Aerotech PRO115SL Series User manual

Revision: 1.07.00
PRO115SL/SLE Hardware
Manual

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website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If
necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
To get help immediately, contact a service office or your sales representative. Include your customer order number in your
email or have it available before you call.
United States (World Headquarters)
Email: [e-mail]
Phone: [phone]
Fax: [phone]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2008-2019, Aerotech, Inc., All rights reserved.

PRO115SL/SLE Hardware Manual Table of Contents
Table of Contents
PRO115SL/SLE Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 11
1.2. Accuracy and Temperature Effects 11
1.3. Basic Specifications 12
1.4. Vacuum Operation 14
Chapter 2: Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 20
2.4. Attaching the Payload to the Stage 22
Chapter 3: Electrical Installation 25
3.1. Motor and Feedback Connectors 26
3.2. Motor and Feedback Wiring 31
3.3. Motor and Feedback Specifications 33
3.4. Limits, Marker, and Machine Direction 37
3.5. Motor and Feedback Phasing 38
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Belt Adjustment 46
4.4. Troubleshooting 49
Appendix A: Warranty and Field Service 51
Appendix B: Revision History 53
Index 55
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Table of Contents PRO115SL/SLE Hardware Manual
List of Figures
Figure 2-1: PRO115SL Dimensions 16
Figure 2-2: PRO115SLE Dimensions 17
Figure 2-3: PRO115SL/SLE Accessory Tabletop Dimensions (-TT3/-TT6 Option) 18
Figure 2-4: PRO115SL/SLE Z-Axis Bracket Dimensions 19
Figure 2-5: Mounting Hole Locations 21
Figure 2-6: Cantilevered Load Capability 23
Figure 2-7: Stage Orientations 23
Figure 2-8: Load Torque Equation 24
Figure 2-9: Torque Required to Turn Ball Screw in Vertical Orientation 24
Figure 3-1: Motor and Feedback Wiring (-SL) 31
Figure 3-2: Motor and Feedback Wiring (-SLE) 32
Figure 3-3: Machine Direction 37
Figure 3-4: Hall Phasing 38
Figure 3-5: Analog Encoder Phasing Reference Diagram 39
Figure 3-6: Encoder Phasing Reference Diagram (Standard) 39
Figure 4-1: Hardcover Removal Procedure (Step 2) 44
Figure 4-2: Hardcover Removal Procedure (Step 3) 44
Figure 4-3: Hardcover Removal Procedure (Step 4) 45
Figure 4-4: Foldback Motor Cover Removal 47
Figure 4-5: Foldback Motor Part Callouts 48
Figure 4-6: Lubricate the Pulley Flanges 48
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PRO115SL/SLE Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 9
Table 1-2: Environmental Specifications 11
Table 1-3: PRO115SL/SLE Series Specifications (-050 to -250) 12
Table 1-4: PRO115SL/SLE Series Specifications (-300 to -600) 13
Table 2-1: Stage Mounting Surface Flatness Requirement 20
Table 2-2: Stage to Mounting Surface Hardware 21
Table 3-1: Motor Connector Pinout 27
Table 3-2: Part Numbers for the Motor Connector 27
Table 3-3: Feedback Connector Pinout 28
Table 3-4: Part Numbers for the Feedback Connector 28
Table 3-5: Linear Encoder Connector Pinout (-SLE only) 29
Table 3-6: Part Numbers for the Encoder Connector 29
Table 3-7: Limit Connector Pinout 30
Table 3-8: Part Numbers for the Limit Connector 30
Table 3-9: Feedback Specifications 33
Table 3-10: PRO115SL/SLE Motor Specifications (BMS60) 34
Table 3-11: PRO115SL/SLE Motor Specifications (BM75) 35
Table 3-12: Rotary Encoder Specifications for PRO115SLStages 36
Table 3-13: Linear Encoder Specifications for PRO115SSLEStages 36
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Table of Contents PRO115SL/SLE Hardware Manual
Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the PRO115SL/SLE. Read all parts of
this manual before you install or operate the PRO115SL/SLE or before you do maintenance to your system.
To prevent injury to you and damage to the equipment, obey the precautions in this manual. The precautions
that follow apply when you see a Danger or Warning symbol in this manual. If you do not obey these
precautions, injury to you or damage to the equipment can occur. If you do not understand the information in
this manual, contact Aerotech Global Technical Support.
This product has been designed for light industrial manufacturing or laboratory environments. The protection
provided by the equipment could be impaired if the product is used in a manner not specified by the
manufacturer.
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the PRO115SL/SLE and component parts must be restricted while connected to
a power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The PRO115SL/SLE stage must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
5. Use care when moving the PRO115SL/SLE stage. Lifting or transporting the
PRO115SL/SLE stage improperly can result in injury or damage to the PRO115SL/SLE.
