Agilent Technologies 16441A R-Box User manual

User’s Guide
Agilent 16441A R-Box
Agilent Part No. 16441-90000
Printed in Japan January 2000
Edition 4

2 Agilent 16441A User’s Guide, Edition 4
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•Product Warranty
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Replacement products may be either new or like-new.
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reasonable time, to repair or replace any product to a condition as warranted,
customer will be entitled to a refund of the purchase price upon prompt return of
the product.
The Agilent Technologies products may contain remanufactured parts
equivalent to new in performance or may have been subject to incidental use.
The warranty period begins on the date of delivery or on the date of installation
if installed by Agilent Technologies. If customer schedules or delays Agilent
Technologies installation more than 30 days after delivery, warranty begins on
the 31st day from delivery.
Warranty does not apply to defects resulting from (a) improper or inadequate
maintenance or calibration, (b) software, interfacing, parts or supplies not
supplied by Agilent Technologies, (c) unauthorized modification or misuse, (d)
operation outside of the published environmental specifications for the product,
or (e) improper site preparation or maintenance.

Agilent 16441A User’s Guide, Edition 4 3
To the extent allowed by local law, the above warranties are exclusive and no
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For consumer transactions in Australia and New Zealand: the warranty terms
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•Assistance
Product maintenance agreements and other customer assistance agreements are
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For any assistance, contact your nearest Agilent Technologies Sales Office.
•Certification
Agilent Technologies Inc. certifies that this product met its published
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that its calibration measurements are traceable to the National Institute of
Standards and Technology (NIST), to the extent allowed by the Institute’s
calibration facility, and to the calibration facilities of other International
Standards Organization members.
•Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific warnings elsewhere in this manual may impair the
protections provided by the equipment. In addition, it violates safety standards
of design, manufacture, and intended use of the instrument. Agilent
Technologies Inc. assumes no liability for customer’s failure to comply with
these requirements.

4 Agilent 16441A User’s Guide, Edition 4
•GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument
chassis and cabinet must be connected to an electrical ground. The power
terminal and the power cable must meet International Electrotechnical
Commission (IEC) safety standards.
•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
•KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component
replacement and internal adjustments must be made by qualified
maintenance personnel. Do not replace components with power cable
connected. Under certain conditions, dangerous voltages may exist even
with the power cable removed. To avoid injuries, always disconnect power
and discharge circuits before touching them.
•DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person, capable
of rendering first aid and resuscitation, is present.
•DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to a Agilent Technologies Sales and Service Office for
services and repair to ensure that safety features are maintained.
•DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, precede potentially dangerous procedures
throughout this manual. Instructions contained in the warnings must be
followed.
WARNING Dangerous Voltage, capable of causing death, are present in this instrument.
Use extreme caution when handling, testing, and adjusting.

Agilent 16441A User’s Guide, Edition 4 5
•Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are
listed below.
Instruction manual symbol: the product will be marked with this symbol when it
is necessary for the user to refer to the instruction manual in order to protect
against damage to the instrument.
Indicates dangerous voltage and potential for electrical shock. Do not touch
terminals that have this symbol when instrument is on.
Protective conductor terminal. For protection against electrical shock in case of
a fault. Used with field wiring terminals to indicate the terminal which must be
connected to ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment
which normally includes all exposed metal structures.
Indicates earth (ground) terminal.
Alternating current.
Direct current.
ON (Supply).
OFF (Supply).
STANDBY (Supply).
Means INSTALLATION CATEGORY I. Measurement terminals on the rear
panel comply with INSTALLATION CATEGORY I.
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in
injury or death to personal.
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,
practice, condition or the like, which, if not correctly performed or adhered to, could
result in damage to or destruction of part or all of the product.
CAT 1

6 Agilent 16441A User’s Guide, Edition 4
•Herstellerbescheinigung
GEÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
•Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
Printing History
Edition 1: February 1994
Edition 2: April 1995
Edition 3: August 1997
Edition 4: January 2000

Agilent 16441A User’s Guide, Edition 4
User's Guide

2 Agilent 16441A User’s Guide, Edition 4
User's Guide
Agilent 16441A R-Box is one of the accessories available for Agilent 4155/4156
Semiconductor Parameter Analyzers. The R-Box is used to add a series resistance (0
W, 10 kW, 100 kW, or 1 MW) between the 4155/4156’s SMU output and your test
device (DUT), and is useful for the following measurements:
•negative resistance measurement
R-Box is effective for the negative resistance measurement, because SMUs
cannot measure negative resistance.
•breakdown measurement
R-Box is effective for preventing excessive current, thus preventing damage to
DUT when sudden voltage change occurs.
This manual consists of the following sections:
•Introduction
•Operation
•Installation
•Maintenance
•Specifications

