Agilent Technologies 4UHV User manual

Agilent 4UHV Ion Pump Controller
User Manual

2 Agilent 4UHV Ion Pump Controller User Manual
Notices
Manual Part Number
87-900-137-01
Edition F.00, May 2023
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© Agilent Technologies, Inc. 2023
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CAUTION

Contents
Agilent 4UHV Ion Pump Controller User Manual 3
Contents
1Istruzioni per l’uso 13
Informazioni su questo manuale 14
Validità 14
Definizioni e terminologia 15
Definizione di Attenzione, Avvertenza e Nota 15
Simboli di avvertenza 16
Sicurezza 18
Uso corretto 18
Uso improprio 19
Attrezzatura di protezione 19
Linee guida per la sicurezza dei controller di pompe Ioniche 20
Trasporto e immagazzinamento 21
Descrizione del prodotto 21
Installazione 22
Preparazione per l’installazione 22
Set-up 23
Fissaggio del 4UHV 26
Avvio e funzionamento del Controller 4UHV
dal pannello frontale (modalità LOCAL) 28
Arresto del 4UHV 30
Arresto di Emergenza 30
Manutenzione 30
Pulizia 31
Compatibilità elettromagnetica 31
EN55011/CISPR11 31
Dichiarazione EMC di Classe A della Corea del Sud 32
ICES/NMB-001 32
Smaltimento 33
Servizio Post Vendita 34

Contents
4 Agilent 4UHV Ion Pump Controller User Manual
2Betriebsanleitung 35
Informationen über diese Betriebsanleitung 36
Gültigkeit 36
Definitionen und Terminologie 37
Definition von Vorsicht, Warnung und Hinweis 37
Warning Symbols 38
Sicherheit 40
Sachgemäße Verwendung 40
Unsachgemäße Anwendung 41
Schutzausrüstung 41
Sicherheitsrichtlinien für Ionische Pumpensteuerung 42
Transport und Lagerung 43
Produktbeschreibung 43
Installation 44
Vorbereitung zum Einbau 44
Set-up 45
Fixieren des 4UHV 48
Start und Betrieb des 4UHV-Controllers
von der Vorderteil (LOCAL-Modus) 50
Abschalten des 4UHV 52
Not-Aus 52
Wartung 52
Reinigen 53
Elektromagnetische Verträglichkeit 53
EN55011/CISPR11 53
Südkoreanische Klasse A EMV-Erklärung 54
ICES/NMB-001 54
Entsorgung 55
Service 56

Contents
Agilent 4UHV Ion Pump Controller User Manual 5
3Mode d’emploi 57
À propos de ce manuel 58
Validité 58
Définitions et terminologie 59
Signification des messages d’attention, d’avertissement et des notes 59
Symboles d'avertissement 60
Sécurité 62
Utilisation appropriée 62
Utilisation appropriée 63
Équipements de protection 63
Consignes de sécurité des contrôleurs de pompes ioniques 64
Transport et Emmagasinage 65
Description du produit 65
Installation 66
Préparation pour l’installation 66
Set-up 67
Fixation de l’4UHV 70
Démarrage et fonctionnement du contrôleur 4UHV
depuis le panneau avant (mode LOCAL) 72
Arrêt de l’4UHV 74
Arrêt d'urgence 74
Entretien 74
Nettoyage 75
Compatibilité électromagnétique 75
EN55011/CISPR11 75
Déclaration CEM Classe A Corée du Sud 76
ICES/NMB-001 76
Élimination 77
Service 78