6. The motor case temperature may exceed 75°C.
7. Operators must be trained before operating this equipment.
8. All service and maintenance must be performed by qualified personnel.
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PRO115SL/SLE Hardware Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PRO115SL/SLE Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, i.e., as a whole, including the equipment referred to in this
Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 7/31/2019
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Table of Contents PRO115SL/SLE Hardware Manual
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PRO115SL/SLE Hardware Manual Overview
Chapter 1: Overview
The specifications in this manual pertain to the second generation of PRO SL/SLE stages. Second
generation stages can be distinguished from their first generation counterparts by the second generation's
curved hardcover. Contact Aerotech if you need a first generation manual.
Table 1-1: Model Numbers and Ordering Options
PRO115SL and PRO115SLESeries Linear Ball-Screw Stage
Direct Linear Feedback (-SLE only)
-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.1 µm digital TTL output
-E4 Incremental linear encoder; 0.5 µm digital TTL output
Travel (Required)
-050 50 mm travel stage
-100 100 mm travel stage
-150 150 mm travel stage
-200 200 mm travel stage
-250 250 mm travel stage
-300 300 mm travel stage
-400 400 mm travel stage
-500 500 mm travel stage
-600 600 mm travel stage
Tabletop (Optional for SL Stages; Required for SLE Stages)
-TT1 Tabletop with metric dimension mounting
-TT2 Tabletop with English dimension mounting
-TT3 Accessory tabletop with mounting for select rotary stages
-TT4 Tabletop with metric dimension mounting and wiper brushes
-TT5 Tabletop with English dimension mounting and wiper brushes
-TT6 Accessory tabletop with mounting for select rotary stages and wipers
Motor (Optional)
-M1 BMS60 brushless servomotor and 2500-Line TTL encoder
-M2 BMS60 brushless servomotor, 2500-Line TTL encoder, and brake
-M3 BMS60 brushless servomotor and 1000-Line 1 Vpp encoder
-M4 BMS60 brushless servomotor, 1000-Line 1 Vpp encoder, and brake
-M5 BM75 brushless servomotor and 2500-Line TTL encoder
-M6 BM75 brushless servomotor, 2500-Line TTL encoder, and brake
-M7 BM75 brushless servomotor and 1000-Line 1 Vpp encoder
-M8 BM75 brushless servomotor, 1000-Line 1 Vpp encoder, and brake
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Overview PRO115SL/SLE Hardware Manual
PRO115SL and PRO115SLESeries Linear Ball-Screw Stage (continued)
Foldback (Optional)
-FB1 Foldback kit for 1/4" diameter shaft NEMA 23 motor
-FB2 Foldback kit with brake for 1/4" diameter shaft NEMA 23 motor
-FB3 Foldback kit for 3/8" diameter shaft NEMA 23 motor
-FB4 Foldback kit with brake for 3/8" diameter shaft NEMA 23 motor
NOTE: -TT1 option required for lower axis of XY when a foldback kit is used
Motor Orientation (Optional)
-2 Bottom cable exit, optional orientation
-3 Left-side cable exit, standard orientation
-4 Top cable exit, optional orientation
-5 Right-side cable exit, optional orientation
-8 Right-side foldback, standard orientation
-12 Left-side foldback, optional orientation
Limits (Required)
-LI1 Normally-closed limit switches; 5 VDC with 9-pin D connector
-LI2 Normally-open limit switches; 5 VDC with 9-pin D connector
-LI3 Normally-closed limit switches; 24 VDC with 9-pin D connector
Coupling (Optional)
-CP1 Coupling for 1/4"inch diameter shaft
-CP2 Coupling for 3/8"inch diameter shaft
Metrology (Required)
-PL0 No metrology performance plots
-PL1 Uncalibrated with performance plots
-PL2 Calibrated with performance plots
ThermoComp™ (Optional)
-TCMP ThermoComp™ integrated thermal compensation, single or lower axis
NOTE: An A3200 controller must be used with the -TCMP option
Accessories (To be Ordered as a Separate Line Item)
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 µm orthogonality for
short travel stages.
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10
µm orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 µm orthogonality for short
travel stages.
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5
µm orthogonality for short travel stages.
HDZ115 Right angle L-bracket for 50 mm, 100 mm, and 150 mm travels only
NOTE: HDZ bracket requires a tabletop when mounting to a PRO series stage
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PRO115SL/SLE Hardware Manual Overview
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The PRO115SL/SLE stages have limited protection against dust, but not water. This
equates to an ingress protection rating of IP50.