Agilent 16441A User’s Guide, Edition 4 3
User's Guide
Introduction
Introduction
The 16441A R-Box contains the following accessories:
NOTE Inspecting the 16441A upon Receiving
When the 16441A arrives at your site, make sure that nothing is missing or
damaged. Unpack the carton, then check the contents. See figure and table shown
above.
If anything is missing or damaged, contact your nearest Agilent Technologies sales
office.
Description Agilent
Part Number Quantity
1 R-Box 16441A 1
2 40 cm triaxial cable 04155-61605 4
3 (option 001) 1.5 m control cable 04155-61610 1
(option 002) 3 m control cable 04155-61609 1
4plate a
a. Three screws are furnished for each plate.
16440-60001 2
5angle b
b. Two screws are furnished for each angle.
16440-60002 2
6User's Guide (this document) 16441-90000 1

4 Agilent 16441A User’s Guide, Edition 4
User's Guide
Operation
Operation
The R-Box adds a series resistance between the 4155/4156 Semiconductor
Parameter Analyzer and DUT. Available resistance values are 0 W, 10 kW, 100 kW,
and 1 MW. There is two channels (CH1 and CH2) to connect SMUs.
Switching of resistance is controlled by the 4155/4156. After you set a resistance
value on the 4155/4156 setup screen, the R-Box sets the selected resistance value
when the 4155/4156 is in the measurement state.
Available Measurement Units
The R-box is effective for the following SMUs:
•SMU1
•SMU2 or SMU5
If the 4155/4156 is installed with the 41501 PGU/PG Expander which has an
HPSMU (High Power SMU), SMU5 is available instead of SMU2.
Measurement Data Compensation
The resistance value is automatically compensated for by the 4155/4156. So, the
data displayed on the GRAPH/LIST screen of the 4155/4156 or data used for user
function is the compensated data.
If you connect the R-Box to SMUs other than described above, resistance values are
not compensated for automatically. You need to compensate for the resistance
values manually, such as by using a user function or calculation in IBASIC program.
NOTE Additional Measurement Channel for Compensation
Be aware that an additional measurement channel is automatically used if both the
following are true:
•You force voltage from channel that is connected to R-Box, and
•You display this voltage variable on the GRAPH/LIST screen, or use voltage
variable in user function.
So if both above are true for a channel, and you set another one measurement
channel, the 4155/4156 uses two measurement channels automatically.

Agilent 16441A User’s Guide, Edition 4 5
User's Guide
Operation
Additional measurement channel is used for the automatic measurement of the
current through R-Box. This is necessary to perform compensation calculation.
Selecting Resistance Value
Install the R-Box as shown in “Installation”, and turn on the 4155/4156. Then do
following:
1. Display the CHANNELS: CHANNEL DEFINITION screen of the 4155/4156.
2. Move the field pointer to the SERIES RESISTANCE field. In this field, select:
•0 ohm softkey to set 0 Wresistance
•10k ohm softkey to set 10 kWresistance
•100k ohm softkey to set 100 kWresistance
•1M ohm softkey to set 1 MWresistance
where, for the following SMUs, select the 0 ohm softkey. Else error occurs.
•SMU defined as the standby channel:
If STBY field is ON, the SMU is defined as the standby channel.
•SMU set to the common mode:
If MODE field is COMMON, the SMU is set to the common mode.
When the 4155/4156 is in the measurement state, the R-Box sets the selected
resistance value. In the other operation state (idle state, standby state, or stress force
state), the R-Box sets 0 W.
Present resistance setting is also indicated by LEDs on the R-Box front panel.
NOTE If an emergency occurs
If an emergency occurs, resistance value is automatically set to 1 MW.
NOTE Making Kelvin Connection
The R-Box makes Kelvin connection only when 0 Wis selected.
For 1 MW, 100 kW, and 10 kWsettings, the R-Box always opens the sense line of
HRSMU and HPSMU. See “Circuit Diagram”on page 6.

6 Agilent 16441A User’s Guide, Edition 4
User's Guide
Operation
Circuit Diagram
The simplified circuit diagram of the R-Box is shown below.
The table below shows the internal relay positions for each resistance setting.
Settings
Relay Switches
SW1 SW2 SW3 SW4
0 WON ON OFF OFF
10 kWOFF OFF OFF ON
100 kWOFF OFF ON OFF
1 MWOFF OFF OFF OFF

Agilent 16441A User’s Guide, Edition 4 7
User's Guide
Installation
Installation
This section describes how to attach the R-Box to Agilent 16442A test fixture or to
a shielding box, and how to connect it to the 4155/4156.
To Attach the R-Box to Test Fixture
You can attach your R-Box to Agilent 16442A test fixture as shown below. You
need a standard screwdriver.
1. Place the R-Box on your workbench. 2. Place the test fixture on top of the R-Box.
3. Position a plate on both sides. 4. Attach each plate using the three flathead
screws supplied with the instrument.

