/Stage and Table;
Clear Anodize Finish
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of
travel.
3. Available with Aerotech controllers.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
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ATS100 Hardware Manual Overview
1.4. Vacuum Operation
If the -HV option is ordered, Aerotech specially prepares the ATS100 for operation in high vacuum
environments (up to 10-6 torr). This preparation involves special precautions during cleaning, assembly, and
packaging to ensure optimal performance in vacuum applications.
To make sure that the ATS100 will continue to perform well in the vacuum environment, use the guidelines
that follow (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
lDo not remove the ATS100 from its sealed bag until it is ready to use.
lAlways handle the ATS100 in a clean environment and use powder-free polyethylene gloves to prevent
any contaminants from adhering to the surface of the ATS100.
lDuring installation, use cleaned, vented, stainless steel fasteners when securing the ATS100.
lReduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of this,
consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation in
normal atmospheric environment. Reduce motor usage accordingly.
lFor vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
lBaking vacuum components significantly reduces outgassing at initial pump-down to vacuum pressure
and evaporates water vapor that impregnates porous surfaces on the aluminum and Teflon cables.
Aerotech recommends that customers bake out vacuum systems when first installing them in the
vacuum chamber. Contact Aerotech for bakeout temperatures and times for your application.
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Overview ATS100 Hardware Manual
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ATS100 Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : ATS100 installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ATS100. Unsecured moving
parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ATS100. Use care when
moving the ATS100.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ATS100from its protective shipping container. Gently set the ATS100 on a smooth,
flat, and clean surface.
Before operating the ATS100, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-free air to
remove any dust or debris that has collected during shipping.
Each ATS100 has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
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Mechanical Specifications and Installation ATS100 Hardware Manual
2.2. Dimensions
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Figure 2-1: ATS100 Dimensions
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ATS100 Hardware Manual Mechanical Specifications and Installation
Figure 2-2: ATS100 Mounting Plate Dimensions
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Mechanical Specifications and Installation ATS100 Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : Make sure that all moving parts are secure before moving the ATS100.
Unsecured moving parts may shift and cause bodily injury.
W A R N I N G : The ATS100 must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the ATS100 stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 8 µm.
N O T E : The ATS100 is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ATS100. Shimming should be avoided if possible. If shimming is required, it should
be minimized to retain maximum rigidity of the system.
ATS100 series stages have a fixed mounting pattern. To secure the stage to a mounting surface, manually
move the stage table so that the access holes on the stage table are aligned with any two of the mounting
holes on the under side of the stage (refer to Figure 2-3). Install the appropriately sized mounting screws
through the access holes and secure the stage to the mounting surface. Repeat this process for each set of
mounting holes.
N O T E : The stage table may offer a considerable amount of resistance when it is moved manually. This
is especially true if the stage is fitted with a motor assembly.
W A R N I N G : Do not attempt to manually move the ATS100 if it is connected to a power
source.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in Table 2-1 are typical values and may not be accurate for your
mounting surface. Refer to Section 2.2. for specific model mounting locations and dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw Torque
M6x1.0 or 1/4" - 20 SHCS 7.0 N·m [62 in·lb]
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ATS100 Hardware Manual Mechanical Specifications and Installation
Figure 2-3: ATS100 Mounting Holes
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Mechanical Specifications and Installation ATS100 Hardware Manual
2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Chapter 3and the documentation delivered with the stage.
N O T E : If your ATS100 was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the ATS100 is started up
without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : For valid system performance, the mounting interface should be flat within 12 µm.
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure).
If cantilevered loads are applied, refer to Figure 2-4 to find the loading condition. Refer to Figure 2-5 to find
the maximum allowable load.
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