Use Indoor use only
1.2. Accuracy and Temperature Effects
The accuracy specification of PRO115SL/SLE series stages is measured 25 mm above the table with the
stage in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
The accuracy of the screw is a key element in the overall positioning accuracy of the SLstage. A scale error
can be expected if temperature of the screw differs from 20° C (68° F). The greater the temperature
difference, the greater the error. The temperature of the screw depends on the speed and duty cycle of the
stage. The faster the movement and higher the duty cycle, the more the stage accuracy will be affected by
heat. The thermal expansion coefficient of the screw is 11.7 ppm/°C.
SLEstages contain a linear encoder for direct feedback of the carriage position. The stage travel as seen by
the linear encoder will expand at the rate of 3.25 ppm/°C as the temperature of the encoder scale deviates
from 20°C.
The ThermoComp™ option is a hardware and software solution that uses the functionality of the A3200
controller to mitigate the effects of changing temperature by detecting and compensating for thermal
changes. ThermoComp™ is effective at compensating for both self-heating and environmental temperature
changes.
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Overview PRO115SL/SLE Hardware Manual
1.3. Basic Specifications
Resolution is dependent on ball-screw pitch, encoder resolution, and controller interpolation.
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: PRO115SL/SLE Series Specifications (-050 to -250)
-050 -100 -150 -200 -250
Travel 50 mm 100 mm 150 mm 200 mm 250 mm
Accuracy (1)
SL Standard ±6 µm ±6 µm ±8 µm ±8 µm ±9 µm
Calibrated ±1 µm ±1.25 µm ±1.5 µm ±1.75 µm ±2 µm
SLE Standard ±3 µm ±4 µm ±6 µm ±8 µm ±9 µm
Calibrated ±1 µm ±1 µm ±1 µm ±1.5 µm ±1.5 µm
Resolution
(Minimum
Incremental
Motion)
SL 0.1 µm (2), 1.0 µm (3)
SLE 0.05 µm (-E1 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4 encoder)
Bidirectional
Repeatability (1)
SL ±1 µm
SLE ±0.5 µm
Horizontal Straightness (1) ±1.5 µm ±2.5 µm ±3 µm ±4 µm ±5 µm
Vertical Straightness (1) ±1.5 µm ±2.5 µm ±3 µm ±4 µm ±5 µm
Pitch 19 µrad
(3.9 arc·sec)
29 µrad
(6 arc·sec)
29 µrad
(6 arc·sec)
39 µrad
(8 arc·sec)
49 µrad
(10.1
arc·sec)
Roll 19 µrad
(3.9 arc·sec)
29 µrad
(6 arc·sec)
29 µrad
(6 arc·sec)
39 µrad
(8 arc·sec)
49 µrad
(10.1
arc·sec)
Yaw 19 µrad
(3.9 arc·sec)
29 µrad
(6 arc·sec)
29 µrad
(6 arc·sec)
39 µrad
(8 arc·sec)
49 µrad
(10.1
arc·sec)
Maximum Speed (4) 300 m/s
Maximum Acceleration (4) Function of motor, amplifier, payload, and maximum axial load
Load Capacity (5)
Horizontal 40 kg
Vertical (Axial) 18 kg
Side 40 kg
Moving Mass
(with tabletop)
SL 1.4 kg
SLE 1.6 kg
Stage Mass
(no motor)
SL 4.0 kg 4.4 kg 4.8 kg 5.2 kg 5.6 kg
SLE 4.5 kg 4.9 kg 5.3 kg 5.8 kg 6.2 kg
Material Anodized Aluminum
Mean Time Before Failure (MTBF) 20,000 Hours
1. Certified with -PL1 / -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact factory for specifications when a foldback kit (-FBx) is used.
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PRO115SL/SLE Hardware Manual Overview
Table 1-4: PRO115SL/SLE Series Specifications (-300 to -600)
-300 -400 -500 -600
Travel 300 mm 400 mm 500 mm 600 mm
Accuracy (1)
SL Standard ±10 µm ±12 µm ±14 µm ±16 µm
Calibrated ±2.5 µm ±3 µm ±3.5 µm ±4 µm
SLE Standard ±10 µm ±12 µm ±14 µm ±15.5 µm
Calibrated ±1.5 µm ±1.5 µm ±2 µm ±2 µm
Resolution (Minimum
Incremental Motion)
SL 0.1 µm (2), 1.0 µm (3)
SLE 0.05 µm (-E1 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4 encoder)
Bidirectional
Repeatability (1)
SL ±1 µm
SLE ±0.5 µm ±0.5 µm ±0.75 µm ±0.75 µm
Horizontal Straightness (1) ±6 µm ±8 µm ±9 µm ±10 µm
Vertical Straightness (1) ±6 µm ±8 µm ±9 µm ±10 µm
Pitch 58 µrad
(12 arc·sec)
78 µrad
(16.1 arc·sec)
97 µrad
(20 arc·sec)
116 µrad
(23.9 arc·sec)
Roll 58 µrad
(12 arc·sec)
78 µrad
(16.1 arc·sec)
97 µrad
(20 arc·sec)
116 µrad
(23.9 arc·sec)
Yaw 58 µrad
(12 arc·sec)
78 µrad
(16.1 arc·sec)
97 µrad
(20 arc·sec)
116 µrad
(23.9 arc·sec)
Maximum Speed (4) 300 m/s
Maximum Acceleration (4) Function of motor, amplifier, payload, and maximum axial load
Load Capacity (5)
Horizontal 40 kg
Vertical (Axial) 18 kg
Side 40 kg
Moving Mass
(with tabletop)
SL 1.4 kg
SLE 1.6 kg
Stage Mass
(no motor)
SL 6.0 kg 6.8 kg 7.6 kg 8.4 kg
SLE 6.6 kg 7.5 kg 8.4 kg 9.3 kg
Material Anodized Aluminum
Mean Time Before Failure (MTBF) 20,000 Hours
1. Certified with -PL1 / -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact factory for specifications when a foldback kit (-FBx) is used.