Contents
6 Agilent 4UHV Ion Pump Controller User Manual
4Instrucciones de uso 79
Acerca del manual 80
Validez 80
Definiciones y terminología 81
Definición de Precaución, Advertencia y Nota 81
Símbolos de advertencia 82
Seguridad 84
Uso correcto 84
Uso incorrecto 85
Equipo de protección 85
Pautas de seguridad para Controladores de bombas iónicas 86
Transporte y Almacenamiento 87
Descripción del producto 87
Instalación 88
Preparación para la instalación 88
Instalación 89
Montaje del 4UHV 92
Puesta en marcha y funcionamiento del Controlador 4UHV
desde el Panel Frontal (Modo LOCAL) 94
Apagado del 4UHV 96
Parada de emergencia 96
Mantenimiento 96
Limpieza 97
Compatibilidad electromagnética 97
EN55011/CISPR11 97
Declaración EMC Clase A de Corea del Sur 98
CIEM/NMB-001 98
Eliminación 99
Servicio 100

Contents
Agilent 4UHV Ion Pump Controller User Manual 7
5使用说明101
关于本手册 102
有效性 102
定义与术语 103
小心、警告和注意的定义103
警告符号 104
安全 106
正确使用 106
使用不当 107
防护装备107
离子泵控制器安全指南 108
运输及存储109
产品描述 109
安装准备110
设置111
修复 4UHV 114
从前面板启动和操作 4UHV 控制器（本地模式） 116
4UHV 关机 118
紧急停止 118
维护 118
清洁119
电磁兼容 119
EN55011/CISPR11 119
韩国A类EMC 声明 120
ICES/NMB-001 120
处置121
服务122

Contents
8 Agilent 4UHV Ion Pump Controller User Manual
6取扱説明書 123
この説明書について 124
有効期 124
定義と用語 125
警告・注意・注の定義 125
警告の記号 126
安全性 128
適切な使用 128
不適切な使用 129
保護装具 129
イオンポンプコントローラーの安全ガイドライン 130
运输及存储131
製品説明 131
取り付け 132
取り付けの準備 132
セットアップ 133
4UHV の固定 136
フロントパネルからの 4UHV コントローラの起動と操作
（LOCAL モード） 138
4UHV 操作停止 140
緊急停止 140
メンテナンス 140
クリーニング 141
電磁両立性 141
EN55011/CISPR11 141
韓国クラス A EMC 宣言 142
ICES/NMB-001 142
処分 143
サービス 144

Contents
Agilent 4UHV Ion Pump Controller User Manual 9
7Instructions for Use 145
About this manual 146
Validity 146
Definitions and terminology 147
Definition of Caution, Warning and Note 147
Warning Symbols 148
Safety 150
Proper use 150
Improper use 151
Protective equipment 151
Ion pump controller safety guidelines 152
Transport & Storage 153
Product Description 153
Installation 154
Preparation for Installation 154
Set-up 155
Fixing the 4UHV Ion Pump Controller 157
Startup and Operation of the 4UHV Ion Pump Controller
from the Front Panel (LOCAL Mode) 159
4UHV Ion Pump Controller Shutdown 161
Emergency Stop 161
Maintenance 161
Cleaning 162
Electromagnetic Compatibility 162
EN55011/CISPR11 162
South Korean Class A EMC declaration 163
ICES/NMB-001 163
Disposal 164
Service 165

Contents
10 Agilent 4UHV Ion Pump Controller User Manual
8Technical Information 166
4UHV Ion Pump Controller Description 168
Technical Specifications 171
Controller Outline 173
Front Panel Description 174
Keys 174
Graphic Signals 175
Rear Panel Description 176
Fuse Holder 177
Interlock connection 177
Procedure to Connect the Serial and I/O ports to an External Cable 178
Operating Mode 179
Start-Up 180
Selecting “Operating Mode” from Front Panel 180
Functions 181
Step-mode / Fixed mode 181
Protect 182
Device Number 183
Spare Pump 184
How to select the Ion pump 184
How to work with non Agilent pump 184
Set Point 185
Autostart 186
How to set the Analog signal 193
Connection of Input Remote 193
Serial 194
Connector Examples 195
Window Protocol 196
Communications Format 196
Communications Protocol 196
Error Description 205
Error Code 205