Agilent Technologies 4155C User manual

Agilent Technologies
Agilent 4155C
Semiconductor Parameter
Analyzer
Agilent 4156C
Precision Semiconductor
Parameter Analyzer
User’s Guide
Silicon Investigations
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Notices
© Agilent Technologies 2001 - 2009
No part of this manual may be reproduced in
any form or by any means (including elec-
tronic storage and retrieval or translation
into a foreign language) without prior agree-
ment and written consent from Agilent
Technologies, Inc. as governed by United
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Manual Part Number
04156-90000
Edition
Edition 1, January 2001
Edition 2, March 2001
Edition 3, September 2001
Edition 4, December 2001
Edition 5, January 2003
Edition 6, August 2003
Edition 7, October 2004
Edition 8, January 2005
Edition 9, July 2006
Edition 10, March 2008
Edition 11, July 2009
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Santa Clara, CA 95051 USA
Warranty
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ject to being changed, without notice,
in future editions. Further, to the max-
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either express or implied, with regard
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information contained herein. Should
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document that conflict with these
terms, the warranty terms in the sep-
arate agreement shall control.
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The hardware and/or software described in
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DECLARATION OF CONFORMITY
According to EN ISO/IEC 17050-1:2004
Manufacturer’s Name: Agilent Technologies Singapore (International) Pte. Ltd.
Manufacturer’s Address: No. 1 Yishun Ave 7
SINGAPORE 768923
Singapore
Declares under sole responsibility that the product as originally delivered
Product Name:
Semiconductor Parameter Analyzer
Precision Semiconductor Parameter Analyzer
SMU and PGU Generator Expander
Model Number:
Agilent 4155C
Agilent 4156C
Agilent 41501B
Product Options: This declaration covers all options of the above product(s)
complies with the essential requirements of the following applicable European Directives, and carries
the CE marking accordingly:
Low Voltage Directive (2006/95/EC)
EMC Directive (2004/108/EC)
and conforms with the following product standards
EMC Standard
IEC 61326-1:2005 / EN 61326-1:2006
CISPR 11:2003 / EN55011:1998+A1:1999+A2 :2002
IEC 61000-4-2:2001 /EN 61000-4-2:1995+A1:1998+A2:2001
IEC 61000-4-3:2002+A1:2002/EN 61000-4-3:2002+A1:2002
IEC 61000-4-4:2004 / EN 61000-4-4:2004
IEC 61000-4-5:2001/EN 61000-4-5:1995+A1:2001
IEC 61000-4-6:2003 / EN 61000-4-6:1996+A1:2001
IEC 61000-4-11:2004 / EN 61000-4-11:2004
Canada: ICES/NMB-001:2004
Australia/New Zealand: AS/NZS CISPR 11:2004
Limit
Group 1 Class A
4 kV CD, 8 kV AD
3 V/m / 80 MHz-1 GHz / 1.4-2 GHz, 1 V/m / 2-2.7 GHz
0.5 kV signal lines, 1 kV power lines
0.5 kV line-line, 1 kV line-ground
3 V, 0.15-80 MHz
0 % for 1/0.5 cycle, 0 % for 250/300 cycles,
70 % for 25/30 cycles
Safety
IEC 61010-1:2001 / EN 61010-1:2001
Canada: CAN/CSA-C22.2 No. 1010.1-92, NRTL/C
Supplementary Information:
The product was tested in a typical configuration with Agilent Technologies test systems.
This DoC applies to above-listed products placed on the EU market after:
March 20, 2010
Date
Toshiyuki Kawaji
QA Manager
Agilent Technologies
For further information, please contact your local Agilent Technologies sales office, agent or distributor,
or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, 71034 Böblingen, Germany.

•Herstellerbescheinigung
GEÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
•Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
NOTE This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme à la norme NMB-001 du Canada.
This product complies with the WEEE Directive (2002/96/EC) marking requirements.
The affixed label indicates that you must not discard this electrical/ electronic product
in domestic household waste.
Product Category: With reference to the equipment types in the WEEE Directive
Annex I, this product is classed as a “Monitoring and Control instrumentation”
product.
Do not dispose in domestic household waste.
To return unwanted products, contact your local Agilent office, or see
www.agilent.com/environment/product/ for more information.
Microsoft, Windows, Excel, MS-DOS, and Windows NT are registered trademarks of Microsoft Corporation.
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exclusively through X/Open Company Limited. All other trademarks are the property of their respective
owners.

Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific warnings elsewhere in this manual may impair the
protections provided by the equipment. In addition, it violates safety standards of
design, manufacture, and intended use of the instrument. Agilent Technologies, Inc.
assumes no liability for customer’s failure to comply with these requirements.
NOTE Agilent 4155C/4156C/41501B comply with INSTALLATION CATEGORY II for mains
input and INSTALLATION CATEGORY I for measurement input terminals, and
POLLUTION DEGREE 2 defined in IEC 61010-1.
Agilent 4155C/4156C/41501B are INDOOR USE products.
•GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument chassis
and cabinet must be connected to an electrical ground. The power terminal and the
power cable must meet International Electrotechnical Commission (IEC) safety
standards.
•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
•KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component replacement
and internal adjustments must be made by qualified maintenance personnel. Do
not replace components with power cable connected. Under certain conditions,
dangerous voltages may exist even with the power cable removed. To avoid
injuries, always disconnect power and discharge circuits before touching them.
•DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person, capable of
rendering first aid and resuscitation, is present.
•DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Because of the danger of introducing additional hazards, do not install substitute
parts or perform any unauthorized modification to the instrument. Return the
instrument to a Agilent Technologies Sales and Service Office for services and
repair to ensure that safety features are maintained.
•DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, precede potentially dangerous procedures
throughout this manual. Instructions contained in the warnings must be followed.
WARNING Dangerous Voltage, capable of causing death, are present in this instrument. Use
extreme caution when handling, testing, and adjusting.

Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are listed
below.
Instruction manual symbol: the product will be marked with this symbol when it is
necessary for the user to refer to the instruction manual in order to protect against
damage to the instrument.
Indicates dangerous voltage and potential for electrical shock. Do not touch terminals
that have this symbol when instrument is on.
Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to
ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.
Indicates earth (ground) terminal.
Alternating current.
Direct current.
ON (Supply).
OFF (Supply).
STANDBY (Supply).
Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply
with INSTALLATION CATEGORY I.
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice, condition
or the like, which, if not correctly performed or adhered to, could result in injury or
death to personal.
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,
practice, condition or the like, which, if not correctly performed or adhered to, could
result in damage to or destruction of part or all of the product.
CAT 1

HIGH VOLTAGE SHOCK HAZARD
The Agilent 4155C/4156C/41501B can force dangerous voltages (200 V for
HPSMU, and 100 V for MPSMU) at the force, guard, and sense terminals. To
prevent electric shock hazard, the following safety precautions must be observed
during the use of the Agilent 4155C/4156C/41501B.
• Use a three-conductor AC power cable to connect cabinet (if used) and Agilent
4155C/4156C/41501B to an electric ground (safety ground).
• If you do not use Agilent 16442 Test Fixture, make sure to connect the INTLK
terminal to a switch that turns off when the shielding box access door is opened.
• Confirm periodically that INTLK function works normally.
• Before touching the connections of the force, guard, and sense terminals, turn
the Agilent 4155C/4156C/41501B off and discharge any capacitors whenever
possible. If you do not turn the Agilent 4155C/4156C/41501B off, complete
“all” of the following items, regardless of any Agilent 4155C/4156C/41501B
settings.
• Terminate measurement by pressing Output key, confim that the Output
status indicator is not lit.
• Confirm that the HIGH VOLTAGE indicator is not lit.
• Open the shielding box access door (open the INTLK terminal).
• Discharge any capacitors if the capacitance is connected to an SMU.
• Warn workers in the vicinity of the Agilent 4155C/4156C/41501B about
dangerous conditions.

高電圧感電注意
Agilent 4155C/4156C/41501B のフォース、ガード、センス端子には、危険電圧が出
力されることがあります（HPSMU の場合は最大± 200 Vdc、MPSMU の場合は最大
±100 Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。
•3極電源ケーブルを使用して Agilent 4155C/4156C/41501B を設置すること。
• Agilent 16442 テスト・フィクスチャ以外のフィクスチャ、あるいはプローバを
使用する場合には、シールド・ボックスにインターロック回路を接続すること。
インターロック回路とは、シールド・ボックスの蓋を開けた時に Agilent
4155C/4156C/41501BのINTLK 端子を開放にすることができる回路のことをい
います。
•インターロック機能が正常であることを定期的に確認すること。
•フォース、ガード、センス端子に繋がる接続部に触れる前には、測定器の電源
を切ること。また、測定系にキャパシタが接続されている場合は、キャパシタ
を放電すること。電源を切らない場合は、以下の事項を全て実施すること。
•Outputキーを押して Output インジケータが消灯したことを確認すること。
•高電圧警告（HIGH VOLTAGE）インジケータが消灯していることを確認す
ること。
•シールド・ボックスの蓋を開ける（INTLK 端子を開放する）こと。
•キャパシタが SMU に接続されているならば、キャパシタを放電すること。
•周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底すること。

PRECAUTIONS POUR COMMOTION A HAUTE TENSION
Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU;
100 Vdc) émanant du dispositif Agilent 4155C/4156C/41501B peut être sortie aux
bornes de force, d'appareil de protection ou de détection. Les précautions suivantes
doivent être obserées contre commotion électrique accidentelle:
• Mettre à la terre le dispositif Agilent 4155C/4156C/41501B au moyen du câble
d'alimentation tripolair.
• En cas de hors service du dispositif d'essai, FIXTURE Agilent 16442, connecter
les bornes de verrouillage (INTLK) de façon à ce que soit ouverte lorsque le
couvercle de la boîte de blindage est ouvert.
• Essayer périodiquement le fonctionnement normal de verrouillage.
• Avant de toucher la partie connexion à partir des bornes de force, d'appareil de
protection et de détection, mettre hors tension le dispositif Agilent
4155C/4156C/41501B. Et, en cas de condensateurs connectés au circuit de
mesure, décharger ces condensateurs. Lorsque l'alimentation n'est pas mise hors
tension, les 4 instructions suivantes doivent être exécutées:
• Finir la mésure en appuyant sur la touche “Output”; verifier que l'indicateur
“Output” n'est pas allumé.
• S'assurer que soit allumé l'indicateur d'alarme de la haute tension.
• Ouvrir le convercle de la boîte de blindage (Ouvrir les bornes de
verrouillage).
• En cas de condensateurs connectés à SMU, décharger les condensateurs.
• Alerter d'autres personnes autour de vous contre le danger de haute tension.