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Overview PRO115SL/SLE Hardware Manual
1.4. Vacuum Operation
Aerotech can specially prepare the PRO115SL/SLE for operation in vacuum environments. Aerotech offers
two vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10-3 torr) and one
for high vacuum (preparation for environments from 10-3 to 10-6 torr). As part of this preparation, attention to
detail during modification, cleaning, and assembly results in products with optimal performance in vacuum
applications.
Special Guidelines
To make sure that the PRO115SL/SLE will continue to perform well in the vacuum environment, use the
guidelines that follow (in addition to standard handling, installation, and lubrication guidelines outlined in this
manual).
1. Do not remove the PRO115SL/SLE from its sealed bag until it is ready to use.
2. Always handle the PRO115SL/SLE in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the PRO115SL/SLE.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the PRO115SL/SLE.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces
outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates
porous surfaces on the aluminum and Teflon cables. Aerotech recommends that customers bake out
vacuum systems when first installing them in the vacuum chamber.
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PRO115SL/SLE Hardware Manual Mechanical Specifications and Installation
Chapter 2: Installation
W A R N I N G : PRO115SL/SLE installation must be in accordance to instructions provided by
this manual and any accompanying documentation. Failure to follow these instructions could
result in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
W A R N I N G : It is the customer's responsibility to safely and carefully lift and move the
PRO115SL/SLE.
lLift only by the base.
lDo not use the tabletop, drive screw, motor, or cables as lifting points.
lFor multi-axis assemblies, always lift the system by the lower axis.
lSecure all moving parts before lifting or moving the PRO115SL/SLE to a new location.
Unsecured moving parts could shift and cause bodily injury.
lImproper handling could adversely affect the performance of the PRO115SL/SLE. Use
care when moving the PRO115SL/SLE.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the PRO115SL/SLEfrom its protective shipping container. Gently set the PRO115SL/SLE
on a smooth, flat, and clean surface.
Before operating the PRO115SL/SLE, it is important to let it stabilize at room temperature for at least 12
hours. Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and
tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-
less air to remove any dust or debris that has collected during shipping.
Each PRO115SL/SLE has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
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Mechanical Specifications and Installation PRO115SL/SLE Hardware Manual
2.2. Dimensions
Figure 2-1: PRO115SL Dimensions
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PRO115SL/SLE Hardware Manual Mechanical Specifications and Installation
Figure 2-2: PRO115SLE Dimensions
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Mechanical Specifications and Installation PRO115SL/SLE Hardware Manual
Figure 2-3: PRO115SL/SLE Accessory Tabletop Dimensions (-TT3/-TT6 Option)
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PRO115SL/SLE Hardware Manual Mechanical Specifications and Installation
Figure 2-4: PRO115SL/SLE Z-Axis Bracket Dimensions
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Mechanical Specifications and Installation PRO115SL/SLE Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The PRO115SL/SLE must be mounted securely. Improper mounting can result
in injury and damage to the equipment.
W A R N I N G : Make sure that all moving parts are secure before moving the PRO115SL/SLE.
Unsecured moving parts may shift and cause bodily injury.
D A N G E R : PINCHPOINT! Keep Hands Clear while the stage is in motion.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the PRO115SL/SLE stage. When it is mounted to a non-flat surface, the stage can be distorted while the
mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting
surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : The PRO115SL/SLE is precision machined and verified for flatness prior to product assembly at
the factory. If machining is required to achieve the desired flatness, it should be performed on the
mounting surface rather than the PRO115SL/SLE. Shimming should be avoided if possible. If shimming is
required, it should be minimized to retain maximum rigidity of the system.
Table 2-1: Stage Mounting Surface Flatness Requirement
Stage Travel Flatness Requirement
All Travels 7.5 µm
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