8 Agilent 16441A User’s Guide, Edition 4
User's Guide
Installation
The following steps apply when using the 16440A selector:
To attach one more selector, repeat steps 5 to 7 again.
5. Place the selector on your workbench.
Place the R-Box and the test fixture on top
of the selector.
6. Position a plate on both sides. 7. Attach each plate using the three flathead
screws supplied with the instrument.

Agilent 16441A User’s Guide, Edition 4 9
User's Guide
Installation
To Attach the R-Box to Shielding Box
You can attach your R-Box to a shielding box. You need a standard screwdriver.
The following figure shows the spacing of the 16441A screw holes. You need to
prepare four screws and nuts to match the screw holes.

10 Agilent 16441A User’s Guide, Edition 4
User's Guide
Installation
Attach the R-Box to the shielding box as shown below:
1. Attach an angle bracket to each side of the R-Box, using the screws supplied.
2. Place the R-Box on the side panel of the
shielding box.
3. Position four nuts on the inside panel of
the shielding box.
4. Attach the angle bracket to the shielding
box using four flathead screws.

Agilent 16441A User’s Guide, Edition 4 11
User's Guide
Installation
If you use the 16440A selector, attach the selector to the R-Box as shown below:

12 Agilent 16441A User’s Guide, Edition 4
User's Guide
Installation
Connecting the R-Box to the 4155/4156
Before connecting the R-box to the 4155/4156 and 41501, turn off the instruments.
1. Connect the To R-Box terminal on the 4155/4156 rear panel to the Control
terminal on the R-Box rear panel using a 3.0 m or 1.5 m control cable.
2. Connect the instrument measurement terminals to the R-Box input terminals as
shown below:
3. Connect the R-Box output terminals to the input terminals of the 16442A test
fixture or an connector plate using 40 cm triaxial cables as shown below:
When you use the connector plate, use a low-noise coaxial cable (Agilent part
number: 8120-3674) from the connector plate to DUT. If you use insufficiently
insulated cables, leakage current may occur.
Instrument
terminals R-Box Input Cable
4155 MPSMU Input Force 3 m or 1.5 m Triaxial Cable
4156 HRSMU Input
(Force/Sense)
3 m or 1.5 m Kelvin Triaxial Cable
41501 MPSMU Input Force 3 m or 1.5 m Triaxial Cable
41501 HPSMU Input
(Force/Sense)
3 m or 1.5 m Kelvin Triaxial Cable
R-Box Output 16442A Input or Connector Plate Input
Output Force a
a. For non-Kelvin connection.
SMU1, 2, 3, 4, 5, or 6
Output Force b
b. For the Kelvin connection, two triaxial cables must be used to con-
nect the R-Box and the 16442A, instead of a Kelvin triaxial cable.
SMU1 SMU3 SMU5
Output Sense bSMU2 SMU4 SMU6

Agilent 16441A User’s Guide, Edition 4 13
User's Guide
Installation
The following figure shows example connections with the 4156.
The following figure shows example connections with the 4155.

14 Agilent 16441A User’s Guide, Edition 4
User's Guide
Maintenance
Maintenance
This section provides the following maintenance information:
•Cleaning
•Servicing
Cleaning the R-Box
To maintain high performance, the R-Box must be kept clean. Oil, perspiration, hair,
dust, and dirt degrade board insulation, which increases leakage current and
decreases measurement accuracy.
Agilent Technologies recommend the following cleaning procedure:
1. Make sure that voltage or current is not present at any channel.
2. Disconnect all cables from the R-Box.
3. Using lint-free paper, gently wipe the chassis. For any area that will not come
clean, dip the lint-free paper into alcohol and wipe the area gently.
Servicing the R-Box
This section provides information for trained service personnel to repair the R-Box.
When a replaceable part, which is shown with the Agilent part number in this
section, needs to be replaced, order the parts from the nearest Agilent Technologies
Sales and Service Office.
WARNING High voltages may be present in the selector when voltage or current is added
to the R-Box. Dangerous voltage may be generated on wires or parts and the
danger of electric shock exists.
Make sure that terminals are not connected to the instruments before you repair the
R-Box.